JPH01168947U - - Google Patents
Info
- Publication number
- JPH01168947U JPH01168947U JP6639788U JP6639788U JPH01168947U JP H01168947 U JPH01168947 U JP H01168947U JP 6639788 U JP6639788 U JP 6639788U JP 6639788 U JP6639788 U JP 6639788U JP H01168947 U JPH01168947 U JP H01168947U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust pipe
- tube
- chamber
- application device
- induced plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000498 cooling water Substances 0.000 claims description 3
- 230000006698 induction Effects 0.000 claims 2
- 230000005284 excitation Effects 0.000 claims 1
- 239000011810 insulating material Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6639788U JPH0518837Y2 (mo) | 1988-05-20 | 1988-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6639788U JPH0518837Y2 (mo) | 1988-05-20 | 1988-05-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01168947U true JPH01168947U (mo) | 1989-11-29 |
| JPH0518837Y2 JPH0518837Y2 (mo) | 1993-05-19 |
Family
ID=31291803
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6639788U Expired - Lifetime JPH0518837Y2 (mo) | 1988-05-20 | 1988-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0518837Y2 (mo) |
-
1988
- 1988-05-20 JP JP6639788U patent/JPH0518837Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0518837Y2 (mo) | 1993-05-19 |
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