JPH01177277U - - Google Patents
Info
- Publication number
- JPH01177277U JPH01177277U JP7360088U JP7360088U JPH01177277U JP H01177277 U JPH01177277 U JP H01177277U JP 7360088 U JP7360088 U JP 7360088U JP 7360088 U JP7360088 U JP 7360088U JP H01177277 U JPH01177277 U JP H01177277U
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- heating means
- molecular beam
- shutter
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Description
第１図は本考案の一実施例を示した分子線源の
概略図、第２図は従来の分子線源の概略図である
。
１…ＰＢＮ製ルツボ、２…ヒーター、３…シヤ
ツター、４…外筒、５…再蒸発用ヒーター、６…
蒸発試料、７…堆積物。
FIG. 1 is a schematic diagram of a molecular beam source showing an embodiment of the present invention, and FIG. 2 is a schematic diagram of a conventional molecular beam source. 1...PBN crucible, 2...heater, 3...shutter, 4...outer cylinder, 5...heater for reevaporation, 6...
Evaporation sample, 7...deposit.
Claims (1)
周に設けられている加熱手段と、さらに当該加熱
手段の外周に取り付けた外筒とを備え、上記加熱
手段によつて加熱され蒸発試料が分子線となつて
飛来するのをシヤツターの開閉動作によつて制御
するようにした分子線源において、前記ツルボ及
び外筒の上端部とシヤツターとの間に堆積した堆
積物を加熱蒸発させる他の加熱手段を前記ルツボ
の開口部近傍に配設したことを特徴とする分子線
源。 It includes a crucible that accommodates an evaporated sample, a heating means provided on the outer periphery of the crucible, and an outer cylinder attached to the outer periphery of the heating means, and the evaporated sample is heated by the heating means and becomes a molecular beam. In the molecular beam source in which the flying of the molecular beam is controlled by the opening/closing operation of the shutter, another heating means is provided to heat and evaporate the deposits accumulated between the crucible and the upper end of the outer cylinder and the shutter. A molecular beam source, characterized in that it is disposed near an opening of the crucible.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7360088U JPH01177277U (en) | 1988-06-02 | 1988-06-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7360088U JPH01177277U (en) | 1988-06-02 | 1988-06-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01177277U true JPH01177277U (en) | 1989-12-18 |
Family
ID=31298737
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7360088U Pending JPH01177277U (en) | 1988-06-02 | 1988-06-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01177277U (en) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6065792A (en) * | 1983-09-19 | 1985-04-15 | Fujitsu Ltd | Molecular beam crystal growth apparatus |
| JPS62165318A (en) * | 1986-01-17 | 1987-07-21 | Agency Of Ind Science & Technol | Device for molecular beam crystal growth |
-
1988
- 1988-06-02 JP JP7360088U patent/JPH01177277U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6065792A (en) * | 1983-09-19 | 1985-04-15 | Fujitsu Ltd | Molecular beam crystal growth apparatus |
| JPS62165318A (en) * | 1986-01-17 | 1987-07-21 | Agency Of Ind Science & Technol | Device for molecular beam crystal growth |
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