JPH01201068A - Ceramic insulating material - Google Patents

Abstract

PURPOSE:To obtain the title insulating material useful as an insulating material for a jig truck of a target insulating type in an ionic plating device, capable of treating heavy-weight materials, having excellent high-temperature insulating properties and mechanical characteristics, by heat-treating especially Al2O3 under a specific condition to give Al2O3 of specific type. CONSTITUTION:Especially Al2O3 is heat-treated by, e.g. a vacuum heat-treating furnace under atmospheric conditions at <=10<-4>Torr at 130 deg.C for 5hr to give Al2O3 of specific type having about 5X10<9>OMEGA.cm at 500 deg.C and improve high- temperature insulating properties.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a ceramic insulator, particularly a ceramic insulator suitable for use as an insulator for a workpiece insulating jig cart in an ion blating device. It is something.

[Prior Art] A workpiece insulated jig trolley for use in an ion grating apparatus includes a script frame having wheels that run on rails, and a plurality of bearings attached to the trolley frame via an insulator. , an idler gear rotatably supported by a bearing, a driven gear that meshes with the idler gear, a main shaft to which the driven gear is attached, and a sample holder attached to the main shaft to fix the processed material. A long gear arranged parallel to the main shaft, a roller or rack arranged parallel to the main shaft at the upper part of the trolley frame, and a sprocket or pinion meshing with the roller or rack, A workpiece insulation type jig cart is well known, which is characterized by rotating and reciprocating the workpiece using long gears and a rack and pinion mechanism (Japanese Patent Application No. 62-297757).

However, in such an ion blating apparatus or the like, the object to be processed is heated to a maximum of 600° C. and a voltage of about 1 V is applied under vacuum. Therefore, the insulator used in the ion grating device is similarly exposed to this atmosphere. Therefore, materials other than steatite have traditionally not been used industrially because this insulator has excellent high-temperature insulation properties and has a dense appearance (low adsorption of contamination and impurities). do not have.

Steatite has a small high-frequency attraction loss, so -
Although it is widely used as an in-shell high-frequency insulating material, when used in ion blating equipment, it has low strength and there are restrictions on the weight of the objects to be processed, making it impossible to process large objects.

[Problems to be solved by the invention] Steatite has poor mechanical properties, so there is a limit to the weight of the processed material, and steatite cracks over time, so it must be replaced regularly. This resulted in increased operating costs.

Therefore, as an insulator with high strength and no cracking,
Although we would like to use alumina, the following problems arose when conventional alumina was used.

■When alumina with a cross-sectional area necessary for a certain load is used as the insulator for the object-insulated jig trolley of the ion brating equipment, the actual insulation resistance of the script is 50
At 0°C, steatite can maintain a t5OKΩ level, whereas conventional alumina deteriorates to a level of 4 to 0.

■With an insulation resistance of 4 to 0, no discharge will occur even if an applied voltage of about IKV is applied to cause a discharge.

[Means for Solving the Problems] The present invention aims to solve these problems. Therefore, it is an object of the present invention to provide a ceramic insulator that does not cause deterioration of high-temperature insulation properties under the above-mentioned atmospheric conditions and has excellent mechanical properties.

To achieve this objective, the ceramic-based insulator according to the present invention uses alumina (8fJ203) at 1O-4Too
It was heat-treated for 5 hours under atmospheric conditions of 1,300° C. to obtain Shisei A, Q203, which can be used as an insulator for a workpiece insulating type jig cart of an ion blating device.

[Example] According to the present invention, by using Shisei Alumina (AfJ203) as a ceramic insulator for a workpiece insulating type jig cart in an ion blating apparatus, it is possible to process large heavy objects.

Conventionally, -shell A and Q203 are dense and have excellent mechanical properties, but the resistivity becomes 5 x 105 Ω・■ at soo'c high temperatures, which causes insulation deterioration and reduces the withstand voltage. Due to its poor properties, it could not be used in an ion blating device (see Figure 1).

This Aj 203 is heated to 10
A heat treatment is performed for 5 hours under an atmospheric condition of -4Toor or less"'C-1300°C to obtain Shisei AJ203.

This Shisei J203 has no deterioration in mechanical properties, and for example, the resistivity is 5 x 10"Ω at a high temperature of 500°C.
・■, and the high-temperature insulation has improved - see Figure 2. (
As for mechanical properties, compared to general steatite, it had twice the bending strength, three times the compressive strength, and 2.5 times the hardness).

When the insulator of the present invention is used in an ion blating device, it is preferable that the insulator be configured with the following points in mind in terms of structure.

■The insulators used in the ion blating equipment must be protected from adhesion to prevent them from being contaminated by evaporated metals! It will be f4 construction.

In other words, the booklet cover is provided on both the voltage application side and the earth side (carriage side), and the voltage applied to the workpiece due to abnormal discharge between the covers, or between the cover and the voltage application, or between the cover and the earth side (carriage side). To prevent unstable voltage and short circuits, each gap should be at least 3 In.9 ■The insulator between the ion brating device's trolley body and the bearing block should be used to ensure that the bearings are installed horizontally and that the load is evenly distributed. In order to disperse the material, strict parallelism and dimensional accuracy in the height direction are required. Additionally, the corners of the insulator are rounded to increase impact resistance and prevent insulation breakdown.

■A place where the voltage is applied and the area is horizontally parallel (for example,
Between the gear and the bearing, and between the bearing and the bearing), a gap of 1101I or more should be maintained to avoid forming a hollow hot cathode.

(2) Abnormal discharge concentrates in the heel part near the ground where voltage is applied, making the voltage application to the processing object unstable, so all R finishes are used to prevent abnormal discharge.

[Effects of the invention] (1) It has become possible to process objects that are about three times as heavy as the weight that can be processed when steatite is used as an insulator.

■The probability of Shisei Aj203 cracking over time is more than 100 times that of steatite (in terms of cost, it is about three times as expensive as steatite's similar products).

■As a result, the processing volume was approximately tripled, and running costs were reduced to one-third.

■As a result, stable operations are possible, and quality is stable.
An increase in the utilization rate has been measured.

[Brief explanation of the drawing]

FIG. 1 is a diagram showing the actual relationship between temperature and resistance of general AJ703, and FIG. 2 is a diagram showing the relationship between temperature and resistance of Poetry A1°03. Hijuki (Good C77L) Specific resistance (Ω・crrL)

Claims (1)

[Claims] Ceramic insulators, especially alumina (Al_2O_
3) was heat-treated for 5 hours under an atmospheric condition of 1300°C under 10^-^4Toor to form a special type Al_2O.
A ceramic insulator characterized by being _3.