JPH01319112A - How to select thin film magnetic heads - Google Patents
How to select thin film magnetic headsInfo
- Publication number
- JPH01319112A JPH01319112A JP15027588A JP15027588A JPH01319112A JP H01319112 A JPH01319112 A JP H01319112A JP 15027588 A JP15027588 A JP 15027588A JP 15027588 A JP15027588 A JP 15027588A JP H01319112 A JPH01319112 A JP H01319112A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- magnetic head
- magnetic heads
- magnetic
- film magnetic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/127—Structure or manufacture of heads, e.g. inductive
- G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
- G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
- G11B5/3166—Testing or indicating in relation thereto, e.g. before the fabrication is completed
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Magnetic Heads (AREA)
Abstract
(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は、薄膜磁気ヘリドの製造方法に係シ、特に磁気
ヘッドの製品形態毎の管理を効率的かつ低コストで行う
ための磁気ヘリドのマーキングに関する。[Detailed Description of the Invention] [Industrial Application Field] The present invention relates to a method for manufacturing a thin film magnetic helide, and in particular to a method for manufacturing a magnetic helide for efficient and low-cost management of each product type of magnetic head. Regarding marking.
薄膜磁気ヘッドは、蒸着、メツキ、スバ嘴夕等の薄膜形
成技術および工噌チングによるパターン形成技術を用い
て、磁気回路および記鎌再生用コイル（−括してトラン
スデユーサ１１と称する）を゛、シリコンあるいはセラ
ミ噌り等を素材とする基板゛１２の上に多数整列して形
成したものである。The thin film magnetic head uses thin film forming techniques such as vapor deposition, plating, and submerging, and pattern forming techniques by machining to form a magnetic circuit and a recording/reproducing coil (collectively referred to as a transducer 11). A large number of them are arranged and formed on a substrate 12 made of silicon or ceramic material.
これを所定数のトランスデ為−サを有する浮揚形の磁気
ヘッドに加工すべく、磁気ヘッドの浮揚１面側５１の同
時加工が可能となる整列単位のプロ噌・り１３に切断し
、（一般に数ヘリドないし数十ヘッド）、所定の治具１
４１／（ｒ７リクス１５で接着し九後、必要に応じ所定
の磁気へ―ド１単位に切断後、浮揚面側５１を研磨ある
いはう嗜プ等を行うことによ、−シ、コイル部１６を所
定の精度に加工している。（精１度はα２ないし１ミク
ロン。）
このブロック単位での同時加工において、１）コイル部
のパターン形成における並び精度のバラつき、２）所定
治真上のブロックの基準位置合わせ精−度のバラつき、
等のため、同時加工されたプロ嗜りには、良品。不良品
のトランスデユーサが混在することになる。この状態で
所定の治具よシ接着をはがし、個々の磁気ヘ−ドとして
￥Ｉ１９出し、加工を終了する。In order to process this into a floating magnetic head having a predetermined number of transducers, it is cut into aligned units of processors 13 that allow simultaneous processing of the floating side 51 of the magnetic head (generally (several helides to tens of heads), prescribed jig 1
41/(After gluing with R7 Riks 15, cut into predetermined magnetic head units as necessary, and polish or carve the floating surface side 51.) -shi, coil part 16 (Accuracy 1 degree is α2 to 1 micron.) In this simultaneous processing in block units, 1) variation in alignment accuracy in pattern formation of the coil part, 2) variation in alignment accuracy directly above the specified jig, Variations in block standard alignment accuracy,
etc., so it is a good product for professionals who have been processed at the same time. Defective transducers will be mixed in. In this state, the adhesive is removed using a predetermined jig, and each magnetic head is sold for 19 yen to complete the process.
磁気ヘッド１は、一般に全トランスデ纂−サでなく、１
ケあるいは所定数のトランスデ瓢−サが良品ならば使用
可能であり、完成後、良品のトランスデ具−サ位置によ
り、選別分類していたにの選別に当九シ、製造過程およ
び磁気へ曖ド状態において確認された良・不良内容は、
その都度データシートに書き込み、データシートと磁気
ヘッドの対応をとるため、磁気へ曽ドを順番に並べ、管
理していた。The magnetic head 1 generally has only one transducer, rather than an entire transducer.
If a predetermined number of transducers are good, they can be used, and after completion, the position of the good transducers can be used to sort and classify them. The contents of good and bad items confirmed in the condition are as follows:
Each time, data was written on a data sheet, and in order to correspond between the data sheet and the magnetic head, the magnetic fields were arranged in order and managed.
上記従来技術は、トランスデ為−サ単位での磁気へ噌ド
の管理の点について配慮されておらず、磁気へ噌ドはデ
ータシートに記入した順番に並べであるため、順番を間
違えると、不良品を良品とすることになり、品質管理上
問題でありＮ。The above-mentioned conventional technology does not take into consideration the management of magnetic heads on a transducer basis, and the magnetic heads are arranged in the order in which they are entered on the data sheet, so if the order is wrong, it will cause damage. This means that a good product will be treated as a non-defective product, which is a quality control problem, so no.
またデータシートの作成、データシートと対応。Also creates datasheets and corresponds with datasheets.
させるための磁気ヘダドの管理には膨大な手間を要する
ため、量産化における問題があった。Managing the magnetic headers for this purpose requires a huge amount of effort, which poses a problem in mass production.
本発明の目的は、磁気へ―ド製造における品質。The purpose of the present invention is to improve quality in magnetic head manufacturing.
の向上および管理コストを削減すると共に、量産化対応
することにある。The goal is to improve performance, reduce management costs, and support mass production.
上記目的は、ウェハよシ磁気へ曽ドを完成させるまでの
製造過程において、磁気ヘリドのトランスデ為−サの良
、不良が明確になった時点で、磁１気ヘリド自体に直接
食、不良に対応するマーキング１０１ 、 １０２．
１０５． １０４を行うことＫよシ、達成される。具体
的なマーキング方法としては、１）インクジエート。ス
タンピングによるインク等の。The purpose of the above is to prevent direct corrosion of the magnetic helide itself and damage it when it becomes clear whether the transducer of the magnetic helide is good or bad during the manufacturing process from the wafer to the completion of the magnetic helide. Corresponding markings 101, 102.
105. 104 is accomplished. Specific marking methods include 1) ink diate. Ink etc. by stamping.
塗料を磁気へψド表面に付けるマーク、２）磁気へ。Marks placed on the surface of the paint to the magnetism, 2) to the magnetism.
曽ド自体に直接レーザで素材表面を溶かして書き込むレ
ーザマーク等がある。このマークの読取シは、光学的ま
たはその他の手段によυ、随時読み取ることが可能であ
り、その読み取り結果によシ、磁気へ噌ドの形態の分類
が可能になる・−〔作用〕
各製造工程では、このマーキングされたマークを読み取
るだけでその磁気ヘッドの形態（各トランスデ為−サの
良、不良）を知ることが可能になるため、データシート
が不良となり、更にデータ：シートとの対応ミスによる
良品、不良品の取シ違いが無くなる。There are laser marks etc. that are written directly on the surface of the material by melting the surface of the material with a laser. This mark can be read at any time by optical or other means, and based on the reading results, it is possible to classify the types of magnets. In the manufacturing process, it is possible to know the form of the magnetic head (whether each transducer is good or bad) just by reading the marked marks, which can lead to defective data sheets and even more problems with data sheets. Eliminates mishandling of good and defective products due to handling errors.
以下、本発明の一実施例を、第１図によシ説明する。こ
の磁気ヘッド１は、左側トランスデａ−サ４１と右側ト
ランスデ為−サ１１より成る。仮に、左側トランスデュ
ーサ４１のコイル１６が不良である。An embodiment of the present invention will be described below with reference to FIG. This magnetic head 1 consists of a left transducer 41 and a right transducer 11. Suppose that the coil 16 of the left transducer 41 is defective.
場合、マーク１０４を打つことによシ、不良表示が可能
となる。In this case, marking the mark 104 makes it possible to indicate the defect.
このマークは不良が明確になった時点でマーキングされ
ることが望ましく、基板状態では第２図１のマークＩＱ
１が、プロ、り５１状態では第５図の如くマーク１０２
が、加工途中の状態では第４図の如くマーク１０５が、
最終的形状である磁気ヘリド１では第１図の如くマーク
１０４が打たれる。It is desirable to mark this mark as soon as the defect becomes clear.
1 is a professional, and in the 51 state, the mark 102 is shown in Figure 5.
However, in the middle of processing, the mark 105 is as shown in Fig. 4.
The final shape of the magnetic helide 1 is marked with marks 104 as shown in FIG.
− 各工程で、各トランスデユーサの製品形態（良・。− In each process, the product form of each transducer (good/good).
不良）を知るには、この所定の箇所のマークを読゛み取
るだけでよい。To know if the product is defective, simply read the mark at this predetermined location.
本実施例によれば、全加工終了後の判別は、マーク１０
４のみ確認すればよい。これによシ、データシートとの
対応が無くなる九め、良、不良を間違えることがなくな
る効果がある。According to this embodiment, the determination after completion of all machining is made by mark 10.
You only need to check 4. This has the effect of eliminating the possibility of making a mistake between 9th, good, and bad because they do not correspond to the data sheet.
以上、本発明の実施例につき、詳細に説明し、これが本
発明の目的を達成しうることを示したが１、マークと製
品形態区分の関係、マーキング手段、マークの色、材料
、形状、構成９寸法は、本発明。The embodiments of the present invention have been described in detail above, and it has been shown that the objects of the present invention can be achieved. 9 dimensions are according to the present invention.
の趣旨を逸脱しない範囲で変形されてもよいことは勿論
であシ、以上の記述が本発明の範囲と限定、するもので
ないことは明らかである。Of course, modifications may be made without departing from the spirit of the present invention, and it is clear that the above description does not limit the scope of the present invention.
本発明によれば、磁気ヘッド自体にマークするため、良
品、不良品等のワーク形態の判別が、容易かつ確実にで
きるため、ウェハよシ磁気へ噌ドまでの製造過程におけ
る不良等の管理方法の簡略化と、不良品の明確化による
品質向上および量産加工に対する容易な対応、の効果が
ある。According to the present invention, since the magnetic head itself is marked, it is possible to easily and reliably distinguish between the workpiece types, such as non-defective products and defective products. This has the effect of simplifying the process, improving quality by clarifying defective products, and easily responding to mass production processing.
第１図は、本発明の一実施例の、マーキングされた磁気
ヘッドの斜視図、第２図は、基板に形成された薄膜へ噌
ドの平面図および側面図、第３図は、薄膜へ噌ドに加工
する過程の正面図、第４図は、加工が終了し薄膜ヘッド
として取り出す＠餉の状態の正面図である。
１・・・磁気へ噌ド、１１．４１・・・トランスデ晶−
サ、１２・・・基板、１５・・・ブクヴク、１４・・・
所定の治具、１５・・・ｑ＃クス、１６・・・コイル部
、５１・・・浮揚面側、ＩＱＩ。
１０２ 、 １０５ 、 １０４・−・マーク・躬 ＋
ＣａFIG. 1 is a perspective view of a marked magnetic head according to an embodiment of the present invention, FIG. 2 is a plan view and side view of a thin film formed on a substrate, and FIG. 3 is a perspective view of a magnetic head with markings formed on a substrate. FIG. 4 is a front view of the process of processing the thin film head, and FIG. 1...Magnetism, 11.41...Transde crystal-
Sa, 12... Board, 15... Bukkaku, 14...
Predetermined jig, 15...Q# box, 16...Coil part, 51...Floating surface side, IQI. 102, 105, 104・-・Mark・謬+
Ca
Claims (1)
ングによるパターン形成技術とを用いて、シリコン、セ
ラミック等の基板上に整列して一括形成された多数の薄
膜磁気ヘッドの、前記基板を含むトランスデューサ部分
を、必要単位毎に切断および成形加工して、所定数のト
ランスデューサを含む磁気ヘッドとなすため、製造過程
および磁気ヘッド状態において、当該磁気ヘッドにおけ
る製品形態を区分するために、当該磁気ヘッドにマーキ
ングを行うことを特徴とする薄膜磁気ヘッドの選別方法
。1. A transducer including a large number of thin film magnetic heads that are aligned and formed on a silicon, ceramic, etc. substrate at once using thin film forming techniques such as vapor deposition, sputtering, plating, etc. and pattern forming techniques using etching. In order to cut and mold the parts into required units to form a magnetic head containing a predetermined number of transducers, in order to classify the product form of the magnetic head during the manufacturing process and the state of the magnetic head, A method for selecting thin film magnetic heads characterized by marking.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15027588A JPH01319112A (en) | 1988-06-20 | 1988-06-20 | How to select thin film magnetic heads |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15027588A JPH01319112A (en) | 1988-06-20 | 1988-06-20 | How to select thin film magnetic heads |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01319112A true JPH01319112A (en) | 1989-12-25 |
Family
ID=15493400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15027588A Pending JPH01319112A (en) | 1988-06-20 | 1988-06-20 | How to select thin film magnetic heads |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01319112A (en) |
-
1988
- 1988-06-20 JP JP15027588A patent/JPH01319112A/en active Pending
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