JPH01263131A - Silica for filling sealing resin - Google Patents
Silica for filling sealing resinInfo
- Publication number
- JPH01263131A JPH01263131A JP9124888A JP9124888A JPH01263131A JP H01263131 A JPH01263131 A JP H01263131A JP 9124888 A JP9124888 A JP 9124888A JP 9124888 A JP9124888 A JP 9124888A JP H01263131 A JPH01263131 A JP H01263131A
- Authority
- JP
- Japan
- Prior art keywords
- silica
- average particle
- particle size
- filling
- coarse
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Silicon Compounds (AREA)
- Compositions Of Macromolecular Compounds (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
[産業上の利用分野]
この発明は、IC封止樹脂充填用シリカに係り、特に熱
硬化性樹脂に対して優れた充填性及び流動性を有するI
C封止材フィラー用シリカに関する。Detailed Description of the Invention [Industrial Application Field] The present invention relates to silica for filling an IC sealing resin, and particularly to silica having excellent filling properties and fluidity for thermosetting resins.
This invention relates to silica for C sealant filler.
[従来の技術]
従来、この種の封止樹脂充填用シリカとしては、平均粒
径7〜30μsの破砕又は球状シリカが一般に使用され
ている。[Prior Art] Conventionally, crushed or spherical silica with an average particle size of 7 to 30 μs has been generally used as this type of silica for filling the sealing resin.
しかしながら、このような粒径を有する破砕又は球状シ
リカは、これを樹脂中にフィラーとして充填する場合、
3虜以下の粒子間空隙が約20容量%存在し、この樹脂
中へのフィラー充填率が必然的に80容量%以下に制限
されてしまうほか、同じフィラー充填率でも粒子間空隙
の大ぎいものは樹脂とシリカのコンパウンドの良好な流
動性が得られず、高添加率でシリカを添加することがで
きず、IC封止材とした場合にその熱膨張係数や吸水率
の低下を図り、耐湿性の向上を図ることが難しくなる。However, when crushed or spherical silica having such a particle size is filled into a resin as a filler,
Approximately 20% by volume of interparticle voids of 3 or less size exist, and the filler filling rate in this resin is inevitably limited to 80% by volume or less. Because the compound of resin and silica does not have good fluidity, it is not possible to add silica at a high addition rate. It becomes difficult to improve sexual performance.
また、平均粒径1p以上の溶融石英粉末20〜97重量
%に平均粒径10〜800mμの球状珪酸質粉末80〜
3弔量%を混合することも提案されており(特開昭59
−204 、633号公報)、具体的にはその実施例と
して平均粒径25pの溶融石英粉末と平均粒径20mμ
のアエロジル(球状珪酸質粉末)とを混合使用すること
が行われている。In addition, 20 to 97% by weight of fused silica powder with an average particle diameter of 1 p or more and 80 to 97% by weight of spherical silicic powder with an average particle diameter of 10 to 800 mμ
It has also been proposed to mix 3% of the amount
-204, No. 633), specifically, as an example thereof, fused quartz powder with an average particle size of 25p and an average particle size of 20mμ
It is being used in combination with Aerosil (spherical silicic acid powder).
しかしながら、この方法においても、平均粒径20Tr
Lμのアエロジルではその粒径か小さづぎ、このために
これら微粒子間に働くノアンデルヮルス力の影響が大き
くなりすき゛、かえってその充填性が低下するという問
題が必り、しがも、この710ジルについては、その製
法上の理由から粒径が100mμ以上のものが得られな
い。However, even in this method, the average particle size is 20Tr.
Since the particle size of Lμ Aerosil is small, the influence of the Noanderthal force acting between these fine particles becomes large, which inevitably reduces the filling property. Because of the manufacturing method, particles with a particle size of 100 mμ or more cannot be obtained.
ところで、充填シリカとして破砕シリカを使用する場合
、その粉砕の程度が異なるものを適宜混合して粒度調整
を行うことにより、ある程度の充填ftを得ることかで
きるが、この場合においても充分に満足できるものでは
なかった。By the way, when using crushed silica as the filling silica, it is possible to obtain a certain amount of filling ft by appropriately mixing silica with different degrees of pulverization and adjusting the particle size, but even in this case, the filling ft can be sufficiently satisfied. It wasn't something.
[発明か解決しようとする課題J
本発明者らは、かかる観点に鑑みて鋭意研究を重ねた結
果、村上樹脂充填用シリカとしである特定の粒度分布と
粒子形状とを有するシリカを選択することにより、樹脂
中、特に熱硬化性樹脂中への充填性及び流動性を顕著に
改善できることを見出し、本発明に到達した。[Problem to be solved by the invention J] As a result of extensive research in view of the above, the present inventors have selected silica having a specific particle size distribution and particle shape as the silica for filling with Murakami resin. It was discovered that the filling properties and fluidity in resins, especially thermosetting resins, can be significantly improved by this method, and the present invention was achieved based on this finding.
従って、本発明の目的は、封止樹脂に対して侵れた充填
性と流動性とを有する封止(か1脂充唄用シリカを提供
することにある。Therefore, an object of the present invention is to provide a silica for sealing that has filling properties and fluidity superior to sealing resins.
[課題を解決するための手段]
すなわち、本発明は、平均粒径りが7〜30虜の範囲の
破砕若しくは球状の粗粒シリカに、平均粒径dが0.1
〜31Uの範囲の単分散球状微粒シリカを全体の5〜4
0重呈%小窩してなる封止)が1脂充填用シリカである
。[Means for Solving the Problems] That is, the present invention provides crushed or spherical coarse-grained silica having an average particle diameter of 7 to 30 mm, and an average particle diameter d of 0.1.
Monodisperse spherical fine grain silica in the range of ~31U
The seal consisting of 0% pits) is 1 fat-filling silica.
本発明で使用する粗粒シリカとしては、それか粉砕シリ
カであっても、また、球状シリカて必ってもよいが、そ
の平均粒径りについては7〜30即、好ましくは8〜1
5虜の範囲のものであり、平均粒径が7韓より小さいと
樹脂コンパウンドの流動性が急激に低下し、また、30
岬を越えるとこの粗粒シリカが被封止物の表面(!!−
傷付は易く、特にIC封止の場合にはICの細密なパタ
ーンをシリカ粒子の角で損傷し、ホンディングワイヤー
のワイヤー流れやワイヤーオープンを引起こす場合がお
る。なお、粉砕シリカの場合には、上述したようにその
粒度調整を行っておる程度の充填性を達成することがで
きるが、球状シリカの場合には、このような粒度調整が
困難なので、本発明の効果がより効果的に発揮される。The coarse silica used in the present invention may be pulverized silica or spherical silica, but its average particle diameter is 7 to 30, preferably 8 to 1.
If the average particle size is smaller than 7mm, the fluidity of the resin compound will decrease rapidly;
Beyond the cape, this coarse silica forms the surface of the object to be sealed (!!-
It is easily damaged, and especially in the case of IC sealing, the fine pattern of the IC can be damaged by the corners of the silica particles, which may cause the wire of the honding wire to come loose or open. In the case of pulverized silica, it is possible to achieve a filling property to the extent that the particle size is adjusted as described above, but in the case of spherical silica, such particle size adjustment is difficult. effect will be more effectively demonstrated.
このような平均粒径D(7〜30/ffi>の粗粒シリ
カに配合される単分散球状微粒シリカは、その平均粒径
dが0.1〜3μs、好ましくは0.2〜111Rの範
囲でおることが必要であり、また、その配合割合が全体
の5〜40ffl量%、好ましくは10〜30重量%で
ある。平均粒径dが0.1岬より小さいと微粒子間の凝
集傾向が増して充填率が低下し、反対に、平均粒径dが
3μsより大きいと粗粒シリカが形成する空隙よりも大
きくなって空隙充填効果が損なわれるという問題が生じ
る。また、配合割合が5重量%より少ないと粗粒シリカ
の空隙を埋める上で量的に不足し、反対に、配合割合が
40重量%より多くなると粗粒シリカの空隙より必要以
上に過剰になるという問題が生じる。The monodisperse spherical fine particle silica to be blended with such coarse particle silica having an average particle diameter D (7 to 30/ffi>) has an average particle diameter d in the range of 0.1 to 3 μs, preferably 0.2 to 111R. The blending ratio is 5 to 40% by weight, preferably 10 to 30% by weight of the total.If the average particle diameter d is smaller than 0.1 cape, there is a tendency for fine particles to agglomerate. On the other hand, if the average particle diameter d is larger than 3 μs, the voids become larger than the voids formed by the coarse silica, and the void filling effect is impaired. If the blending ratio is less than 40% by weight, the amount is insufficient to fill the voids in the coarse silica, and on the other hand, if the blending ratio exceeds 40% by weight, there will be a problem that the amount will be more than necessary compared to the voids in the coarse silica.
さらに、本発明においては、より一層の高充填性と高流
動性を達成するために、上記粗粒シリカの平均粒径りと
微粒シリカの平均粒径dの間に、0.02D<d<0.
1Dの関係、より好ましくは0.03D<d<0.07
0の関係が存在するのがよい。このような関係を有する
粗粒シリカと微粒シリカとを使用し、その配合割合を上
記範囲内から選択することにより、粗粒シリカの充填の
際に形成される空隙を単分散球状微粒シリカで密に埋め
ることができ、封止樹脂、好ましくは熱硬化性樹脂中に
IC封止材用フィラーとしてシリカを高密度充填するこ
とができ、しかも、得られたコンパウンドの高流動性を
可能と覆ることかできる。Furthermore, in the present invention, in order to achieve even higher filling properties and higher fluidity, the difference between the average particle size of the coarse silica and the average particle size d of the fine silica is 0.02D<d< 0.
1D relationship, more preferably 0.03D<d<0.07
It is preferable that a relationship of 0 exists. By using coarse silica and fine silica, which have such a relationship, and selecting their blending ratio within the above range, the voids formed when filling the coarse silica can be filled with monodispersed spherical fine silica. silica can be filled in the encapsulating resin, preferably a thermosetting resin, as a filler for an IC encapsulating material at a high density, and the resulting compound can have high fluidity. I can do it.
なお、空隙充填の目的で不定形の破砕微粒シリカを用い
ることも考えられるか、単分散球状微粒シリカに比べて
その充填性に劣り、また、同じ球状微粒シリカでも広い
分布を持ったシリカを使用することも考えられるが、そ
の粒度弁イ5により粗粒シリカとの最適配合割合を決定
するのが難しくなる。In addition, it may be possible to use irregularly shaped crushed fine silica for the purpose of filling voids, but its filling properties are inferior to monodispersed spherical fine silica, and even with the same spherical fine silica, silica with a wide distribution may be used. Although it is conceivable to do so, it becomes difficult to determine the optimum blending ratio with coarse silica due to the particle size control 5.
そして、本発明で使用するこのような単分散球状微粒シ
リカの製造法としては、例えば、シリコンアルコラート
をアルコール−水−アン−しニア溶液中で加水分解し、
得られた球状シリカ粒子を乾燥し焼成して製造する方法
(唱5tober等、J。As a method for producing such monodispersed spherical fine silica used in the present invention, for example, silicon alcoholate is hydrolyzed in an alcohol-water annealed solution,
A method of manufacturing by drying and firing the obtained spherical silica particles (Tober et al., J.
Co11oid Interface Sci、、Vo
l、26. p62(1968))かあり、この方法に
より平均粒径0.1〜3μmで比表面積30 rrt/
q以下の単分散球状微粒シリカを′#!j告すること
ができる。このようにして得られた単分散球状微粒シリ
カは、それ自体ではたとえ六方最密充填しても、なお約
25%の空隙率が存在して高充填性は得られないが、粗
粒シリカと適当な割合、すなわち粗粒シリカに対してこ
の微粒シリカを5〜40Φ蟻%の範囲で配合することに
より、優れた充填性と流動性とを得ることができる。Co11oid Interface Sci,,Vo
l, 26. p62 (1968)), and by this method, an average particle size of 0.1 to 3 μm and a specific surface area of 30 rrt/
Monodispersed spherical fine silica with a size of q or less! j can be reported. The monodispersed spherical fine-grained silica obtained in this way still has a porosity of about 25% even if it is hexagonally close-packed, and high packing properties cannot be obtained, but it cannot be obtained with coarse-grained silica. Excellent filling properties and fluidity can be obtained by blending fine silica in an appropriate proportion, that is, 5 to 40 ant% of coarse silica.
また、上記粗粒シリカと単分散球状微粒シリカの混合に
際しては、ボールミルやヘンシエルミギサーが適してい
るが、ボールミルを使用する場合には単分散球状シリカ
の破砕が起らないようにホールとしてブラッスチックボ
ールを使用する必要がある。In addition, when mixing the above-mentioned coarse-grained silica and monodispersed spherical fine-grained silica, a ball mill or a Henschelmigisser is suitable; Requires the use of a brass stick ball.
本発明の充填用シリカは、種々の樹脂、例えばエポキシ
樹脂、ポリイミド樹脂等にそのIC封止材用フィラーと
して配合することができ、また、その配合方法としては
、従来公λ0の封止材用シリカと同様に、加熱ロール等
の手段で混練する方法等を採用することができる。The filling silica of the present invention can be blended into various resins such as epoxy resins and polyimide resins as fillers for IC encapsulants. As with silica, a method of kneading using means such as heated rolls can be employed.
[実施例]
以下、実施例及び比較例に基づいて、本発明を具体的に
説明する。[Examples] The present invention will be specifically described below based on Examples and Comparative Examples.
実施例1〜6並びに比較例1及び2
エポキシ当量200のオルソクレゾールノホラックエポ
キシ樹脂(エポキシ樹脂A>80重量部、臭素化フェノ
ールノホラックエポキシ樹脂(エポキシ樹脂B)20重
量部、フェノール当量105のフェノールノボラック樹
脂(硬化剤>50重量部、2−メチルイミダゾール(硬
化促進剤)0.5車量部、カルナバワックス(離型剤)
1重量部、三酸化アンチモン(難燃剤)4重量部、γ−
グリシドキシプロピルトリメトキシシラン(カップリン
グ剤)1重湯部及びカーボンブラック(着色剤)1重量
部と、平均粒径16虜の破砕シリカ(シリカA)、平均
粒径7μmの破砕シリカ(シリカB)、平均粒径1.0
μmの単分散球状シリカ(シリカC)及び平均粒径0.
2虜の単分散球状シリカ(シリカD)とを第1表に示す
割合で配合し、加熱ロールで混練し、冷却した後扮砕し
、各実施例及び比較例のエポキシ樹脂組成物を1qだ。Examples 1 to 6 and Comparative Examples 1 and 2 Orthocresol nophorac epoxy resin with an epoxy equivalent of 200 (epoxy resin A > 80 parts by weight, brominated phenol nophorac epoxy resin (epoxy resin B) 20 parts by weight, phenol equivalent of 105 Phenol novolak resin (curing agent>50 parts by weight, 2-methylimidazole (hardening accelerator) 0.5 parts by weight, carnauba wax (mold release agent)
1 part by weight, 4 parts by weight of antimony trioxide (flame retardant), γ-
1 part of glycidoxypropyltrimethoxysilane (coupling agent) and 1 part of carbon black (coloring agent), crushed silica (Silica A) with an average particle size of 16 μm, crushed silica (Silica B) with an average particle size of 7 μm. ), average particle size 1.0
Monodisperse spherical silica (Silica C) of μm and average particle size of 0.
Two types of monodispersed spherical silica (Silica D) were blended in the proportions shown in Table 1, kneaded with heated rolls, cooled, and crushed to give 1 q of the epoxy resin compositions of each example and comparative example. .
これら各実施例及び比較例のエポキシ樹脂組成物につい
て、そのスパイラルフローとゲルタイムを測定し、樹、
脂中へのシリカの充填性と得られたエポキシ樹脂組成物
の流動性とを評価した。結果を第′1表に示す。The spiral flow and gel time of the epoxy resin compositions of these Examples and Comparative Examples were measured.
The filling properties of silica into fat and the fluidity of the obtained epoxy resin composition were evaluated. The results are shown in Table '1.
なお、スパイラルフローは1旧−1−66法に従って測
定し、また、ゲルタイムは月S K−6911法に従つ
−(175°Cで測定した。Incidentally, the spiral flow was measured according to the 1-1-66 method, and the gel time was measured at 175°C according to the Tsuki SK-6911 method.
実施例1及び3は平均粒径16/711+の粗粒シリカ
に平均粒径1μmの単分散球状微粒シリカをブレンドし
た場合であり、比較例1よりもスパイラルフローが長い
が、実施例2ではブレンドした単分散球状微粒シリカが
小さすぎるために効果が少ない。Examples 1 and 3 are cases where coarse silica with an average particle size of 16/711+ is blended with monodispersed spherical fine silica with an average particle size of 1 μm, and the spiral flow is longer than in Comparative Example 1, but in Example 2, the blend Because the monodispersed spherical fine silica particles are too small, the effect is low.
また、実施例4は平均粒径7虜の粗粒シリカに平均粒径
1μmの単分散球状微粒シリカをブレンドした場合であ
り、微粒シリカが大きすぎて効果が少ない。実施例5及
び6は同じ平均粒径7μmの粗粒シリカに平均粒径0.
3岬の単分散球状微粒シリカをブレンドしているが、比
較例2と比へ流動性が向上している。流動性の向上はシ
リカの充填性が向上したことによる。Further, in Example 4, monodispersed spherical fine silica with an average particle size of 1 μm is blended with coarse silica with an average particle size of 7 μm, and the fine silica particles are too large to have little effect. In Examples 5 and 6, coarse silica with the same average particle size of 7 μm was mixed with an average particle size of 0.
Although the monodispersed spherical fine silica of 3 Misaki is blended, the fluidity is improved compared to Comparative Example 2. The improvement in fluidity is due to the improvement in the filling properties of silica.
なお、粗粒シリカ、すなわちシリカA及びシリカBと単
分散球状微粒シリカ、すなわちシリカC及びシリカDと
を種々の組合ばて配合した場合について、そのブレンド
による流動性向上効果の有無を調べた。結果を第2表に
示す。なお、第2表において、ブレンドによる流動性向
上効果がある場合を○、少ない場合を△として表した。In addition, various combinations of coarse silica, ie, silica A and silica B, and monodispersed spherical fine silica, ie, silica C and silica D, were blended to see if the blend had an effect on improving fluidity. The results are shown in Table 2. In Table 2, cases where there is a flowability improvement effect due to blending are expressed as ◯, and cases where there is little are expressed as △.
[発明の効果1
本発明の封止樹脂充填用シリカは、封止樹脂中への充填
性及びこれを使用して調製された封止(カ1脂組成物の
成形時の流動性が著しく向上し、これによって未充填、
ボイド発生等の成形性の問題を解決でき、また、シリカ
の高密度充填ににり熱膨張係数や吸水率を小さくし、熱
応力や水分の問題を解決することができる。[Effect of the invention 1] The silica for filling a sealing resin of the present invention has a remarkable improvement in the filling property into the sealing resin and the fluidity during molding of the sealant prepared using the silica (potassium composition). and by this unfilled,
It is possible to solve moldability problems such as void generation, and it is also possible to reduce thermal expansion coefficient and water absorption due to high density packing of silica, and solve problems of thermal stress and moisture.
持直出願人 新日鐵化学株式会社Applicant: Nippon Steel Chemical Co., Ltd.
Claims (2)
球状の粗粒シリカに、平均粒径dが0.1〜3μmの範
囲の単分散球状微粒シリカを全体の5〜40重量%混合
してなることを特徴とする封止樹脂充填用シリカ。(1) 5 to 40% by weight of the total monodispersed spherical fine silica with an average particle diameter d of 0.1 to 3 μm is mixed with crushed or spherical coarse silica with an average particle diameter D of 7 to 30 μm. A silica for filling a sealing resin characterized by:
の平均粒径dとの間に0.02D<d<0.1Dの関係
がある請求項1記載の封止樹脂充填用シリカ。(2) The silica for sealing resin filling according to claim 1, wherein there is a relationship of 0.02D<d<0.1D between the average particle diameter D of the coarse silica and the average particle diameter d of the monodispersed spherical fine silica. .
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63091248A JPH07103263B2 (en) | 1988-04-15 | 1988-04-15 | Silica for filling sealing resin |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63091248A JPH07103263B2 (en) | 1988-04-15 | 1988-04-15 | Silica for filling sealing resin |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01263131A true JPH01263131A (en) | 1989-10-19 |
| JPH07103263B2 JPH07103263B2 (en) | 1995-11-08 |
Family
ID=14021121
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63091248A Expired - Lifetime JPH07103263B2 (en) | 1988-04-15 | 1988-04-15 | Silica for filling sealing resin |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH07103263B2 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5618872A (en) * | 1992-06-12 | 1997-04-08 | Merck Patent Gesellschaft Mit Beschrankter Haftung | Inorganic fillers and organic matrix materials with refractive index adaptation |
| JP2001048521A (en) * | 1999-08-13 | 2001-02-20 | Denki Kagaku Kogyo Kk | Fine spherical silica powder and its production method and use |
| JP2002201339A (en) * | 2000-12-28 | 2002-07-19 | Toagosei Co Ltd | Particulate silica composition and epoxy resin composition comprising the same |
| US7327039B2 (en) | 2002-05-23 | 2008-02-05 | 3M Innovative Properties Company | Nanoparticle filled underfill |
| CN100412699C (en) * | 2004-03-23 | 2008-08-20 | 精工爱普生株式会社 | Toner, developing device using same |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5922955A (en) * | 1982-07-29 | 1984-02-06 | Toshiba Chem Corp | Resin composition for sealing semiconductor |
| JPS61254619A (en) * | 1985-05-07 | 1986-11-12 | Shin Etsu Chem Co Ltd | Epoxy resin composition for semiconductor encapsulation |
-
1988
- 1988-04-15 JP JP63091248A patent/JPH07103263B2/en not_active Expired - Lifetime
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5922955A (en) * | 1982-07-29 | 1984-02-06 | Toshiba Chem Corp | Resin composition for sealing semiconductor |
| JPS61254619A (en) * | 1985-05-07 | 1986-11-12 | Shin Etsu Chem Co Ltd | Epoxy resin composition for semiconductor encapsulation |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5618872A (en) * | 1992-06-12 | 1997-04-08 | Merck Patent Gesellschaft Mit Beschrankter Haftung | Inorganic fillers and organic matrix materials with refractive index adaptation |
| JP2001048521A (en) * | 1999-08-13 | 2001-02-20 | Denki Kagaku Kogyo Kk | Fine spherical silica powder and its production method and use |
| JP2002201339A (en) * | 2000-12-28 | 2002-07-19 | Toagosei Co Ltd | Particulate silica composition and epoxy resin composition comprising the same |
| US7327039B2 (en) | 2002-05-23 | 2008-02-05 | 3M Innovative Properties Company | Nanoparticle filled underfill |
| US7482201B2 (en) | 2002-05-23 | 2009-01-27 | 3M Innovative Properties Company | Nanoparticle filled underfill |
| CN100412699C (en) * | 2004-03-23 | 2008-08-20 | 精工爱普生株式会社 | Toner, developing device using same |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH07103263B2 (en) | 1995-11-08 |
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