JPH01285729A - 絶対圧力制御装置 - Google Patents

絶対圧力制御装置

Info

Publication number
JPH01285729A
JPH01285729A JP11671988A JP11671988A JPH01285729A JP H01285729 A JPH01285729 A JP H01285729A JP 11671988 A JP11671988 A JP 11671988A JP 11671988 A JP11671988 A JP 11671988A JP H01285729 A JPH01285729 A JP H01285729A
Authority
JP
Japan
Prior art keywords
chamber
pressure
absolute pressure
control
air
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11671988A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0463291B2 (de
Inventor
Masayoshi Sakuma
正芳 佐久間
Toshihiko Yamazaki
俊彦 山崎
Masayuki Maeda
真之 前田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Plant Engineering and Construction Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Plant Engineering and Construction Co Ltd filed Critical Hitachi Plant Engineering and Construction Co Ltd
Priority to JP11671988A priority Critical patent/JPH01285729A/ja
Publication of JPH01285729A publication Critical patent/JPH01285729A/ja
Publication of JPH0463291B2 publication Critical patent/JPH0463291B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
  • Control Of Fluid Pressure (AREA)
JP11671988A 1988-05-13 1988-05-13 絶対圧力制御装置 Granted JPH01285729A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11671988A JPH01285729A (ja) 1988-05-13 1988-05-13 絶対圧力制御装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11671988A JPH01285729A (ja) 1988-05-13 1988-05-13 絶対圧力制御装置

Publications (2)

Publication Number Publication Date
JPH01285729A true JPH01285729A (ja) 1989-11-16
JPH0463291B2 JPH0463291B2 (de) 1992-10-09

Family

ID=14694114

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11671988A Granted JPH01285729A (ja) 1988-05-13 1988-05-13 絶対圧力制御装置

Country Status (1)

Country Link
JP (1) JPH01285729A (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018128184A (ja) * 2017-02-07 2018-08-16 エスペック株式会社 絶対圧力制御システム及び絶対圧力制御方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018128184A (ja) * 2017-02-07 2018-08-16 エスペック株式会社 絶対圧力制御システム及び絶対圧力制御方法

Also Published As

Publication number Publication date
JPH0463291B2 (de) 1992-10-09

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