JPH01156541U - - Google Patents
Info
- Publication number
- JPH01156541U JPH01156541U JP1988054985U JP5498588U JPH01156541U JP H01156541 U JPH01156541 U JP H01156541U JP 1988054985 U JP1988054985 U JP 1988054985U JP 5498588 U JP5498588 U JP 5498588U JP H01156541 U JPH01156541 U JP H01156541U
- Authority
- JP
- Japan
- Prior art keywords
- organic film
- gas
- chemical solution
- substrate
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988054985U JPH01156541U (2) | 1988-04-21 | 1988-04-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988054985U JPH01156541U (2) | 1988-04-21 | 1988-04-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156541U true JPH01156541U (2) | 1989-10-27 |
Family
ID=31280893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988054985U Pending JPH01156541U (2) | 1988-04-21 | 1988-04-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156541U (2) |
-
1988
- 1988-04-21 JP JP1988054985U patent/JPH01156541U/ja active Pending
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