JPH01171027U - - Google Patents
Info
- Publication number
- JPH01171027U JPH01171027U JP1988068286U JP6828688U JPH01171027U JP H01171027 U JPH01171027 U JP H01171027U JP 1988068286 U JP1988068286 U JP 1988068286U JP 6828688 U JP6828688 U JP 6828688U JP H01171027 U JPH01171027 U JP H01171027U
- Authority
- JP
- Japan
- Prior art keywords
- layer
- thickness change
- notch
- wafer boat
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
- H10P72/3218—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
- H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
- H10P72/34—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H10P72/3402—Mechanical parts of transfer devices
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図は本考案の治具の一例の傾視図である。
図中の符号：１……円筒体、２……円弧状の切
欠き部、５３……直線状切欠き部、４……厚肉層
、５……肉厚変化層、６……薄肉層。
FIG. 1 is a perspective view of an example of the jig of the present invention. Codes in the diagram: 1...Cylindrical body, 2...Circular notch, 53...Linear notch, 4...Thick layer, 5...Variable thickness layer, 6...Thin layer .
Claims (1)
てウエーハボート保持部を形成し、その切欠き基
部近傍を厚肉層に形成して成るウエーハボート搬
送用治具において、該厚肉層と切欠き端部の薄肉
層との間に緩やかで滑らかな肉厚変化層を形成し
て成る改善された実用的強度を有する上記治具。 ２ 上記肉厚変化層が、１／１２〜１／８０の傾
斜割合である請求項１記載のウエーハボード搬送
用治具。[Claims for Utility Model Registration] 1. A wafer boat conveyor in which a wafer boat holding portion is formed by cutting out a part of a cylindrical body in an arc shape and a straight line, and a thick layer is formed near the base of the notch. The above-mentioned jig has improved practical strength, wherein a gradual and smooth thickness change layer is formed between the thick layer and the thin layer at the notch end. 2. The wafer board transport jig according to claim 1, wherein the thickness change layer has a slope ratio of 1/12 to 1/80.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988068286U JPH01171027U (en) | 1988-05-24 | 1988-05-24 | |
| KR1019880008741A KR910007105B1 (en) | 1988-05-24 | 1988-07-14 | Wafer Board Transfer Tool |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1988068286U JPH01171027U (en) | 1988-05-24 | 1988-05-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01171027U true JPH01171027U (en) | 1989-12-04 |
Family
ID=31293612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1988068286U Pending JPH01171027U (en) | 1988-05-24 | 1988-05-24 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JPH01171027U (en) |
| KR (1) | KR910007105B1 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6120319A (en) * | 1984-07-09 | 1986-01-29 | Toshiba Ceramics Co Ltd | Wafer boat transporting jig made of crystal glass |
-
1988
- 1988-05-24 JP JP1988068286U patent/JPH01171027U/ja active Pending
- 1988-07-14 KR KR1019880008741A patent/KR910007105B1/en not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6120319A (en) * | 1984-07-09 | 1986-01-29 | Toshiba Ceramics Co Ltd | Wafer boat transporting jig made of crystal glass |
Also Published As
| Publication number | Publication date |
|---|---|
| KR910007105B1 (en) | 1991-09-18 |
| KR890017792A (en) | 1989-12-18 |