JPH01220124A - Production of perpendicular magnetic recording medium - Google Patents

Abstract

PURPOSE:To efficiently form a long-sized recording medium having excellent magnetic characteristics by installing a shutter between a target and a substrate film and forming magnetic films intermittently on the substrate film by opening and closing of the shutter at the time of producing a flexible disk for perpendicular magnetic recording on a long-sized high-polymer film. CONSTITUTION:The shutter 7 which can be opened and closed is disposed between the long-sized high-polymer film 5 and the target 4. Film feed is stopped when the part to be sputtered of the film 5 comes over the target 4. The shutter 7 is then opened upon lapse of the specified period of time to deposit the film on the film 5. The shutter 7 is closed to attain the state of executing the electric discharge when the sputtering time ends. After the shutter 7 is closed, the film 5 is fed and when the part to be sputtered next comes over the target 4, the feeding of the film 5 is stopped. The magnetic films are efficiently formed on the film 5 by repeating the above-mentioned operations.

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method for manufacturing a vertical recording medium.

[Conventional technology]

In recent years, with the demand for higher density magnetic recording, the so-called perpendicular magnetic recording method, which performs recording and reproduction in the direction of the film thickness, has attracted attention, and research is being conducted from various fields toward its practical application.

In order to achieve high recording density in perpendicular magnetic recording media, it is necessary to obtain an extremely thin film with good perpendicular alignment.

Conventionally, in the production of this perpendicular magnetic recording medium, as shown in FIG. It is recommended that sputtering be performed using the same method. The film thus produced is shown in FIG.

[Problem to be solved by the invention]

When sputtering a long film intermittently.

At the start of sputtering, discharge is started by increasing the argon pressure. Then, in the early stages of Sufu 4 Tsuta,
The portion where the film was formed under high argon pressure had the disadvantage of low magnetic anisotropy and poor orientation.

This method also had the disadvantage of being inefficient and causing dust because the discharge had to be carried out intermittently.

In view of these drawbacks, the second technical object of the present invention is to provide a method for efficiently manufacturing a perpendicular magnetic recording medium with excellent magnetic properties.

[Means to solve the problem]

According to the present invention, in a method of manufacturing a flexible disk for magnetic perpendicular magnetic recording on a long polymeric substrate film, a shutter is installed between the target and the substrate film, that is, between the film and the target, and the initial The method is characterized in that a layer is sputtered onto a shutter, and once a discharge is caused, sputtering is performed intermittently by opening and closing the shutter without stopping the discharge.

〔Example〕

Next, the present invention will be explained in detail.

As shown in FIG. 1, a shutter 7 installed between a deer target 4 and a film 5 can be opened and closed, and can either block sputtered particles flying from the target 4 or allow them to reach the film 5 as is.

Target 4 is the part of long/weak film 5 that is smeared.
Stop film advance when it reaches the top. Next, the shutter 7 is closed and discharge begins. After a certain period of time has elapsed, the shutter 7 is opened and the film 5 is coated with a film. When the 2-time period has ended, the shutter 7 is closed. At this time, the discharge continues. After closing the shutter 7, the film 5 is fed, and when the next sputtered portion reaches the target 4, the film feeding is stopped. Then, the shutter 7 is opened to apply a film to the film 5. The above operation is repeated to intermittently apply a film to the long film 5.

FIG. 2 shows the in-plane magnetization curve of the film thus produced. (,) is the magnetization curve of the film produced by the conventional method, and (b) is the magnetization curve of the film produced according to the present invention. (
In a), there is a large in-plane magnetization component and the magnetic anisotropy is small, whereas in (b) there is almost no in-plane magnetization component and the magnetic anisotropy is large.

FIG. 3 shows the dependence of Δθ5o on film thickness, which is related to magnetic anisotropy. (A) is the case where the film was manufactured by a conventional method, and (B) is the case where the film was manufactured according to the present invention.

From these comparisons, it can be seen that the film produced by the present invention exhibits better orientation from the initial layer than the conventional method.

In this example, an apparatus in which the target and the substrate are parallel is shown, but a can apparatus as shown in FIG. Not limited to examples.

〔Effect of the invention〕

As described above, according to the present invention, a perpendicular magnetic recording medium with excellent magnetic properties can be efficiently produced.

[Brief explanation of the drawing]

FIG. 1 is a conceptual diagram of an embodiment according to the present invention, FIG. 2 is a diagram showing an in-plane magnetization curve of a film broken in the embodiment shown in FIG. 1, and FIG. 3 is a diagram showing the dependence of Δθ5o on film thickness. FIG. 4 is a conceptual diagram showing another embodiment of the present invention, and FIG. 5 is a conceptual diagram of a conventional perpendicular magnetic recording device. FIG. 6 is a schematic diagram of a film produced by the conventional apparatus shown in FIG. unwind roll, 2 guide rolls, 3: take-up roll, 4: TARDAT, 5: long polymer film, 6: magnetic film, 7: shutter, 8: cylindrical can. Figure 1 Figure 2 Figure 3 Atsushi Gnoda [μ-pan] Figure 4 Figure 6

Claims (1)

[Claims] (1) In a method for producing a flexible disk for magnetic perpendicular magnetic recording on a long polymer substrate film, a shutter is installed between the target and the substrate film, and by opening and closing the shutter, the substrate film is intermittently A method for manufacturing a perpendicular magnetic recording medium characterized by the formation of a magnetic film.