JPH0120732B2 - - Google Patents
Info
- Publication number
- JPH0120732B2 JPH0120732B2 JP2475680A JP2475680A JPH0120732B2 JP H0120732 B2 JPH0120732 B2 JP H0120732B2 JP 2475680 A JP2475680 A JP 2475680A JP 2475680 A JP2475680 A JP 2475680A JP H0120732 B2 JPH0120732 B2 JP H0120732B2
- Authority
- JP
- Japan
- Prior art keywords
- photosensitive
- polymer
- acid
- soluble
- group
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229920000642 polymer Polymers 0.000 claims description 29
- -1 ester compound Chemical class 0.000 claims description 13
- 239000007864 aqueous solution Substances 0.000 claims description 12
- 230000032050 esterification Effects 0.000 claims description 12
- 238000005886 esterification reaction Methods 0.000 claims description 12
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims description 12
- 150000001875 compounds Chemical class 0.000 claims description 10
- 239000003960 organic solvent Substances 0.000 claims description 10
- 239000002253 acid Substances 0.000 claims description 9
- 239000000203 mixture Substances 0.000 claims description 9
- 239000011342 resin composition Substances 0.000 claims description 9
- 239000012670 alkaline solution Substances 0.000 claims description 7
- WBYWAXJHAXSJNI-UHFFFAOYSA-N methyl p-hydroxycinnamate Natural products OC(=O)C=CC1=CC=CC=C1 WBYWAXJHAXSJNI-UHFFFAOYSA-N 0.000 claims description 7
- WBYWAXJHAXSJNI-VOTSOKGWSA-M .beta-Phenylacrylic acid Natural products [O-]C(=O)\C=C\C1=CC=CC=C1 WBYWAXJHAXSJNI-VOTSOKGWSA-M 0.000 claims description 5
- 229930016911 cinnamic acid Natural products 0.000 claims description 5
- 235000013985 cinnamic acid Nutrition 0.000 claims description 5
- WBYWAXJHAXSJNI-SREVYHEPSA-N Cinnamic acid Chemical compound OC(=O)\C=C/C1=CC=CC=C1 WBYWAXJHAXSJNI-SREVYHEPSA-N 0.000 claims description 4
- FEIQOMCWGDNMHM-KBXRYBNXSA-N (2e,4e)-5-phenylpenta-2,4-dienoic acid Chemical compound OC(=O)\C=C\C=C\C1=CC=CC=C1 FEIQOMCWGDNMHM-KBXRYBNXSA-N 0.000 claims description 3
- FEIQOMCWGDNMHM-UHFFFAOYSA-N cinnamylideneacetic acid Natural products OC(=O)C=CC=CC1=CC=CC=C1 FEIQOMCWGDNMHM-UHFFFAOYSA-N 0.000 claims description 3
- 125000004093 cyano group Chemical group *C#N 0.000 claims description 3
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 3
- 125000001997 phenyl group Chemical group [H]C1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 claims description 3
- 125000001424 substituent group Chemical group 0.000 claims description 3
- ZCJLOOJRNPHKAV-ONEGZZNKSA-N (e)-3-(furan-2-yl)prop-2-enoic acid Chemical compound OC(=O)\C=C\C1=CC=CO1 ZCJLOOJRNPHKAV-ONEGZZNKSA-N 0.000 claims description 2
- 239000000243 solution Substances 0.000 description 14
- ZWEHNKRNPOVVGH-UHFFFAOYSA-N 2-Butanone Chemical compound CCC(C)=O ZWEHNKRNPOVVGH-UHFFFAOYSA-N 0.000 description 12
- 238000000034 method Methods 0.000 description 9
- 229920005989 resin Polymers 0.000 description 9
- 239000011347 resin Substances 0.000 description 9
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 7
- 238000006243 chemical reaction Methods 0.000 description 7
- 238000000576 coating method Methods 0.000 description 7
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 6
- 150000002148 esters Chemical class 0.000 description 6
- 239000000463 material Substances 0.000 description 6
- 206010034972 Photosensitivity reaction Diseases 0.000 description 4
- 239000003513 alkali Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- 230000036211 photosensitivity Effects 0.000 description 4
- 239000003504 photosensitizing agent Substances 0.000 description 4
- RYHBNJHYFVUHQT-UHFFFAOYSA-N 1,4-Dioxane Chemical compound C1COCCO1 RYHBNJHYFVUHQT-UHFFFAOYSA-N 0.000 description 3
- NGNBDVOYPDDBFK-UHFFFAOYSA-N 2-[2,4-di(pentan-2-yl)phenoxy]acetyl chloride Chemical compound CCCC(C)C1=CC=C(OCC(Cl)=O)C(C(C)CCC)=C1 NGNBDVOYPDDBFK-UHFFFAOYSA-N 0.000 description 3
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- WSFSSNUMVMOOMR-UHFFFAOYSA-N Formaldehyde Chemical compound O=C WSFSSNUMVMOOMR-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical compound [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 3
- 239000008346 aqueous phase Substances 0.000 description 3
- 229920001577 copolymer Polymers 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 229920003986 novolac Polymers 0.000 description 3
- 229920001568 phenolic resin Polymers 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- 239000002904 solvent Substances 0.000 description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
- 229910052725 zinc Inorganic materials 0.000 description 3
- 239000011701 zinc Substances 0.000 description 3
- KXGFMDJXCMQABM-UHFFFAOYSA-N 2-methoxy-6-methylphenol Chemical compound [CH]OC1=CC=CC([CH])=C1O KXGFMDJXCMQABM-UHFFFAOYSA-N 0.000 description 2
- DKPFZGUDAPQIHT-UHFFFAOYSA-N Butyl acetate Natural products CCCCOC(C)=O DKPFZGUDAPQIHT-UHFFFAOYSA-N 0.000 description 2
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 239000001913 cellulose Substances 0.000 description 2
- 229920002678 cellulose Polymers 0.000 description 2
- 229920002301 cellulose acetate Polymers 0.000 description 2
- 239000000975 dye Substances 0.000 description 2
- FUZZWVXGSFPDMH-UHFFFAOYSA-N hexanoic acid Chemical compound CCCCCC(O)=O FUZZWVXGSFPDMH-UHFFFAOYSA-N 0.000 description 2
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 239000011259 mixed solution Substances 0.000 description 2
- 239000010680 novolac-type phenolic resin Substances 0.000 description 2
- 239000005011 phenolic resin Substances 0.000 description 2
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 description 2
- 238000000016 photochemical curing Methods 0.000 description 2
- 239000000047 product Substances 0.000 description 2
- 239000007787 solid Substances 0.000 description 2
- 238000003756 stirring Methods 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- LNAZSHAWQACDHT-XIYTZBAFSA-N (2r,3r,4s,5r,6s)-4,5-dimethoxy-2-(methoxymethyl)-3-[(2s,3r,4s,5r,6r)-3,4,5-trimethoxy-6-(methoxymethyl)oxan-2-yl]oxy-6-[(2r,3r,4s,5r,6r)-4,5,6-trimethoxy-2-(methoxymethyl)oxan-3-yl]oxyoxane Chemical compound CO[C@@H]1[C@@H](OC)[C@H](OC)[C@@H](COC)O[C@H]1O[C@H]1[C@H](OC)[C@@H](OC)[C@H](O[C@H]2[C@@H]([C@@H](OC)[C@H](OC)O[C@@H]2COC)OC)O[C@@H]1COC LNAZSHAWQACDHT-XIYTZBAFSA-N 0.000 description 1
- WOGITNXCNOTRLK-VOTSOKGWSA-N (e)-3-phenylprop-2-enoyl chloride Chemical compound ClC(=O)\C=C\C1=CC=CC=C1 WOGITNXCNOTRLK-VOTSOKGWSA-N 0.000 description 1
- SMZOUWXMTYCWNB-UHFFFAOYSA-N 2-(2-methoxy-5-methylphenyl)ethanamine Chemical compound COC1=CC=C(C)C=C1CCN SMZOUWXMTYCWNB-UHFFFAOYSA-N 0.000 description 1
- SVAQSFQTRCAABT-UHFFFAOYSA-N 2-(furan-2-yl)prop-2-enoyl chloride Chemical compound ClC(=O)C(=C)C1=CC=CO1 SVAQSFQTRCAABT-UHFFFAOYSA-N 0.000 description 1
- NIXOWILDQLNWCW-UHFFFAOYSA-N 2-Propenoic acid Natural products OC(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 1
- QTWJRLJHJPIABL-UHFFFAOYSA-N 2-methylphenol;3-methylphenol;4-methylphenol Chemical compound CC1=CC=C(O)C=C1.CC1=CC=CC(O)=C1.CC1=CC=CC=C1O QTWJRLJHJPIABL-UHFFFAOYSA-N 0.000 description 1
- PYSRRFNXTXNWCD-UHFFFAOYSA-N 3-(2-phenylethenyl)furan-2,5-dione Chemical compound O=C1OC(=O)C(C=CC=2C=CC=CC=2)=C1 PYSRRFNXTXNWCD-UHFFFAOYSA-N 0.000 description 1
- FUGYGGDSWSUORM-UHFFFAOYSA-N 4-hydroxystyrene Chemical compound OC1=CC=C(C=C)C=C1 FUGYGGDSWSUORM-UHFFFAOYSA-N 0.000 description 1
- CUARLQDWYSRQDF-UHFFFAOYSA-N 5-Nitroacenaphthene Chemical compound C1CC2=CC=CC3=C2C1=CC=C3[N+](=O)[O-] CUARLQDWYSRQDF-UHFFFAOYSA-N 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 239000004925 Acrylic resin Substances 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-N Methacrylic acid Chemical compound CC(=C)C(O)=O CERQOIWHTDAKMF-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- 229920002845 Poly(methacrylic acid) Polymers 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- OFOBLEOULBTSOW-UHFFFAOYSA-N Propanedioic acid Natural products OC(=O)CC(O)=O OFOBLEOULBTSOW-UHFFFAOYSA-N 0.000 description 1
- 239000004115 Sodium Silicate Substances 0.000 description 1
- 229920002125 Sokalan® Polymers 0.000 description 1
- 229920000147 Styrene maleic anhydride Polymers 0.000 description 1
- 230000002378 acidificating effect Effects 0.000 description 1
- 150000007513 acids Chemical class 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000001476 alcoholic effect Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 125000000129 anionic group Chemical group 0.000 description 1
- 239000003945 anionic surfactant Substances 0.000 description 1
- 150000008425 anthrones Chemical class 0.000 description 1
- 239000006227 byproduct Substances 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000006229 carbon black Substances 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 229940114081 cinnamate Drugs 0.000 description 1
- 238000004040 coloring Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000006482 condensation reaction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 229930003836 cresol Natural products 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000006471 dimerization reaction Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000009472 formulation Methods 0.000 description 1
- 238000005470 impregnation Methods 0.000 description 1
- MOUPNEIJQCETIW-UHFFFAOYSA-N lead chromate Chemical compound [Pb+2].[O-][Cr]([O-])(=O)=O MOUPNEIJQCETIW-UHFFFAOYSA-N 0.000 description 1
- 239000011976 maleic acid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 229920000609 methyl cellulose Polymers 0.000 description 1
- 239000001923 methylcellulose Substances 0.000 description 1
- 235000010981 methylcellulose Nutrition 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 239000003607 modifier Substances 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 150000002828 nitro derivatives Chemical class 0.000 description 1
- 239000002736 nonionic surfactant Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 239000012071 phase Substances 0.000 description 1
- 150000002989 phenols Chemical class 0.000 description 1
- 239000001007 phthalocyanine dye Substances 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 239000004584 polyacrylic acid Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920006267 polyester film Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 125000001436 propyl group Chemical group [H]C([*])([H])C([H])([H])C([H])([H])[H] 0.000 description 1
- 239000012429 reaction media Substances 0.000 description 1
- 230000001235 sensitizing effect Effects 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 229910000029 sodium carbonate Inorganic materials 0.000 description 1
- 235000019795 sodium metasilicate Nutrition 0.000 description 1
- NTHWMYGWWRZVTN-UHFFFAOYSA-N sodium silicate Chemical compound [Na+].[Na+].[O-][Si]([O-])=O NTHWMYGWWRZVTN-UHFFFAOYSA-N 0.000 description 1
- 229910052911 sodium silicate Inorganic materials 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 239000004094 surface-active agent Substances 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- VZCYOOQTPOCHFL-UHFFFAOYSA-N trans-butenedioic acid Natural products OC(=O)C=CC(O)=O VZCYOOQTPOCHFL-UHFFFAOYSA-N 0.000 description 1
- 229940001496 tribasic sodium phosphate Drugs 0.000 description 1
- RYFMWSXOAZQYPI-UHFFFAOYSA-K trisodium phosphate Chemical compound [Na+].[Na+].[Na+].[O-]P([O-])([O-])=O RYFMWSXOAZQYPI-UHFFFAOYSA-K 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 229920002554 vinyl polymer Polymers 0.000 description 1
- 229910052724 xenon Inorganic materials 0.000 description 1
- FHNFHKCVQCLJFQ-UHFFFAOYSA-N xenon atom Chemical compound [Xe] FHNFHKCVQCLJFQ-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0388—Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Phenolic Resins Or Amino Resins (AREA)
- Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
Description
【発明の詳細な説明】
本発明はアルカリ可溶性のヒドロキシル基を有
する高分子化合物と感光性酸クロライドから合成
される高エステル化度高分子と低エステル化度高
分子の混合物を主成分とする光硬化型感光性樹脂
組成物に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention provides a light-emitting device containing a mixture of a high esterification degree polymer and a low esterification degree polymer synthesized from an alkali-soluble hydroxyl group-containing polymer compound and a photosensitive acid chloride. This invention relates to a curable photosensitive resin composition.
従来、ポリビニルアルコールまたはこれに類す
る水酸基を多数もつ高分子化合物とケイ皮酸、シ
ンナミリデン酢酸、及びこれらのα位にシアノ
基、メチル基、フエニル基等の置換基をもつもの
及びフリルアクリル酸等の感光性酸とのエステル
化合物を合成し、これら感光性基が光により活性
化され二量化することを利用し、光硬化型感光性
樹脂として利用することは米国特許第2670285号
を始めとして多数の文献に開示され広く公知の事
実となつている。各種印刷原板の作製あるいはプ
リント配線基板、などの作製において、あらかじ
め所定の支持体上に感光性樹脂、増感剤、塗膜改
質剤等を溶解した感光剤溶液を塗布し、溶剤を蒸
発除去し、感光層を形成させた後に原図を通して
紫外線などの活性光線を選択的に照射し、感光層
を硬化せしめ、硬化部分の非溶解性を利用し、有
機溶剤により未露光層のみを溶解除去して画像を
形成させ(現像)る事が行なわれている。又要す
れば光硬化感光層、すなわちいわゆるレジスト層
で覆われた部分以外の支持体のエツチングを行な
うことが一般的に行なわれている。上記現像の工
程において未露光部の溶解除去に有機溶剤を用い
ず、アルカリ水溶液を用いる、いわゆるアルカリ
現像可能の感光性樹脂は、作業性、安全性等から
最近当業界で強く要望されている。而して光二量
化型感光性樹脂にアルカリ可溶の性質を付与する
ための提案が種々なされているが、実用性能上満
足できるものは未だ得られていない。 Conventionally, polyvinyl alcohol or a similar polymer compound with many hydroxyl groups, cinnamic acid, cinnamylidene acetic acid, those having substituents such as cyano group, methyl group, phenyl group at the alpha position, and furyl acrylic acid, etc. Numerous studies, including U.S. Pat. No. 2,670,285, have proposed synthesizing ester compounds with photosensitive acids and utilizing the fact that these photosensitive groups are activated and dimerized by light to be used as photocurable photosensitive resins. This has been disclosed in literature and is a widely known fact. In the production of various printing original plates or printed wiring boards, etc., a photosensitizer solution containing a photosensitive resin, sensitizer, coating film modifier, etc. dissolved is applied onto a predetermined support in advance, and the solvent is removed by evaporation. After forming the photosensitive layer, active light such as ultraviolet rays is selectively irradiated through the original image to harden the photosensitive layer, and only the unexposed layer is dissolved and removed using an organic solvent, taking advantage of the insolubility of the cured portion. The process of forming (developing) an image is performed. Furthermore, if necessary, it is common practice to etch the support other than the portion covered with the photocurable photosensitive layer, that is, the so-called resist layer. Photosensitive resins that can be developed with alkali, in which an aqueous alkaline solution is used instead of an organic solvent to dissolve and remove unexposed areas in the development process, have recently been strongly desired in the industry from the viewpoint of workability, safety, etc. Various proposals have been made to impart alkali-soluble properties to photodimerizable photosensitive resins, but none have yet been found that are satisfactory in terms of practical performance.
光二量化型感光性樹脂をアルカリ可溶とするた
めの一つの提案としては、特公昭45−8499号公報
に開示されているノボラツク型フエノール樹脂の
部分ケイ皮酸エステルがある。ノボラツク型フエ
ノール樹脂はそれ自体アルカリ可溶性であるの
で、その溶解性を損なわない程度にケイ皮酸基を
導入し、感光性とアルカリ溶解性の両者の性質を
兼ね備えさせようとするものである。しかしなが
ら実用的な感光性能を有するに充分なほどのケイ
皮酸基を導入すると当該エステル化物がアルカリ
不溶となるし、又アルカリ可溶性を保持する程度
の低エステル化度化合物では実用上満足すべき感
光性能を有しない。 One proposal for making a photodimerizable photosensitive resin alkali-soluble is a partial cinnamic acid ester of a novolac type phenol resin disclosed in Japanese Patent Publication No. 8499/1983. Since the novolac type phenolic resin itself is alkali-soluble, the aim is to introduce cinnamic acid groups to an extent that does not impair its solubility, thereby making it have both the properties of photosensitivity and alkali-solubility. However, if enough cinnamic acid groups are introduced to have practical photosensitivity, the esterified product will become insoluble in alkali, and a compound with a low degree of esterification that maintains alkali solubility will not have sufficient photosensitivity for practical purposes. It has no performance.
本発明者等はこの先行技術の欠点を改善すべく
鋭意検討し、本発明に到達した。すなわち、ヒド
ロキシル基を有するアルカリ可溶性高分子と感光
性基を有する酸とのエステル化合物が、高エステ
ル化度でアルカリ水溶液に不溶、有機溶剤可溶の
ものと、低エステル化度でアルカリ水溶液及び有
機溶剤可溶のものとの混合物である時、驚くべき
ことにこの混合物を主成分とする感光性樹脂から
成る膜はアルカリ水溶液で処理すると、アルカリ
水溶液可溶の部分が溶解すると共にアルカリ水溶
液不溶の部分も細かい粉末となつて分散するた
め、膜が崩壊することを見出した。したがつて光
硬化反応後の未硬化部分のアルカリ水溶液による
除去、すなわちいわゆるアルカリ現像が可能とな
る。かくして、高エステル化度高分子の存在によ
り感光性基濃度が増大し、感光性能が改善される
と同時に、アルカリ不溶の部分を含有するにもか
かわらず実質的なアルカリ現像性能を保持させる
ことができる。 The present inventors have made extensive studies to improve the drawbacks of this prior art, and have arrived at the present invention. That is, ester compounds of an alkali-soluble polymer having a hydroxyl group and an acid having a photosensitive group are classified into two types: one has a high degree of esterification and is insoluble in aqueous alkaline solutions and soluble in organic solvents, and the other has a degree of esterification and is insoluble in aqueous alkaline solutions and organic solvents. Surprisingly, when a film made of a photosensitive resin containing this mixture as a main component is treated with an alkaline aqueous solution, the alkaline aqueous solution soluble part dissolves and the alkali aqueous solution insoluble part dissolves. It was discovered that the membrane disintegrates because the parts become fine powder and disperse. Therefore, it becomes possible to remove the uncured portion after the photocuring reaction with an alkaline aqueous solution, that is, so-called alkaline development. Thus, the presence of a highly esterified polymer increases the concentration of photosensitive groups and improves photosensitive performance, while at the same time maintaining substantial alkaline development performance despite containing an alkali-insoluble portion. can.
本発明の感光性樹脂組成物には高エステル化度
の感光性酸エステル高分子と低エステル化度の感
光性酸エステル高分子の存在が必須であるが前者
は90モル%以上、できるだけ高エステル化度であ
ることが感光性能に対し有利である。後者は50モ
ル%以上90モル%以下のヒドロキシル基を残存さ
せていて、全エステル化合物中60wt%以上の割
合を占めていることが好ましい。但し98wt%以
下であることが好ましく、90wt%以下であるこ
とが更に好ましい。90モル%以上のヒドロキシル
基を残存させ、実質的に未置換高分子と等しい溶
解性能を有するものは、これを高エステル化度高
分子と混合し、製膜しても良好なアルカリ現像性
能を与えない。恐らくは、高エステル化度高分子
との相溶性に劣るため、ミクロに高エステル化度
高分子と低エステル化度高分子とが分散した膜が
得られないため、アルカリ不溶部分の細かい分散
崩壊が起らないためと考えられる。 The photosensitive resin composition of the present invention requires the presence of a photosensitive acid ester polymer with a high degree of esterification and a photosensitive acid ester polymer with a low degree of esterification. It is advantageous for photosensitivity to have a high degree of oxidation. The latter preferably has 50 mol% or more and 90 mol% or less of hydroxyl groups remaining, and accounts for 60 wt% or more of the total ester compound. However, it is preferably 98 wt% or less, more preferably 90 wt% or less. If 90 mol% or more of hydroxyl groups remain and the solubility performance is substantially the same as that of an unsubstituted polymer, it can be mixed with a highly esterified polymer to form a film with good alkaline development performance. I won't give it. Probably, due to poor compatibility with the highly esterified polymer, it is not possible to obtain a film in which the highly esterified polymer and the low esterified polymer are microdispersed, resulting in fine dispersion collapse of the alkali-insoluble portion. This is thought to be because it does not occur.
本発明に使用するアルカリ可溶性のヒドロキシ
ル基を有する高分子化合物には、フエノール、ク
レゾール等のフエノール類とホルムアルデヒドと
を酸性触媒の存在下で縮合反応させて得られるノ
ボラツク型フエノール樹脂、ポリ−p−ビニルフ
エノール等がある。又感光性酸クロライドとして
は、ケイ皮酸、シンナミリデン酢酸及びそれらの
α位にシアノ基、メチル基、フエニル基等の置換
基を有するもの、及びフリルアクリル酸のクロラ
イドがある。 The polymer compound having an alkali-soluble hydroxyl group used in the present invention includes a novolak type phenolic resin obtained by a condensation reaction of phenols such as phenol and cresol with formaldehyde in the presence of an acidic catalyst, and poly-p- Vinylphenol etc. Photosensitive acid chlorides include cinnamic acid, cinnamylidene acetic acid, those having a substituent such as a cyano group, methyl group, or phenyl group at the alpha position thereof, and furyl acrylic acid chloride.
本発明のエステル混合物の製造に当つては、ア
ルカリ可溶性のヒドロキシル基を有する高分子化
合物と感光性酸クロライドとを反応させエステル
化するに際して、低エステル化度高分子と、高エ
ステル化度高分子をそれぞれ別個に製造したもの
を混合しても良いが、本発明者等は、同日出願し
た「アルカリ現像可能な感光性樹脂の製造法」の
発明(特願昭55−号)に記載した製造方法により
本発明のエステル混合物が有利に得られることを
見出した。 In producing the ester mixture of the present invention, when a polymer compound having an alkali-soluble hydroxyl group and a photosensitive acid chloride are reacted and esterified, a polymer with a low degree of esterification and a polymer with a high degree of esterification are used. Although it is possible to mix products manufactured separately, the inventors of the present invention applied the manufacturing method described in the invention (Patent Application No. 1981) for ``Method for manufacturing alkali-developable photosensitive resin'' filed on the same day. It has been found that the process advantageously yields ester mixtures according to the invention.
即ち、アルカリ水溶液にアルカリ可溶性のヒド
ロキシル基を有する高分子化合物(A)を溶解させ、
この溶液と感光性酸クロライド(B)を非水溶性有機
溶剤あるいは水溶性有機溶剤と非水溶性有機溶剤
との混合液に溶解した液とを混合して感光性エス
テル化高分子化合物を合成するに際し、(A)のヒド
ロキシル基1モルに対する(B)のモル比を0.5以下
(0.1以上好ましくは0.2以上)で反応させ、実質
的にアルカリ水溶液に分解溶解する性質を有する
エステル混合物を得る方法であつて、後に実施例
に示すように高エステル化度高分子と、低エステ
ル化度高分子とを、同時に混合状態で生成せしめ
容易に本発明の感光性樹脂組成物を製造すること
が出来る。 That is, a polymer compound (A) having an alkali-soluble hydroxyl group is dissolved in an alkaline aqueous solution,
A photosensitive esterified polymer compound is synthesized by mixing this solution with a solution in which photosensitive acid chloride (B) is dissolved in a water-insoluble organic solvent or a mixed solution of a water-soluble organic solvent and a water-insoluble organic solvent. In this method, the molar ratio of (B) to 1 mole of hydroxyl groups in (A) is 0.5 or less (0.1 or more, preferably 0.2 or more) to obtain an ester mixture that has the property of being substantially decomposed and dissolved in an aqueous alkaline solution. The photosensitive resin composition of the present invention can then be easily produced by simultaneously producing a highly esterified polymer and a low esterified polymer in a mixed state, as shown in the Examples below.
従つて、得られた感光性重合体は反応媒体とし
て用いる溶媒に溶解した状態で回収され、そのま
ま感光性樹脂組成物溶液の配合に供し得るが、要
すれば、これを濃縮し、あるいは乾固等の適当な
手段により固体として回収した後に、目的に応じ
てこの樹脂を溶解する溶剤、たとえばアセトン、
メチルエチルケトン、セロソルブ類、ジオキサ
ン、酢酸ブチル等によつて溶液とすることができ
る。 Therefore, the obtained photosensitive polymer can be recovered in a state dissolved in the solvent used as a reaction medium and used as it is to formulate a photosensitive resin composition solution, but if necessary, it can be concentrated or dried to solidify. After recovering the resin as a solid by appropriate means such as, depending on the purpose, a solvent such as acetone,
It can be made into a solution using methyl ethyl ketone, cellosolves, dioxane, butyl acetate, etc.
本発明の感光性樹脂組成物を目的に応じた基材
に塗布するには、たとえばアセトン、メチルエチ
ルケトン、セロソルブ類、ジオキサン、酢酸ブチ
ル等に溶解し、塗工性、塗工膜の耐酸、耐腐蝕
性、強度などの改善の目的で高分子材料を適宜配
合し、又染料、顔料、増感剤、その他の添加剤を
加えることができる。高分子材料としては通常ア
ルカリ水溶液可溶のもの、すなわち、エチルセル
ロース、メチルセルロース、プロピルセルロー
ス、セルロースアセテートのハーフエステル等の
セルロース誘導体、ポリアクリル酸、ボリメタク
リル酸、アルコール性ヒドロキシ基を有するアク
リル酸又はメタクリル酸の誘導体等の共重合体等
のアクリル樹脂、スチレン−無水マレイン酸共重
合体、イソブチレン−無水マレイン酸共重合体等
のマレイン酸共重合体、アルカリ可溶性ノボラツ
ク型フエノール樹脂、ポリ−p−ビニルフエノー
ル等が挙げられるが、アルカリ不溶性の高分子で
も現像処理に支障をきたさない程度の量であれば
添加することができる。顔料としては例えばクロ
ムイエロー、カーボンブラツク等が挙げられる。
着色はそれによつて画像を見やすくし、又できた
画像に遮光性をもたせて原図としての使用を可能
ならしめるためになされる。このような観点で前
記の例以外に他の顔料又は染料が利用される。増
感剤としては種々のニトロ化合物、アントロン
類、アルキルアミノベンゾフエノン類、あるいは
これら化合物とビスアジド系化合物との複合増感
剤等が挙げられ、ポリケイ皮酸ビニル、ポリフリ
ルアクリル酸ビニル、ボリシンナミリデン酢酸ビ
ニルに増感効果のあるものはすべて使用できる。 In order to apply the photosensitive resin composition of the present invention to a substrate depending on the purpose, it is dissolved in, for example, acetone, methyl ethyl ketone, cellosolves, dioxane, butyl acetate, etc. to improve coating properties, acid resistance, and corrosion resistance of the coated film. For the purpose of improving properties such as properties and strength, polymeric materials may be appropriately blended, and dyes, pigments, sensitizers, and other additives may be added. The polymeric materials are usually those soluble in aqueous alkaline solutions, such as cellulose derivatives such as ethyl cellulose, methyl cellulose, propyl cellulose, and half esters of cellulose acetate, polyacrylic acid, polymethacrylic acid, and acrylic acid or methacrylic acid having alcoholic hydroxyl groups. Acrylic resins such as copolymers of acid derivatives, maleic acid copolymers such as styrene-maleic anhydride copolymers, isobutylene-maleic anhydride copolymers, alkali-soluble novolac type phenolic resins, poly-p-vinyl Examples include phenol, but even alkali-insoluble polymers can be added in an amount that does not interfere with the development process. Examples of pigments include chrome yellow and carbon black.
Coloring is done to make the image easier to see and also to give the resulting image a light-shielding property so that it can be used as an original drawing. From this point of view, other pigments or dyes may be used in addition to the examples mentioned above. Examples of sensitizers include various nitro compounds, anthrones, alkylaminobenzophenones, and composite sensitizers of these compounds and bisazide compounds. Any cinnamylidene vinyl acetate that has a sensitizing effect can be used.
本発明の感光性樹脂組成物は、適当な支持体、
例えばアルミニウム、亜鉛、銅などの金属板、ポ
リエステル、ポリプロピレン、セルロースアセテ
ートなどのプラスチツクフイルム、紙又は前記フ
イルム又は金属板とラミネートした紙などの表面
に均一に塗布される。この塗布方法としては回転
法、スプレー法、含浸法、ホエラー又はロールに
よるコーテイング法などがある。塗布後、塗布膜
を乾燥して有機溶剤を除去する。このようにして
製造された感光材料の膜面に所望のネガ画像を重
ね合わせ、活性光線を照射する。照射のために
は、例えばカーボンアーク灯、水銀ランプ、キセ
ノンランプ、ケミカルランプ、タングステンラン
プなどを用いることができる。これによつて、感
光材料の露光部分は感光基の二量化反応により、
無限網目を形成して硬化するので未露光部をアル
カリ水溶液で溶解させ現像する。 The photosensitive resin composition of the present invention can be prepared using a suitable support,
For example, it is uniformly applied to the surface of a metal plate such as aluminum, zinc, or copper, a plastic film such as polyester, polypropylene, or cellulose acetate, paper, or paper laminated with the above film or metal plate. Examples of this application method include a rotation method, a spray method, an impregnation method, and a coating method using a wheller or roll. After coating, the coating film is dried to remove the organic solvent. A desired negative image is superimposed on the film surface of the photosensitive material thus produced, and actinic light is irradiated. For the irradiation, for example, carbon arc lamps, mercury lamps, xenon lamps, chemical lamps, tungsten lamps, etc. can be used. As a result, the exposed portion of the photosensitive material undergoes a dimerization reaction of the photosensitive group.
Since it hardens by forming an infinite network, the unexposed areas are dissolved in an alkaline aqueous solution and developed.
現像液としてはメタけい酸ナトリウム、水酸化
ナトリウム、水酸化カリウム、第三リン酸ナトリ
ウムなどの水溶液又はこれらの混合水溶液を用い
ることができる。現像液の浸透性を向上させるた
め、所望に応じ、アルカリ水溶液に可溶の有機溶
剤、たとえば、ベンジルアルコール、メタノー
ル、エタノール、テトラヒドロフラン、アセト
ン、ジオキサン等、アニオン又はノニオン系界面
活性剤等を添加することも可能である。 As the developer, an aqueous solution of sodium metasilicate, sodium hydroxide, potassium hydroxide, tribasic sodium phosphate, or a mixed aqueous solution of these can be used. In order to improve the permeability of the developer, an organic solvent soluble in the alkaline aqueous solution such as benzyl alcohol, methanol, ethanol, tetrahydrofuran, acetone, dioxane, anionic or nonionic surfactant, etc. is added as desired. It is also possible.
本発明の感光性樹脂組成物は化学的に安定性が
高く、光硬化以外の反応、すなわち暗反応が起り
にくく、溶液あるいは塗膜として長期間にわたつ
て品質の低下なしに貯蔵することができる。従つ
て感光材料として広い用途、たとえば、ワイポン
版、PS版、凸版、凹版などの印刷版材として用
いられ、あるいは金属エツチング用マスク、フオ
トマスク、及び複写用第二原図などにも用いられ
る。 The photosensitive resin composition of the present invention has high chemical stability, is resistant to reactions other than photocuring, that is, dark reactions, and can be stored as a solution or coating for a long period of time without deterioration in quality. . Therefore, it has a wide range of uses as a photosensitive material, for example, as a printing plate material for Wipon plates, PS plates, letterpress plates, intaglio plates, etc., and also for metal etching masks, photomasks, and second originals for copying.
次に本発明を実施例によつて具体的に説明す
る。 Next, the present invention will be specifically explained using examples.
実施例 1
水240gにNaOH20gを溶解した水溶液にノボ
ラツク型フエノールホルムアルデヒド樹脂20gを
溶解し、更にメチルエチルケトン101gを加える。
シール付撹拌棒、コンデンサ−及び温度計を有す
る三つ口フラスコ中でこの混合液をはげしく撹拌
しつつ−10℃に冷却する。これをA液とする。一
方メチルエチルケトン117g、トルエン26gの混
合液にケイ皮酸クロライド14g(樹脂のヒドロキ
シル基1モルに対し約0.45モル)を溶解し、−10
℃に冷却して、これをB液とする。A液にB液を
−8℃〜−12℃に維持しつつ滴下し、90分間反応
を続けると反応終了時点では、水相中には低エス
テル化度高分子が油相には高エステル化度高分子
が生成している。塩酸を加えて反応液の水相のPH
を1以下にする。反応液を分液ロートに移し水相
を分離した後、油層を250gの2%炭酸ソーダ水
溶液とはげしく混合して、副生ケイ皮酸を抽出す
る。固形分12.5重量%のフエノールホルムアルデ
ヒド樹脂ケイ皮酸エステル溶液230gを得た。Example 1 20 g of novolak type phenol formaldehyde resin is dissolved in an aqueous solution of 20 g of NaOH dissolved in 240 g of water, and 101 g of methyl ethyl ketone is further added.
The mixture is cooled to -10°C with vigorous stirring in a three-necked flask equipped with a sealed stir bar, condenser, and thermometer. This is called liquid A. On the other hand, 14 g of cinnamic acid chloride (approximately 0.45 mol per 1 mol of hydroxyl group of the resin) was dissolved in a mixed solution of 117 g of methyl ethyl ketone and 26 g of toluene, and -10
Cool to ℃ and use this as liquid B. When liquid B is added dropwise to liquid A while maintaining the temperature at -8°C to -12°C and the reaction is continued for 90 minutes, at the end of the reaction, the polymer with a low degree of esterification is in the aqueous phase and the polymer is highly esterified in the oil phase. degree polymer is generated. Add hydrochloric acid to adjust the pH of the aqueous phase of the reaction solution.
Make it less than 1. After the reaction solution is transferred to a separatory funnel and the aqueous phase is separated, the oil layer is vigorously mixed with 250 g of 2% aqueous sodium carbonate solution to extract the by-product cinnamic acid. 230 g of a phenol formaldehyde resin cinnamate ester solution having a solid content of 12.5% by weight was obtained.
上記溶液10重量部に対し、5−ニトロアセナフ
テン0.1重量部及び2,6−ジ(4′−アジドベン
サル)−4−メチルシクロヘキサノン0.05重量部
を増感剤として加え、更に油溶性フタロシアニン
染料Spilon Blue GNH0.10重量部を加えて、50
℃に加温して溶解し、感光性樹脂組成物を調整し
た。この感光剤溶液をバーコーターでポリエステ
ルフイルム上に塗布し空気中80℃5分間の乾燥の
後、ネガを重ねて水銀灯で8mw/cm2、1分間の
露光を行なつた後、Na2SiO3・9H2O18重量部、
ベンジルアルコール10重量部、界面活性剤ミグノ
ール802(30%水溶液)3重量部及び水969重量部
よりなる現像液に約30秒浸漬した後水洗し、乾燥
した。解像力にすぐれ塗膜性状の良好な画像が形
成された。 To 10 parts by weight of the above solution, 0.1 part by weight of 5-nitroacenaphthene and 0.05 part by weight of 2,6-di(4'-azidobenthal)-4-methylcyclohexanone were added as sensitizers, and the oil-soluble phthalocyanine dye Spilon Blue Add 0.10 parts by weight of GNH, 50
The mixture was heated to 0.degree. C. to dissolve, thereby preparing a photosensitive resin composition. This photosensitizer solution was applied onto a polyester film using a bar coater, and after drying in air at 80°C for 5 minutes, a negative was layered and exposed to light at 8 mw/cm 2 for 1 minute using a mercury lamp, followed by Na 2 SiO 3・9H 2 O18 parts by weight,
It was immersed for about 30 seconds in a developer consisting of 10 parts by weight of benzyl alcohol, 3 parts by weight of surfactant Mignol 802 (30% aqueous solution) and 969 parts by weight of water, then washed with water and dried. An image with excellent resolution and good coating film properties was formed.
実施例 2
実施例1で調整した感光剤溶液と同一処方の感
光剤溶液を粗研磨した亜鉛板に回転塗布機で塗
布、乾燥せしめた。このようにして得られた感光
面にネガフイルムを密着させ螢光灯真空焼付機に
セツトし、2分間露光した。これを実施例−1の
現像液に30秒浸漬し非露光部分を除去すると解像
力のすぐれたポジレジスト像が得られた。亜鉛板
を10%硝酸中で5分間腐蝕を行なつたが耐酸レジ
ストとしての性能を有していた。Example 2 A photosensitizer solution having the same formulation as the photosensitizer solution prepared in Example 1 was applied to a roughly polished zinc plate using a spin coater and dried. A negative film was brought into close contact with the photosensitive surface thus obtained, set in a fluorescent lamp vacuum printer, and exposed for 2 minutes. When this was immersed in the developer of Example 1 for 30 seconds and the non-exposed portions were removed, a positive resist image with excellent resolution was obtained. A zinc plate was corroded in 10% nitric acid for 5 minutes, and it had the performance as an acid-resistant resist.
Claims (1)
子化合物と、ケイ皮酸、シンナミリデン酢酸及び
それらのα位にシアノ基、メチル基、フエニル基
等の置換基を有するもの、及びフリルアクリル酸
からなる群から選ばれる感光性基を有する酸との
エステル化合物を主成分とし、当該エステル化合
物がアルカリ水溶液に不溶で有機溶剤可溶の高エ
ステル化度高分子とアルカリ水溶液可溶の低エス
テル化度高分子の混合物であることを特徴とす
る、アルカリ水溶液にて現像可能な感光性樹脂組
成物。1. From the group consisting of an alkali-soluble polymer compound having a hydroxyl group, cinnamic acid, cinnamylidene acetic acid, those having a substituent such as a cyano group, methyl group, or phenyl group at their alpha position, and furyl acrylic acid. The main component is an ester compound with an acid having a selected photosensitive group, and the ester compound is a polymer with a high degree of esterification that is insoluble in aqueous alkaline solutions and soluble in organic solvents, and a polymer with a low degree of esterification that is soluble in aqueous alkaline solutions. A photosensitive resin composition that is a mixture and is developable with an alkaline aqueous solution.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2475680A JPS56122029A (en) | 1980-02-29 | 1980-02-29 | Photosensitive resin composition developable with aqueous alkali solution |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2475680A JPS56122029A (en) | 1980-02-29 | 1980-02-29 | Photosensitive resin composition developable with aqueous alkali solution |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56122029A JPS56122029A (en) | 1981-09-25 |
| JPH0120732B2 true JPH0120732B2 (en) | 1989-04-18 |
Family
ID=12146984
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2475680A Granted JPS56122029A (en) | 1980-02-29 | 1980-02-29 | Photosensitive resin composition developable with aqueous alkali solution |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56122029A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5821735A (en) * | 1981-07-31 | 1983-02-08 | Daicel Chem Ind Ltd | Alkali developable photosensitive resin composition |
| US5712022A (en) * | 1992-09-14 | 1998-01-27 | Yoshino Kogyosho Co., Ltd. | Printed thermoplastic resin products and method for printing such products |
-
1980
- 1980-02-29 JP JP2475680A patent/JPS56122029A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56122029A (en) | 1981-09-25 |
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