JPH0131801B2 - - Google Patents

Info

Publication number
JPH0131801B2
JPH0131801B2 JP57194411A JP19441182A JPH0131801B2 JP H0131801 B2 JPH0131801 B2 JP H0131801B2 JP 57194411 A JP57194411 A JP 57194411A JP 19441182 A JP19441182 A JP 19441182A JP H0131801 B2 JPH0131801 B2 JP H0131801B2
Authority
JP
Japan
Prior art keywords
piezoelectric element
crystal piece
substrates
pattern
conductive adhesive
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57194411A
Other languages
Japanese (ja)
Other versions
JPS5985117A (en
Inventor
Masanori Fujita
Mitsuyuki Sugita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seikosha KK
Original Assignee
Seikosha KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seikosha KK filed Critical Seikosha KK
Priority to JP19441182A priority Critical patent/JPS5985117A/en
Publication of JPS5985117A publication Critical patent/JPS5985117A/en
Publication of JPH0131801B2 publication Critical patent/JPH0131801B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H03ELECTRONIC CIRCUITRY
    • H03HIMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02Details
    • H03H9/05Holders or supports
    • H03H9/10Mounting in enclosures
    • H03H9/1007Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device

Landscapes

  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Description

【発明の詳細な説明】 本発明は厚みすべり振動を行う圧電振動子に関
するものである。
DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a piezoelectric vibrator that performs thickness shear vibration.

従来、厚みすべり圧電振動子の一例としてAT
カツトの水晶振動子は、気密端子の2本の端子ピ
ンに保持バネを溶接などにより固着し、2本の保
持バネの間に水晶片を支持し、保持バネ、水晶片
と接触しない状態でキヤツプを被せ、気密端子の
ベースとキヤツプとを封止していた。このため部
品点数が多くなり、構成が複雑であつた。また製
造、組立が煩雑であり、外形形状が大きくなると
いう欠点を持つていた。さらに水晶片は2点にて
支持されるため衝撃に弱いという不都合もあつ
た。
Conventionally, AT is an example of a thickness-shear piezoelectric vibrator.
Kattu's crystal resonators are made by fixing a holding spring to the two terminal pins of an airtight terminal by welding or other means, supporting the crystal piece between the two holding springs, and attaching the cap without contacting the holding spring or the crystal piece. The base of the airtight terminal and the cap were sealed. This resulted in a large number of parts and a complex configuration. In addition, manufacturing and assembly are complicated, and the external shape is large. Furthermore, since the crystal piece is supported at two points, there is also the disadvantage that it is susceptible to impact.

本発明は上記欠点を除去するものであり、構成
が簡単で部品点数が少なく、製造、組立が容易で
あり、衝撃に強く、外形形状の小さい厚みすべり
圧電振動子を提供するものである。
The present invention eliminates the above-mentioned drawbacks and provides a shear piezoelectric vibrator with a simple structure, a small number of parts, easy manufacture and assembly, strong impact resistance, and a small external shape.

以下本発明の実施例を図面を参照して詳細に説
明する。
Embodiments of the present invention will be described in detail below with reference to the drawings.

第1〜3図において、は厚みすべり水晶振動
子であり、厚みすべり振動を行う水晶片2と、こ
の水晶片の両面に、この水晶片の外周端部に対応
して設けられた周回状の接着層3,4により水晶
片の両主面2a,2bの中央部が非接触の状態で
固着された二つの平板状の基板5,6とから構成
されている。水晶片2は平凸状をしており、厚み
すべり振動の振動エネルギを中央部に集中させ、
外周端部の振動変位は極めて小さくなるように設
定してある。水晶片2の両主面2a,2bには駆
動電極7,8が真空蒸着などにより形成してあ
る。7a,8aは駆動電極7,8の引出し電極で
あり、水晶片2の外周端までそれぞれ反対方向に
延出形成してある。基板5,6は水晶片2と熱膨
張係数の近いセラミツクなどから形成されてお
り、本実施例では導体パターン9,10が印刷な
どにより形成してあり、同一形状をしている。導
体パターン9,10は水晶片2の外周に対応する
リング状部9a,10aと、これに連続し基板端
部まで引出された引出し部9b,10bとから構
成されている。接着層3,4は導体パターン9,
10のリング状部9a,10aに対応して異方導
電接着剤を印刷により形成したものである。この
異方導電性接着剤は、絶縁性接着剤に銀粉などの
導電性粒子を20〜40重量%混入したもので、厚み
方向(押圧方向)には導通となり、幅方向には絶
縁となるものである。また、この実施例では、
200μm程度のスペーサ粒子が混入されており、
このスペーサ粒子により水晶片2の主面2a,2
bと基板5,6との間隙が設定され、水晶片2と
基板5,6との非接触が保たれる。駆動電極8は
引出し電極8aより接着層4を介して導体パター
ン9のリング状部9a、引出し部9bに接続され
ている。また駆動電極7は引出し電極7aより接
着層4を介して導体パターン10のリング状部1
0a、引出し部10bに接続されている。異方導
電性接着剤を使用しているため、接着層3と接着
層4とがはみ出して接触したとしても両者の間は
絶縁状態に保たれて導通せず、引出し電極7a,
8aと導体パターン9,10のリング状部9a,
10aとは導通がとれるのである。水晶片2と基
板5,6との間の接着層3,4に囲まれた空間は
気密状態となつており、真空または不活性ガスに
置換されている。
In Figs. 1 to 3, reference numeral 1 denotes a thickness-shear crystal resonator, which includes a crystal piece 2 that performs thickness-shear vibration, and a circular pattern provided on both sides of the crystal piece corresponding to the outer peripheral edge of the crystal piece. It is composed of two flat substrates 5, 6 to which the center portions of both main surfaces 2a, 2b of a crystal piece are fixed in a non-contact state by adhesive layers 3, 4. The crystal piece 2 has a plano-convex shape, and concentrates the vibration energy of thickness-shear vibration in the center.
The vibration displacement at the outer peripheral end is set to be extremely small. Drive electrodes 7 and 8 are formed on both main surfaces 2a and 2b of the crystal blank 2 by vacuum deposition or the like. Denoted at 7a and 8a are lead-out electrodes of the drive electrodes 7 and 8, which are formed to extend in opposite directions to the outer peripheral end of the crystal piece 2, respectively. The substrates 5 and 6 are made of ceramic or the like having a coefficient of thermal expansion similar to that of the crystal piece 2, and in this embodiment, the conductor patterns 9 and 10 are formed by printing or the like and have the same shape. The conductor patterns 9, 10 are composed of ring-shaped parts 9a, 10a corresponding to the outer periphery of the crystal blank 2, and drawn-out parts 9b, 10b that are continuous with the ring-shaped parts 9a, 10a and extended to the ends of the substrate. The adhesive layers 3 and 4 are conductive patterns 9,
An anisotropically conductive adhesive is formed by printing in correspondence to the ring-shaped portions 9a and 10a of 10. This anisotropic conductive adhesive is an insulating adhesive mixed with 20 to 40% by weight of conductive particles such as silver powder, and is conductive in the thickness direction (pressing direction) and insulating in the width direction. It is. Also, in this example,
Spacer particles of about 200μm are mixed in,
The main surfaces 2a and 2 of the crystal piece 2 are caused by these spacer particles.
A gap is set between the crystal blank 2 and the substrates 5 and 6 to maintain non-contact between the crystal piece 2 and the substrates 5 and 6. The drive electrode 8 is connected to the ring-shaped part 9a and the lead-out part 9b of the conductive pattern 9 via the adhesive layer 4 from the lead-out electrode 8a. Further, the drive electrode 7 is connected to the ring-shaped portion 1 of the conductor pattern 10 via the adhesive layer 4 from the extraction electrode 7a.
0a, and is connected to the drawer section 10b. Since an anisotropic conductive adhesive is used, even if the adhesive layer 3 and the adhesive layer 4 protrude and come into contact with each other, they are kept in an insulated state and are not electrically connected, and the lead electrodes 7a,
8a and ring-shaped portions 9a of conductor patterns 9 and 10,
10a can be electrically connected. The space between the crystal piece 2 and the substrates 5, 6 surrounded by the adhesive layers 3, 4 is airtight and replaced with a vacuum or an inert gas.

水晶振動子の組立は、まず基板5,6上に形
成された導体パターン9,10のリング状部9
a,10a上に導電接着剤を印刷し、周回状の接
着層3,4を形成する。そして例えば窒素雰囲気
中で接着層4の上に水晶片2の外周を対応させて
載置する。さらに水晶片2の上に基板5を載置す
る。このときも水晶片2の外周と接着層3とを対
応させて載置する。水晶片2と基板5,6とは接
着層3,4により所定の間隙を設けられ、水晶片
2の両主面2a,2bの中央部は基板5,6とは
非接触の状態となる。このあと加熱すれば接着層
3,4の硬化を早めることができる。導体パター
ン9の引出し部9bは接着層4を介して駆動電極
8の引出し電極8aと接続され、引出し部10b
は接着層3を介して駆動電極7の引出し電極7a
と接続される。
The assembly of the crystal resonator 1 begins with the ring-shaped portions 9 of the conductive patterns 9 and 10 formed on the substrates 5 and 6.
A conductive adhesive is printed on a and 10a to form circular adhesive layers 3 and 4. Then, the outer periphery of the crystal piece 2 is placed on the adhesive layer 4 in a nitrogen atmosphere, for example, so that the outer periphery of the crystal piece 2 corresponds to the adhesive layer 4. Furthermore, the substrate 5 is placed on the crystal piece 2. At this time as well, the outer periphery of the crystal piece 2 and the adhesive layer 3 are placed in correspondence with each other. A predetermined gap is provided between the crystal piece 2 and the substrates 5, 6 by the adhesive layers 3, 4, and the center portions of both main surfaces 2a, 2b of the crystal piece 2 are in a non-contact state with the substrates 5, 6. By heating after this, the adhesive layers 3 and 4 can be cured more quickly. The lead-out portion 9b of the conductor pattern 9 is connected to the lead-out electrode 8a of the drive electrode 8 via the adhesive layer 4, and the lead-out portion 10b
is the lead electrode 7a of the drive electrode 7 via the adhesive layer 3.
connected to.

このように水晶振動子は部品点数が少なく構
成が簡単であり、組立が容易であり、小型化がで
き、衝撃にも強いという効果を有する。
As described above, the crystal resonator 1 has the following advantages: it has a small number of parts, is simple in structure, easy to assemble, can be miniaturized, and is resistant to impact.

なお水晶片2の外周部の基板5と基板6との間
にワツクスを充填し気密性能を向上させることも
できる。また基板の少なくとも一方に配線パター
ンを形成し、電気部品などを取付けてもよい。
It is also possible to fill the space between the substrates 5 and 6 on the outer periphery of the crystal piece 2 with wax to improve the airtightness. Further, a wiring pattern may be formed on at least one of the substrates, and electrical components or the like may be attached.

つぎに本発明の他の実施例を第4〜8図を参照
して説明する。11は厚みすべり水晶振動子であ
り、厚みすべり振動を行う水晶片12と、この水
晶片の両面に、この水晶片の外周端部に対応する
周回状の接着層13,14により水晶片の両主面
12a,12bの中央部が非接触の状態で固着さ
れた二つの基板15,16とから構成されてい
る。水晶片12は前記実施例と同様に平凸状をし
ており、両主面には駆動電極17,18、引出し
電極17a,18aが設けてある。基板15,1
6も前記実施例と同様にセラミツクなど通気性の
ない基板が用いられ、基板16には引出しパター
ン19aおよび端子パターン19bが、また基板
15には引出しパターン20が導電ペーストを印
刷するなどにより形成してある。そして接着層1
3,14はそれぞれ引出しパターン20,19a
と交差している。接着層13,14は前記実施例
同様、異方導電性接着剤により形成される。そし
て駆動電極17の引出し電極17aは基板15の
引出しパターン20と接続され、駆動電極18の
引出し電極18aは基板16の引出しパターン1
9aと接続される。21はハンダ、導電接着剤な
どの導電材であり、基板15の引出しパターン2
0と基板16の端子パターン19bとを接続する
ものである。
Next, another embodiment of the present invention will be described with reference to FIGS. 4 to 8. Reference numeral 11 designates a thickness-shear crystal resonator, which includes a crystal piece 12 that performs thickness-shear vibration, and circumferential adhesive layers 13 and 14 on both sides of the crystal piece, which correspond to the outer peripheral edges of the crystal piece. It is composed of two substrates 15 and 16 whose central portions of main surfaces 12a and 12b are fixed in a non-contact state. The crystal blank 12 has a plano-convex shape as in the previous embodiment, and drive electrodes 17, 18 and extraction electrodes 17a, 18a are provided on both main surfaces. Substrate 15,1
6 also uses a non-permeable substrate such as ceramic as in the previous embodiment, and the board 16 has a lead pattern 19a and a terminal pattern 19b, and the board 15 has a lead pattern 20 formed by printing conductive paste or the like. There is. and adhesive layer 1
3 and 14 are drawer patterns 20 and 19a, respectively.
intersects with The adhesive layers 13 and 14 are formed of an anisotropically conductive adhesive as in the previous embodiment. The lead electrode 17a of the drive electrode 17 is connected to the lead pattern 20 of the substrate 15, and the lead electrode 18a of the drive electrode 18 is connected to the lead pattern 1 of the board 16.
Connected to 9a. 21 is a conductive material such as solder or conductive adhesive;
0 and the terminal pattern 19b of the board 16.

水晶振動子11の組立は前記実施例とほぼ同様
であり、最後に基板15の引出しパターン20と
基板16の端子パターン19bとをハンダなどの
導電材21にて接続する。これにより水晶振動子
11を駆動するときは一方の基板16の引出しパ
ターン19aと端子パターン19bとの間に電源
を接続すればよい。また基板16に発振回路を構
成する集積回路素子、配線パターンなどを容易に
設けることができる。
The assembly of the crystal resonator 11 is almost the same as in the previous embodiment, and finally the lead pattern 20 of the substrate 15 and the terminal pattern 19b of the substrate 16 are connected with a conductive material 21 such as solder. Accordingly, when driving the crystal resonator 11, it is sufficient to connect a power source between the lead pattern 19a and the terminal pattern 19b of one of the substrates 16. Further, integrated circuit elements, wiring patterns, etc. constituting the oscillation circuit can be easily provided on the substrate 16.

なお上記二つの実施例では圧電素子として平凸
状の水晶片の例を示したが、両凸状、ベベリング
状、平板状などでもよく、また他の圧電材料を用
いることもできる。
In the above two embodiments, a plano-convex crystal piece is used as the piezoelectric element, but it may be biconvex, beveled, flat, etc., and other piezoelectric materials may also be used.

以上述べたように本発明によれば、1対の基板
間へ圧電素子を挟持封着するのと同時に基板の導
体パターンへの圧電素子の電気的導通が計れ、し
かもこの挟持封着に異方導電性接着剤を使用して
いるから、封着作業時に接着剤がはみ出したとし
ても短絡することがなく、したがつて圧電素子の
封着の作業が非常に行ない易くなる。また、部品
点数が極めて少なく構成が簡単であり、製造組立
が容易であり、小型で薄型で衝撃に強い厚みすべ
り圧電振動子を提供することができる。
As described above, according to the present invention, electrical conduction of the piezoelectric element to the conductor pattern of the substrate can be measured at the same time as the piezoelectric element is sandwiched and sealed between a pair of substrates, and furthermore, this sandwiching and sealing is anisotropic. Since a conductive adhesive is used, even if the adhesive protrudes during the sealing operation, there will be no short circuit, and therefore the piezoelectric element can be sealed very easily. Furthermore, it is possible to provide a thickness-shear piezoelectric vibrator that has an extremely small number of parts, is simple in structure, is easy to manufacture and assemble, and is small, thin, and strong against impact.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の一実施例の断面図、第2図は
上方の基板を省略した状態の正面図、第3図は下
方の基板の正面図、第4図は他の実施例の正面
図、第5図は第4図―線断面図、第6図は下
方の基板の正面図、第7図は水晶片の正面図、第
8図は上方の基板の正面図である。 1,11……水晶振動子、2,12……水晶
片、3,4,13,14……接着層、5,6,1
5,16……基板、7,8,17,18……駆動
電極、7a,8a,17a,18a……引出し電
極、9,10……導体パターン。
Fig. 1 is a sectional view of one embodiment of the present invention, Fig. 2 is a front view with the upper substrate omitted, Fig. 3 is a front view of the lower substrate, and Fig. 4 is a front view of another embodiment. 5 is a sectional view taken along the line of FIG. 4, FIG. 6 is a front view of the lower substrate, FIG. 7 is a front view of the crystal piece, and FIG. 8 is a front view of the upper substrate. 1, 11... Crystal resonator, 2, 12... Crystal piece, 3, 4, 13, 14... Adhesive layer, 5, 6, 1
5, 16... Substrate, 7, 8, 17, 18... Drive electrode, 7a, 8a, 17a, 18a... Leading electrode, 9, 10... Conductor pattern.

Claims (1)

【特許請求の範囲】 1 駆動電極と、この駆動電極から外周端部へ延
出形成してある引出し電極とが両主面に形成して
ある厚みすべりを行なう圧電素子と、 上記圧電素子の上記両主面と対向して位置し、
上記圧電素子との対向面に上記引出し電極と対向
する外部接続用の導体パターンが形成されている
1対の平板状の絶縁性基板と、 上記圧電素子の上記両主面外周部と上記両絶縁
性基板との間を封止する一方、上記圧電素子を上
記絶縁性基板に対して非接触の状態に保つ異方導
電性接着剤により形成された接着層と、 からなり、 上記引出し電極と上記導体パターンとは、上記
異方導電性接着剤を介して電気的に接続されてい
る ことを特徴とする厚みすべり圧電振動子。 2 特許請求の範囲第1項において、上記異方導
電性接着剤は、上記圧電素子と上記両絶縁性基板
間の間〓を設定するスペーサ粒子を含有したもの
であることを特徴とする厚みすべり圧電振動子。
[Scope of Claims] 1. A piezoelectric element that performs thickness sliding, in which a drive electrode and an extraction electrode extending from the drive electrode to an outer peripheral end are formed on both main surfaces; Located opposite both main surfaces,
a pair of flat insulating substrates having a conductor pattern for external connection facing the extraction electrode formed on a surface facing the piezoelectric element; an adhesive layer formed of an anisotropic conductive adhesive that seals between the piezoelectric element and the insulating substrate while keeping the piezoelectric element in a non-contact state with the insulating substrate; A thickness-shear piezoelectric vibrator characterized in that the conductor pattern is electrically connected to the conductive pattern via the anisotropic conductive adhesive. 2. In claim 1, the anisotropically conductive adhesive contains spacer particles that establish a distance between the piezoelectric element and both of the insulating substrates. Piezoelectric vibrator.
JP19441182A 1982-11-05 1982-11-05 Thickness shear piezoelectric oscillator Granted JPS5985117A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19441182A JPS5985117A (en) 1982-11-05 1982-11-05 Thickness shear piezoelectric oscillator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19441182A JPS5985117A (en) 1982-11-05 1982-11-05 Thickness shear piezoelectric oscillator

Publications (2)

Publication Number Publication Date
JPS5985117A JPS5985117A (en) 1984-05-17
JPH0131801B2 true JPH0131801B2 (en) 1989-06-28

Family

ID=16324149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19441182A Granted JPS5985117A (en) 1982-11-05 1982-11-05 Thickness shear piezoelectric oscillator

Country Status (1)

Country Link
JP (1) JPS5985117A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5223383B2 (en) * 2008-03-05 2013-06-26 セイコーエプソン株式会社 Quartz crystal unit, crystal unit package, electronic component, electronic device, mounting method for electronic component

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52123888A (en) * 1976-04-12 1977-10-18 Matsushima Kogyo Kk Thickness slip quartz oscillator
JPS56158518A (en) * 1978-07-14 1981-12-07 Matsushima Kogyo Co Ltd Quartz oscillator
JPS5693412A (en) * 1979-12-26 1981-07-29 Seiko Instr & Electronics Ltd Superthin quartz oscillator

Also Published As

Publication number Publication date
JPS5985117A (en) 1984-05-17

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