JPH0125142B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a magnetic recording medium manufacturing apparatus with an improved cooling can structure.

Magnetic recording media, in which ferromagnetic metals such as iron and cobalt are obliquely adhered to a substrate such as plastic film, have larger coercive force and squareness ratio than conventional coated media, and have recently come into practical use. .

By the way, the magnetic properties of this magnetic recording medium vary greatly depending on the conditions when and after the ferromagnetic metal is attached to the substrate, and it is extremely difficult to obtain a medium with constant magnetic properties.

For example, when a ferromagnetic metal is deposited while a strip-shaped substrate is traveling, an evaporation source is positioned at the center of the substrate in the width direction to evaporate the ferromagnetic metal. Therefore, the temperature of the ferromagnetic metal attached to the center of the base is high, and the temperature at the center of the base is higher than near both ends. After the ferromagnetic metal is deposited, the substrate is cooled by running along the circumferential surface of a cooling can. However, in conventional cans, the temperature of the peripheral surface is constant regardless of the location, and even if the substrate is cooled by such cans, the temperature in the center is maintained higher than near both ends, and the temperature between the center and near both ends is There is a drawback that the magnetic properties of the ferromagnetic layers are different.

It is an object of the present invention to provide an apparatus for manufacturing a magnetic recording medium that can improve the above-mentioned drawbacks, correct the temperature difference of the substrate after ferromagnetic metal is attached, and improve the magnetic properties.

In order to achieve the above object, the present invention provides an apparatus for manufacturing a magnetic recording medium having a cooling can whose temperature is lower at the center than near both ends.

Embodiments of the present invention will be described below based on the drawings.

In FIG. 1, 1 is a cylindrical vacuum device, which is maintained at a vacuum level of about 10 ^-5 Torr.
Reference numeral 2 denotes a supply roller capable of supplying a substrate 3 such as a strip-shaped plastic film. 4 is a winding roller for finally winding up the base body 3. Reference numeral 5 denotes a cylindrical cooling can, along which the base 3 runs. As shown in FIG. 2, the cooling can 5 has a cooling medium injection hole 6 and an exhaust hole 7.
A first drum 8 having an exhaust hole near the center and a second drum 10 having an exhaust hole 9 are arranged at both ends of the interior, and the exhaust hole 7 and the exhaust hole 9 are connected to the exhaust pipe 1.
1, the other end of the exhaust hole 7 is connected to an exhaust pipe 12 extending outside the cooling can 5, and the injection hole 6 is connected to an injection pipe 13 extending outside the cooling can 5. The structure is such that an exhaust pipe 14 is further provided on the end face of the cooling can 5 provided at the exhaust pipe 12 and the injection pipe 13. An evaporation source 15 houses a ferromagnetic metal 16 such as iron, cobalt, or nickel, and is disposed below the cooling can 5 and closer to the supply roller 2.
17 is a mask placed directly below the cooling can 5.

That is, the substrate 3 sent out from the supply roller 2 runs obliquely downward to the cooling can 5, and along the way, the ferromagnetic metal evaporated from the evaporation source 15 adheres to form a magnetic layer. After the ferromagnetic metal has been deposited, the opposite side of the base body 3 runs along the circumferential surface of the cooling can 5. A cooling medium is injected into the cooling can 5 from the injection pipe 13 and is exhausted to the center of the cooling can 5 through the injection hole 6 of the first drum 8 . The discharged cooling medium flows between the first drum 8 and the inner peripheral surface of the cooling can 5 and the second drum 1.
0 and the inner circumferential surface of the cooling can 5, is sent to both end surfaces, and is discharged through the exhaust hole 9, the exhaust pipe 11, the exhaust hole 7, the exhaust pipe 12, and the exhaust pipe 14.
Therefore, the area near the center is cooled the most, and the temperature increases as it approaches both ends. Since the base body 3 runs along this cooling can 5, the parts that are heated to a particularly high temperature are cooled to the lowest temperature, and as it approaches the ends, it is cooled to a higher temperature, so that the base body 3 is evenly heated. cooled down. The substrate 3 cooled by the cooling can 5 is finally wound up by the take-up roller 4.

As described above, according to the present invention, since the substrate is uniformly cooled by the cooling can, an apparatus for manufacturing a magnetic recording medium with uniform and stable magnetic properties can be obtained.

[Brief explanation of drawings]

FIG. 1 is a front sectional view of an embodiment of the present invention, and FIG. 2 is a sectional view of a cooling can used in FIG. 1. DESCRIPTION OF SYMBOLS 1... Vacuum device, 2... Supply roller, 3... Base, 4... Take-up roller, 5... Cooling can, 1
5... Evaporation source, 16... Ferromagnetic metal.

Claims (1)

[Claims] 1. In a magnetic recording medium manufacturing apparatus in which a ferromagnetic metal is obliquely attached to a substrate and the substrate is cooled by a can, the magnetic recording medium has a cooling can whose temperature is lower at the center than near both ends. Manufacturing equipment.