JPH0133151Y2 - - Google Patents

Description

[Detailed Description of the Invention] [Technical Field] The present invention relates to a power outage bypass device attached to a gas purification device.

[Prior art]

A conventional power failure bypass device of this type will be explained with reference to FIG. In the figure, 1 is a main body of a gas purification apparatus for purifying nitrogen gas, and this main body 1 of the gas purification apparatus includes a line 2 for supplying raw material gas, a line 3 for outputting purified gas, a line 4 for supplying hydrogen gas for regeneration, and a drain pipe 5. are each piped.

The gas purification device consisting of these refines unrefined raw material gas supplied from a raw material gas supply line 2 when electricity is applied in the gas purification device main body 1, and passes the purified gas through a purified gas output line 3 to produce a gas (not shown). The solenoid valve provided in the main body 1 of the gas purification apparatus closes when there is a power outage to stop the gas from being sent to the purified gas output line 3.

Therefore, for example, in a semiconductor factory that has many furnaces that use hydrogen gas, if the supply of purified gas from the gas purification equipment is stopped during a power outage, air will flow back into the diffusion tube, causing an explosion due to hydrogen gas and diffusion. Contamination of the tube will occur.

Therefore, in order to avoid such a danger, the raw material gas supply line 2 and the purified gas output line 3 are connected outside the gas purification apparatus main body 1 by a bypass line 6, and when the bypass line 6 is energized, the A power outage bypass device is constructed by providing a solenoid valve that is closed and opens in the event of a power outage, or an air-operated valve 7 that operates in response to a signal from the solenoid valve. The raw material gas is sent from the raw material gas supply line 2 through the bypass line 6 to the purified gas output line 3, but in such a conventional power outage bypass device, the solenoid valve or the air operated valve 7 may malfunction. Even if unrefined raw material gas leaks from the bypass line 6 to the purified gas output line 3 when the power is turned on due to a malfunction, this cannot be detected and early detection of the failure is impossible. It has the following drawbacks.

[Purpose of invention]

The present invention has been made to solve the above-mentioned drawbacks of the prior art, and aims to provide a highly reliable power failure bypass device that allows early detection of failures.

[Structure of the invention] In order to achieve the above-mentioned object, the present invention includes at least two solenoid valves or air-operated valves that are opened during a power outage in the bypass line that connects the raw material gas supply line and the purified gas output line. A pressure gauge is provided between the electromagnetic valve or the air-operated valve, and a bellows valve or needle valve is provided for removing gas from the pressure gauge section to bring the pressure to zero.

〔Example〕

An embodiment of the present invention will be described below with reference to FIG. In the figure, 1 is the main body of the gas purification equipment, 2 is the raw material gas supply line, 3 is the purified gas output line,
4 is a hydrogen gas supply line for regeneration, and 5 is a drain pipe, which are the same as those in Fig. 1.
It constitutes a gas purification device.

8 to 12 constitute a power outage bypass device according to the present invention, and 8 is a bypass line that connects the raw material gas supply line 2 and the purified gas output line 3 outside the gas purification device main body 1; Two solenoid valves or air-operated valves 9 and 10 that operate in response to signals from the solenoid valves are installed at appropriate intervals on the bypass line 8, and a pressure gauge 11 is installed between the solenoid valves or air-operated valves 9 and 10. A bellows valve or needle valve 12 is provided to release pressure from the pressure gauge 11. Note that this bellows valve or needle valve 12 is kept closed except when the pressure at the pressure gauge 11 is released.

In the power outage bypass device with such a configuration, the solenoid valves or air-operated valves 9 and 10 of the bypass line 8 are closed when electricity is applied, and therefore, the unpurified raw material gas supplied from the raw material gas supply line 2 is a gas. The gas that enters the purification device main body 1 and is purified here is sent to the gas usage device through the purified gas output line 3. Here, the pressure gauge 11 indicates zero when the electromagnetic valves or air operated valves 9, 10 are working normally.

On the other hand, when a power outage occurs, the solenoid valve in the gas purification device main body 1 closes, and at the same time, the solenoid valve or air-operated valves 9 and 10 in the bypass line 8 open, and unrefined raw material gas is bypassed from the raw material gas supply line 2. It is sent through line 8 to line 3 for the purified gas output, thereby avoiding the risk of air backflow. At this time, the pressure gauge 11 is connected to the bypass line 8.
Displays the pressure of unrefined raw material gas passing through.

Therefore, if the solenoid valve or air-operated valve 9 on the side of the raw material gas supply line 2 provided in the bypass line 8 malfunctions or becomes defective during the energization, unrefined raw material gas flows between the solenoid valves 9 and 10. This raw material gas enters the solenoid valve or air operated valve 10.
leakage to the refined gas output line 3 is prevented, and at the same time the pressure of the source gas is displayed on the pressure gauge 11.

Furthermore, when the solenoid valve or air-operated valve 10 on the purified gas output line 3 side malfunctions or becomes defective, the gas pressure is similarly displayed on the pressure gauge 11.

In the above-described embodiment, the bypass line is provided with two solenoid valves or air-operated valves, but two or more valves may be provided.

[Effect of idea]

As explained above, the present invention includes installing at least two solenoid valves or air-operated valves that open in the event of a power outage in the bypass line that connects the raw material gas supply line and the purified gas output line; Since a pressure gauge is installed between the valves, even if one solenoid valve or air-operated valve malfunctions or becomes defective when energized, unpurified raw material gas will not leak into the purified gas output line. At that time, the pressure gauge displays the pressure of the raw material gas that has entered between the solenoid valve or the air operated valve, so failures can be detected early. It is possible to know whether there is an abnormality in either the operating valve or the solenoid valve or air operating valve on the purified gas output line side.

Therefore, in this invention, unless all the solenoid valves or air-operated valves installed in the bypass line fail at the same time, unrefined raw material gas will leak into the purified gas output line when the power is turned on, causing product trouble in the gas-using equipment. Since abnormalities in the bypass line can be detected before they occur, it is possible to create a highly reliable power outage bypass device that can stably supply high-quality gas, making it suitable for gas purification in semiconductor factories and other places where gas quality is strict. It will be effective for the device.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram showing a conventional power failure bypass device for a gas purification device, and FIG. 2 is a schematic diagram showing an embodiment of a power failure bypass device for a gas purification device according to the present invention. 1... Gas purification equipment main body, 2... Raw material gas supply line, 3... Purified gas output line, 4...
Regeneration hydrogen gas supply line, 5... Drain pipe, 8... Bypass line, 9, 10... Solenoid valve or air operated valve, 11... Pressure gauge, 12...
… Bellows or needle valve.

Claims (1)

[Scope of utility model registration request] Connect the raw gas supply line and the purified gas output line piped to the gas purification equipment main body with a bypass line, and install at least two solenoid valves or air-operated valves on this bypass line that close when energized and open during power outage. A power outage bypass device for a gas purification device, characterized in that a pressure gauge is provided between the two electromagnetic valves or air-operated valves, and a bellows valve or needle valve for venting gas from the pressure gauge section.