JPH0121082B2 - - Google Patents
Info
- Publication number
- JPH0121082B2 JPH0121082B2 JP19035384A JP19035384A JPH0121082B2 JP H0121082 B2 JPH0121082 B2 JP H0121082B2 JP 19035384 A JP19035384 A JP 19035384A JP 19035384 A JP19035384 A JP 19035384A JP H0121082 B2 JPH0121082 B2 JP H0121082B2
- Authority
- JP
- Japan
- Prior art keywords
- ozone
- generator
- oxygen
- ozone generator
- molybdenum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 35
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 12
- 239000000758 substrate Substances 0.000 claims description 12
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 10
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 7
- 239000000919 ceramic Substances 0.000 claims description 7
- 229910052760 oxygen Inorganic materials 0.000 claims description 7
- 239000001301 oxygen Substances 0.000 claims description 7
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 5
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 claims description 5
- 239000011733 molybdenum Substances 0.000 claims description 5
- 229910052759 nickel Inorganic materials 0.000 claims description 5
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 5
- 239000010937 tungsten Substances 0.000 claims description 5
- 229910052750 molybdenum Inorganic materials 0.000 claims description 4
- 229910052721 tungsten Inorganic materials 0.000 claims description 4
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910052742 iron Inorganic materials 0.000 claims description 3
- 125000006850 spacer group Chemical group 0.000 claims description 3
- 239000011651 chromium Substances 0.000 description 4
- 229910052804 chromium Inorganic materials 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000010935 stainless steel Substances 0.000 description 3
- 229910001220 stainless steel Inorganic materials 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 229910000599 Cr alloy Inorganic materials 0.000 description 1
- 229910000640 Fe alloy Inorganic materials 0.000 description 1
- 229910001182 Mo alloy Inorganic materials 0.000 description 1
- 229910001080 W alloy Inorganic materials 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Oxygen, Ozone, And Oxides In General (AREA)
Description
【発明の詳細な説明】
本発明はオゾン発生装置に関するもので、抵抗
体に電圧をかけ放電させて空気中の酸素をオゾン
化するオゾン発生装置であり、従来のオゾン発生
装置が99.9%の高純度アルミナ基板を使用してス
テンレススチール板等でサンドイツチにしなけれ
ばならないため極めて高価となつていた(第3図
参照)。[Detailed Description of the Invention] The present invention relates to an ozone generator, which applies voltage to a resistor and discharges it to ozone oxygen in the air. Since a pure alumina substrate must be used and sandwiched with a stainless steel plate or the like, it is extremely expensive (see Figure 3).
本発明は低純度のアルミナ基板を使用して効率
の良い低価格のオゾン発生装置を提供することを
その目的として開発したものである。 The present invention was developed for the purpose of providing an efficient, low-cost ozone generator using a low-purity alumina substrate.
本発明の構成を上述の目的に従いその一実施例
に就いて説明するに、鉄、クローム、タングステ
ン、モリブデン、その他ニツケルから成る合金の
抵抗体1をアルミナ基板2,2′で挾着したオゾ
ン発生板Aを、セラミツクパイプスペイサー3等
にに依つて複数枚、適所を適宜間隙を持つて重ね
合せてセラミツクボルト4で締着し、電圧をかけ
て放電させ空気中の酸素からオゾンを放出するよ
うにしたオゾン発生装置であり、更に図面に従い
その作用及び効果を詳細に説明するに、従来高純
度のアルミナ基板を更に研磨して全く歪みの無い
平面に仕上げるのに多額のコストを要していた
が、本発明は90%〜93%程度の純度の低いアルミ
ナ基板2,2′を平面に成型してそのまま、鉄5
%、クローム10%、タングステン4%、モリブデ
ン10%、その他ニツケル等から成る合金の抵抗体
1を挾着して一体としたオゾン発生板Aを、適所
にセラミツクパイプ等から成るスペイサー3等で
各々適切な間隔を維持して絶縁し、更に適宜数を
重ねてセラミツクボルト4等で締着したので研磨
しないでも歪みは矯正され、+,−と交互に電流を
流すようにして電圧をかけ放電させ、空気中の酸
素からオゾンを放出するようにしたもので、低純
度のアルミナ基板を研磨しないで使用出来るので
価格が従来の20分の1になり、複数枚のオゾン発
生板Aを各々絶縁して積み重ねて適所を締付ける
ことによつて歪みを矯正しながら放電するように
したので、10%以上の効率でオゾンを放出する事
が可能となる、極めて低価格で効率の良いオゾン
発生装置の発明である。尚、第4図に示す装置に
よつて、本願発明と従来技術とを比較すると、
<装置の概要>
荏原実業株式会社製、発生オゾン測定器EG―
2001Aを使用。 The structure of the present invention will be explained with reference to one embodiment according to the above-mentioned purpose.Ozone generation is made by sandwiching a resistor 1 made of an alloy of iron, chromium, tungsten, molybdenum, or other nickel between alumina substrates 2 and 2'. A plurality of plates A are stacked on top of each other using ceramic pipe spacers 3, etc., with appropriate gaps in the appropriate places, and are fastened with ceramic bolts 4, and a voltage is applied to discharge the plates so that ozone is released from oxygen in the air. This is an ozone generator that uses a high-purity alumina substrate, and its functions and effects are explained in detail according to the drawings. Conventionally, it required a large amount of cost to further polish a high-purity alumina substrate to a flat surface with no distortion. However, in the present invention, the alumina substrates 2, 2' with a low purity of about 90% to 93% are formed into a flat surface, and then the iron 5
%, 10% chromium, 4% tungsten, 10% molybdenum, and other materials such as nickel.The ozone generating plate A is integrated with an alloy resistor 1 made of 10% chromium, 4% tungsten, 10% molybdenum, and other materials such as nickel. By maintaining appropriate spacing and insulating them, and then stacking the appropriate number of bolts and tightening them with ceramic bolts 4, etc., the distortion was corrected without polishing, and the voltage was applied and discharged by passing current alternately between + and -. , which releases ozone from oxygen in the air, and can be used without polishing low-purity alumina substrates, making it 1/20th the price of conventional products, and insulating multiple ozone generating plates A. Invention of an extremely low-cost and highly efficient ozone generator that can emit ozone with an efficiency of over 10% by stacking them and tightening them at the appropriate places to correct distortion while discharging. It is. By the way, when comparing the present invention and the prior art using the device shown in Fig. 4, <Overview of the device> Generated ozone measuring instrument EG manufactured by Ebara Jitsugyo Co., Ltd.
Uses 2001A.
7……酸素ボンベ
8……減圧器
9……シロツクフアン
10……風量調節板
11……電流計
12……変圧器
13……電圧計
14……発生器本体
15……風速計
16……紫外線センサー
尚、オゾン発生板Aは、上下に二段重ねとし、
アルミナ基板2,2′は0.8mm厚とし、縦横100mm
×100mm巾とする。電極となる合金(鉄、クロー
ム、タングステン、モリブデン、ニツケル)の抵
抗体1は、0.2mm厚とし、縦横100mm×100mm巾と
する。7... Oxygen cylinder 8... Pressure reducer 9... Shirotsuku fan 10... Air volume adjustment plate 11... Ammeter 12... Transformer 13... Voltmeter 14... Generator body 15... Anemometer 16... Ultraviolet rays Sensor The ozone generating plates A are stacked in two layers, one above the other.
The alumina substrates 2 and 2' are 0.8mm thick and 100mm in length and width.
x100mm width. The resistor 1 made of an alloy (iron, chromium, tungsten, molybdenum, nickel) serving as an electrode has a thickness of 0.2 mm and a width of 100 mm x 100 mm.
放電間隙は3.0mmとする。 The discharge gap is 3.0mm.
従来技術のオゾン発生板の高純度アルミナ基板
及びステンレススチール板の厚み、縦横巾等の条
件は、上記オゾン発生板Aの構成材料の条件と同
一とし、放電間隙も同一の3.0mmとする。 The conditions such as the thickness, length and width of the high-purity alumina substrate and stainless steel plate of the conventional ozone generating plate are the same as those of the constituent materials of the ozone generating plate A, and the discharge gap is also the same, 3.0 mm.
<測定方法>
酸素ボンベ7より減圧弁を通して得た減圧酸素
を、更に減圧器8に入れた後、シロツクフアン9
によつて風量調節板10(流速4.15/min(1
秒あたり)に設定)を介して発生器本体14内に
圧入させる。一方、発生器本体14内は、反応温
度を20℃、圧力760mmHgとなるように設定し、
内設した上下二段重ねのオゾン発生板A,Aから
なるオゾン発生装置の前記電極には、放電電流
1.45mA、放電電圧15.0KVに設定された電圧を印
加し、紫外線センサー16により発生したオゾン
を測定する。<Measurement method> After the reduced pressure oxygen obtained from the oxygen cylinder 7 through the pressure reducing valve is further put into the pressure reducing device 8,
The air volume adjustment plate 10 (flow rate 4.15/min (1
per second) into the generator body 14. On the other hand, inside the generator main body 14, the reaction temperature was set to 20°C and the pressure was 760mmHg.
A discharge current is applied to the electrodes of the ozone generator, which is made up of internally installed ozone generator plates A and A stacked in upper and lower layers.
A voltage set to 1.45 mA and a discharge voltage of 15.0 KV is applied, and ozone generated by the ultraviolet sensor 16 is measured.
<測定結果>
従来技術に係るオゾン発生装置によるオゾン生
成量は、4.20mol/h(1時間あたり)×103であ
り、本願発明に係るオゾン発生装置によるオゾン
生成量は、4.20mol/h(1時間あたり)×103であ
る。<Measurement results> The amount of ozone produced by the ozone generator according to the prior art is 4.20 mol/h (per hour) x 103 , and the amount of ozone produced by the ozone generator according to the present invention is 4.20 mol/h (per hour). per hour) x 103 .
また、反応温度を−31℃,0℃,25℃,41℃,
59℃に変えて測定を行なつたが、両者のオゾン生
成量は同一であつた。 In addition, the reaction temperature was -31℃, 0℃, 25℃, 41℃,
Measurements were performed at 59°C, but the amount of ozone produced was the same in both cases.
以上の如く、上記両者のオゾン発生効率には差
が生じないものと思料される。 As described above, it is considered that there is no difference in the ozone generation efficiency between the two methods.
図面は本発明の一実施例を示すもので、第1図
は発明のオゾン発生板断面図、第2図は同発生板
を重ね合せたオゾン発生装置の断面図、第3図は
従来技術のオゾン発生板の断面図、第4図はオゾ
ン測定装置の構成略図である。
1……抵抗体、2,2′……アルミナ基板、3
……セラミツクパイプスペイサー、4……セラミ
ツクボルト、A……オゾン発生板、B……従来技
術のオゾン発生板、5,5′……高純度アルミナ
基板、6……ステンレススチール板。
The drawings show one embodiment of the present invention. Fig. 1 is a sectional view of an ozone generating plate according to the invention, Fig. 2 is a sectional view of an ozone generator in which the same generating plates are stacked together, and Fig. 3 is a sectional view of an ozone generator according to the prior art. A sectional view of the ozone generating plate and FIG. 4 are schematic diagrams of the configuration of the ozone measuring device. 1...Resistor, 2, 2'...Alumina substrate, 3
... Ceramic pipe spacer, 4 ... Ceramic bolt, A ... Ozone generation plate, B ... Ozone generation plate of conventional technology, 5, 5' ... High purity alumina substrate, 6 ... Stainless steel plate.
Claims (1)
その他ニツケルから成る合金の抵抗体1をアルミ
ナ基板2,2′で挾着したオゾン発生板Aを、セ
ラミツクパイプスペイサー3等に依つて複数枚、
適所を適宜間隙を持つて重ね合せてセラミツクボ
ルト4で締着し、電圧をかけて放電させ空気中の
酸素からオゾンを放出するようにしたオゾン発生
装置。1 Iron, chrome, tungsten, molybdenum,
In addition, a plurality of ozone generating plates A each having an alloy resistor 1 made of nickel held between alumina substrates 2 and 2' are assembled using ceramic pipe spacers 3, etc.
This ozone generator is constructed by stacking ceramic bolts 4 on top of each other with appropriate gaps, and applying voltage to discharge ozone to emit ozone from oxygen in the air.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19035384A JPS6168305A (en) | 1984-09-11 | 1984-09-11 | Ozone generator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19035384A JPS6168305A (en) | 1984-09-11 | 1984-09-11 | Ozone generator |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6168305A JPS6168305A (en) | 1986-04-08 |
| JPH0121082B2 true JPH0121082B2 (en) | 1989-04-19 |
Family
ID=16256777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19035384A Granted JPS6168305A (en) | 1984-09-11 | 1984-09-11 | Ozone generator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6168305A (en) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102009033319B4 (en) | 2009-07-15 | 2019-02-21 | Carl Zeiss Microscopy Gmbh | Particle beam microscopy system and method of operating the same |
| JP2014186900A (en) * | 2013-03-25 | 2014-10-02 | Murata Mfg Co Ltd | Discharge element and method of manufacturing the same |
-
1984
- 1984-09-11 JP JP19035384A patent/JPS6168305A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6168305A (en) | 1986-04-08 |
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