JPH0123055Y2 - - Google Patents

Description

[Detailed Description of the Invention] The present invention relates to a clean tunnel device for use in industrial machinery, etc., which aims at good workability, prevention of contamination, and simple structure.

As an industrial clean tunnel that satisfactorily achieves these objectives, the present invention provides a clean tunnel 3 having an opening 2 in a clean room 1 that communicates with the clean room 1, as shown in the drawing.
This is the equipment that formed the clean tunnel 3.
HEPA filter 5, which is higher class than HEPA filter 4 for clean room 1, is installed on the ceiling of the room.
is arranged horizontally, and a vertical hood 6 is installed above the opening 2, and clean air is blown downward from the HEPA filter 5 on the ceiling into the clean tunnel 3 constructed in this way. A clean tunnel device characterized in that a rectifier plate 9 having a vertical surface parallel to the vertical surface of the hood 6 is attached to the surface of the hood 6 on the clean tunnel 3 side at a distance from the hood 6. It provides:

In Figure 1, 1 indicates a clean room (passageway) with a rating of 0.3 μ; about class 10,000, and for this purpose, a 0.3 HEPA filter 4 is installed on the ceiling, and clean air is supplied from this HEPA filter 4 into the clean room 1. Supplied. Here, 0.3μ;
Class 10,000 means that the particle size of 0.3 μ or more has a cleanliness level of 10,000 cumulative particles/ft ³ or less, and a 0.3 μ HEPA filter is a high-performance filter that virtually does not pass particles of 0.3 μ or more. It means. Industrial machines or workbenches 7 (hereinafter simply referred to as machinery) are installed along the walls of the clean room passageway 1, and in order to maintain the cleanliness of this part to, for example, 0.1 to 0.3 μ; class 10 to 100. A clean tunnel 3 is formed.

This clean tunnel 3 has one side wall that is the wall surface 10 of the clean room passage 1 or the vertical wall 1 that is in close contact with the wall 10 of the clean room passage 1.
The hood 6 hanging down from the ceiling part 11 is formed as the other side wall. There is a considerable distance between the lower edge of this hood 6 (vertical hanging wall) and the floor surface 12, and this distance becomes an opening 2 that communicates the clean room passage 1 and the clean tunnel 3. 2, the machinery 7 can be operated and other operations. Reference numeral 13 in the figure indicates a fluorescent lamp arranged on the inner surface of the hood 6 so as to illuminate the inside of the clean tunnel.

A 0.1μ HEPA filter 5 is placed horizontally on the ceiling of the clean tunnel 3, and an exhaust port 14 is placed on the rear wall near the floor of the clean tunnel 3. Clean air is blown toward the machinery 7 in a system different from the air in the clean room passageway 1, and then exhausted from the exhaust port 14. For this purpose, a blower 15 for the clean tunnel is provided outside the clean room passageway 1.

According to the clean tunnel constructed in this way, the device construction is simple and the workability of machinery etc. is also good, but contamination due to entrainment of airflow from the opening 2 becomes a problem.

The present invention effectively prevents contamination from the opening 2 without sacrificing the simplicity and workability of the device configuration, and for this purpose, the current plate 9 is used.
This current plate 9 is the clean tunnel 3 of the hood 6.
It is attached parallel to the hood 6 at a distance from the hood 6 on the side surface. Since the hood 6 has a vertical surface, the current plate 9 also has a vertical surface.
installed vertically along the inner surface of the

FIG. 2 shows how the current plate 9 is installed. A support rod 18 having a suction cup 17 is installed inside the hood 6, and is spaced from the hood 6 by the distance of this support rod 18. It is attached parallel to the hood 6. As the material of the rectifying plate 9, a transparent acrylic plate or the like can be used for good visibility. By installing the rectifying plate 9, the air flow is rectified on both sides of the rectifying plate 9, and as a result, air is effectively prevented from being drawn in from the opening 2 of the clean room passageway 1, and the machinery 7 does not need to be installed at the back of the clean tunnel 3 (even if it is installed by extending it close to the opening 2), large machinery can be accommodated, and workability is improved, which has the effect of killing two birds with one stone. . In this case, if a shielding plate 22 whose height is not very high is vertically erected on the floor surface 12 and a suction port 23 is provided on the back side of this shielding plate 22 to force suction, the rectifying effect will be even better, and the entire machinery will be contamination is completely prevented.

Figures 3 and 4 compare the air flow when the current plate 9 is not used and when the current plate 9 is used.As shown in Figure 3, when the current plate 9 is not used, the air flow from the upper part of the machinery After colliding with the top surface of this machinery 7
A turbulent region 25 occurs at the front and even side surfaces of the air passageway, and contamination with the airflow on the passage side occurs. On the other hand, in the case of FIG. 4 in which the rectifying plate 9 is provided, such a turbulent area does not occur, so that contamination is effectively prevented.

Figure 5 is a plan view of the ceiling showing an example of the arrangement in which the clean tunnel device of the present invention is installed on both sides of aisle 1. By adopting this arrangement, a large number of production machines can be installed on both sides of aisle 1. can be operated in a highly clean environment, resulting in better workability.

As described above, the clean tunnel of the present invention has a simple structure and excellent workability, prevents contamination from the working opening of machinery, and has flexibility in installing machinery inside the tunnel. This has beneficial and practical effects as an industrial clean tunnel, such as increasing the

[Brief explanation of the drawing]

Figure 1 is a vertical cross-sectional view of the clean tunnel of the present invention, Figure 2 is an enlarged view of section A in Figure 1, and Figures 3 and 4 show airflow distribution with and without a rectifier plate. FIG. 5 is a plan view of the ceiling showing an example of the arrangement of the clean tunnel device of the present invention. 1...Clean room (passage), 2...Opening,
3...Clean tunnel, 4...HEPA filter, 5...HEPA filter, 6...Hood,
7... Machinery, 9... Rectifier plate, 14... Exhaust port,
17... Suction cup, 18... Support rod.

Claims (1)

[Scope of utility model registration request] This clean room 1 inside clean room 1
This equipment has a clean tunnel 3 having an opening 2 communicating with the clean tunnel 3, and a HEPA filter 5 of a higher class than the HEPA filter 4 for the clean room 1 is horizontally arranged on the ceiling of the clean tunnel 3, and the opening 2 In a clean tunnel device, a vertical hood 6 is installed above the hood 6, and clean air is blown downward from the HEPA filter 5 on the ceiling into the clean tunnel 3 constructed in this way. This clean tunnel device is characterized in that a rectifying plate 9 having a vertical plane parallel to the vertical plane is attached to the surface of the hood 6 on the clean tunnel 3 side with a distance from the hood 6.