JPH01228692A - Rotary optical instrument for laser beam machining - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed Description of the Invention] [Summary] The present invention relates to a rotating optical device for laser processing of a laser processing machine that drills holes in a workpiece, and aims to improve productivity by facilitating the drilling of holes with good roundness. An odd number of at least three or more laser beams are arranged so that the multi-mode laser beam reflected by one reflector is reflected by a second reflector, further reflected by a third reflector, and then emitted in the same direction as the incident optical axis. An optical system in which a smooth reflector is integrated is constructed by rotating the incident optical axis of the laser beam as a central axis.

[Industrial application field]

The present invention relates to a laser processing machine for drilling holes in a workpiece using a laser beam, and more particularly to a rotating optical device for laser processing that improves productivity by facilitating the processing of holes with good roundness.

[Conventional technology]

When drilling fine and precise holes with a diameter of, for example, 0.1 to 0.2+ nm in a plate-shaped object, there are many methods that are commonly used, such as spot irradiation of a laser beam onto the drilling position of the workpiece plate. .

In this case, the laser beam is used depending on the type of material to be drilled, such as when the workpiece is a metal plate, a laser beam is used, and when the workpiece is a non-metallic plate, a gas laser beam is used.

Figure 3 shows a conventional method of drilling a hole in a metal plate using a laser beam. (A) shows the normal method and (B) shows another method that improves roundness. It is something that

In FIG. 3 (8), 1 is a metal plate with a thickness of about 11 mounted on the X-Y table 2.

3 is a solid laser beam emitted from a light source (not shown), which is directed to a predetermined position P on the metal plate 1 by a converging lens 4.
It is designed to focus on a point.

Normally, in this state, first drill a fine hole at point P, then operate the X-Y table 2 in the X direction and Y direction to
is moved in a two-dimensional direction to drill, for example, a point P''.

Thereafter, a plurality of required holes are bored in the metal plate 1 by repeating the same process.

In this case, the solid-state laser beam 3 generally has a multi-mode transverse mode in its beam cross section.

For example, a cross section 3a along c-c' of the solid-state laser beam 3 in the figure
In this case, a portion with high energy is formed in a direction inclined at 45 degrees with respect to the X-axis, that is, in a hunting region indicated by a broken line.

In this case, when drilling the metal plate l with such a beam, the hole is drilled starting from the part with the highest energy, so the shape of the hole at point P is an ellipse extending in a direction inclined at 45 degrees with respect to the X-axis where the energy is high, as shown in 1a. It becomes a hole.

On the other hand, when the flower shape to be perforated requires particularly strict roundness, the X-Y table 2 is rotated with the rotation axis 5 coinciding with the optical axis 3' of the solid-state laser beam 3, as shown in Figure (B). The hole is drilled while rotating itself at a rotational speed of about 50 to 1100 rpm.

In this case, even if the same solid-state laser beam 3 as in Figure (8) is used, the elliptical hole 1a in Figure (8) is drilled while rotating around the optical axis, so the hole at point P is This results in a perfectly circular hole shown by 1b.

When drilling a hole at a point near the end of the metal plate 1, for example, point P77 in the figure, operate the X-Y table 2 and move the metal plate l to drill the point P11 with the solid-state laser beam 3. Axis 3
Similarly, after aligning the holes, the metal plate 1 is rotated about the shaft 5 and the holes are drilled.

[Problem to be solved by the invention]

In conventional drilling operations using solid-state laser light, it is necessary to rotate the workpiece together with an X-Y table in order to obtain the roundness of the hole.

Therefore, if the workpiece is large or the drilling position is close to the edge of the workpiece, there is a problem in that it is difficult to rotate the workpiece, and the holding and positioning mechanism for the workpiece becomes complicated. There was a problem.

[Means to solve the problem]

The above problem is such that the multi-mode laser beam reflected by the first reflector is reflected by the second reflector, further reflected by the third reflector, and then exits in the same direction as the incident optical axis. This problem is solved by a rotating optical device for laser processing, which is formed by rotating an optical system in which an odd number of three or more smooth reflecting plates are arranged and integrated, and is rotated about the incident optical axis of the laser beam.

[For production]

When drilling holes in a workpiece such as a metal plate using laser light,
A similar effect can be obtained by rotating the laser beam itself about its optical axis instead of the conventional method of rotating the workpiece to obtain the roundness of the hole.

In the present invention, by inserting a rotating optical system into the parallel beam portion of the laser beam and rotating it around the optical axis of the laser beam,
The axis rotation of the laser beam itself is realized.

Therefore, it is possible to drill a hole of high circularity and quality in a workpiece such as a metal plate without rotating the workpiece.

〔Example〕

FIG. 1 is a sectional view showing an example of the configuration of a rotating optical device for laser processing according to the present invention, and FIG. 2 is a diagram showing another embodiment.

In FIG. 1, a metal plate 1 with a thickness of about 1 mII+ is placed on an Similar to the case of FIG. 3, the lens is configured to focus on a predetermined point P on the plate 1.

In addition, in the optical path of the parallel beam portion of the solid-state laser beam 3,
A freely rotatable rotating optical device 10 is disposed on a holding part 16 fixed to an external device (not shown) via a bearing 15, with its optical axis aligned.

Further, a belt 18 connects a pulley 17a of a motor 17 mounted on the holding portion 16 and a heald groove 10a provided in the rotary optical device 10.

Therefore, the rotation of the motor 17 is transmitted by the belt 18 as axial rotation about the optical axis of the rotating optical device 10.

On the other hand, in the optical path constituting portion of the rotating optical device 10, the solid-state laser beam 3 is incident from the direction L1 shown in the figure, and a smooth first reflecting plate 1 is formed.
After being reflected on the surface of 1a, it proceeds in the L2 direction, is reflected on the smooth surface of the second reflecting plate 11b, becoming L3, and further reflected on the smooth surface of the third reflecting plate 11c, becoming L4 and emitting. In particular, the optical axis 3' of the incident light and the optical axis 3'' of the emitted light are configured to coincide with each other.

When the motor 17 is operated while the solid-state laser beam 3 is incident on the rotating optical device 10 having such a configuration, the solid-state laser beam 3 is transmitted to the three reflecting plates 11a, llb, and lc which rotate while maintaining the above-mentioned relative relationship. After being sequentially reflected at , the solid-state laser beam is emitted from the rotating optical device 10 as a solid-state laser beam having an optical axis 3'' on an extension of the optical axis 3'' of the incident light. Therefore, the third
As in the figure, a predetermined point P on the metal plate 1 can be spot-irradiated by the converging lens 4.

At this time, the incident solid-state laser beam 3 is twisted about its front axis at twice the rotation speed of the rotary optical device 10, which rotates about its axis. That is, while the rotating optical device IO makes one rotation, the solid-state laser beam 3 itself rotates twice.

Therefore, since the predetermined position P of the metal plate 1 is irradiated with the laser beam rotating on the axis, it is possible to obtain the same effect as the conventional method of rotating the workpiece.

FIG. 2 shows a configuration in which the third reflecting plate 11c and converging lens 4 in FIG. r
It's shifted by just that.

In this case, when the laser beam 3 is irradiated onto the metal plate 1 without rotating the rotating optical device 10'', the spot of the laser beam 3 has a radius r centered on the point P on the extension of the incident optical axis 31. Since the spot itself moves while rotating on the circumference, it is possible to machine holes with high roundness.

〔Effect of the invention〕

As described above, the present invention provides a rotating optical device for laser processing that can easily perform hole processing with high roundness without rotating the workpiece when performing hole processing using multi-mode laser light. can do.

[Brief Description of the Drawings] Fig. 1 is a sectional view showing a configuration example of an optical device for laser processing according to the present invention, Fig. 2 is a view showing another embodiment, and Fig. 3 is a cross-sectional view showing an example of the configuration of an optical device for laser processing according to the present invention. 1 is a diagram illustrating a conventional method of drilling a hole in a metal plate. In the figure, 1 is a metal plate, 2 is an x-y table, 3 is a solid-state laser beam, 3" and 3" are optical axes, 4 is a converging lens, io and io' are rotating optical devices for laser processing, and 10a is a belt 11a, Ilb, and llc are reflecting plates, 15 is a bearing, 16 is a holding portion, 17 is a motor, 17a is a pulley, and 18 is a belt. X HofusakuC flowing L-sa blade 0 knives...transfer stopper■, Jiro6f limit O, 9゛Heki Ralo No. 12 fear θ) stylish evening 1 skewer is'' Tsui 2 mouths

Claims (1)

[Claims] The multi-mode laser beam reflected by the first reflector is reflected by the second reflector, further reflected by the third reflector, and then emitted in the same direction as the incident optical axis. 1. A rotating optical device for laser processing, comprising an optical system integrally equipped with a smooth reflecting plate, which is rotated about the incident optical axis of laser light as a central axis.