JPH01156545U - - Google Patents
Info
- Publication number
- JPH01156545U JPH01156545U JP1988053202U JP5320288U JPH01156545U JP H01156545 U JPH01156545 U JP H01156545U JP 1988053202 U JP1988053202 U JP 1988053202U JP 5320288 U JP5320288 U JP 5320288U JP H01156545 U JPH01156545 U JP H01156545U
- Authority
- JP
- Japan
- Prior art keywords
- heat treatment
- treatment apparatus
- integrated circuit
- semiconductor integrated
- gas introduction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988053202U JPH01156545U (sr) | 1988-04-19 | 1988-04-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988053202U JPH01156545U (sr) | 1988-04-19 | 1988-04-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01156545U true JPH01156545U (sr) | 1989-10-27 |
Family
ID=31279194
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988053202U Pending JPH01156545U (sr) | 1988-04-19 | 1988-04-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01156545U (sr) |
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1988
- 1988-04-19 JP JP1988053202U patent/JPH01156545U/ja active Pending