JPH01320622A - Magnetic recording medium - Google Patents

Magnetic recording medium

Info

Publication number
JPH01320622A
JPH01320622A JP63155290A JP15529088A JPH01320622A JP H01320622 A JPH01320622 A JP H01320622A JP 63155290 A JP63155290 A JP 63155290A JP 15529088 A JP15529088 A JP 15529088A JP H01320622 A JPH01320622 A JP H01320622A
Authority
JP
Japan
Prior art keywords
recording medium
film
magnetic recording
durability
content
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63155290A
Other languages
Japanese (ja)
Other versions
JP2600297B2 (en
Inventor
Koichi Shinohara
紘一 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP63155290A priority Critical patent/JP2600297B2/en
Publication of JPH01320622A publication Critical patent/JPH01320622A/en
Application granted granted Critical
Publication of JP2600297B2 publication Critical patent/JP2600297B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Abstract

PURPOSE:To improve durability and drop-out performance by specifying the content of nitrogen atom in a diamond-like hard carbon film of the recording medium in which the carbon film is provided on a ferromagnetic metal film. CONSTITUTION:On a polymer film 4, a fine particle coating layer 5 incorporated with Al2O3, Zn O, etc., and the ferromagnetic metal film 6 consisting of Co-O, Co-Os, etc., are formed by high frequency sputtering. Then, the diamond-like hard carbon film 7 contg. 5 - 15 atomic % nitrogen atoms, and successively a lubricating layer 8 consisting of perfluorecarbonic acid are formed to consti tute the recording medium. If the content of nitrogen atom in the film 7 is <=5 atomic %, dropout may increase and still-durability may be deteriorated. On the other hand, if the content of nitrogen exceeds 15 atomic %, hardness and durability are lowered. Thereby, by specifying the content, the recording medium has good durability and drop-out property.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、高密度磁気記録に適した垂直磁気記録をはじ
めとした強磁性金属薄膜を磁気記録層とする磁気記録媒
体に関する。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a magnetic recording medium having a magnetic recording layer made of a ferromagnetic metal thin film, including perpendicular magnetic recording suitable for high-density magnetic recording.

従来の技術 近年の磁気記録の進歩は目覚しく、強磁性金属薄膜を磁
気記録層とする磁気記録媒体が実用化の気運にある。
BACKGROUND OF THE INVENTION Magnetic recording has made remarkable progress in recent years, and magnetic recording media whose magnetic recording layer is a ferromagnetic metal thin film are on the verge of being put into practical use.

第2図は従来提案されている強磁性金属薄膜を磁気記録
層とする磁気記録媒体の一例の拡大断面図である。第2
図で1はポ゛リエチレンテレフタレート、ポリフェニレ
ンサルファイド、ポリエーテルエーテルケトン等の高分
子フィルムで、微粒子塗布層、下塗り層等を必要に応じ
て配したものを用いてもよい。2はGo−Ni、 Go
−Or、 co−0゜Go−Ti、 Go−Ni−0等
の強磁性金属薄膜で、3はプラズマ重合膜、 5i02
膜1等と脂肪酸、パーフルオロポリエーテル等の潤滑剤
を積層した保護層である。〔特開昭61−224128
号公報、特開昭61−139919号公報、特開昭61
−6426号公報等参照〕 第2図に示した磁気記録媒体で、最近特に改善が期待さ
れているものに、硬い保護膜を配して耐久性向上を図る
点で〔特開昭61−126627号公報、特開昭6’1
−233412号公報〕スペーシング損失との兼ね合い
で膜厚は200人程度で、耐久性を確保しているのが現
状である。
FIG. 2 is an enlarged sectional view of an example of a conventionally proposed magnetic recording medium having a ferromagnetic metal thin film as a magnetic recording layer. Second
In the figure, 1 is a polymer film of polyethylene terephthalate, polyphenylene sulfide, polyether ether ketone, etc., which may be provided with a fine particle coating layer, an undercoat layer, etc. as required. 2 is Go-Ni, Go
-Or, co-0° ferromagnetic metal thin film such as Go-Ti, Go-Ni-0, 3 is a plasma polymerized film, 5i02
This is a protective layer in which a film 1 etc. and a lubricant such as fatty acid or perfluoropolyether are laminated. [Unexamined Japanese Patent Publication No. 61-224128
No. 61-139919, Japanese Patent Application Laid-Open No. 1983-139919
-6426, etc.] The magnetic recording medium shown in Fig. 2, which has recently been particularly expected to be improved, has been improved in terms of durability by providing a hard protective film [JP-A-61-126627 Publication, JP-A-6'1
Publication No. 233412] At present, the film thickness is about 200 to ensure durability in consideration of spacing loss.

発明が解決しようとする課題 しかしながら、上記した構成では、記録波長が0.6μ
m以下になると、200人の膜厚ではスペーシング損失
が大きすぎるのと、ドロノプアウトやディジタル記録で
のエラーレイトが場所により大きくなるといった課題が
あり、改善が望まれていた。本発明は上記した事情に鑑
みなされたもので、スペーシング損失を改善して耐久性
を低下させないで、ドロップアウトについても改善した
磁気記録媒体を提供するものである。
Problems to be Solved by the Invention However, in the above configuration, the recording wavelength is 0.6μ.
When the thickness is less than 200 m, there are problems such as the spacing loss is too large for a film thickness of 200 people, and the error rate in drop-out and digital recording becomes large depending on the location, and improvements have been desired. The present invention has been made in view of the above-mentioned circumstances, and it is an object of the present invention to provide a magnetic recording medium that improves spacing loss, does not reduce durability, and also improves dropout.

課題を解決するための手段 上記した課題を解決するだめ、本発明の磁気記録媒体は
、強磁性金属薄膜上にダイアモンド状硬質炭素薄膜を配
したものにあって、前記ダイアモンド状硬質炭素薄膜が
窒素原子を5原子係から15原子チ含むようにしたもの
である。
Means for Solving the Problems In order to solve the above-mentioned problems, the magnetic recording medium of the present invention has a diamond-like hard carbon thin film arranged on a ferromagnetic metal thin film, and the diamond-like hard carbon thin film is made of nitrogen. The number of atoms has been increased from 5 to 15 atoms.

作用 本発明の磁気記録媒体は、上記した構成により、硬さは
殆んど変らないにもかかわらず、ダイアモンド状硬質炭
素薄膜の絶縁性が低下し、磁気ヘッドとの高速摺動や走
行系との摩擦で表面帯電してのノイズ発生や、異物付着
によるドロップアウト。
Due to the above-described structure, the magnetic recording medium of the present invention reduces the insulation properties of the diamond-like hard carbon thin film, making it difficult for high-speed sliding with the magnetic head and for the running system, although the hardness remains almost the same. The surface is charged due to friction, which causes noise, and dropouts due to foreign matter adhesion.

エラー率の増大を防止できるので、耐久性を低下させず
にドロップアウト性能に関する改善ができることになる
Since an increase in error rate can be prevented, dropout performance can be improved without reducing durability.

実施例 以下、図面を参照しながら本発明の磁気記録媒体の一実
施例について詳しく説明する。第1図は本発明の一実施
例の磁気記録媒体の拡大断面図である。第1図で、4は
、ポリアミド、ポリエーテルエーテルケトン、ポリエー
テルサルフオン、ポリエチレンナフタレート等の高分子
フィルムで、5ij: 人7!20s r zn O,
Fio 2 、ポリエチレン球、ポリイミド球等を配し
た微粒子塗布層で6は、CO−○。
EXAMPLE Hereinafter, an example of the magnetic recording medium of the present invention will be described in detail with reference to the drawings. FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention. In Fig. 1, 4 is a polymer film such as polyamide, polyether ether ketone, polyether sulfon, polyethylene naphthalate, etc.;
Fio 2 , a fine particle coating layer containing polyethylene spheres, polyimide spheres, etc., and 6 is CO-◯.

Go−〇s 、 Go−Ti 、Go−Or 、 Co
 −Mo 、 Go−Ru 。
Go-〇s, Go-Ti, Go-Or, Co
-Mo, Go-Ru.

Co −Ni 、 Co −Ni−P 、 Go−Ni
−0、Go−Or−Nb 。
Co-Ni, Co-Ni-P, Go-Ni
-0, Go-Or-Nb.

Go−Or−Nd等の強磁性金属薄膜で、電子ビーム蒸
着法、高周波スパッタリング法、イオンビームデポジシ
ョン法、イオンブレーティング法、等により形成できる
ものである。了は窒素原子を5原子チから15原子係含
むダイアモンド状硬質炭素薄膜で、膜厚は50人から1
50人の範囲で構成するのが好ましい。かかる薄膜は、
炭化水素とアンモニアガスの混合ガスのプラズマを発生
させ、これを加速照射する方法や、グラフマイトをター
ゲットにして、ムr+NH5,ムr+H2−1−NH5
、等の混合ガスのプラズマを利用したスパッタリング等
により形成できるのであるが、5原子俤より少ない窒素
原子の含有量では、絶縁性がまだ良好で、湿度が低い(
30%RH以下)条件下でドロップアウト増大や、スチ
ル耐久の劣化が起る確率が増大し、15原子チを越える
と、硬さが低下し、膜自体の耐久性が下がり、膜厚を大
きくする必要があり、スペーシング損失が大きくなり高
密度記録に適さなくなることから範囲が決ってくるもの
である。8はパーフルオロカルボン酸、パーフルオロポ
リエーテル、有機ケイ素化合物等の潤滑剤で溶液塗布法
、真空蒸着法等で形成するものである。
It is a ferromagnetic metal thin film such as Go-Or-Nd, and can be formed by electron beam evaporation, high frequency sputtering, ion beam deposition, ion blating, or the like. Ryo is a diamond-shaped hard carbon thin film containing 5 to 15 nitrogen atoms, and the film thickness is 50 to 1.
It is preferable that the group consist of 50 people. Such a thin film is
A method of generating a plasma of a mixed gas of hydrocarbon and ammonia gas and irradiating it at an accelerated rate, or targeting graphite, such as Mur + NH5, Mur + H2-1 - NH5.
It can be formed by sputtering using plasma of a mixed gas such as , etc. However, if the content of nitrogen atoms is less than 5 atoms, the insulation is still good and the humidity is low (
If the temperature exceeds 15 atoms, the hardness decreases and the durability of the film itself decreases, and the film thickness increases. The range is determined by the fact that the spacing loss increases, making it unsuitable for high-density recording. Reference numeral 8 is a lubricant such as perfluorocarboxylic acid, perfluoropolyether, or organosilicon compound, which is formed by a solution coating method, a vacuum evaporation method, or the like.

上記した構成は、磁気ディスク、磁気テープのいずれの
形態で用いてもよいものである。
The configuration described above may be used in either a magnetic disk or magnetic tape format.

以下、更に具体的な実施例について比較例との対比で説
明する。
Hereinafter, more specific examples will be explained in comparison with comparative examples.

厚み12μmのポリエチレンテレフタレートフィルム上
に直径100人の5i02微粒子を10ケ/(μm)2
配しその上に、直径1mの円筒キャンに沿わせて、入射
角9Q度から40度の斜め蒸着をs x 1o ’(T
orr)の酸素中でGo−Ni (Go、 80wt%
)を0.15 pm電子ビーム蒸着することで行い、C
o−Ni−0膜を形成した。上記したフィルムに異なる
条件でダイアモンド状硬質炭素薄膜を配しその上に真空
蒸着法でパーフルオロステアリン酸を56人配し、8ミ
リ幅の磁気テニプに加工した。それぞれの磁気テープを
、改造した8ミリビデオにより評価した。
10 pieces/(μm)2 of 5i02 fine particles with a diameter of 100 on a polyethylene terephthalate film with a thickness of 12 μm
On top of that, diagonal vapor deposition is applied along a cylindrical can with a diameter of 1 m at an angle of incidence of 9Q to 40 degrees at s x 1o' (T
Go-Ni (Go, 80 wt%
) by 0.15 pm electron beam evaporation, and C
An o-Ni-0 film was formed. A diamond-shaped hard carbon thin film was placed on the above-mentioned film under different conditions, and 56 perfluorostearic acids were placed on top of it by vacuum evaporation, and it was processed into a magnetic tenip with a width of 8 mm. Each magnetic tape was evaluated using a modified 8 mm video.

改造は、輝度信号の中心周波数をs(MHz)から7 
(MHz )にあげ、広帯域仕様化したものである。
The modification is to change the center frequency of the brightness signal from s (MHz) to 7
(MHz), with wideband specifications.

ダイアモンド状硬質炭素薄膜はグラファイトをターゲッ
トにして、ArとN)!5の組合わせで放電ガスを選ん
で、40(MHz)の高周波を用いて、高周波スパッタ
リングすることで形成し膜厚は120人一定としだ。
Diamond-like hard carbon thin film targets graphite, Ar and N)! The film was formed by high-frequency sputtering using a high frequency of 40 (MHz) by selecting a discharge gas in the combination of 5 and keeping the film thickness constant at 120 MHz.

評価法は、40’C10%RHでのスチルを画像で目視
評価し、ノイズが目立つまでの時間で比較し、ドロップ
アウトは、平均値と最大値で比較し、1分間当りの3 
(μ5ec) 、 −1o (dB)のドロノプアウド
個数で示した。磁気テープの条件と評価結果を表にまと
めて示した。
The evaluation method is to visually evaluate still images at 40'C, 10% RH, and compare the time until noise becomes noticeable.For dropout, compare the average value and maximum value, and evaluate the dropout by 3 per minute.
(μ5ec), −1o (dB). The magnetic tape conditions and evaluation results are summarized in a table.

発明の効果 以上のように本発明によれば、耐久性もドロップアウト
性能も良好な磁気記録媒体が得られるといったすぐれた
効果がある。
Effects of the Invention As described above, the present invention has excellent effects in that a magnetic recording medium with good durability and dropout performance can be obtained.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図は本発明の一実施例の磁気記録媒体の拡大断面図
、第2図は従来の磁気記録媒体の拡大断面図である。 4・・・・・・高分子フィルム、6・・・・・・強磁性
金属薄膜、7・・・・・・ダイアモンド状硬質炭素薄膜
(窒素含有)。
FIG. 1 is an enlarged sectional view of a magnetic recording medium according to an embodiment of the present invention, and FIG. 2 is an enlarged sectional view of a conventional magnetic recording medium. 4...Polymer film, 6...Ferromagnetic metal thin film, 7...Diamond-shaped hard carbon thin film (nitrogen-containing).

Claims (1)

【特許請求の範囲】[Claims] 強磁性金属薄膜上にダイアモンド状硬質炭素薄膜を配し
たものにあって、前記ダイアモンド状硬質炭素薄膜が窒
素を5原子%から15原子%含むことを特徴とする磁気
記録媒体。
1. A magnetic recording medium comprising a diamond-like hard carbon thin film disposed on a ferromagnetic metal thin film, wherein the diamond-like hard carbon thin film contains 5 to 15 at% of nitrogen.
JP63155290A 1988-06-23 1988-06-23 Magnetic recording media Expired - Lifetime JP2600297B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63155290A JP2600297B2 (en) 1988-06-23 1988-06-23 Magnetic recording media

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63155290A JP2600297B2 (en) 1988-06-23 1988-06-23 Magnetic recording media

Publications (2)

Publication Number Publication Date
JPH01320622A true JPH01320622A (en) 1989-12-26
JP2600297B2 JP2600297B2 (en) 1997-04-16

Family

ID=15602663

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63155290A Expired - Lifetime JP2600297B2 (en) 1988-06-23 1988-06-23 Magnetic recording media

Country Status (1)

Country Link
JP (1) JP2600297B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5776602A (en) * 1994-10-25 1998-07-07 Matsushita Electric Industrial Co., Ltd. Magnetic recording medium having a carbon protective film containing nitrogen and oxygen and overcoated with a lubricant
JP2000331336A (en) * 1999-04-22 2000-11-30 Komag Inc METHOD FOR SPUTTERING CARBON PROTECTIVE FILM ON MAGNETIC DISK HAVING HIGH sp3 CONTENT
JP2002063717A (en) * 2000-06-27 2002-02-28 Komag Inc Magnetic disk comprising first carbon coating film having high sp3 content and second carbon coating film having low sp3 content
US6623836B1 (en) 1992-11-19 2003-09-23 Semiconductor Energy Laboratory Co., Ltd. Magnetic recording medium
US6805941B1 (en) 1992-11-19 2004-10-19 Semiconductor Energy Laboratory Co., Ltd. Magnetic recording medium

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258417A (en) * 1985-09-07 1987-03-14 Hitachi Maxell Ltd Magnetic recording medium and its production
JPS6448221A (en) * 1987-08-19 1989-02-22 Showa Denko Kk Magnetic disk and its production
JPS6486312A (en) * 1986-05-09 1989-03-31 Tdk Corp Magnetic recording medium

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6258417A (en) * 1985-09-07 1987-03-14 Hitachi Maxell Ltd Magnetic recording medium and its production
JPS6486312A (en) * 1986-05-09 1989-03-31 Tdk Corp Magnetic recording medium
JPS6448221A (en) * 1987-08-19 1989-02-22 Showa Denko Kk Magnetic disk and its production

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6623836B1 (en) 1992-11-19 2003-09-23 Semiconductor Energy Laboratory Co., Ltd. Magnetic recording medium
US6805941B1 (en) 1992-11-19 2004-10-19 Semiconductor Energy Laboratory Co., Ltd. Magnetic recording medium
US7083873B2 (en) 1992-11-19 2006-08-01 Semiconductor Energy Laboratory Co., Ltd. Magnetic recording medium including a diamond-like carbon protective film with hydrogen and at least two additional elements
US7391592B2 (en) 1992-11-19 2008-06-24 Semiconductor Energy Laboratory Co., Ltd. Magnetic recording medium including a diamond-like carbon protective film and at least two additional elements
US5776602A (en) * 1994-10-25 1998-07-07 Matsushita Electric Industrial Co., Ltd. Magnetic recording medium having a carbon protective film containing nitrogen and oxygen and overcoated with a lubricant
JP2000331336A (en) * 1999-04-22 2000-11-30 Komag Inc METHOD FOR SPUTTERING CARBON PROTECTIVE FILM ON MAGNETIC DISK HAVING HIGH sp3 CONTENT
JP2002063717A (en) * 2000-06-27 2002-02-28 Komag Inc Magnetic disk comprising first carbon coating film having high sp3 content and second carbon coating film having low sp3 content
US6565719B1 (en) 2000-06-27 2003-05-20 Komag, Inc. Magnetic disk comprising a first carbon overcoat having a high SP3 content and a second carbon overcoat having a low SP3 content
US6682807B2 (en) 2000-06-27 2004-01-27 Komag, Inc. Magnetic disk comprising a first carbon overcoat having a high SP3 content and a second carbon overcoat having a low SP3 content
US6855232B2 (en) 2000-06-27 2005-02-15 Komag, Inc. Magnetic disk comprising a first carbon overcoat having a high SP3 content and a second carbon overcoat having a low SP3 content

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