JPH01169754A - Optical information recording medium and its manufacture - Google Patents

Abstract

PURPOSE:To prevent moisture from permeating into a recording film or a reflecting film and to obtain an optical recording medium of long shelf life by forming the plasma polymerization membrane of a halogenized resin on the desired surface of a substrate on which a recording film or a reflecting membrane is formed. CONSTITUTION:In one surface of the polycarbonate substrate 1, a signal pattern 2 such as a guiding groove or a pit string is provided, then a recording film or a reflecting film 3 made of aluminum is formed by means of vacuum deposition. Thus the substrate 1 formed with membrane 3 is stored in a plasma processing room where gaseous tetrafluoro ethylene monomer is injected, then a high-frequency power is impressed to the electrodes to generate gaseous plasma, by which the plasma polymer membrane 5 of carbon fluoride is formed on the entire substrate 1 and the film 3. Further, on the membrane 5 applied on the film 3, a protective membrane 4 of an ultraviolet-curing resin is formed to make an optical recording medium. As a result, moisture permeation from the substrate or the protective membrane can be prevented, and the medium of long shelf life can be obtained.

Description

[Detailed Description of the Invention] [Field of Industrial Application] The present invention relates to an optical information recording medium and a method for manufacturing the same.
More specifically, the present invention relates to a means for preventing corrosion of a recording film or a reflective film formed on a substrate.

[Prior Art] In recent years, optical information recording media, such as compact discs, video discs, computer disk memories, etc., have rapidly become popular as recording media with high recording density and excellent random access properties. .

FIG. 17 is a perspective cross-sectional view of a conventionally known compact disc, in which a bit string 12 formed by modulating an information signal in the form of mechanical unevenness is arranged in a spiral shape on one side of a disc-shaped substrate 11. A reflective film I3 made of, for example, aluminum is deposited on the surface on which the pit rows 12 are formed, and a protective film 14 is further formed on the reflective film 13 to protect it. There is.

The substrate 11 is made of polycarbonate resin because it has high light transmittance, good moldability, and low optical strain. Further, as the protective film 14, an ultraviolet curing resin film is preferred because of its high mass productivity.

In addition, the light beam irradiation surface of the optical information recording medium is exposed,
For this reason, they are often scratched or easily contaminated with dust. Furthermore, the surface of the substrate may be accidentally contaminated with solvent or the like.

If the light beam irradiation surface is scratched, the light beam irradiated there will be reflected diffusely, causing level fluctuations in the reproduced information signal.Furthermore, if dust or solvent adheres to the surface, the amount of light beam transmitted will change and playback will be affected. Level fluctuations occur in the information signal. In particular, if a solvent or the like adheres, this will melt the plastic substrate and cause damage to the surface irradiated with the light beam. If dust or solvent adheres to it, you can wipe it off, but since the plastic substrate is relatively soft, the light beam irradiated surface is easily scratched, and the light beam irradiated surface becomes electrically charged, making it more likely that dust will stick to it. It becomes easier to do.

[Problem that the invention seeks to solve]

The polycarbonate resin constituting the substrate 11 and the ultraviolet curing resin film constituting the protective film 4 are both resin materials with relatively low moisture permeability.

However, compact discs are sometimes exposed to high temperature and humid atmospheres for long periods of time, such as when used in automobiles, and in such cases, the resin material absorbs considerable moisture. Therefore, the moisture absorbed from the substrate 11 and the protective film 14 reacts with the metal reflective film 13 to form hydroxide, and the inverse IJ ratio of the reproduction laser beam decreases, resulting in the S/N ratio of the reproduction signal. There is a problem of deterioration.

Although the above description has been made using a compact disc as an example, similar problems exist in other optical information recording media having a resin substrate and a resin protective film. In addition, for optical information recording media using glass substrates, moisture permeation from the substrate side is not a problem, but no measures have been taken to prevent moisture permeation from the protective film side, so the same problem as above still occurs. cause problems.

The present invention has been made to solve the problems of the prior art described above, and aims to provide an optical information recording medium that prevents corrosion of the recording film or reflective film and has a long service life. It is something.

[Means to solve the problem]

In order to achieve the purpose of forming the ridges, the present invention provides a plasma polymerized film of a halogenated resin such as fluorocarbon on at least one of the surface of the substrate and the surface of the recording film or reflective film. It is characterized by the formation of

Further, the manufacturing feature includes a step of placing at least a substrate on which a recording film or a reflective film is formed in a plasma gas atmosphere of a predetermined monomer, and forming a plasma polymerized film of a halogenated resin on a desired surface. It is something.

The present invention also provides a protective film made of a solvent-based ultraviolet curable resin film on the side of the light beam irradiation surface.

[For production]

The halogenated resin itself is a highly water-repellent substance. Moreover, when this film is formed by plasma polymerization, a film with high T8 aqueous property, thin film thickness, and high adhesiveness can be formed due to intermolecular crosslinking reaction. Therefore, by forming this film on a desired portion, it is possible to prevent corrosion of the recording film or reflective film due to moisture permeation, thereby preventing recording.

Deterioration of reproduction characteristics can be prevented.

[Example] First, an outline of an optical information recording medium according to the present invention will be explained based on FIGS. 1 to 6. In these figures, 1
is a substrate, 2 is a signal pattern, 3 is a recording film or a reflective film,
4 is a protective film, and 5 is a plasma polymerized film of halogenated resin.

In addition to polycarbonate, the substrate 1 can be made of other transparent resin materials such as transparent ceramics such as glass, polymethyl methacrylate, polymethyl pentene, and epoxy. On one side of this board 1,
If necessary, a signal pattern 2 such as a guide groove corresponding to a tracking signal, an address signal, or a pit row corresponding to an information signal is formed.

As a means for forming the signal pattern 2, an appropriate method is applied depending on the material of the substrate 1.

For example, when the substrate 1 is made of a thermoplastic resin such as polycarbonate, polymethyl methacrylate, or polymethylpentene, the substrate 1 and the signal pattern 2 are formed by injecting the molten substrate material into an injection mold. A so-called injection method in which the two are integrally molded is suitable. Regarding this substrate material, it is also possible to apply a known forming method such as the so-called compression method or injection-compression method, in which pressure is applied after injecting the molten substrate material into an injection mold.

In addition, when the substrate 1 is made of ceramics such as glass or thermosetting resin such as epoxy, there is a gap between the substrate 1 and a standber (mold) in which an inverted pattern of the desired signal pattern is formed. Stretch the photocurable resin with
The so-called 2P method (photocurable resin method), which transfers the inverted pattern of the standby onto the substrate 1, is suitable. Furthermore, regarding this thermosetting resin, it is also possible to apply a so-called casting method in which the substrate 1 and the signal pattern 2 are integrally molded by intravenously injecting the substrate material in a molten state into a mold.

The recording film 3 is formed of any heat mode material compatible with the optical recording medium. For example, a write-once type optical recording medium is formed of a low-melting metal recording material such as a tellurium alloy, or an organic dye recording material such as a cyanine-based or phthalocyanine-based organic dye. Regarding rewritable optical information recording media, there are magneto-optical recording materials such as amorphous alloys whose main components are tellurium, iron, and cobalt, and amorphous materials whose main components are indium and selenium. It is formed from a phase-change recording material such as a high-quality alloy.

Furthermore, in a read-only optical information recording medium, a reflective film is formed in place of the recording film. This reflective film 3 can be formed using a metal with high reflectance, such as aluminum, chromium, or silver.

The recording film or reflective film 3 can be formed by sputtering, for example.
It can be formed using known thin film forming means such as vacuum evaporation, ion blating, plasma evaporation, and electroless plating.

The protective film 4 is made of ultraviolet curing resin.

In forming the protective film 4, a method is employed in which a molten ultraviolet curable resin is spin-coded onto the surface of the recording film or reflective film 3, and then cured by irradiating ultraviolet rays of a predetermined wavelength.

The plasma-polymerized film 5 of halogenated resin is formed on either one of the surface of the substrate 1 and the surface of the recording film or reflective film 3.

For example, as shown in FIG. 1, the surface and peripheral surface of the substrate 1, the recording film or reflective film 3, and the protective film 4
and the plasma polymerized film 5 of the halogenated resin on both sides.
Alternatively, as shown in FIG. A polymer film 5 can also be formed.

In this case, since the recording film or reflective film 3 is completely covered with the plasma polymerized film 5 of halogenated resin, the recording film or reflective film 3 is not attacked by moisture in the air, and corrosion resistance is greatly improved. will be improved.

Further, as shown in FIG. 3, the recording film or reflective film 3
It is also possible to form the plasma polymerized film 5 of the halogenated resin only between the protective film 4 and the protective film 4. Further, as shown in FIG. 4, the plasma polymerized film 5 of the halogenated resin can be formed only on the surface and peripheral surface of the protective film 4.

If a non-moisture-permeable material such as glass is used as the substrate 1, a sufficient moisture-proofing effect can be obtained even with such a configuration.

Furthermore, as shown in FIG. 5, a plasma polymerized film 5 of halogenated resin can be formed only on the surface and peripheral surface of the substrate 1.

In this case, moisture permeation from the substrate 1 side is prevented, and deterioration of the recording film or reflective film due to moisture permeation is halved.

In addition, as shown in FIG. 6, the plasma polymerized film 5 of the halogenated resin is formed between the recording film or reflective film 3 and the protective film 4, and the surface of the substrate 1 and the protective film 5 are It is also possible to form the plasma polymerized film 5 of the halogenated resin on the surface of the film 4 and on the peripheral surfaces of the substrate 1 and the protective film 4.

In this way, the recording film or reflective film 3 is doubly protected and deterioration of the recording film or reflective film 3 due to moisture permeation is further prevented. A plasma-polymerized membrane of fluorocarbon resin is particularly suitable because it has good aqueous properties.

Hereinafter, specific examples of the present invention will be shown, and the effects of the present invention will be mentioned in comparison with comparative examples in which a plasma polymerized film of halogenated resin is not formed.

First Example> A polycarbonate substrate was placed at a vacuum degree of lXl0-6 (T
The aluminum contained in the substrate is heated and evaporated while supplying oxygen at a rate of 50 (ml/min) in the vacuum evaporation equipment, and approximately 100 ml of aluminum is applied to one side of the substrate. An aluminum reflective film with a thickness of 100 mm was deposited.

Next, the substrate on which the aluminum reflective film was formed in this way was placed in a plasma processing chamber whose degree of vacuum was pre-adjusted to 1 xio-6 (Torr), and ethylene tetrafluoride monomer gas was supplied at a rate of 10 (ml) per minute. ) while applying 300 (Watts) of RF high frequency power to the electrode to generate plasma gas, forming a plasma polymerized film of about 500 (Watts) of fluorocarbon on the entire surface of the substrate and aluminum reflective film. has been established.

Second Example> In the same manner as shown in the first example, an aluminum reflective film having a thickness of approximately 1000 mm is deposited on one side of a polycarbonate substrate. After this polycarbonate substrate was taken out of the tank, an ultraviolet curable resin film was spin-coded on the surface of the aluminum reflective film, and an ultraviolet ray of a predetermined wavelength was irradiated to form a protective film with a thickness of about 10 μm.

Next, the substrate on which the protective film was formed was placed in a plasma processing chamber, and argon gas was introduced therein at a rate of 10 (ml) per minute to generate argon plasma, thereby purifying the surfaces of the substrate and the protective film.

After exhausting the argon gas, about 200 plasma-polymerized films of carbon fluoride were formed on the entire surface of the substrate and protective film under the same conditions as in the first example.

<Third Example> Under the same conditions as in the first example, an aluminum reflective film with a thickness of about 1,000 mm was deposited on one side of a polycarbonate substrate, and an aluminum reflective film was deposited on the entire surface of these substrates and the aluminum reflective film. Approximately 200 people installed fluorocarbon plasma polymerized membranes.

Next, this substrate was taken out of the tank, and under the same conditions as in the second example, a layer of ultraviolet curable resin with a thickness of about IO μm was applied to the plasma polymerized crotch of the fluorocarbon coated on the aluminum reflective film. A protective film was formed.

First Comparative Example> Under the same conditions as in the first example, an aluminum reflective film with a thickness of about 1000 mm was deposited on one side of a polycarbonate substrate.

<Second Comparative Example> Under the same conditions as in the first example, an aluminum reflective film having a thickness of approximately 1,000 mm was deposited on one side of a polycarbonate substrate, and then under the same conditions as in the second example. Under the
A protective film of ultraviolet curing resin having a thickness of about 10 μm was formed on the surface of the aluminum reflective film.

The table below shows the results of the corrosion resistance test of the optical information recording media of each of the Examples and Comparative Examples. However, the test conditions were a temperature of 60℃,
The relative humidity is 90% and the test time is 2000 hours. The decrease rate of reflectance in the table is the ratio (η, /ηl) of the light reflectance η2 after the test to the light reflectance η1 before the test, and the contact angle θ is the is the contact angle of a water droplet on the sample surface.

Table As is clear from this table, the optical information recording medium of each example has a lower rate of decrease in reflectance and a lower contact angle than those on which a plasma polymerized film of halogenated resin (fluorocarbon) is not formed. Both have been significantly improved. In addition, no significant differences were observed among the corner examples, and halogenated resin (
Substantially the same effect is obtained when a plasma-polymerized film of carbon fluoride (fluorocarbon) is provided on either side.

(Embodiment 4) FIG. 7 is a sectional view showing an embodiment of the optical disc according to the present invention, in which 11 is a plastic substrate, 11a is a recording surface, llb is a light beam irradiation surface, 13 is a recording film or a reflective film, 14 is a protective film.

In the figure, the plastic substrate 11 is, for example, a PC.
, PMMA, or a thermosetting resin such as epoxy resin, and the negative side 1a is a recording surface on which spiral or concentric tracks consisting of pit rows are formed. A recording layer 13 is provided on this recording surface 11a.

The other surface 11b of the plastic substrate l is a surface to which a light beam is irradiated, and a protective film 1 is provided on this light beam irradiation surface 11b.
4 is provided. This protective film 14 is made of a solvent-based ultraviolet curing resin, has high hardness, and has a superior antistatic effect compared to the plastic substrate 11.

This improves the scratch resistance on the side of the light beam irradiation surface 11b, prevents the adhesion of dust and the like due to charging, and prevents corrosion by solvents.

Solvent-type ultraviolet curing resin has excellent mechanical strength as described above, but when using it as the protective film 3,
The shrinkage rate during curing by ultraviolet irradiation must be small (approximately 15% or less).

Further, the formed coating must have good adhesion to the plastic substrate 11, have a refractive index and a coefficient of thermal expansion comparable to those of the plastic substrate 11, and must not be eroded by solvents. A solvent-based ultraviolet curing resin that satisfies these conditions is one in which the protective film material is dissolved in one type of solvent such as toluene, acetone, methyl ethyl ketone, methyl alcohol, ethyl alcohol, propyl alcohol, etc., or a mixed solvent of two or more types. However, it depends on the material of the plastic substrate 11, and the solvent must be selected and used. Here, to give a specific example, when the plastic substrate 11 is made of PC, the solvent-based ultraviolet curing resin that satisfies the above conditions as the protective film 14 is UVX-HM 185-2 manufactured by ThreeBond.
．． 3070 type, Toyobo's MIT-2, Fujikura Kasei's H
5123-UN, Dainippon Ink Co., Ltd. Coanda 17-8
24, Nitto Denko Corporation's NA-803, etc. In addition, as solvent-free ultraviolet curing resins, Unidayk V-7005 type manufactured by Dainippon Ink Co., Ltd. and Alonisox UV3 type manufactured by Toagosei Co., Ltd.
700 type, Nippon Denko Corporation's NA-802 type, etc. In addition to these, there is also the ESP-0167 type manufactured by Dainippon Ink Co., Ltd.

Next, the method and performance of forming a protective film on an optical disc using this solvent-based ultraviolet curable resin as the protective film 14 will be described.

First, regarding the method of forming a protective film, UVX-HM-
185-2) to a thickness of 3 to 5 μm, and after pre-drying for 1 minute in an atmosphere at 80°C (this removes the solvent), 150 mW/an! The solvent type ultraviolet curable resin is cured by applying ultraviolet rays for 10 seconds. A protective film 14 is thus obtained.

Regarding the mechanical scratch resistance of the protective film 14, 20
A stale wool (#0000) test was conducted in which the surface of the protective film 14 was rubbed 5000 times under a load of 0 g, but the surface was not scratched at all. As a result, the protective film 1
It can be seen that No. 4 has sufficiently high scratch resistance.

[Example 5] Even if a protective film made of a solvent-based ultraviolet curable resin is provided, the effect of reducing the hygroscopicity of atmospheric moisture cannot be obtained. This point can be improved by combining the protective film made of the ultraviolet curable resin and the plasma polymerized film of the halogenated resin.

8, 9, 10, 11, and 12, a protective film 14 made of a solvent-based ultraviolet curing resin is formed in advance on the light beam irradiation side of the transparent resin substrate 1, and then ,
Figures 1, 2, 4, and 5.

This is an example in which a plasma polymerized film 5 of halogenated resin is formed using the same method and the same materials as in the example shown in FIG.

By using such a combination of protective films, effects such as at least the suppression of absorption of atmospheric moisture by the transparent substrate 1 and the prevention of adsorption of dust, flakes, etc. can be obtained.

[Example 6] In order to obtain the effect of preventing minute scratches on the surface of the transparent substrate 1, the structure of the protective film of the transparent substrate 1 is such that the outermost layer is made of a solvent-based ultraviolet curing resin. It is effective to provide a membrane and arrange a plasma polymerized membrane of halogenated resin inside the membrane.

FIG. 13, FIG. 14, FIG. 15, and FIG. 16 are the same as FIG. 1 above.

In each embodiment of the optical disk in which the plasma polymerized film 5 of halogenated resin shown in FIGS. 2, 4, and 6 is formed as a protective film, the light-irradiated side surface of the transparent substrate 1 is coated with a solvent-based ultraviolet curing resin. An example of an optical disc in which a protective film 14 is further formed is shown.

As mentioned above, the features of this embodiment include not only suppressing the absorption of atmospheric moisture by forming the plasma polymerized film 5 of halogenated resin, but also suppressing the absorption of atmospheric moisture by forming the hard protective film 14 of the ultraviolet curable resin on the outer surface. It is possible to obtain the effect of increasing the trauma resistance of the optical disc.

The gist of the present invention is that a plasma polymerized film of a halogenated resin is formed on a desired surface of an optical information recording medium, which is formed by coating a recording film or a reflective film on one side of a substrate.
The shape and structure of the substrate, the presence or absence of a signal pattern, the thickness and material of the recording film, reflective film, and protective film, the presence or absence of a protective film, etc. are not limited to those of the embodiments described above.

For example, in the above embodiments, a single plate of an optical information recording medium was explained, but the gist of the present invention is not limited to this. An optical information recording medium can also be constructed. In this case, any type of optical information recording medium can be constructed, such as a so-called air sandwich structure or a direct bonding type. Note that for a double-sided recording type optical information recording medium, a plasma polymerized film of halogenated resin may be formed on the outer surface of the substrate after bonding.

Further, the type of optical information recording medium is not limited to a disk-shaped optical information recording medium, but can be applied to a card-shaped optical information recording medium or a tape-shaped optical information recording medium.

〔Effect of the invention〕

As explained above, since the optical information recording medium of the present invention has a plasma polymerized film of halogenated resin formed on a desired surface, moisture permeation from the substrate or protective film is prevented, and the recording film or reflective film is not be invaded by Therefore, it is possible to provide an optical information recording medium with excellent corrosion resistance and a long service life.

[Brief explanation of the drawing]

1 to 16 are cross-sectional views of optical information recording media according to embodiments of the present invention, and FIG. 17 is a cross-sectional view of a conventional optical information recording medium. 1.11... Substrate, lla... Recording surface, llb...
・Light beam irradiation surface, 2...signal pattern, 3.13・
... Recording film or reflective film, 4, 14... Protective film, 5.
...Plasma polymerized film of halogenated resin. Agent Patent Attorney Kenji Takeshi Aki゛■, :j:H
Figure 1 Figure 2 Figure 3 Figure 4 Figure 5 Figure 6 Figure 7 nb 11Q 14ko2
12. 12 12 1.
1 ・Figure 8 Figure 9 Figure 10 Figure 11 Figure 12 Figure 5 32 1 16th

Claims (1)

[Scope of Claims] (1) In an optical information recording medium comprising at least a recording film or a reflective film coated on one side of a substrate, at least one of the surface of the substrate and the surface side of the recording film or reflective film An optical information recording medium characterized in that a plasma polymerized film of halogenated resin is formed on one surface. (2) In the optical information recording medium according to claim (1), a plasma polymerized film of halogenated resin is formed on the surface and peripheral surface of the substrate, and on the surface of the recording film or reflective film,
An optical information recording medium characterized in that a protective film is formed on a plasma polymerized film of halogenated resin formed on the surface of the recording film or reflective film. (3) In the optical information recording medium according to claim (1), a protective film is formed on the surface of the recording film or the reflective film, the surface of the protective film, the surface of the substrate, and each peripheral surface of the protective film and the substrate. An optical information recording medium comprising a plasma polymerized film of the halogenated resin. (4) In the optical information recording medium according to claim (1), the plasma polymerized film of the halogenated resin is formed on the surface of the recording film or the reflective film, and a protective film is provided on the plasma polymerized film of the halogenated resin. An optical information recording medium characterized in that: (5) In the optical information recording medium according to claim (1), a protective film is formed on the surface of the recording film or the reflective film, and a plasma polymerized film of the halogenated resin is formed on the surface and peripheral surface of the protective film. An optical information recording medium characterized by: (6) In the optical information recording medium according to claim (1), a protective film is formed on the surface of the recording film or the reflective film, and a plasma polymerized film of the halogenated resin is formed on the surface and peripheral surface of the substrate. An optical information recording medium characterized by: (7) In the optical information recording medium according to claim (1), the plasma polymerized film of the halogenated resin is formed on the surface of the recording film or the reflective film, and a protective film is provided on the plasma polymerized film of the halogenated resin. An optical information recording medium characterized in that a plasma polymerized film of the halogenated resin is formed on the surface of the protective film, the surface of the substrate, and each peripheral surface of the protective film and the substrate. (8) The optical information recording medium according to claim (1), wherein the plasma polymerized film of halogenated resin is a plasma polymerized film of fluorocarbon resin. (9) The optical information recording medium according to claim (2), wherein the protective film is made of an ultraviolet curing resin. (10) In an optical information recording medium comprising at least a recording film or a reflective film coated on one side of a substrate, at least one of the surface of the substrate and the surface side of the recording film or reflective film is coated with halogen. 1. An optical information recording medium comprising a plasma polymerized resin film and an ultraviolet curable resin film formed in a laminated manner. (11) In the optical information recording medium according to claim (10), a plasma polymerized film of a halogenated resin and an ultraviolet curing resin film are laminated on the surface and peripheral surface of the substrate, and on the surface of the recording film or reflective film. 1. An optical information recording medium comprising: a protective film formed on the laminated film; (12) In the optical information recording medium according to claim (10), a protective film is formed on the surface of the recording film or the reflective film, and the halogen 1. An optical information recording medium characterized in that a plasma polymerized film of a halogenated resin is formed, and a laminated film of an ultraviolet curable resin film and a plasma polymerized film of a halogenated resin is formed on the surface of a substrate. (13) In the optical information recording medium according to claim (10), a protective film is formed on the surface of the recording film or the reflective film, and a UV curable resin film and a plasma polymerized film of halogenated resin are laminated on the surface of the substrate. What is claimed is: 1. An optical information recording medium characterized in that a plasma polymerized film of the halogenated resin is formed on the peripheral surface of a substrate. (14) In the optical information recording medium according to claim (10), a plasma polymerized film of the halogenated resin is formed on the surface of the recording film or the reflective film, and a protective film is provided on the plasma polymerized film of the halogenated resin. At the same time, a plasma polymerized film of the halogenated resin is formed on the surface of the protective film and each peripheral surface of the protective film and the substrate, and an ultraviolet curing resin film and a plasma polymerized film of the halogenated resin are formed on the surface of the substrate. An optical information recording medium characterized by forming a laminated film of. (15) The optical information recording medium according to claim 10, wherein the plasma polymerized film of halogenated resin is a plasma polymerized film of fluorocarbon resin. (16) The optical information recording medium according to any one of claims (1) to (15), wherein the substrate is made of polycarbonate. (17) The optical information recording medium according to claims (1) and (16), wherein the protective film is made of an ultraviolet curing resin. (18) A substrate with a recording film or a reflective film formed on one side and an ultraviolet curable resin film formed on the other side is placed in a plasma gas atmosphere of a predetermined monomer, and a plasma polymerized film of halogenated resin is formed on the desired surface. A method for manufacturing an optical information recording medium, comprising the steps of: (19) Optical information comprising the step of placing a substrate on which at least a recording film or a reflective film is formed in a plasma gas atmosphere of a predetermined monomer and forming a plasma polymerized film of a halogenated resin on a desired surface. A method for manufacturing a recording medium.