JPH0116035B2 - - Google Patents

Info

Publication number
JPH0116035B2
JPH0116035B2 JP60091655A JP9165585A JPH0116035B2 JP H0116035 B2 JPH0116035 B2 JP H0116035B2 JP 60091655 A JP60091655 A JP 60091655A JP 9165585 A JP9165585 A JP 9165585A JP H0116035 B2 JPH0116035 B2 JP H0116035B2
Authority
JP
Japan
Prior art keywords
layer
gaas
algaas
grooves
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP60091655A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61251092A (ja
Inventor
Hideaki Horikawa
Saeko Ooshiba
Akira Watanabe
Yoshio Kawai
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Oki Electric Industry Co Ltd
Original Assignee
Oki Electric Industry Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oki Electric Industry Co Ltd filed Critical Oki Electric Industry Co Ltd
Priority to JP60091655A priority Critical patent/JPS61251092A/ja
Publication of JPS61251092A publication Critical patent/JPS61251092A/ja
Publication of JPH0116035B2 publication Critical patent/JPH0116035B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Semiconductor Lasers (AREA)
JP60091655A 1985-04-27 1985-04-27 半導体レ−ザの製造方法 Granted JPS61251092A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60091655A JPS61251092A (ja) 1985-04-27 1985-04-27 半導体レ−ザの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60091655A JPS61251092A (ja) 1985-04-27 1985-04-27 半導体レ−ザの製造方法

Publications (2)

Publication Number Publication Date
JPS61251092A JPS61251092A (ja) 1986-11-08
JPH0116035B2 true JPH0116035B2 (lt) 1989-03-22

Family

ID=14032516

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60091655A Granted JPS61251092A (ja) 1985-04-27 1985-04-27 半導体レ−ザの製造方法

Country Status (1)

Country Link
JP (1) JPS61251092A (lt)

Also Published As

Publication number Publication date
JPS61251092A (ja) 1986-11-08

Similar Documents

Publication Publication Date Title
JPS6220392A (ja) 半導体レ−ザ素子
JPH0474877B2 (lt)
JPH0552676B2 (lt)
JPS5940317B2 (ja) リブガイドストライプ型半導体多層薄膜光導波路及びその製造方法
JP2629678B2 (ja) 半導体レーザ装置およびその製造方法
JPS63124484A (ja) 半導体レ−ザ素子
JP2940158B2 (ja) 半導体レーザ装置
JPS6362292A (ja) 半導体レ−ザ装置およびその製造方法
JPH05226774A (ja) 半導体レーザ素子とその製造方法
JPS6241437B2 (lt)
JPH0567849A (ja) 半導体発光素子
JPH01115186A (ja) 埋め込みヘテロ型半導体レーザ素子
JPH0260077B2 (lt)
JPS62179790A (ja) 半導体レ−ザ
JPS6344311B2 (lt)
JPS6353715B2 (lt)
JPS61251092A (ja) 半導体レ−ザの製造方法
JPH0260075B2 (lt)
JPH0380589A (ja) 半導体レーザ素子の製造方法
JPS5925398B2 (ja) 半導体レ−ザの製造方法
JPS63287082A (ja) 半導体レ−ザ素子
JPS60149184A (ja) 半導体レ−ザ素子の製造方法
JPH03263890A (ja) 半導体レーザ装置およびその製造方法
JPS62286294A (ja) 半導体レ−ザの製造方法
JPS58131787A (ja) 半導体レ−ザ