JPH0128672Y2 - - Google Patents
Info
- Publication number
- JPH0128672Y2 JPH0128672Y2 JP17829682U JP17829682U JPH0128672Y2 JP H0128672 Y2 JPH0128672 Y2 JP H0128672Y2 JP 17829682 U JP17829682 U JP 17829682U JP 17829682 U JP17829682 U JP 17829682U JP H0128672 Y2 JPH0128672 Y2 JP H0128672Y2
- Authority
- JP
- Japan
- Prior art keywords
- etching
- tank
- liquid
- tanks
- cooling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000007788 liquid Substances 0.000 claims description 35
- 239000004065 semiconductor Substances 0.000 claims description 27
- 238000001816 cooling Methods 0.000 claims description 17
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 238000005530 etching Methods 0.000 description 81
- 235000012431 wafers Nutrition 0.000 description 23
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 19
- 238000005406 washing Methods 0.000 description 15
- 239000000498 cooling water Substances 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 101100165177 Caenorhabditis elegans bath-15 gene Proteins 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 125000000896 monocarboxylic acid group Chemical group 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 238000012805 post-processing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17829682U JPS5981030U (ja) | 1982-11-24 | 1982-11-24 | 半導体製造装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP17829682U JPS5981030U (ja) | 1982-11-24 | 1982-11-24 | 半導体製造装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5981030U JPS5981030U (ja) | 1984-05-31 |
| JPH0128672Y2 true JPH0128672Y2 (fr) | 1989-08-31 |
Family
ID=30387134
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP17829682U Granted JPS5981030U (ja) | 1982-11-24 | 1982-11-24 | 半導体製造装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5981030U (fr) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61133633A (ja) * | 1984-12-03 | 1986-06-20 | Mitsubishi Electric Corp | 半導体ウエ−ハの洗浄装置 |
-
1982
- 1982-11-24 JP JP17829682U patent/JPS5981030U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5981030U (ja) | 1984-05-31 |
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