JPH01257252A - Diffracting apparatus of reflected electron - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Detailed description of the invention] (a) Industrial application field The present invention is directed to the energy reflection electron diffraction method (RHBlin).
This invention relates to a backscattered electron diffraction device for investigating the crystal structure, etc. of a sample surface.

(b) Crystal structure 11 of the surface layer (edge layer extending from the outermost first atomic layer to several atomic layers on the surface) of a conventional technical sample - As a method of analysis,
Generally, a high-energy reflected electron diffraction method (R)IEED) is used. (Here, the energy is several KeV or more, and usually 10 to 3 Q KeV is used.) In RHgBD, as shown in FIG. The structure 1i1a of the surface layer is determined by the pattern projected on the fluorescent plate 23.
This is the ``l-peru'' method. (Japan Institute of Metals Special Collections.

Basic course on physical properties of metals 3 r [Ejj Folding Crystallography J (1981
(2010) P, 332 to 350) (c) Problems to be solved In the above-mentioned backscattered electron diffraction method (apparatus), electrons and thermionic electrons are inelastically scattered on the sample surface as a back ground when obtaining a diffraction image. , X-rays, ultraviolet light.

Visible and infrared rays rays @star, reach the fluorescent plate and become 8/N y (
There is a problem of lowering

B) Means for Solving the Problems In the present invention, the above problems are solved by removing radiation other than diffracted electrons by using an energy analyzer violet film between the sample and the fluorescent plate.

(e) Radiation other than diffracted electrons is removed by the slit provided at the convergence point of the action energy analyzer or by the electrode surface or wall surface of the energy analyzer. Diffracted electrons passing through the convergence point are considered to be emitted from this convergence point, and an image symmetrical to the conventional diffraction image is obtained.

(F) Embodiment FIG. 1 shows the structure of a first embodiment of the reflected electron diffraction apparatus of the present invention. In this figure, 1 is an electron gun, 2 is a sample, 3 is a detailed collimator to reduce background, 4 is a hemispherical energy analyzer 65 is an A2 slit (aperture) provided at the exit of the energy analyzer 4, and 6 is a fluorescent plate. be. A microchannel plate is attached to the front surface of the fluorescent plate 6, and the incident electrons r are multiplied and guided to the fluorescent plate.

Was it emitted from an electron gun? The E electron beam is converged,
It enters the sample 2 at a grazing angle and emits diffracted electrons 9 at that point. The first focus of the energy analyzer 4 is set at this emission point, and the second focus (convergence point) is set! J
Provided at Tsu l-5.

Since kinetic energy is conserved in electron beam diffraction, the voltage between the electrodes of the energy analyzer 4 is set so that electrons having the energy of the incident electron beam 8 pass through five slits. The diffracted electrons that have reached the slit 5 can be regarded as being emitted from this slit, and the image projected on the fluorescent plate 6 will be 180 degrees symmetrical to the normal diffraction image. The fL diffraction image thus obtained on the fluorescent plate is recorded and analyzed by photography.

Fig. 2 shows the configuration of the second embodiment of the present invention? show.

In this figure, electron gun 1. Sample 2. Collimator 3° hemispherical energy analyzer 4. Slits 5. Fluorescent plate 6.1E
The sagittal line 8 is the same as in Fig. 1, but at the entrance of the hemispherical energy analyzer 4 (between the sample and the energy analyzer).
The first electric field is installed in i11 and 12 to create a deceleration electric field.
Different from the illustration. 5 is an entrance slit of the energy analyzer 4. In this configuration of FIG. 2, the electrode 11.1
2+! The hole r in the center through which the diffracted electrons 14 pass is a plate-shaped electrode, and 1! The electrode 11 is at the same potential as the sample 2 (grounded), and the electrode 12 is supplied with a negative voltage from a variable voltage source 13. 1 pole 11, 12? ! - Since only the velocity component of the passing diffracted electrons 10 in the direction perpendicular to the electrode is decelerated, the emission angle increases, the diffracted electron solid imaged on the fluorescent plate 6 is expanded, and the separation of the RHEBD spots is improved, resulting in a pattern becomes clear. Furthermore, since the energy of the zero-diffraction electron beam is reduced, there is an advantage that the energy analyzer can also be made smaller.

In this embodiment, a hemispherical energy analyzer is used, but various energy analyzers such as a parallel plate energy analyzer or a cylindrical energy analyzer can be used.

(G) Effect According to the present invention, radiation other than diffracted electrons is removed by an energy analyzer in reflected electron diffraction (RHEED), so that a nine-diffracted electron image can be obtained with an improvement of 8/N. 1. In a conventional RHEBD, the electron gun, sample, and phosphor plate are arranged approximately in a straight line, which increases the length of the device, which is inconvenient.1 However, according to the present invention, the trajectory of the diffracted electrons is bent. The fluorescent plate r1! can be placed on the same side as the child gun, which has the advantage of making the device more compact.

[Brief explanation of the drawing]

FIG. 1 and FIG. 2 are block diagrams showing an embodiment of the present invention.
The reason is that there are diagrams that fully explain the conventional technology. 1... Electron gun 2... Sample 3... Collimator 4... Energy analyzer 5... Slit 6... Fluorescent plate 2 Figure 3

Claims (2)

[Claims] (1) In a device that projects a high-energy electron beam onto the surface of a sample and projects the diffracted electron pattern by the sample onto a fluorescent plate, an energy analyzer is installed between the sample and the fluorescent plate to remove radiation other than the diffracted electrons. A reflected electron diffraction device characterized in that diffracted electrons converged near the emission position of the energy analyzer are projected onto a fluorescent plate located at a distance from the convergence point. (2) A backscattered electron diffraction apparatus according to claim 1, characterized in that a deceleration electric field is provided between the sample and the energy analyzer.