JPH01296420A - Magnetic recording or reproducing device - Google Patents

Abstract

PURPOSE:To set recording track width to be extremely small and to obtain the high density of recording in a perpendicular magnetic recording system by making the film thickness direction of a magnetic film, which constitutes the main magnetic pole of a thin film magnetic head, coincide with a track width direction. CONSTITUTION:On a substrate 5 to be composed of the magnetic material of high permeability, a coil 7 to be composed of a conductive film and to include a leading-out electrode is formed by a thin film depositing process and a photolitho-etching process. An insulation film 8 is provided on this coil and a main magnetic pole 9 of the high permeability material is further formed by the thin film deposition and photolithography-etching processes. Then, a rear edge part is joined through a contact whole to the substrate 5. Since a recording medium 12 is slid and traveled in an A direction or a reverse direction and recording and reproducing is executed, the thickness of the magnetic film in the main magnetic pole goes to be the track recording width. When the control of the film thickness is exactly executed, the track width can be set to be small and uniform with high accuracy and further, the high density of the recording can be obtained.

Description

[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a device for magnetically recording or reproducing information on a magnetic recording medium, and in particular, a device in which a main pole made of a magnetic film is provided on a substrate with an insulating film interposed therebetween. , relates to a magnetic recording or reproducing device that magnetically records or reproduces information using a perpendicular magnetic recording method by moving a thin-film magnetic head in which the end surface of the main pole faces a magnetic recording medium relative to the recording medium. .

[Prior art] Conventional general magnetic recording was based on a longitudinal recording method in which residual magnetization was formed in the in-plane direction of a magnetic recording medium using a ring-shaped magnetic head. As the density increased, the demagnetizing field within the recording medium increased, putting a limit on high-density recording.

The perpendicular magnetic recording method was proposed to solve this problem, and it creates residual magnetization alternately in the thickness direction of the recording medium, that is, in the direction perpendicular to the recording surface. It has been confirmed that recording is possible. Furthermore, in order to achieve even higher density recording, high-speed information transfer is necessary, and for this purpose, multiple signal recording methods are used to simultaneously record and reproduce a large number of information signals, that is, information data, on the same recording medium. Channelization is considered an important research topic. To this end, research and development of a perpendicular magnetic recording system using a multi-channel magnetic head has recently been underway.

FIG. 13 shows the state of perpendicular magnetic recording using a conventionally proposed multi-channel magnetic head. This magnetic head is an auxiliary magnetic pole excitation type head, and a plurality of conventional single track auxiliary magnetic pole excitation type heads are arranged side by side in the track width direction to achieve multichannel.

As shown in the figure, this magnetic head has a plurality of main magnetic poles 1a, lb, Ic arranged above a magnetic tape T, which is a magnetic recording medium, in parallel at regular intervals along the tape width direction.
...and the main magnetic poles 1a and I with the magnetic tape T sandwiched below.
The auxiliary magnetic poles 2a are arranged in parallel so as to face each of the magnetic poles b, Ic, and so on in pairs.

It consists of 2b, 2c... Auxiliary magnetic poles 2a, 2b.

2c... have coils 3a, 3b, 3"c...
...is wound. And coils 3a, 3b, 3c...
- Applying a signal current from the outside to the auxiliary magnetic pole 2a.

By energizing 2b, 2c..., a magnetic flux corresponding to the signal current leaks from the upper end surface of each auxiliary magnetic pole, and each magnetic flux is transmitted to the main magnetic poles la, lb, lc, made of high permeability magnetic material.
The flow concentrates on each of the magnetic tape T.
The perpendicularly magnetized film is alternately reversed and magnetized in a direction perpendicular to the film surface. And each magnetized portion is a recording track 4a,
4b, 4c...

[Problems to be Solved by the Invention] However, according to the conventional perpendicular magnetic recording system as shown in FIG. 13, the main magnetic poles are arranged parallel to each other in series in the width direction of the magnetic tape. In order to accommodate multiple recording tracks within a magnetic tape, it is not possible to achieve high track density unless the width of the main magnetic pole is made as narrow as possible and the width of the recording tracks recorded on the magnetic tape is made as narrow as possible. , Is it possible to increase the density of recording by doing so?

On the other hand, in order to achieve high track density, a method using a thin film magnetic head in which the main pole is formed from a magnetic film using a thin film forming technique is considered. However, with this method of using thin-film magnetic heads, the recording track width for boat fishing is determined by the width of the magnetic film of the main pole processed by photolithography. There is a problem in processing that there is a limit to the width dimension.

-1 When converting a magnetic head into a multi-channel system, considering the example of conventional magnetic recording in the in-plane direction, even if the playback head is located exactly above the recording track, adjacent recording There always exists so-called inter-track crosstalk, in which l.rutter signals mix with each other.

Furthermore, considering that multi-channel technology has resulted in high-density tracks with each track width of several microns or more, errors in the relative position between the playback head and the recording track are inevitable. It is thought that the amount of crosstalk between tracks will be quite large.

On the other hand, in order to reliably prevent crosstalk, reference numeral L1. Is it necessary to set the width of the guard hand between the recording tracks indicated by L2 sufficiently wide? However, this poses the problem of not being able to adequately cope with the increasing density of tracks.

Furthermore, another problem associated with higher track density is that when the recording track width is narrowed, the S/N ratio decreases significantly, making it impossible to perform good recording and reproduction. In addition, as magnetic heads become finer due to higher density, the coil patterns and wiring also become thinner, which increases the electrical resistance of the coil patterns and wiring, making it difficult to efficiently record and reproduce data. be.

Therefore, an object of the present invention is to solve these problems and further increase the recording density in the perpendicular magnetic recording system.

[Means for Solving the Problems] In order to solve the above problems, according to the present invention, a main magnetic pole made of a magnetic film is provided on a substrate via an insulating film, and the end face of the main magnetic pole is attached to a magnetic recording medium. In a device that magnetically records or reproduces information using a perpendicular magnetic recording method by moving opposing thin-film magnetic heads relative to the recording medium, the thickness of the magnetic film constituting the main pole of the thin-film magnetic head is A structure was adopted in which the film thickness direction of the magnetic film was aligned with the track width direction so as to correspond to the recording track width.

[Function] According to this structure, the film thickness of the magnetic film constituting the main pole of the thin-film magnetic head becomes the recording track width. By accurately controlling the thickness, the recording track width can be set extremely small with high precision.

[Example code] Hereinafter, details of embodiments of the present invention will be described with reference to the drawings.

In each figure, common or corresponding parts are given the same reference numerals.

First Embodiment FIGS. 1 and 2 are an exploded perspective view and a perspective view during a recording operation, respectively, illustrating the structure of a thin film magnetic head according to a perpendicular magnetic recording system according to a first embodiment of the present invention.

First, each part of the head according to this embodiment will be explained in order from the bottom in FIG. 1 according to the manufacturing process. First, in FIG. 1, reference numeral 5 denotes a substrate made of a high permeability magnetic material such as ferrite. An insulating film 6 made of 5102 or the like is deposited on the substrate 5 by sputtering or the like.

Next, a coil 7 including an extraction electrode made of a conductive film of a good conductor such as Cu or Al1 is formed on the insulating film 6 by a thin film deposition process such as vapor deposition or sputtering, and a photolithography process. In order to simplify the drawing, the coil 7 is shown to have approximately one turn, but it is of course preferable to have a plurality of turns.

Next, on the coil 7 is again an insulation II made of 5i02, etc.
8 is deposited and formed. Contact holes 6a and 8a for magnetic flux return buses are formed in the insulating film 6.8 by photolithography.

Next, a main pole 9 made of a magnetic film with high magnetic permeability and high saturation magnetic flux density is formed on the insulating film 8 by a thin film deposition process and a photolithography process. The rear end of the main pole 9 is joined to the substrate 5 via contact poles 6a and 8a.

A protective plate 10 is further bonded onto the main pole 9 to form a thin film magnetic head 11 shown in FIG.

This thin film magnetic head 11 is of a main pole excitation type, and during recording, as shown in FIG. It slides in the incoming direction or in the opposite direction. Then, by applying a recording signal current to the coil 7,
The main magnetic pole 9 is excited accordingly, and a magnetic flux corresponding to the signal current 2 leaks from the lower end surface of the main magnetic pole 9 in the figure, and the magnetic recording medium 1
A recording track 4 is formed by magnetizing the magnetic layer 2 in a direction perpendicular to the recording surface. Further, during reproduction, the magnetic recording medium 12 slides in the direction of arrow A relative to the thin film magnetic head 11, and the recording track 4 slides on the end face of the main magnetic pole 9, so that the magnetic flux due to its magnetization is guided to the main magnetic pole. A signal voltage corresponding to the change is excited in the coil 7 and output.

By the way, during recording and reproduction in the perpendicular magnetic recording and reproducing apparatus of this embodiment, as shown in FIG. be done. The film thickness direction of the magnetic film of the main pole 9 is aligned parallel to the width direction of the recording track 4. In this way, the width of the recording track 4 corresponds to the thickness of the magnetic film of the main pole 9. That is, according to this embodiment, the film thickness 3T of the magnetic film of the main pole 9 becomes the recording track width.

In this way, according to the perpendicular magnetic recording/reproducing apparatus of this embodiment, the film thickness of the magnetic film of the main pole 9 corresponds to the track recording width. Recording track width (about several hundred nm)
This is possible by controlling the thickness of the magnetic film of the main magnet fi9 when forming the thin film. By accurately controlling the thickness of the magnetic film during film formation, the recording track width can be made uniform with high precision. By being able to set the recording track width small with high precision in this manner, recording density can be further increased.

2nd to 5th examples Next, FIGS. 3(A), (B) to FIG. 6(A).

(B) shows a different application example in the case of two tracks, which is an application of the structure of the thin film magnetic head shown in the first embodiment to multi-tracking. In each figure, (A) is a top view of the head with the protective plate removed, and (B) is a front view of the medium sliding surface.

First, Fig. 3 (A), (B) and Fig. 4 (A).

In the thin film magnetic heads according to the second and third embodiments of the present invention shown in FIG. On top of this, a second coil 14 and a main magnetic pole 16 are provided via an insulating film 13 that is thicker than the insulating film 6.8, and a protective plate 10 is bonded thereon to form a two-channel head. .

In the case of the heads shown in FIGS. 3(A) and 3(B), the coils 7.14 are arranged parallel to each other, but the main magnetic poles 9.16 are arranged with inclinations in opposite directions relative to the medium sliding surface S. The leading ends facing the medium sliding surface S are stacked one on top of the other.

On the other hand, in the case of the heads shown in FIGS. 4(A) and 4(B), the coil 7.14 and the main magnetic pole 9.16 are both arranged parallel to each other, and the tip surface of the main magnetic pole 9.16 is located at the medium sliding surface S. are arranged so as to be shifted back and forth in the direction of the medium sliding direction.

Next, FIG. 5(A) according to a fourth embodiment of the present invention.

In the head shown in (B), a step 5a is provided at the center of the upper surface of the substrate 5, and the area of the upper surface of the substrate 5 is divided into approximately two equal parts along the direction A of the medium sliding direction by the step 5a. There is. On the substrate 5, a coil 7, a main magnetic pole 9, a coil 14, and a main magnetic pole 16 are respectively provided via an insulating film 6.8 in the respective areas on the left and right sides of the step 5a, and each constitutes a recording/reproducing channel. .

Further, FIGS. 6(A) and (B) according to the fifth embodiment of the present invention
In the head shown in , a step a is provided in the center of at least one of the insulating films 6 and 8 instead of the substrate 5, and this step a extends the area on the substrate 5 approximately 2 times along the A direction of the medium sliding direction. The area is divided into equal parts, and each area is provided with a coil 7, a main magnetic pole 9, and a coil 14, a main magnetic pole 16, each forming a recording/reproducing channel.

The above FIGS. 3(A), (B) to FIG. 6(A).

In each embodiment whose head configuration is shown in (B), the main magnetic pole 9
．． 16, its width direction is aligned with the A direction of the medium sliding force direction and parallel to the same direction as in the first embodiment,
By aligning the film thickness direction of the magnetic film of the main magnetic pole 9.16 with the track width direction of the recording track and making it parallel, the film thickness of the magnetic film of the main magnetic pole 9.16 becomes the recording track width, and the recording track width is It is set too small with extremely high precision. Also, the uniformity is too high. The width of the guard hunt between recording tracks is also shown in Figures 3 (A), (B) and Figure 4 (A).
), (B), by controlling the thickness of the insulating film 13 during film formation, the head shown in FIGS. 5(A), (B) and 6(A)
, (B), the size of the step 5a of the substrate 5 or the step a of the insulation +11A6.8 can be set to a predetermined and small size with high precision. Therefore, high-density recording can be performed at high speed in multiple channels with extremely high track density.

In the above structure, the step 5a of the substrate 5 is formed by etching, polishing, etc., and the step a of the insulating film 6.8 is formed by etching, etc.

Of course, the above structure can also be applied to a multi-track head having three or more tracks.

6th Embodiment FIG. 7 shows the medium sliding surface of the thin film magnetic head shown in FIGS. 4(A) and 3(B) and the magnetization pattern recorded on the magnetic recording medium recorded using the same head. It shows. The direction of the magnetization pattern is indicated by diagonal lines.

In the magnetic head shown in FIG. 7, the edges 9a and 16a of the main pole 9.16 facing the medium sliding surface on the side where the medium enters along the A direction of the medium sliding direction are formed by photolithography. They are formed so as to be inclined at an acute angle θ in the same direction with respect to the upper surface of the substrate 5 . That is, it is inclined in the same direction at an angle (90° - θ) corresponding to the angle θ with respect to the direction of the track width 1w shown on the left side of FIG. Therefore, as shown in the figure, the magnetization patterns of the recording tracks 4a and 4b of the recording medium are also recorded at an angle corresponding to the angle θ with respect to the direction of the track width 1w, as indicated by diagonal lines. The magnetization patterns of the recording tracks 4a and 4b are recorded almost parallel to each other.

However, in order to increase the track density, the cart hand Gg
If the width is made as small as possible, read errors may occur during playback due to crosstalk from adjacent recording tracks or l/racking deviation.

Therefore, in order to solve this problem, in a sixth embodiment of the present invention, as shown on the right side of FIG. 8, the edge of the tip of the main magnetic pole 9.16 has a structure substantially similar to that of the head shown in FIG. Heads 9a and 16a are tilted at an acute angle θ in opposite directions to the top surface of the substrate 5, and are tilted at an angle corresponding to the angle θ in opposite directions to the track width direction. .

As shown on the left side of FIG. 8, this type of head structure causes the magnetization patterns in adjacent recording tracks 4a and 4b to be recorded in opposite directions relative to the track width direction and inclined at an angle θ according to the angle θ. and between each other 20
It is recorded with the intersection angle of As a result, during playback of a recording track, the playback sensitivity of adjacent tracks can be kept low by so-called azimuth loss without adversely affecting the playback, and it is possible to keep the zero stalk between tracks that conventionally occurs during playback to a low level. Become. By reducing inter-track crosstalk, the width Ge (see FIG. 7) of the card band provided between recording tracks can be narrowed, and the track density can be further increased.

The method for manufacturing the head according to this embodiment is shown in FIG. 9 (
This will be explained using A) to (H).

First, as shown in FIG. 9(A), an insulating film 6 is deposited on a substrate 5 by sputtering or the like, and then a coil 7 including an extraction electrode is formed on the insulating film 6 as a good conductor as shown in FIG. 9(B). It is formed by a thin film forming process and a photolithography process.

Next, as shown in FIG. 9C, an insulating film 8 made of 8102 or the like is again deposited on the coil 7, and contact holes 6a and 8a are formed by etching.

Next, as shown in Figure 9 CD), attach the main magnetic pole 9 on the insulating tri B.
is formed by a thin film formation process of a high permeability magnetic material and a photolithography process. At this time, in order to taper the above-mentioned edge 9a (shaded area in the figure) of the main pole 9 at an angle θ, it is processed using, for example, an ion beam sealing device that can variably control the incident angle of the ion beam.

Next, as shown in FIG. 9(E), after depositing and forming an insulating film 13 on the main magnetic pole 9, a coil 14 for the second channel is formed, and then as shown in FIG. 9(F), a coil 14 is formed. An insulating film 15 is again deposited thereon. Then, a recess 15a for providing a main magnetic pole for the second channel is formed in the insulating film 15. In this case, the peripheral edge of the recess 15a is tapered at an angle θ in the opposite direction to the edge 9a at a portion corresponding to the edge 9a of the main magnetic pole 9 for the first channel. Further, a contact hole 15b is formed in the insulating film 15 by etching.

Next, as shown in Fig. 9 (G), the main magnetic pole 1 for the second channel is
6 is formed by a process of forming a thin film of magnetic material and a photolithography process, and is embedded in the previously formed recess 15a.

Finally, as shown in Fig. 9 (H), 5i is placed on the main magnetic pole 16.
A protective film 17 made of 02 or the like is deposited and formed, and a protective plate 10 shown in FIG. 8 is adhered thereon to complete the process.

In the manner described above, the thin film magnetic head shown in FIG. 8 can be manufactured. By repeating the above steps, a multi-track head with three or more tracks can also be manufactured.

Seventh Embodiment By the way, in the conventional thin-film magnetic head, the coil and its lead electrode were formed from a good conductor such as AJ2 or Cu.
As the coil shape becomes finer and the film becomes thinner due to higher recording density, the electrical resistance thereof increases. As a result, during recording, heat is generated due to an increase in recording current and Joule heat, resulting in a decrease in efficiency. Furthermore, during reproduction, the impedance noise also increases because the DC resistance value increases. As a result, there is a problem in that the S/N ratio decreases. Therefore, in order to solve the above problem, in each of the structures of the heads of the first to sixth embodiments described above as a seventh embodiment of the present invention, a coil fan 14 including an extraction electrode is used.
It shall be formed from at least a portion of a superconducting material.

As a superconducting material, for example, the composition formula is YIBa2Cu.
30? -x etc. are used.

By using a head in which at least a portion of the coil fins or 14 are formed from a superconducting material by cooling it to a temperature at which the superconducting material is in a superconducting state, the electrical resistance of the superconducting material portion becomes 0, and the above-mentioned problem can be solved. This problem can be solved, recording can be performed efficiently, and during reproduction, noise can be suppressed and reproduction can be performed satisfactorily.

Eighth Embodiment Next, in the magnetic recording/reproducing apparatus according to the eighth embodiment of the present invention, recording and reproduction of each channel is performed by the above-mentioned conductive type head element consisting of the main magnetic pole and a coil, and reproduction is performed using the Josephson effect. The SQUID element (superconducting quantum interference device), which is an applied magnetic flux sensor with extremely high sensitivity and quick response, is used. As we all know, SQUID
The device is composed of Josephson coupling of superconducting materials,
Here, the coil including the lead-out electrode of the recording head element is also made of superconducting material.

FIG. 10 shows the structure of the thin film magnetic head according to this embodiment. In this case, this head is configured as a two-channel head, and on a substrate 18 made of ferrite with a step 18a formed on its upper surface, the above-mentioned main magnetic pole and coil are formed in the upper and lower regions of the step 18a, respectively. A recording element 35 and a SQU I are used as speech-guiding head elements.
Reproducing elements 36 as D elements are provided adjacent to each other.

The recording element 35 includes a coil 23 formed on the substrate 18 via an insulating film 22 and a main magnetic pole 27 for recording. The coil 23 is made of, for example, the superconducting material described in the seventh embodiment. Further, an insulating film 24 is formed on the coil 23.

Note that at the end of the coil 23, a terminal indicated by the reference numeral 32 is a terminal for applying a recording signal current to the coil 23.

On the other hand, the reproducing element 36 includes a superconducting material 21 embedded in a groove 20 formed in a substrate 18, a main magnetic pole 27 for reproducing that guides magnetic flux formed thereon via an insulating film 24, and an oxidized material (not shown). It consists of a superconducting film 31 coupled to a superconducting material 21 via a Josephson bond 30 formed by an insulating film. Superconducting film 3
1 is formed so as to straddle the four main guns 27 via an insulating film 34 formed on the main magnetic pole 27, and is coupled to the superconducting material 21. Note that the superconducting material 21 and the superconducting film 31 are made of the same superconducting material as the coil 23.

Further, reference numerals 33 are terminals for extracting output signals from the reproducing element 36, respectively.

Note that a protective plate (not shown) is bonded to all of these.

With this structure, during recording, a recording signal is applied from the outside to the coil 23 via the terminal 32, and recording is performed in the same manner as in the first embodiment. In this case as well, the main magnetic pole 26
It goes without saying that the thickness direction of the magnetic film is parallel to the recording track width direction, and the thickness thereof is the recording track width.

On the other hand, during reproduction, the main magnetic pole 27 of the reproducing element 36 comes into sliding contact with the recording track, and the magnetic flux due to its magnetization is guided between the superconducting material 21 and the superconducting film 31 via the main magnetic pole 27, and responds to changes in the magnetic flux due to Josephson coupling. The voltage applied to the superconducting material 21
, generated between the superconducting films 31 and outputted from the terminals 33 as reproduction output signals.

It goes without saying that during recording and reproduction, the entire head is cooled to a temperature at which the superconducting material 21, coil 23, and superconducting film 31 become superconducting.

The head of this embodiment uses an extremely sensitive SQUID element as the reproducing element 36, so reproduction can be performed with extremely high sensitivity, which has been considered a problem with conventional perpendicular magnetic recording type magnetic heads. It is possible to improve the S/N ratio during reproduction. Furthermore, by forming the coil 23 from a superconducting material, it is possible to improve efficiency during recording.

The method of manufacturing the head of this embodiment will now be explained with reference to FIGS. 11(A) to 11(E) and FIG. 10.

First, as shown in FIG. 11(A), a substrate 18 provided with a step 18a is formed from a magnetic material such as Mn--Zn ferrite. Note that the height H of the step 18a is the recording track width Tw.
be equal to or greater than. In this case, only one step 18a is provided for two channels, or it is better to increase the number of steps 18a to further increase the number of channels.

Next, as shown in FIG. 11(B), a groove 2o for embedding the superconducting material 21 described above is formed in the substrate 18 by grinding or the like.

Next, as shown in FIG. 11(C), a superconducting material 21 is placed in the groove 20.
After embedding the substrate 18 and the upper surfaces of the superconducting material 21, an insulating film 22 made of 5i02 or the like is formed only on the upper surface of the substrate 18.

Next, as shown in FIG. 11(D), an excitation coil 23 is formed from the above-mentioned superconducting material, and an insulating film 2 is further formed on it.
4 is formed into a film. At this time, an insulating film 24 is also formed on the upper surface of the superconducting material 21 at a portion where the above-described main magnetic pole 26 for recording and main magnetic pole 27 for reproduction are provided. Then, a contact hole 25 is formed in the insulating films 22 and 24 so that the main magnetic poles 26 and 27 form a closed magnetic path with the substrate 18.

Next, as shown in FIG. 11(E), main 1infi 26.27 is formed on the insulating film 22.24. Main magnetic pole 26.27
is connected to the substrate 18 via the contact hole 25 mentioned above. As mentioned earlier, the main gun fi26,2
The film thickness at the time of film formation of No. 7 is the recording track width Tw. Further, the width P1 of the main magnetic pole 27 for reproduction is appropriately determined depending on the reproduction resolution, and the width TP2 of the main magnetic pole 26 for recording is appropriately determined so as not to reduce the recording efficiency during recording. In addition, in this case, the edges 28 of the main magnetic poles 26, 27 of the first channel on the medium entrance side and the edges 29 of the main magnetic poles 26, 27 of the second channel on the medium entrance side are oriented in opposite directions with respect to the recording track width direction. It is preferable to form it by tilting it with an appropriate azimuth angle.

Next, as shown in FIG. 10, after forming an insulating film 34 on the main magnetic pole 27 for reproduction, a thin oxide insulating film (not shown) is formed on the superconducting material 21, and the Josephson bond 30 is formed by the insulating film. The superconducting film 31 is placed on the main pole 27 via the insulating film 3.
It is formed so that it spans through 4. Then, a protection plate (not shown) is bonded to the entire structure, and the process is completed.

In the manner described above, the thin lIM magnetic head of this embodiment can be manufactured.

Ninth Embodiment Next, FIG. 12 shows the structure of a thin film magnetic head according to a ninth embodiment of the present invention. In this head, a recording element 3 as an inductive head element consists of a main magnetic pole 26 and a coil 23 provided on a substrate 18 with insulating films 22 and 24 interposed therebetween.
5 is provided, and an insulating film 34 is provided on the main magnetic pole 26 of the element 35.
A reproduction element 36' as a 5QLIID element is provided via the 5QLIID element.

The reproducing element 36' includes a first superconducting film 31a formed over the main magnetic pole 26 with an insulating film 34 interposed therebetween, and a reproducing element 36' provided on the main magnetic pole 26 over the central part of the superconducting film 31a. A second superconducting film 31b straddles the main magnetic pole 27 and is coupled to a first superconducting film 31a via a Josephson coupling 30. Note that the reference numeral 32 is a terminal for applying a recording signal to the coil 23 of the recording element 35, and the reference numeral 33 is a terminal for taking out a reproduction output signal from the reproduction element 36'. With this structure, as in the case of the eighth embodiment, recording is performed by the recording element 35 as an inductive head element, and reproduction is performed by the reproducing element 36' consisting of a SQUID element.

According to this embodiment, the same effect as in the eighth embodiment can be obtained, and in addition, the eighth embodiment is provided on the substrate 18 in order to achieve multi-channeling in the manufacturing process of the thin film magnetic head.
Since all steps except the step for forming the step similar to the example are performed in a vacuum during the film forming process, contamination by impurities can be reduced, yield can be improved, and quality can be improved. Furthermore, since the reproducing element 36' overlaps the recording element 35, less space is required for one channel than in the eighth embodiment, which has the advantage of being compact.

Although all of the heads in the above embodiments were of the main pole excitation type, for example, in the conventional example of the auxiliary pole excitation type thin film magnetic head shown in FIG. Of course, the same effect can be expected by adopting a structure with a track width.

[Effects of the Invention] As is clear from the above description, according to the present invention, a main magnetic pole made of a magnetic film is provided on a substrate with an insulating film interposed therebetween, and the end face of the main magnetic pole is formed of a thin film facing the magnetic recording medium. In an apparatus for magnetically recording or reproducing information by a perpendicular magnetic recording method by moving a magnetic head relative to the magnetic recording medium, the thickness of the magnetic film constituting the main magnetic pole is set to be the recording track width. Since a structure is adopted in which the film thickness direction of the magnetic film is aligned with the track width direction, the recording track width can be set to be small with extremely high precision by controlling the film thickness when forming the magnetic film of the main pole. This provides an excellent effect of improving track density and recording density.

[Brief explanation of the drawing]

FIG. 1 is an exploded perspective view showing the structure of a thin film magnetic head according to a first embodiment of the present invention, FIG. 2 is a perspective view of the same embodiment during a recording operation, and FIG. 3(A). (B) is a top view of a thin film magnetic head and a front view of a medium sliding surface, respectively, according to the second embodiment, and FIGS. 4(A) and (B) are a top view of a head and a medium, respectively, according to a third embodiment. A front view of the sliding surface, FIGS. 5A and 5B are a top view of the head and a front view of the medium sliding surface according to the fourth embodiment, respectively.
Figures (A) and (B) are respectively a top view of a head and a front view of a medium sliding surface according to a fifth embodiment, and FIG. FIG. 8 is an explanatory diagram showing the relationship between the head according to the sixth embodiment of the present invention and the inclination of the magnetization pattern recorded by it, and FIGS. FIG. 10 is a perspective view showing the structure of a thin film magnetic head according to the eighth embodiment of the present invention, and FIGS. 11(A) to (E) are FIG. 10. Fig. 12 is a perspective view showing the structure of the thin-film main magnetic head according to the ninth embodiment, and Fig. 13 shows the structure of a conventional auxiliary pole excitation type head and its structure. FIG. 3 is a perspective view illustrating the magnetic recording used. 5... Substrate 6.8.13, 22.24.34... Insulating film 7.14
... Coils 9, 16, 26, 27 ... Main magnetic pole 10 ... Protective plate 11 ... Thin film magnetic head 1
2...Magnetic recording medium 21...Superconducting material 31.31
a, 31b-superconducting film

Claims (1)

[Claims] 1) A main magnetic pole made of a magnetic film is provided on a substrate with an insulating film interposed therebetween, and an end face of the main pole faces a magnetic recording medium. In an apparatus for magnetically recording or reproducing information using a perpendicular magnetic recording method, the magnetic film is moved in the film thickness direction of the magnetic film constituting the main pole of the thin film magnetic head so that the film thickness thereof corresponds to the recording track width. What is claimed is: 1. A magnetic recording or reproducing device characterized in that: the width of the track coincides with the width of the track; 2) The thin film magnetic head is characterized in that a plurality of main magnetic poles each made of a magnetic film are provided at different heights on the substrate with an insulating film interposed therebetween, and each main magnetic pole constitutes a recording or reproducing channel, respectively. Claim 1:
Magnetic recording or reproducing device as described in Section. 3) In the thin film magnetic head, a step is provided on the upper surface of the substrate or the insulating film, and the main magnetic pole is provided in each region separated by the step, and each of the main magnetic poles constitutes a recording or reproducing channel. A magnetic recording or reproducing device according to claim 2, characterized in that: 4) Among the plurality of main magnetic poles of the thin film magnetic head, the edges of the main magnetic poles of adjacent channels on the magnetic recording medium entry side of the ends facing the magnetic recording medium are oriented in opposite directions with respect to the recording track width direction. The magnetic recording or reproducing device according to claim 2 or 3, characterized in that the magnetic recording or reproducing device is formed to be inclined. 5) A coil including an extraction electrode is formed from a conductive film on the substrate of the thin film magnetic head with an insulating film interposed therebetween, and is provided together with the main magnetic pole, and at least a part of the coil is formed from a superconducting material. A magnetic recording or reproducing device according to any one of claims 1 to 4, characterized in that: 6) On the substrate of the thin film magnetic head, an inductive head element consisting of the main pole and a coil and a SQUID element are arranged in parallel, and the head element performs recording;
6. The magnetic recording or reproducing apparatus according to claim 1, wherein the SQUID element performs reproduction.