JPH01308035A - Molding die for resin-sealed semiconductor device - Google Patents
Molding die for resin-sealed semiconductor deviceInfo
- Publication number
- JPH01308035A JPH01308035A JP13964288A JP13964288A JPH01308035A JP H01308035 A JPH01308035 A JP H01308035A JP 13964288 A JP13964288 A JP 13964288A JP 13964288 A JP13964288 A JP 13964288A JP H01308035 A JPH01308035 A JP H01308035A
- Authority
- JP
- Japan
- Prior art keywords
- pot
- resin
- heated
- resin tablet
- force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C45/00—Injection moulding, i.e. forcing the required volume of moulding material through a nozzle into a closed mould; Apparatus therefor
- B29C45/02—Transfer moulding, i.e. transferring the required volume of moulding material by a plunger from a "shot" cavity into a mould cavity
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Mechanical Engineering (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Moulds For Moulding Plastics Or The Like (AREA)
- Injection Moulding Of Plastics Or The Like (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は樹脂封止型半導体装置の封止し程に使用する
成形金型に関するものである。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a molding die used for sealing a resin-sealed semiconductor device.
第5図は従来の樹脂封止型半導体装置のトランスファ成
形金1ji1(以下金型と称す)の断面図、第6図はこ
の金型の下金型の斜視図である。両図において1は−F
金型、2はこの下金型に設けられたホット底部、3はこ
のホット底部に連通するランナ、5 rj、 ’)−ド
フレーム7に搭載された半導体装1aを収納するキャビ
ティ、4は前記ランナ3とキャビティ5を結ぶゲート、
6は半導体装置をキャビティ内で位置決めする位置決め
ビンである。8は上金型、9はこの上金型に設けられ前
記ポット底部2と共にポットを形成するポット側部、1
0は前記ポット内に挿入される樹脂封止型半導体装置用
樹脂タブレット(以下樹脂タブレットと称す)、11は
この樹脂タブレットを加圧するプランジャである。FIG. 5 is a sectional view of a conventional transfer molding mold 1ji1 (hereinafter referred to as a mold) for a resin-sealed semiconductor device, and FIG. 6 is a perspective view of a lower mold of this mold. In both figures, 1 is -F
A mold, 2 is a hot bottom provided in this lower mold, 3 is a runner communicating with this hot bottom, 5 is a cavity in which the semiconductor device 1a mounted on the frame 7 is housed, 4 is the above-mentioned A gate connecting runner 3 and cavity 5,
Reference numeral 6 denotes a positioning bin for positioning the semiconductor device within the cavity. 8 is an upper mold, 9 is a pot side part provided on this upper mold and forms a pot together with the pot bottom part 2;
0 is a resin tablet for a resin-sealed semiconductor device (hereinafter referred to as a resin tablet) inserted into the pot, and 11 is a plunger that pressurizes this resin tablet.
次に動作について説明する。半導体装置を搭載したリー
ドフレーム7は一定温度に加熱された下金型1の位置決
めピン6によって設定された位置に装着され、下金型1
と同様に加熱さ′れた上金型8によって型締めされる。Next, the operation will be explained. The lead frame 7 carrying the semiconductor device is mounted at a position set by the positioning pin 6 of the lower mold 1 heated to a constant temperature, and the lower mold 1 is heated to a certain temperature.
The mold is clamped by the heated upper mold 8 in the same manner as above.
次に、固体の樹脂タブレット10をポット内に挿入し、
プランジャ11で加圧する。この時樹脂タブレット10
はポット底部2からの熱伝達により下部から加熱溶融さ
れる。加熱溶融された樹脂はプランジャ11の圧力によ
りランナ3およびゲート4を経てキャビティ5内に充填
され半導体装置を封止する。この樹脂は一定時間加熱し
て硬化させ、成形が完了する。Next, insert the solid resin tablet 10 into the pot,
Pressurize with plunger 11. At this time, 10 resin tablets
is heated and melted from the bottom by heat transfer from the pot bottom 2. The heated and melted resin is filled into the cavity 5 through the runner 3 and gate 4 by the pressure of the plunger 11, and seals the semiconductor device. This resin is heated for a certain period of time to harden, and the molding is completed.
従来の金型は以上のように構成されているので、プラン
ジャ加圧時の樹脂タブレットへの加熱はポット底部およ
びポット側部からの熱伝達によってのみ行われていた。Since the conventional mold is constructed as described above, the resin tablet is heated only by heat transfer from the bottom and side of the pot when the plunger is pressurized.
したがって、樹脂タブレットは速やかに加熱される底部
および側部に対して内部の温度上昇が遅く、樹脂タブレ
ット内に温度差が生じる。この温度差のために樹脂タブ
レットが均一に@融さn丁、成形の工程や品質に悪影響
企及ぼすという問題点があった。Therefore, the internal temperature of the resin tablet increases more slowly than the bottom and sides, which are heated quickly, creating a temperature difference within the resin tablet. This temperature difference caused the problem that the resin tablets were not uniformly melted, which adversely affected the molding process and quality.
この発明は上記のような問題点を解消するためになさ扛
たもので、樹脂タブレットへの熱体4を向上させる金型
を得ることを目的とする。This invention was made to solve the above-mentioned problems, and an object of the present invention is to obtain a mold that improves the heating element 4 to the resin tablet.
この発明に係る金型は、樹脂タブレットの内部に圧入さ
れる加熱用突設部をポット内に突設したものである。The mold according to the present invention has a heating protrusion that is press-fitted into the resin tablet and protrudes into the pot.
〔作用〕
加熱用突設部が樹脂タブレットの内部に圧入され、樹脂
タブレットを内部からも加熱する。[Function] The heating protrusion is press-fitted into the inside of the resin tablet and heats the resin tablet from the inside as well.
〔実施例1
以−ド、この発明の一実施例を図について説明する。第
1図はこの発明に係る樹脂封止型半導体装置用トランス
ファ成形金型の下金型を示す斜視図である。図において
1は下金型、2はこの下金型に設けられたポット底部、
3はこのポット底部に連通ずるランナ、5はリードフレ
ーム7に搭載された半導体装置を収納するキャビティ、
4は前記ランナ3とキャビティ5を結ぶゲート、6は半
導体装置をキャビティ内で位置決めする位1d決めピン
、12は前記ポット底部2内に設けられ、後述のプラン
ジャと連動して上下動可能な加熱さねたビンである。第
2図および第3図は下金型1に上金型8(il−型締め
した状態を示す断if!i図である。両図において9は
、上金型8に設けられ前記ポット底部2と共にポットを
形成するポット側部、11はポット内に挿入された樹脂
タブレットを加圧するプランジャである。第4図はこの
実施例に使用される樹月旨タフ゛Vットの8+視図であ
り、10は位(脂タブレット、13はこの樹脂タブレッ
トに設けられ、前記ビン12の外径よりも若干小さい外
径を有しかつ前記ビン12に圧入される貫通穴である。[Embodiment 1] Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIG. 1 is a perspective view showing a lower mold of a transfer molding mold for a resin-sealed semiconductor device according to the present invention. In the figure, 1 is the lower mold, 2 is the pot bottom provided in this lower mold,
3 is a runner that communicates with the bottom of the pot; 5 is a cavity that houses the semiconductor device mounted on the lead frame 7;
4 is a gate connecting the runner 3 and the cavity 5; 6 is a 1d fixing pin for positioning the semiconductor device in the cavity; 12 is a heating element provided in the pot bottom 2 and movable up and down in conjunction with a plunger to be described later. It is a rounded bottle. 2 and 3 are cross-sectional views showing a state in which the upper mold 8 (il- mold is clamped) to the lower mold 1. In both figures, 9 is provided in the upper mold 8 and is located at the bottom of the pot. The side part of the pot together with 2 forms a pot, and 11 is a plunger that pressurizes the resin tablet inserted into the pot. Figure 4 is an 8+ perspective view of the V-cut of the tree mat used in this example. 10 is a resin tablet, and 13 is a through hole that is provided in this resin tablet, has an outer diameter slightly smaller than the outer diameter of the bottle 12, and is press-fitted into the bottle 12.
次に動作について説明する。半導体装I1を搭載したリ
ードフレーム7か一定温度に加熱された下金型1の位置
決めビン6 Kよって設定された位II!7に装着され
、第2図に示すように加熱されたピン12が−F昇した
状態で下金型1と止金型8の型締めが行われる。次に、
樹脂タプレッ)10が、ピン12に貢〕th穴13を圧
入しながら、自車またはプランジャ11によってポット
内に挿入される。Next, the operation will be explained. The lead frame 7 on which the semiconductor device I1 is mounted or the positioning pin 6 of the lower mold 1 heated to a constant temperature is set by the position II! The lower mold 1 and the stopper mold 8 are clamped with the heated pin 12 raised to -F as shown in FIG. next,
A resin taplet 10 is inserted into the pot by the driver or plunger 11 while press-fitting the hole 13 into the pin 12.
樹脂タブレットは、ポット底部2およびポットl111
1部9からだけでなく、加熱されたピン12によって内
部からも熱伝達が行われ、均一な溶融が可能になる。第
3図に示すように、プランジャ11の下降と連動してピ
ン12も下降し樹脂の充填が終了する。Resin tablets are included in pot bottom 2 and pot l111
Heat is transferred not only from the first part 9 but also from the inside by the heated pin 12, allowing uniform melting. As shown in FIG. 3, the pin 12 also descends in conjunction with the descent of the plunger 11, completing the resin filling.
以上の例では、ポット底部2にプランジャ11と1手動
し′C」二下動ロ丁北な力l]熱さtたビン12を示し
たが、突設部をポット底部2.ポット側部9またはプラ
ンジャ11に設けて樹脂タブレットに圧入される構造に
してもよい。この場合、樹脂タブレットは、貫通穴13
を有する形状の他に、上記突設部に係合する凹溝を設け
たものとする。In the above example, the plunger 11 and the heated bottle 12 were shown at the bottom of the pot 2. It may be provided in the pot side part 9 or the plunger 11 and press-fitted into the resin tablet. In this case, the resin tablet has through holes 13
In addition to the shape having the above-described shape, a groove that engages with the protrusion is provided.
以上のように、この発明によれば樹脂タブレットの内部
に圧入される加熱用突設部を設けたので、樹脂タブレッ
トを内部からも加熱することにより樹脂タブレット内の
温度差を小さクシ、均一な溶融かり能になり、成形の工
程が順調に進み製品の品質が向上するという効果がある
。As described above, according to the present invention, since the heating protrusion is provided which is press-fitted into the inside of the resin tablet, the temperature difference inside the resin tablet can be reduced by heating the resin tablet from the inside, and the temperature can be uniformly heated. The effect is that the melting process becomes smoother, the molding process progresses smoothly, and the quality of the product improves.
【図面の簡単な説明】
第1図はこの発明の一実施例による樹脂封止型半導体装
置用成形金型の下金型の斜視図、第2図は第1図の成形
金型の断面図、第3図は第2図の成形金型の動作を示す
断面図、第4図はこの発明の一実施例に使用される樹脂
タブレットの斜視図、第5図は従来の樹脂封止型+−廊
鉢体装置用成形金型断面図、第6図は同じく成形金型の
下金型を示す斜視図である。
1・・・・下金型、8・・・・上金型、10・・・・樹
脂タブレット、12・・・・ビン。[BRIEF DESCRIPTION OF THE DRAWINGS] FIG. 1 is a perspective view of a lower mold of a mold for a resin-sealed semiconductor device according to an embodiment of the present invention, and FIG. 2 is a sectional view of the mold of FIG. 1. , FIG. 3 is a sectional view showing the operation of the molding die shown in FIG. 2, FIG. 4 is a perspective view of a resin tablet used in an embodiment of the present invention, and FIG. 5 is a conventional resin sealed mold + - A sectional view of a molding die for the gallery pot body device; FIG. 6 is a perspective view of the lower mold of the molding die; 1...Lower mold, 8...Upper mold, 10...Resin tablet, 12...Bin.
Claims (1)
金型において、前記樹脂タブレットの内部に圧入される
加熱用突設部を、前記金型のポット内に突設したことを
特徴とする樹脂封止型半導体装置用成形金型。A molding die for resin-sealing a semiconductor device with a resin tablet, characterized in that a heating protrusion that is press-fitted into the resin tablet projects into a pot of the mold. Molding mold for semiconductor devices.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13964288A JPH01308035A (en) | 1988-06-06 | 1988-06-06 | Molding die for resin-sealed semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13964288A JPH01308035A (en) | 1988-06-06 | 1988-06-06 | Molding die for resin-sealed semiconductor device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01308035A true JPH01308035A (en) | 1989-12-12 |
Family
ID=15250033
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13964288A Pending JPH01308035A (en) | 1988-06-06 | 1988-06-06 | Molding die for resin-sealed semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01308035A (en) |
-
1988
- 1988-06-06 JP JP13964288A patent/JPH01308035A/en active Pending
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