JPH01210267A - Dresser for inner circumferential edge - Google Patents

Abstract

PURPOSE:To perform dressing work efficiently by providing a drive mechanism for rotating a dressing stick contacting with the inner circumferential edge of a blade while inclining and moving the dressing stick in longitudinal direction, thereby specifying the vertical range of the inner circumferential edge. CONSTITUTION:Dressing sticks 3, 13 are contacted through a fixing mechanism with the inner circumferential edge of a blade while inclining. Then a motor 11 is rotated forward to turn a clutch 9 ON, and one stick 3 is moved longitudinally to the right while rotating around the longitudinal axis thereof to contact with specific range at the lower section of the inner circumferential edge so as to dress the specific range. Then the motor 11 is rotated reversely to turn a unilateral switch 15 ON and to move the other stick 13 in rotary and longitudinal directions so as to contact the stick 13 with a specific range at the upper section of the inner circumferential edge thus dressing the specific range.

Description

[Detailed Description of the Invention] Field of Application The present invention relates to a device for dressing the cutting edge of an inner circumferential blade used in a slicing machine that cuts an ingot of silicon or the like into thin wafers in the process of semiconductor manufacturing. Related.

<Prior art> The blade of a slicing machine has diamond powder fixed around its inner circle to form a blade, and the blade is rotated to press the ingot against the blade and cut into wafers. At this time, the blade wears out, becomes clogged, and its sharpness partially deteriorates.

Figure 5 shows an enlarged cross-section of the blade.
A blade 2 is formed with diamond powder around the inner circle of a thin metal plate 1 constituting the blade.

If we consider the upper and lower parts of the blade separately, if the sharpness of the lower part deteriorates compared to the upper part, the blade edge will curve upward during cutting, and the surface of the wafer will deform into a chevron shape (convex shape). Moreover, the opposite phenomenon also occurs. Therefore, it is necessary to selectively dress the top and bottom of the blade to achieve even sharpness. In addition,
Dressing a blade is a modification by pressing a dense whetstone called a dressing stick (hereinafter simply referred to as stick) against the blade and sharpening the stick with the blade.

Conventionally, the stick was held in the hand and pressed against the rotating blade, but this required experience and skill, was a dangerous task, and did not necessarily produce the desired effect.

Furthermore, as in Japanese Patent Laid-Open No. 61-79568, the stick is held at an angle by mechanically holding it and pressing it against the blade, but there is still room for improvement. there were.

<Summary of the present invention> Conventionally, the stick was simply pressed, but the stick is made into a round bar and is rotated while moving in the longitudinal direction to selectively contact the upper and lower parts of the blade to perform dressing. Limit and specify the area and perform dressing by mechanical operation.

<Example> As shown in FIG. 1, the dressing device of the present invention has two sticks 3 and 13 at the tip.

Then, as shown in FIGS. 2 and 3, the stick is set on a fixed part by a mounting mechanism whose position is adjustable so that the stick 13 contacts the upper part of the blade and the stick 3 contacts the lower part. The two sticks have the following mechanism to selectively dress the upper and lower sides.

The stick 3 is held by a shaft 4 having a stick chuck 5 at the left end, the right end of the shaft 4 being threaded 6 and slidably held in a cylinder 7. A key 8 is attached to the inside of the cylinder 7, and a key groove for the key 8 is cut into the shaft 4. Further, the cylinder 7 is appropriately supported by a bearing. Also, screw 6 has a female thread of 17.17' split in two.
Provided so that it can be opened and closed. Its opening/closing mechanism is shown separately. Cylinder 7
A gear 10 is attached to the cylinder 7 via a one-way clutch 9, and rotation of a reversible rotary deceleration motor 11 is transmitted to the cylinder 7 by the gear 12.

The upper stick 13 in FIG. 1 has the function shown in FIG. 2, and is held by a shaft 14 substantially parallel to the lower stick 3, and its holding mechanism is the same as described above. However, the one-way clutch 15 between the cylinder and the gear 19 is installed to function in the opposite direction to the clutch 9 described above. and axis 14
The screw 16 has two female screws 18, 18' as before.
Hold it in place.

Figure 4 shows the opening/closing mechanism of the shaft screws 6 and 16 and the two-part female screw. Here the female thread halves 18, 17' and 18
', 17 are made integrally, supported in the middle by a fulcrum 2°, and pressed in the direction of the screws 6, 16 by four springs 22.

By pinching the two knobs 21 at the top of the figure, the space between the two female screws opens and the screws 6 and 16 become free. When the knob is released, the screw and female screw are engaged by the spring 22.

Note that a transmission gear 23 is involved in opening the gears 10 and 19.

Function> Here, the motor rotates reversibly, and when its rotation direction matches that of the clutch 9, the stick 3 rotates and moves in the longitudinal direction to the right in the figure. Then, the position of the stick in and out is adjusted by hand by opening the knob 21 and setting it in a free state. Note that during this time (open when the stick 3 is functioning), the upper stick 13 does not rotate because the one-way clutch 15 is in the idle direction. Then, when the motor 11 is turned in the opposite direction, the stick 3 comes to rest and the stick 13 rotates and moves forward in the longitudinal direction.

Effectiveness> The present invention does not simply press the stick against the blade, but instead uses a round stick and presses it against the blade while rotating and moving in the longitudinal direction, which not only improves the dressing effect, but also improves the dressing effect. , it is possible to limit the dressing to a specific area above and below the blade. Furthermore, since the dressing direction, contact angle, pressing pressure, etc. can be kept constant, the effect can be controlled quantitatively.

In addition, with the two sticks arranged in parallel according to the present invention, it is possible to work efficiently by continuously moving the upper and lower positions of the blades, and the work can be completed in a reasonably short time, extending the operating time. can do.

[Brief explanation of the drawing]

FIG. 1 is a configuration diagram showing an embodiment of the present invention, and FIG. Figure 3 is an explanatory diagram showing the relationship between the stick and the blade, Figure 6 = 4 is a sectional view taken along the X-ray in Figure 1, and Figure 5 is a sectional view of the blade. 2...Blade 3.13...Stick 5...Chuck 6.16...Screw 8...Key 9.
15...One-way clutch 10, 12, 19, 23
... Gear 11 ... Motor 17, 17', 1
8・18'...Female thread 22...Spring Patent Applicant: Tokyo Seimitsu Jun Co., Ltd. N Procedural Amendment May 26, 1988 Patent Application No. 1983-32087 2 Title of Invention Dressing device for inner peripheral blade 3. Relationship with the case of the person making the amendment Patent applicant: 9-7-1, Shimorenjaku, Mitaka-shi, Tokyo 181 4. Date of amendment order: “Voluntary” 5. Number of inventions increased by the amendment 6. “Inventions” in the specification subject to amendment Column 7 “Detailed explanation of the amendment” Contents of the amendment

Claims (2)

[Claims] (1) In a device for dressing a blade for cutting wafers, an inner peripheral blade consisting of a mounting mechanism that brings a round dressing stick into contact with the blade at an angle, and a drive mechanism that rotates and moves the stick in the longitudinal direction. dressing equipment. (2) In claim 1, the longitudinal movement and rotation of one of the two sticks in the operating state is caused by the two stick shafts provided substantially parallel to each other and the forward and reverse rotation of the motor.
A dressing device for the inner peripheral blade consisting of a mechanism that transmits information only to the book.