JPH0119080B2 - - Google Patents
Info
- Publication number
- JPH0119080B2 JPH0119080B2 JP57199599A JP19959982A JPH0119080B2 JP H0119080 B2 JPH0119080 B2 JP H0119080B2 JP 57199599 A JP57199599 A JP 57199599A JP 19959982 A JP19959982 A JP 19959982A JP H0119080 B2 JPH0119080 B2 JP H0119080B2
- Authority
- JP
- Japan
- Prior art keywords
- stator
- pump
- blades
- large number
- circumferential direction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/08—Sealings
- F04D29/083—Sealings especially adapted for elastic fluid pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
- F05D2230/00—Manufacture
- F05D2230/50—Building or constructing in particular ways
- F05D2230/54—Building or constructing in particular ways by sheet metal manufacturing
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Description
【発明の詳細な説明】
本発明はターボ分子ポンプの改良に関し、特に
静翼を有する固定子の構造に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to improvements in turbomolecular pumps, and more particularly to the structure of a stator having stator vanes.
徒来、ターボ分子ポンプの静翼は、アルミニウ
ム製薄板円環の内周から半径方向外方へ切断スリ
ツトの多数を等間隔に設け、２つのスリツト間に
残された部分を捩り曲げて製作されていた。その
ため、加工応力により固定子全体がよじれて変形
する許りでなく、加工が難かしい。スリツト巾を
広くすると気体が要易に逆流し、そのため、ポン
プ自体の到達しうる真空圧力が悪くなり圧縮性能
が低下し、品質の安定性を欠く原因となつてい
た。しかも、この欠点は特に小型ポンプにおいて
顕著であつた。 Traditionally, stator vanes for turbomolecular pumps have been manufactured by creating a large number of cutting slits at equal intervals radially outward from the inner periphery of a thin aluminum ring, and twisting the portion left between the two slits. was. Therefore, the entire stator cannot be twisted and deformed due to processing stress, and processing is difficult. When the slit width is widened, gas easily flows backwards, which deteriorates the vacuum pressure that the pump itself can reach, reducing compression performance and causing a lack of quality stability. Moreover, this drawback was particularly noticeable in small pumps.
本発明は上記欠点を除き、製作が容易で、変形
の少ない固定子を用いることにより気体分子の逆
流を防ぎもつて安定性と圧縮性能の高いターボ分
子ポンプを提供することを目的とする。 It is an object of the present invention to eliminate the above-mentioned drawbacks, provide a turbomolecular pump that is easy to manufacture, uses a stator with little deformation, prevents backflow of gas molecules, and has high stability and compression performance.
この目的を達成するため、本発明の構成は次の
とおりとする。即ち、円周方向に多数の動翼を持
つ回転子の複数段が同心に配列され、各段の中間
に円周方向へ多数の静翼を持つ固定子がスペーサ
を介して配置されてなるターボ分子ポンプにおい
て、前記固定子は薄板円環の同一円周上の等間隔
位置にＩ字状スリツトが設けられ、該スリツトに
挟まれた部分が捩曲されて静翼が形成され、前記
スリツトの固定子半径方向外側の部分を覆うよう
にスペーサに挾持されて円環邪魔板が配置された
ことである。 In order to achieve this object, the configuration of the present invention is as follows. In other words, a turbo consists of multiple stages of rotors having a large number of moving blades in the circumferential direction arranged concentrically, and a stator having a large number of stator blades in the circumferential direction arranged between each stage via a spacer. In the molecular pump, the stator is provided with I-shaped slits at equal intervals on the same circumference of a thin plate ring, and the portion sandwiched between the slits is twisted to form a stationary blade, and The annular baffle plate is sandwiched between spacers and arranged so as to cover the radially outer portion of the stator.
以下本発明を図面に示す一実施例にもとづき説
明する。 The present invention will be described below based on an embodiment shown in the drawings.
第１図および第２図において、ターボ分子ポン
プは円周方向に多数の動翼１１をもつ回転子１の
複数段が同心に配列され、各段の中間に円周方向
へ多数の静翼２２をもつ固定子２がスペーサ４を
介して配置されている。前記固定子２は、SUS
（不銹鋼）の薄板円環２０の同一円周上の等間隔
位置にＩ字状のスリツト２１が設けられる。そし
て、隣接スリツト２１間に位置する各部分が前記
回転子１の動翼１１の傾斜角度に沿う一定傾斜角
度を形成する如く捩られ、静翼２２とされる。従
つて、静翼２２は隣接するＩ字状スリツト２１の
頂辺２１ａ、下辺２１ｂに挾まれる部分がくびれ
部２３となる。また、前記頂辺２１ａのスリツト
幅ｔによつて生ずるギヤツプを覆うため、スペー
サ４に挾持された円環邪魔板５が設けられる。こ
れにより、前記スリツト幅ｔにもとづくギヤツプ
を通して逆流する気体分子の量が大幅に減少し
た。実験によると本発明ポンプの水素圧縮性能は
約４倍に増強できた。 In FIGS. 1 and 2, the turbomolecular pump has multiple stages of a rotor 1 having a large number of moving blades 11 in the circumferential direction arranged concentrically, and a large number of stator blades 22 in the circumferential direction between each stage. A stator 2 having a shape is arranged with a spacer 4 interposed therebetween. The stator 2 is made of SUS
I-shaped slits 21 are provided at equally spaced positions on the same circumference of a thin plate ring 20 made of stainless steel. Then, each portion located between adjacent slits 21 is twisted so as to form a constant inclination angle that follows the inclination angle of the rotor blade 11 of the rotor 1, forming a stationary blade 22. Therefore, the part of the stationary blade 22 that is sandwiched between the top side 21a and the bottom side 21b of the adjacent I-shaped slit 21 becomes the constricted part 23. Further, in order to cover the gap caused by the slit width t of the top side 21a, an annular baffle plate 5 held between the spacers 4 is provided. This significantly reduced the amount of gas molecules flowing back through the gap based on the slit width t. According to experiments, the hydrogen compression performance of the pump of the present invention could be increased approximately four times.
スペーサ４はリング状の短筒４０を合じやくり
状に排気側より前記固定子２の円環部２０を挾む
姿勢で順次重ね合せられる。 In the spacer 4, short ring-shaped tubes 40 are successively stacked one on top of the other in an interlocking manner so as to sandwich the annular portion 20 of the stator 2 from the exhaust side.
なお、邪魔板５は静翼２２の排気側または吸排
気両側に設けられてもよい。 Note that the baffle plate 5 may be provided on the exhaust side of the stationary blade 22 or on both sides of the intake and exhaust sides.
本発明は以上のように構成されるので、固定子
および静翼の製作が極めて容易で変形も少なく、
この固定子を装着されたターボ分子ポンプは気体
分子の逆流が防止され、特に邪魔板による逆流防
止効果が著しい。これにより品質の安定性と圧縮
性能が一段と高められることとなり、特に小型ポ
ンプにおいてその効果が大きい。 Since the present invention is constructed as described above, it is extremely easy to manufacture the stator and stationary blades, and there is little deformation.
A turbomolecular pump equipped with this stator can prevent backflow of gas molecules, and in particular, the baffle plate has a remarkable backflow prevention effect. This further improves quality stability and compression performance, which is especially effective for small pumps.
第１図は本発明のターボ分子ポンプの固定子の
一実施例における製造過程を示す要部平面図、第
２図は本発明のポンプの要部拡大断面図である。
１……回転子、２……固定子、２１……スリツ
ト、２２……静翼、２３……くびれ部、４……ス
ペーサ、５……邪魔板。
FIG. 1 is a plan view of a main part showing the manufacturing process of an embodiment of the stator of a turbo-molecular pump of the present invention, and FIG. 2 is an enlarged sectional view of a main part of the pump of the present invention. DESCRIPTION OF SYMBOLS 1... Rotor, 2... Stator, 21... Slit, 22... Stationary blade, 23... Neck part, 4... Spacer, 5... Baffle plate.
Claims (1)
が同心に配列され、各段の中間に円周方向へ多数
の静翼を持つ固定子がスペーサを介して配置され
てなるターボ分子ポンプにおいて、前記固定子は
薄板円環の同一円周上の等間隔位置にＩ字状スリ
ツトが設けられ、該スリツトに挾まれた部分が捩
曲されて静翼が形成され、前記スリツトの固定子
半径方向外側の部分を覆うようにスペーサに挾持
されて円環邪魔板が配置されたことを特徴とする
ターボ分子ポンプ。1 A turbo molecule in which multiple stages of rotors with a large number of moving blades in the circumferential direction are arranged concentrically, and a stator with a large number of stator blades in the circumferential direction is placed between each stage with a spacer interposed between them. In the pump, the stator is provided with I-shaped slits at equally spaced positions on the same circumference of a thin plate ring, and the portions held by the slits are twisted to form stationary blades, and the stator is fixed. A turbo-molecular pump characterized in that an annular baffle plate is disposed between spacers so as to cover a radially outer portion of the pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57199599A JPS5990796A (en) | 1982-11-12 | 1982-11-12 | turbo molecular pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57199599A JPS5990796A (en) | 1982-11-12 | 1982-11-12 | turbo molecular pump |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5990796A JPS5990796A (en) | 1984-05-25 |
| JPH0119080B2 true JPH0119080B2 (en) | 1989-04-10 |
Family
ID=16410530
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57199599A Granted JPS5990796A (en) | 1982-11-12 | 1982-11-12 | turbo molecular pump |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5990796A (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3722164C2 (en) * | 1987-07-04 | 1995-04-20 | Balzers Pfeiffer Gmbh | Turbomolecular pump |
| JP3013083B2 (en) * | 1998-06-23 | 2000-02-28 | セイコー精機株式会社 | Turbo molecular pump |
| DE102005027097A1 (en) * | 2005-06-11 | 2006-12-14 | Pfeiffer Vacuum Gmbh | Stator disk for turbomolecular pump |
| JP6834612B2 (en) * | 2017-03-07 | 2021-02-24 | 株式会社島津製作所 | How to make a vacuum pump |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6053153B2 (en) * | 1981-04-15 | 1985-11-22 | 大成建設株式会社 | Steel reinforcement assembly method |
-
1982
- 1982-11-12 JP JP57199599A patent/JPS5990796A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5990796A (en) | 1984-05-25 |
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