JPH01163337U - - Google Patents
Info
- Publication number
- JPH01163337U JPH01163337U JP1988060493U JP6049388U JPH01163337U JP H01163337 U JPH01163337 U JP H01163337U JP 1988060493 U JP1988060493 U JP 1988060493U JP 6049388 U JP6049388 U JP 6049388U JP H01163337 U JPH01163337 U JP H01163337U
- Authority
- JP
- Japan
- Prior art keywords
- arm
- transport mechanism
- vertical movement
- support pedestal
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988060493U JPH01163337U (de) | 1988-05-07 | 1988-05-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988060493U JPH01163337U (de) | 1988-05-07 | 1988-05-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01163337U true JPH01163337U (de) | 1989-11-14 |
Family
ID=31286202
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988060493U Pending JPH01163337U (de) | 1988-05-07 | 1988-05-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01163337U (de) |
-
1988
- 1988-05-07 JP JP1988060493U patent/JPH01163337U/ja active Pending
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