JPH01277802A - Color filter - Google Patents
Color filterInfo
- Publication number
- JPH01277802A JPH01277802A JP63108701A JP10870188A JPH01277802A JP H01277802 A JPH01277802 A JP H01277802A JP 63108701 A JP63108701 A JP 63108701A JP 10870188 A JP10870188 A JP 10870188A JP H01277802 A JPH01277802 A JP H01277802A
- Authority
- JP
- Japan
- Prior art keywords
- ink
- film
- org
- color filter
- metal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims abstract description 12
- 238000007639 printing Methods 0.000 claims abstract description 10
- 238000001312 dry etching Methods 0.000 claims abstract description 9
- 229910052751 metal Inorganic materials 0.000 claims abstract description 8
- 239000002184 metal Substances 0.000 claims abstract description 8
- 230000018044 dehydration Effects 0.000 claims abstract description 4
- 238000006297 dehydration reaction Methods 0.000 claims abstract description 4
- 229910052739 hydrogen Inorganic materials 0.000 claims abstract description 4
- 239000001257 hydrogen Substances 0.000 claims abstract description 4
- 238000006482 condensation reaction Methods 0.000 claims abstract description 3
- 150000002902 organometallic compounds Chemical class 0.000 claims description 8
- 239000003086 colorant Substances 0.000 claims description 5
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 1
- 239000011521 glass Substances 0.000 abstract description 10
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract description 3
- 239000000976 ink Substances 0.000 description 43
- 238000000034 method Methods 0.000 description 13
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 10
- 239000005388 borosilicate glass Substances 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 238000007645 offset printing Methods 0.000 description 4
- 239000011148 porous material Substances 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 239000000049 pigment Substances 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 238000004380 ashing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 description 2
- DVQHRBFGRZHMSR-UHFFFAOYSA-N sodium methyl 2,2-dimethyl-4,6-dioxo-5-(N-prop-2-enoxy-C-propylcarbonimidoyl)cyclohexane-1-carboxylate Chemical compound [Na+].C=CCON=C(CCC)[C-]1C(=O)CC(C)(C)C(C(=O)OC)C1=O DVQHRBFGRZHMSR-UHFFFAOYSA-N 0.000 description 2
- LFQCEHFDDXELDD-UHFFFAOYSA-N tetramethyl orthosilicate Chemical compound CO[Si](OC)(OC)OC LFQCEHFDDXELDD-UHFFFAOYSA-N 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- 108010010803 Gelatin Proteins 0.000 description 1
- 235000000177 Indigofera tinctoria Nutrition 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- QCWXUUIWCKQGHC-UHFFFAOYSA-N Zirconium Chemical compound [Zr] QCWXUUIWCKQGHC-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- FPCJKVGGYOAWIZ-UHFFFAOYSA-N butan-1-ol;titanium Chemical compound [Ti].CCCCO.CCCCO.CCCCO.CCCCO FPCJKVGGYOAWIZ-UHFFFAOYSA-N 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000008119 colloidal silica Substances 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000004043 dyeing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010304 firing Methods 0.000 description 1
- 238000007647 flexography Methods 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 229920000159 gelatin Polymers 0.000 description 1
- 239000008273 gelatin Substances 0.000 description 1
- 235000019322 gelatine Nutrition 0.000 description 1
- 235000011852 gelatine desserts Nutrition 0.000 description 1
- 229940097275 indigo Drugs 0.000 description 1
- COHYTHOBJLSHDF-UHFFFAOYSA-N indigo powder Natural products N1C2=CC=CC=C2C(=O)C1=C1C(=O)C2=CC=CC=C2N1 COHYTHOBJLSHDF-UHFFFAOYSA-N 0.000 description 1
- BFXIKLCIZHOAAZ-UHFFFAOYSA-N methyltrimethoxysilane Chemical compound CO[Si](C)(OC)OC BFXIKLCIZHOAAZ-UHFFFAOYSA-N 0.000 description 1
- 239000005416 organic matter Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- RMAQACBXLXPBSY-UHFFFAOYSA-N silicic acid Chemical compound O[Si](O)(O)O RMAQACBXLXPBSY-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- VSSLEOGOUUKTNN-UHFFFAOYSA-N tantalum titanium Chemical compound [Ti].[Ta] VSSLEOGOUUKTNN-UHFFFAOYSA-N 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Landscapes
- Optical Filters (AREA)
Abstract
Description
［産業上の利用分野］
本発明はカラー液晶表示素子に使用されるカラーフィル
ターに関するものである。
〔従来の技術）
カラーフィルターは、擾像管や固体邊像素子との組み合
せでカラービデオカメラへ応用される一方、カラー表示
素子への応用もされてきている。
カラーフィルターは、ガラス等の透明基板上に三原色を
着色したカラーモザイクやカラーストライプを所定のパ
ターンに基づいて配置したものである。
カラーフィルターは、例えば、印刷カラーフィルターの
場合透明基板としてガラス基板上に、アクリル樹脂や、
ゼラチン等の透明有機樹脂層を形成し、その上に所定の
色パターンに基づいて、赤、緑、青の３原色の染料で染
色して作られる。
しかし、使用目的によって、単色あるいは二色の色パタ
ーンの場合もある。
平版、凸版、凹版、グラビア、スクリーン、フレキソ等
の印刷技術によって、赤、緑、青の３原色のインキを所
定のパターンに形成したものである。
カラーフィルターの各色画素の形状、位置精度は、使用
されるデイスプレィの大きさによって異なる０例えば、
ハンディークイブ（画面サイズが５インチ前後）のカラ
ー液晶ＴＶの場合、必要とされる各色の形状、位置精度
は±Ｌｏｕｍ以内、望ましくは±５μｍ以内である。
又、印刷カラーフィルターの各色画素のインキ厚みは、
２〜３μｍは必要である。この理由は、インキは顔料分
散タイプのものであり、ある厚み以上ないと十分濃い色
にならず、カラー液晶ＴＶのカラーフィルターとして不
適当だからである。[Industrial Application Field] The present invention relates to a color filter used in a color liquid crystal display element. [Prior Art] Color filters have been applied to color video cameras in combination with image tubes and solid-state image elements, and have also been applied to color display elements. A color filter is one in which a color mosaic or color stripes colored in three primary colors are arranged in a predetermined pattern on a transparent substrate such as glass. For example, in the case of printed color filters, color filters are made of acrylic resin, on a glass substrate as a transparent substrate, etc.
It is made by forming a transparent organic resin layer such as gelatin, and dyeing the layer with three primary colors of red, green, and blue based on a predetermined color pattern. However, depending on the purpose of use, it may have a monochrome or two-color pattern. Inks of the three primary colors of red, green, and blue are formed into a predetermined pattern using printing techniques such as planography, letterpress, intaglio, gravure, screen, and flexography. The shape and positional accuracy of each color pixel of the color filter vary depending on the size of the display used. For example,
In the case of a handheld color liquid crystal TV (with a screen size of about 5 inches), the shape and position accuracy of each color is required to be within ±Loum, preferably within ±5 μm. Also, the ink thickness of each color pixel of the printed color filter is
2 to 3 μm is necessary. The reason for this is that the ink is of a pigment dispersion type, and unless it is thicker than a certain level, it will not produce a sufficiently deep color, making it unsuitable for use as a color filter for color liquid crystal TVs.
ガラス上にインキを印刷する場合、紙の上と比較して、
インキの転写性が極めて悪い、この結果ｌ）画素が所定
の形状にならない。
２）画素のインキ厚みにムラが生じる。
という課題があった。When printing ink on glass, compared to paper,
The transferability of the ink is extremely poor, resulting in l) pixels not having a predetermined shape; 2) Unevenness occurs in the ink thickness of pixels. There was a problem.
本発明は、かかる課題を解決するために、ガラスからな
る基体の表面に、有機金属化合物（構造式がＭ （ＯＲ
）ｎＲ′ｍ−ｎでＭは金属を示し、Ｒは有機鎖で、Ｒ′
はＯＲと同一かもしくは水素を含む有機鎖でｍ、ｎは整
数でかつｍは金属の価数である）の脱水縮合反応による
膜を形成後、ドライエツチングによって該膜中の有機成
分を選択的にエツチングしたことにより、膜を多孔質化
しインキの転写性を良くしたことを特徴としている。
有機金属化合物において１Ｍはシリコン、チタンタンタ
ル、ジルコニウム専有る。
Ｒはメチル基、エチル基を持つものが一般的であり、水
素を含む有機鎖Ｒ″はやはりメチル基。
エチル基をはじめとして様々な基があるが特に限定はな
い。
有機金属化合物は単独で用いても良いが、シリカゾルな
どを混合して用いても良い。
塗布方法としては、スピンコード法、スプレー法、ロー
ルコータ−法、スクリーン印刷法等がある。
塗布後は焼成により、脱水縮合させ、硬質化する。焼成
温度は１５０℃焼後が好ましく、後に印刷したインキを
焼きつける温度と同等以上が好ましい。
膜厚は、０．０５μｍ〜５ｕｍが好ましい。
０．０５μｍ以下の膜厚であると１次の工程のドライエ
ツチングで膜がなくなってしまう場合もあり、又、５μ
ｍ以上あっても、インキの転写性は変わらず、むしろ膜
の内部応力によりクラックが生じやすくなる。
次の工程のドライエツチングは、本式が大きく分けて２
つある。プラズマエツチング法とイオンエツチング法で
あるが１本発明の目的は膜のエツチングよりむしろ、ｍ
中の有機物を灰化選択エツチングすることにより、多孔
質膜とするものである。
どちらのエツチング法を用いてもよいが１反応性ガスと
しては、０８．あるいは０．にＡｒ、ＣＦ４、Ｓ ｉ
Ｆ ｓ、ＣＨ−、Ｃ＊ Ｈｚ、Ｃｓ Ｈ４、Ｃ，Ｈ−の
どれかを混合したもの、Ｈ８あるいはＨｘに０２あるい
はＮ２を混合したもの、ＡｒとＣＨ４を混合したもの等
が適している。In order to solve this problem, the present invention provides an organometallic compound (having a structural formula of M (OR
)nR'm-n, M represents a metal, R is an organic chain, and R'
is the same as OR or is an organic chain containing hydrogen; m, n is an integer, and m is the valence of the metal) After forming a film by dehydration condensation reaction, the organic components in the film are selectively removed by dry etching. It is characterized by making the membrane porous and improving ink transferability by etching it. Among organometallic compounds, 1M is exclusive to silicon, titanium tantalum, and zirconium. Generally, R has a methyl group or an ethyl group, and the hydrogen-containing organic chain R'' is also a methyl group. There are various groups including ethyl group, but there are no particular limitations. Organometallic compounds can be used alone It may be used, but it may also be used in combination with silica sol etc. Application methods include spin code method, spray method, roll coater method, screen printing method, etc. After application, dehydration and condensation are performed by baking. , hardens.The firing temperature is preferably 150°C after baking, and is preferably equal to or higher than the temperature at which the ink printed later is baked.The film thickness is preferably 0.05 μm to 5 μm.The film thickness is 0.05 μm or less. In some cases, the film may disappear during the dry etching in the first step, and
Even if it is more than m, the transferability of the ink does not change, but rather cracks are more likely to occur due to the internal stress of the film. The next process, dry etching, can be roughly divided into two types:
There is one. Although there are plasma etching methods and ion etching methods, the purpose of the present invention is not to etch a film but to
A porous membrane is created by ashing and selectively etching the organic matter inside. Either etching method may be used, but as one reactive gas, 08. Or 0. Ar, CF4, Si
A mixture of Fs, CH-, C* Hz, Cs H4, C, H-, a mixture of H8 or Hx with 02 or N2, a mixture of Ar and CH4, etc. are suitable.
ガラスの印刷適正の悪さは１紙と比較して、ガラス表面
に細孔がないということに由来する。
インキは、チキントロピー流体であり、ずり応力が増し
たり、応力のかかる時間がたつにつれて粘度は低下する
。
通常の印刷の場合、胴についたインキの層の中で、胴と
被印刷基体に近い部分がすり速度が大きく、粘度が低く
なる。胴についたインキ層は、インキ粘度の低いところ
で切れ、被印刷体に転写される。
ここでガラスのような細孔のない基板の場合、被印刷基
体に近い部分が、粘度が一番低いため、転写性が悪くな
る。
一方、紙のような被印刷基体であると、表面に微細孔が
あり、インキの印刷圧を受けた瞬間に、ビヒクルの一部
が顔料から分かれて１紙の多孔性表面に吸収、濾過され
る。このため、紙に近い部分の顔料濃度が高くなり、し
たがって、粘度が高くなる。
このため、単純化して言えばインキは胴に近い粘度の低
いところで切れるため、転写性が良くなる。
ガラス表面に多孔質膜を形成した場合にも同様のことが
いえる。
本発明で用いる有機金属化合物からの膜は、微細な孔を
持っているが、成膜後ドライエツチングをすることによ
って、細孔数や細孔径を変えることができ、より印刷転
写性の高い多孔質層を形成することができる。
こうして得られた多孔質層の上に所定のパターンを持っ
た一色以上°のインキ層を形成することにより、画素形
状の良い、インキ厚みにムラのない印刷カラーフィルタ
ーが得られる。
次に実施例を用いて詳細に説明する。
〔比 較 例］
鏡面のホウケイ酸ガラスに、オフセット印刷法によって
１辺が２００ ｕ ｍの画素を印刷した。
使用したインキは東洋インキ■製ＴＫマークＶ藍りであ
った。使用した２３版の画素形状と比較して１画素の平
均的形状は、±３０μｍ以上の形状のばらつきがあった
。また、図２には、インキの転写性を示すために、任意
に選んだガラス上の画素のインキ厚みを画素断面にそっ
て測定した。
第２図かられかるように、画素内でインキの厚みバラツ
キがあり、はなはだしい部分はインキが転写しておらず
、カラーフィルターとしては使用できない。
［実施例１］
鏡面のホウケイ酸ガラス上に、
φメチルトリメトキシシラン １０８重量部・イソ
プロパツール分散 ２１重量部コロイダルシ
リカ
（触媒化成工業製、０ＳＣＡＬ−１４３２）０イソプロ
パツール ４３９重量部・０．０５Ｎ塩酸
５２重量部・フローロントロール剤
微量（日本ユニカー製Ｌ−７６０４）
からなる有機金属化合物溶液をスピンコードにて塗布、
乾燥後、１７０℃で焼成した。膜厚は２．５μｍであっ
た。
この基板を、東京応化製、プラズマアッシング装置（Ｏ
ＰＭ−ＥＭＩ ０００）で３分間表面エツチングを行っ
た０反応ガスとして０２とＮ２の混合ガスを用いた。
続いてこの基板上に比較例と同様の方法で１辺が２００
μｍの画素をオフセット印刷法により所定のパターンに
印刷した。インキは比較例で用いた青インキを用いた。
使用した２３版の画素形状と比較して、印刷画素の平均
形状は、±ＬＯｕｍ以下の形状のばらつきであった。ま
た、第１図にインキの転写性を示すために比較例１と同
様の厚み測定を行った。
画素にインキは均一に転写されており、画素形状精度、
インキ厚みともにカラーフィルターとして使用可能な範
囲にあった。このあと、赤、緑のインキを同様に所定の
パターンに印刷した０画素形状、インキ厚みともに青の
場合と同等であり、カラーフィルターとして使用可能な
ものとなった。The poor printing suitability of glass stems from the fact that there are no pores on the glass surface compared to paper. The ink is a chicken-tropic fluid, and its viscosity decreases as shear stress increases or as time passes under stress. In the case of normal printing, in the ink layer attached to the cylinder, the part near the cylinder and the substrate to be printed has a high rubbing speed and a low viscosity. The ink layer adhering to the cylinder breaks at a point where the ink viscosity is low and is transferred to the printing medium. In the case of a substrate without pores, such as glass, the viscosity is lowest in the portion closest to the substrate to be printed, resulting in poor transferability. On the other hand, a printing substrate such as paper has micropores on its surface, and the moment it receives the printing pressure of the ink, some of the vehicle is separated from the pigment, absorbed into the porous surface of the paper, and filtered. Ru. For this reason, the pigment concentration in the area close to the paper becomes high, and therefore the viscosity becomes high. For this reason, to put it simply, the ink is cut off at a place with low viscosity near the cylinder, which improves transferability. The same thing can be said when a porous film is formed on the glass surface. The film made from the organometallic compound used in the present invention has fine pores, but by dry etching after film formation, the number and diameter of the pores can be changed, resulting in a porous structure with better printing transferability. can form a stratified layer. By forming an ink layer of one or more colors having a predetermined pattern on the porous layer thus obtained, a printed color filter with good pixel shape and uniform ink thickness can be obtained. Next, a detailed explanation will be given using examples. [Comparative Example] Pixels each having a side of 200 μm were printed on mirror-surfaced borosilicate glass by an offset printing method. The ink used was TK Mark V indigo manufactured by Toyo Ink ■. Compared to the pixel shape of the 23rd edition used, the average shape of one pixel had a shape variation of ±30 μm or more. Furthermore, in order to show the transferability of the ink, FIG. 2 shows the ink thickness of an arbitrarily selected pixel on glass, which was measured along the cross section of the pixel. As can be seen from Figure 2, there is variation in the thickness of the ink within the pixel, and the ink is not transferred to significant areas, making it unusable as a color filter. [Example 1] On mirror-surfaced borosilicate glass, 108 parts by weight of φ methyltrimethoxysilane, 21 parts by weight of isopropanol dispersed, 0 colloidal silica (manufactured by Catalysts Kasei Kogyo Co., Ltd., 0SCAL-1432), 0 parts by weight of isopropanol, 0 An organometallic compound solution consisting of 52 parts by weight of .05N hydrochloric acid and a trace amount of fluorontrol agent (Nippon Unicar L-7604) was applied using a spin cord.
After drying, it was fired at 170°C. The film thickness was 2.5 μm. This substrate was processed using a plasma ashing device (O
A mixed gas of 02 and N2 was used as the reaction gas for surface etching for 3 minutes using PM-EMI 000). Next, on this board, one side was 200 mm in the same manner as in the comparative example.
Pixels of μm were printed in a predetermined pattern by an offset printing method. The ink used was the blue ink used in the comparative example. Compared to the pixel shapes of the 23 plates used, the average shape of the printed pixels had a shape variation of ±LOum or less. Further, in order to show the ink transferability in FIG. 1, the same thickness measurement as in Comparative Example 1 was performed. Ink is transferred uniformly to pixels, ensuring pixel shape accuracy,
Both ink thicknesses were within a range that could be used as a color filter. After that, red and green inks were similarly printed in a predetermined pattern, and the 0 pixel shape and ink thickness were both the same as in the case of blue, making it possible to use it as a color filter.
【実施例２】
鏡面のホウケイ酸ガラスに有機金属化合物と１゜で、テ
トラメトキシシラン（日本曹達製）をスピンコードによ
り塗布した。
テトラメトキシシランは、イソプロピルアルコールによ
り１％に希釈したものを用いた。この後乾燥、１７０℃
で焼成した。 Ｉ！厚は０．１５ｕｍであった。
この後、実施例１と同様にドライエツチングを行い、オ
フセット印刷機を用いて、青、赤、緑のインキを所定の
パターンに印刷し、カラーフィルターを作製した。イン
キで形成された画素の形状精度及びインキの厚みの均一
性は実施例１と同様であり、インキの転写性が改善され
ており、カラーフィルターとして使用可能なものとなっ
た。
〔実施例３１
鏡面のホウケイ酸ガラスに有機金属化合物としてテトラ
ブトキシチタン（日本曹達製）の１０％イソプロピルア
ルコール液をディッピング法によって塗布した。乾燥後
、１７０℃で焼成し膜厚を測定したところ、０．３１ｔ
ｍであった。実施例１と同様にドライエツチングを行い
、オフセット印刷機を用いて青、赤、緑のインキを所定
のパターンに印刷し、カラーフィルターを作製した。イ
ンキで形成された画素の形状精度及びインキの厚みの均
一性は実施例１と同様であり、インキの転写性が改善さ
れており、カラーフィルターとして使用可能なものとな
った。
［発明の効果１
以上の実施例でわかるように１本法で作ったカラーフィ
ルターは、インキの転写性が良いため、画素形状の精度
はアップし、又インキ膜厚は均一となった。これにより
印刷カラーフィルターが安定して精度のよいものができ
るようになった。[Example 2] Tetramethoxysilane (manufactured by Nippon Soda) was coated on mirror-surfaced borosilicate glass at an angle of 1° with the organometallic compound using a spin cord. Tetramethoxysilane was diluted to 1% with isopropyl alcohol. After that, dry at 170℃
It was fired in I! The thickness was 0.15 um. Thereafter, dry etching was performed in the same manner as in Example 1, and blue, red, and green inks were printed in a predetermined pattern using an offset printing machine to produce a color filter. The shape accuracy of the pixels formed with the ink and the uniformity of the ink thickness were the same as in Example 1, and the ink transferability was improved, making it usable as a color filter. [Example 31] A 10% isopropyl alcohol solution of tetrabutoxytitanium (manufactured by Nippon Soda) as an organometallic compound was applied to mirror-surfaced borosilicate glass by dipping. After drying, it was baked at 170℃ and the film thickness was measured, and it was 0.31t.
It was m. Dry etching was performed in the same manner as in Example 1, and blue, red, and green inks were printed in a predetermined pattern using an offset printing machine to produce a color filter. The shape accuracy of the pixels formed with the ink and the uniformity of the ink thickness were the same as in Example 1, and the ink transferability was improved, making it usable as a color filter. [Effect of the Invention 1] As can be seen from the above examples, the color filter made by the one-line method had good ink transferability, so the precision of pixel shape was improved and the ink film thickness was uniform. This has made it possible to print color filters that are stable and highly accurate.
第１図は本発明で形成されたカラーフィルターのインキ
画素の膜厚を示した図。
第２図は従来法で形成されたカラーフィルターのインキ
画素の膜厚を示した図。
ａ）・・・インキ膜厚の測定部位
ｂ）・・・インキ膜厚の分布
以上
出願人 セイコーエプソン株式会社FIG. 1 is a diagram showing the film thickness of ink pixels of a color filter formed according to the present invention. FIG. 2 is a diagram showing the film thickness of ink pixels of a color filter formed by a conventional method. a)... Ink film thickness measurement location b)... Ink film thickness distribution or above Applicant: Seiko Epson Corporation
Claims (1)
Ｒ）＿ｎＲ′＿ｍ＿−＿ｎでＭは金属を示し、Ｒは有機
鎖で、Ｒ′はＯＲと同一かもしくは水素を含む有機鎖で
ｍ、ｎは整数でかつｍは金属の価数である）の脱水縮合
反応による膜を形成後、ドライエッチングによって該膜
中の有機成分を選択的にエッチングした後、該基板上に
所定のパターンに１色以上のインキ層を印刷によって形
成したことを特徴とするカラーフィルター。An organometallic compound (with a structural formula of M(O)
R)_nR'_m_-_n, M represents a metal, R is an organic chain, R' is the same as OR or an organic chain containing hydrogen, m and n are integers, and m is the valence of the metal) After forming a film by a dehydration condensation reaction, organic components in the film are selectively etched by dry etching, and then an ink layer of one or more colors is formed in a predetermined pattern on the substrate by printing. color filter.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63108701A JPH01277802A (en) | 1988-04-30 | 1988-04-30 | Color filter |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP63108701A JPH01277802A (en) | 1988-04-30 | 1988-04-30 | Color filter |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01277802A true JPH01277802A (en) | 1989-11-08 |
Family
ID=14491434
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP63108701A Pending JPH01277802A (en) | 1988-04-30 | 1988-04-30 | Color filter |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01277802A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000037972A1 (en) * | 1998-12-21 | 2000-06-29 | Seiko Epson Corporation | Color filter and method of manufacture thereof |
| US7413272B2 (en) | 2004-11-04 | 2008-08-19 | Applied Materials, Inc. | Methods and apparatus for precision control of print head assemblies |
| US7460267B2 (en) | 2005-07-15 | 2008-12-02 | Applied Materials, Inc. | Green printing ink for color filter applications |
| US7514187B2 (en) | 1998-12-21 | 2009-04-07 | Seiko Epson Corporation | Color filter and manufacturing method therefor |
| US7544723B2 (en) | 2005-07-15 | 2009-06-09 | Applied Materials, Inc. | Blue printing ink for color filter applications |
| US7556334B2 (en) | 2004-11-04 | 2009-07-07 | Applied Materials, Inc. | Methods and apparatus for aligning print heads |
| US7611217B2 (en) | 2005-09-29 | 2009-11-03 | Applied Materials, Inc. | Methods and systems for inkjet drop positioning |
| US7637587B2 (en) | 2007-08-29 | 2009-12-29 | Applied Materials, Inc. | System and method for reliability testing and troubleshooting inkjet printers |
| US7803420B2 (en) | 2006-12-01 | 2010-09-28 | Applied Materials, Inc. | Methods and apparatus for inkjetting spacers in a flat panel display |
-
1988
- 1988-04-30 JP JP63108701A patent/JPH01277802A/en active Pending
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2000037972A1 (en) * | 1998-12-21 | 2000-06-29 | Seiko Epson Corporation | Color filter and method of manufacture thereof |
| US7514187B2 (en) | 1998-12-21 | 2009-04-07 | Seiko Epson Corporation | Color filter and manufacturing method therefor |
| US7413272B2 (en) | 2004-11-04 | 2008-08-19 | Applied Materials, Inc. | Methods and apparatus for precision control of print head assemblies |
| US7556334B2 (en) | 2004-11-04 | 2009-07-07 | Applied Materials, Inc. | Methods and apparatus for aligning print heads |
| US7625063B2 (en) | 2004-11-04 | 2009-12-01 | Applied Materials, Inc. | Apparatus and methods for an inkjet head support having an inkjet head capable of independent lateral movement |
| US7637580B2 (en) | 2004-11-04 | 2009-12-29 | Applied Materials, Inc. | Methods and apparatus for a high resolution inkjet fire pulse generator |
| US7460267B2 (en) | 2005-07-15 | 2008-12-02 | Applied Materials, Inc. | Green printing ink for color filter applications |
| US7544723B2 (en) | 2005-07-15 | 2009-06-09 | Applied Materials, Inc. | Blue printing ink for color filter applications |
| US7611217B2 (en) | 2005-09-29 | 2009-11-03 | Applied Materials, Inc. | Methods and systems for inkjet drop positioning |
| US7803420B2 (en) | 2006-12-01 | 2010-09-28 | Applied Materials, Inc. | Methods and apparatus for inkjetting spacers in a flat panel display |
| US7637587B2 (en) | 2007-08-29 | 2009-12-29 | Applied Materials, Inc. | System and method for reliability testing and troubleshooting inkjet printers |
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