JPH0136185Y2 - - Google Patents

Description

[Detailed description of the invention] The present invention is a resist solution container (hereinafter referred to as "container") used for storing and dropping photosensitive materials (hereinafter referred to as "resist") used to manufacture photomasks etc. ).

Conventionally, this type of container has been one shown in FIG. That is, it consisted of a container body 1 for holding resist, an opening 11 for dispensing and dropping the resist, and a lid 2 for preventing external dust from entering the container body 1. To dispense and drop resist using this container, first remove the lid 2 from the opening 11 of the container body 1, tilt the container body 1, and dispense the desired amount of resist from the opening 11 onto a photomask blank (not shown). Note: Dropped. Thereafter, the container body 1 was made vertical, and the lid 2 was fitted into the opening 11 to store the resist.

However, since conventional containers are constructed as described above, the resist remaining at the mouth of the container easily dries out, and the dried resist peels off every time the lid is attached and removed, and mixes with the resist in the container body. As a result, there was a drawback that the uniformity of the viscosity of the resist was disturbed. In addition, if external dust adheres to the resist remaining at the opening of the container body and the lid is fitted to the container body, the dust attached to the lid will adhere to the opening and the resist will be dispensed/dropped again. When doing so, there was a drawback that the dirt that had adhered to the mouth would adhere to the photomask.

The present invention was developed in order to eliminate the above-mentioned drawbacks, and it has the function of keeping the resist attached to the inside of the container body including the mouth of the container body in a liquid state without drying out, and the ability to function as a lid. Functional resist drying prevention jig (hereinafter referred to as "drying prevention jig")
That's what it means. ), the resist storage area and the dispensing/dispensing area.
The object of the present invention is to provide a container which is composed of a container body having a drip opening, etc., and which prevents resist remaining at the mouth of the container body from drying and prevents dust from adhering to the mouth.

Hereinafter, one embodiment of the present invention will be described in detail.

(Example 1) This will be explained in detail based on FIGS. 2 and 3. FIG. 2a is a perspective view of the drying prevention jig of this embodiment, and FIG. 2b is a perspective view of the drying prevention jig with the top surface removed.
Figure c is a plan view of figure a, Figure 3 d is a front view of figure a, and Figures 3a and 3b are a plan view and a front view of the container body of this embodiment, respectively, and Figures c and d are respectively These are a front view and a side view, respectively, of a container of this example formed by inserting the desiccation prevention jig into a container main body.

First, there is a U-shaped side surface 31, a U-shaped bottom surface 32 surrounded by the side surfaces 31 and a U-shaped recess, and a height lower than the side surface 31 from the bottom surface 32 to the U-shaped portion, which is approximately In the vicinity of the U-shaped inner surface 33 provided vertically and into which a drying prevention jig attachment part of the container body to be described later is inserted, the opening 35 surrounded by the U-shaped inner surface 33, and the opening surface 34 of the side surface 31, Surrounded by a portion of the side surface 31 and a portion of the U-shaped inner surface 33, the side surface 31
A bag body 37 is provided with a sealing surface 36 that seals the opening surface 34 side of the resist drying prevention liquid formed by the side surface 31, the U-shaped inner surface 33, and the sealing surface 36 of the bag body 37. A storage section 38 for storing, this storage section 3
The upper part of 8 is partially covered by the upper surface of the bag body 37,
Furthermore, a drying prevention jig 3 having an upper surface 39 surrounded by side surfaces 31 is prepared. This drying prevention jig 3 is
Any material that is not attacked by the resist drying prevention liquid, such as glass, may be used. Next, in the storage section 38,
For example, the resist to be dispensed and dropped is COP (Meed
Chemical (trade name), a monochlorobenzene resist drying prevention liquid 4 is injected, and the amount of this liquid is large enough even when the drying prevention jig 3 is held almost vertically with the sealing surface 36 of the bag body 37 as the bottom surface. The amount of liquid is such that it can be accommodated in the bag body 37. Next, the circular mouth 51
, a hexagonal pillar-shaped drying prevention jig attachment part (hereinafter referred to as "attachment part") 52, an inclined shoulder 53 that holds the drying prevention jig 3, and a cylindrical resist storage part 5.
A container body 5 consisting of 4 is prepared. circular mouth 5
1 is smaller than the distance l ₁ from side to side forming the opening surface 34 of the side 31, and the height h ₁ of the mounting portion 52 in the direction of the opening 51 is the height h ₂ of the bag body 37.
The height may be higher than that and does not contact the upper surface 39, and the maximum length of the hexagon of the mounting portion 52
It is sufficient that m ₁ is smaller than the distance l2 between the U-shaped inner surfaces 33 and the depth n. Further, it is sufficient that the diameter of the resist storage portion 54 is larger than the distance l ₂ between the U-shaped inner surfaces 33. Next, the U-shaped inner surface 33 of the drying prevention jig 3
The attachment part 52 of the container main body 5 is inserted between them with one hexagonal corner of the attachment part 52 facing the opening surface 34 side. In addition, the drying prevention jig 3 is attached to the shoulder 5 of the container body 5.
3 to form the container of the present invention.

Next, the resist dispensing and dropping method of this example will be described below. First, with the container body 5 inserted into the drying prevention jig 3, tilt the container body 5 at an arbitrary angle and dispense the resist onto the photomask blank.
Drip. After the resist dispensed/dropped onto the photomask blank reaches an appropriate amount, the container body 5 is stood upright, and the dispensing/dropping of the resist is stopped. In this repeated operation of dispensing and dropping, the resist drying prevention liquid 4 moves within the storage section 38 of the drying prevention jig 3, and this movement increases the evaporation rate of the volatile components of the resist drying prevention liquid 4. The volatile component gas of the anti-drying liquid 4 fills the mouth 51 of the container body 5 and the inside of the resist storage section 54 .
Thereby, it is possible to prevent drying of the resist attached to the inside of the container body including the mouth 51 of the container body 5, and to prevent dust from adhering to the mouth 51 portion. Furthermore, according to this embodiment, since the container body 5 is inserted into the drying prevention jig 3 with one hexagonal corner of the mounting portion 52 of the container body 5 facing the opening surface 34, the resist is dispensed. - When dropping, the resist is dispensed and dropped along the corners of the mounting part 52, so the surface area on which the remaining resist liquid adheres is smaller than that of the cylindrical mounting part 52, and this hexagonal mounting part 52 In this case, the drying speed of the resist can be made slower, and the viscosity of the resist can be further stabilized.

(Example 2) This will be explained in detail based on FIG. 4. Figure 4 a, b
are a plan view and a front view of the container body of this example, respectively, and figures c and d are a front view and a side view of the container of this example formed by inserting a drying prevention jig into the container body, respectively. .

First, the container body 5 consists of a hexagonal pyramid opening 51, a hexagonal column mounting portion 52, a hexagonal column shoulder 53, and a hexagonal column resist storage portion 54, each of which has a similar hexagonal shape. Next, in the drying prevention jig 3, the minimum length m ₂ of the hexagon of the mounting portion 52 is the U-shaped inner surface 33.
The distance between them is slightly smaller than _l2 , for example about 1 mm, and the material is made of elastic material such as Teflon.
This is a resin that is not attacked by the resist drying prevention liquid, and the rest is the same as in Example 1. Next, resist drying prevention liquid 4 similar to that in Example 1 is injected into this drying prevention jig 3, and the U-shaped inner surface of the drying prevention jig 3 is
3, with one corner of the hexagon such as the mounting part 52 facing the opening surface 34 side, and attaching the mounting part 52 of the container body 5.
is inserted to form the container of the present invention. At this time,
Since the drying prevention jig 3 is made of an elastic material and the minimum length m ₂ of the hexagon of the mounting portion 52 is smaller than the distance l ₂ between the U-shaped inner surfaces 33, the drying prevention jig 3 is It is inserted into the attachment part 52 of the container body 5. When dispensing and dropping resist using this container, the resist storage section 54, the shoulder 53, the mounting section 5
2. Since the resist is dispensed and dropped along the corner of the opening 51, the surface area on which residual liquid of the resist adheres is smaller than in Example 1, the drying speed of the resist is slower, and the viscosity of the resist is lower. It becomes more stable. The effects of preventing drying of the resist and preventing dust from adhering to the mouth area are the same as in Example 1.

As described above, according to the present invention, the desiccation prevention jig is not limited to the shapes in Examples 1 and 2, but may have other shapes such as a disc-like shape as shown in FIG. , at least an inner surface 33 forming a concave shape for attaching the container body, and a side surface 31 having an opening surface 34 on the concave opening 35 side of the inner surface 33 so as to surround this inner surface 33, and this inner surface 33 and side surface 31 Between the storage part 3 of the resist drying prevention liquid
8, and at least near the inner surface 33 and the opening surface 34 of the side surface 31, a bag body 37 having a volume that accommodates the resist drying prevention liquid when the container is tilted.
, and further comprises an upper surface 39 for covering the storage section 38. Next, Examples 1 and 2
The shape of the container body is not limited to the shape shown in FIG. It may be. Further, the method of attaching and holding the drying prevention jig to the container body is not limited to the first and second embodiments, and the container body and the concave inner surface may be fixed together using an adhesive. Further, the resist drying prevention liquid is not limited to monochlorobenzene, and may be any liquid having a vapor pressure higher than the vapor pressure of the resist to be dispensed/dropped.

As described above, according to the present invention, it is possible to prevent the resist remaining at the opening of the container body and the resist attached to the attachment part and the resist storage area from drying out, to prevent dust from adhering to the opening of the container body, and to cover the opening with a lid. It is also possible to omit the work of fitting the resist, and furthermore, the uniformity of the viscosity of the resist can be maintained.

[Brief explanation of drawings]

Figure 1 is a schematic diagram showing a conventional container;
Figure a is a perspective view showing a drying prevention jig according to an embodiment of the present invention, Figure b is a perspective view with the top side removed from Figure A, and Figures c and d are a plan view and a front view of Figure A. Yes, 3rd
Figures a and b are a plan view and a front view showing a container body according to an embodiment of the present invention, Figures c and d are a front view and a side view showing an embodiment of a container according to the present invention, and Figure 4 a ,b
is a plan view showing a container body of another embodiment of the present invention;
5 is a front view and a side view showing another embodiment of the container according to the present invention, and FIG. 5 is a perspective view showing a drying prevention jig according to another embodiment of the present invention. ,
FIGS. 6a and 6b are a plan view and a front view showing a container body according to another embodiment of the present invention. 3...Drying prevention jig, 4...Resist drying prevention liquid, 5...Container body, 31...Side surface, 32...Bottom surface, 33...U-shaped inner surface, 34...Opening surface, 35
... opening, 36 ... sealing surface, 37 ... bag body, 3
8... Storage section, 39... Top surface, 51... Mouth, 52
...Mounting section, 53...Shoulder, 54...Resist storage section.

Claims (1)

[Claims for Utility Model Registration] (1) A container body provided with a mouth, a drying prevention jig attachment part, and a resist storage part, an inner surface forming a concave shape for attaching the container body, and a concave opening side of the inner surface. a side surface formed to surround the inner surface with an opening surface; a storage section for storing a resist drying prevention liquid between the inner surface and the side surface; a bag formed at least near the opening surface of the storage section; A desiccation prevention jig consisting of at least an inner surface, the storage section, and an upper surface covering the bag body, and a resist desiccation prevention liquid injected into the storage section, and further comprising an opening of the container body inside the desiccation prevention jig. A resist container characterized by being inserted. (2) The resist container according to claim (1), wherein the resist drying prevention liquid is a liquid having a vapor pressure higher than the vapor pressure of a desired resist.