JPH0145584B2 - - Google Patents
Info
- Publication number
- JPH0145584B2 JPH0145584B2 JP55148988A JP14898880A JPH0145584B2 JP H0145584 B2 JPH0145584 B2 JP H0145584B2 JP 55148988 A JP55148988 A JP 55148988A JP 14898880 A JP14898880 A JP 14898880A JP H0145584 B2 JPH0145584 B2 JP H0145584B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- sample
- voltage
- extraction electrode
- deceleration
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/302—Contactless testing
- G01R31/305—Contactless testing using electron beams
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measurement Of Current Or Voltage (AREA)
- Tests Of Electronic Circuits (AREA)
Description
【発明の詳細な説明】
本発明は電圧測定装置に係り、特に該エネルギ
アナライザーの引き出し電極を改良した電圧測定
装置に関する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a voltage measuring device, and more particularly to a voltage measuring device in which the extraction electrode of the energy analyzer is improved.
従来から電子ビームを試料に照射して該試料面
より放出される２次電子をアナライズして精度よ
く電圧測定するための電圧測定装置として引き出
し電極を設けたエネルギアナライザーを利用する
電圧測定装置が知られている。第１図は従来の引
き出し電極を用いたエネルギアナライザーの略線
的な電極構成図であり半円球状の金属メツシユよ
りなる減速電極１にマイナス電位VRが与えられ、
該半円球状の減速電極内に平板状の引き出し電極
２が配置されている。該引き出し電極は同じくメ
ツシユ状となされ、プラス電位VEが与えられて
いる。引き出し電極２の下端にはIC等の試料３
が置かれて電子ビーム４を該試料３の表面に照射
することで低エネルギの２次電子５が放出され
る。該２次電子は引き出し電極２によつて加速さ
れ、減速電極１に与えられる電圧VR以上のエネ
ルギを有する２次電子のみをメツシユを通して通
過させて２次電子検知手段６に与えられるように
なされる。 Conventionally, a voltage measuring device that uses an energy analyzer equipped with an extraction electrode has been known as a voltage measuring device for accurately measuring voltage by irradiating a sample with an electron beam and analyzing secondary electrons emitted from the surface of the sample. It is being FIG. 1 is a schematic electrode configuration diagram of an energy analyzer using a conventional extraction electrode. A negative potential V R is applied to a deceleration electrode 1 made of a semicircular metal mesh.
A flat extraction electrode 2 is disposed within the semicircular deceleration electrode. The extraction electrode is also mesh-shaped and is given a positive potential V E . At the lower end of the extraction electrode 2 is a sample 3 such as an IC.
is placed and the surface of the sample 3 is irradiated with the electron beam 4, thereby emitting low-energy secondary electrons 5. The secondary electrons are accelerated by the extraction electrode 2, and only the secondary electrons having energy higher than the voltage V R applied to the deceleration electrode 1 are allowed to pass through the mesh and are applied to the secondary electron detection means 6. Ru.
第３図は試料３の電圧がOVの場合の、２次電
子エネルギスペクトル分布曲線を示し、減速電極
に加えられるマイナス電位VRに依存して斜線で
示す部分のエネルギのみが減速電極を通過する。
次に試料３に或るマイナスの電圧が加わると同一
のマイナス電位VRが減速電極１に与えられてい
ても第４図示の如くエネルギスペクトル分布曲線
は当該印加電圧分だけ右方にシフトし減速電極１
を通過するエネルギは増加する。この様な現象を
利用して試料３への電圧印加時のエネルギアナラ
イザから出力される２次電子を測定することによ
つて試料３の電圧を測定することが出来る。上述
の第１図の構成に於ける減速電極１及び引き出し
電極２部分の拡大図を第２図に示す。同図に上記
電極に所定の電圧を加えた状態での電位分布７を
一点鎖線で示す。この等電位面からも解る様に平
板状の引き出し電極２の影響によつて試料３より
放出された２次電子５は、検知手段６に至る経路
でその方向を変えられてしまう。この作用のため
第４図の如く試料３に加えられる電圧変化に応じ
て減速電極を通過する２次電子は電界分布の違い
によつて生ずる２次電子放出方向の差が加味され
て測定点近傍（減速電極）は平板状の引き出し電
極による電界分布の影響を十分にとり除くことが
できない。即ち平板状の電極近傍の電界の影響が
正確なエネルギアナライズを不可能とする欠点を
生ずる。 Figure 3 shows the secondary electron energy spectral distribution curve when the voltage of sample 3 is OV, and only the energy in the shaded area passes through the deceleration electrode, depending on the negative potential V R applied to the deceleration electrode. .
Next, when a certain negative voltage is applied to the sample 3, even though the same negative potential V R is applied to the deceleration electrode 1, the energy spectrum distribution curve shifts to the right by the applied voltage as shown in Figure 4, causing deceleration. Electrode 1
The energy passing through increases. Utilizing such a phenomenon, the voltage of the sample 3 can be measured by measuring the secondary electrons output from the energy analyzer when voltage is applied to the sample 3. FIG. 2 shows an enlarged view of the deceleration electrode 1 and extraction electrode 2 portion in the configuration shown in FIG. 1 described above. In the figure, the potential distribution 7 in a state where a predetermined voltage is applied to the electrode is shown by a dashed line. As can be seen from this equipotential surface, the direction of the secondary electrons 5 emitted from the sample 3 due to the influence of the flat extraction electrode 2 is changed on the path to the detection means 6. Due to this effect, as shown in Fig. 4, the secondary electrons passing through the deceleration electrode in accordance with the voltage change applied to the sample 3 are taken into account the difference in the direction of secondary electron emission caused by the difference in the electric field distribution, and the secondary electrons pass near the measurement point. (deceleration electrode) cannot sufficiently eliminate the influence of electric field distribution due to the flat extraction electrode. That is, the influence of the electric field near the flat electrode causes a drawback that accurate energy analysis is impossible.
本発明は上述の欠点を除いた電圧測定の出来る
引き出し電極の改良に関し、減速電極と平板状メ
ツシユの引き出し電極との間に半円球状の引き出
し電極を付加して試料より放出された２次電子が
減速作用のみを持つ減速電界を形成し２次電子が
方向を変えないようにして精度の高い電圧測定を
高速に行うようにしたものである。 The present invention relates to an improvement of an extraction electrode that can measure voltage without the above-mentioned drawbacks, and by adding a hemispherical extraction electrode between a deceleration electrode and a flat mesh extraction electrode, secondary electrons emitted from a sample can be collected. This system forms a decelerating electric field that only has a decelerating effect and prevents the secondary electrons from changing direction, allowing high-precision voltage measurements to be made at high speed.
以下、本発明の１実施例を第５図及び第６図に
ついて詳記する。尚第１図及び第２図と同一部分
には同一符号を付して重復説明を省略する。即ち
平板状のメツシユよりなる引き出し電極２と半円
球状メツシユよりなる減速電極１間に該減速電極
１と同心円状の半円球状メツシユよりなる引き出
し電極８を設け、上記平板上の引き出し電極と半
円球状の引き出し電極に同一の引き出し電圧VE
を印加する。 Hereinafter, one embodiment of the present invention will be described in detail with reference to FIGS. 5 and 6. Note that the same parts as in FIGS. 1 and 2 are given the same reference numerals and repeated explanations will be omitted. That is, between the extraction electrode 2 made of a flat mesh and the deceleration electrode 1 made of a hemispherical mesh, an extraction electrode 8 made of a semicircular spherical mesh concentric with the deceleration electrode 1 is provided. The same extraction voltage V E for the spherical extraction electrode
Apply.
上述の構成の減速電極１と引き出し電極８，２
近傍の等電位面７ａは第７図に示す如く同心球面
となり試料３より放出された２次電子は平板上メ
ツシユの引き出し電極２内から半円球状メツシユ
の引き出し電極８に至る間は半円球上の等電位面
を形成し、２次電子は方向を変えずに直進し、減
速電極によつて減速のみが与えられることにな
る。 Deceleration electrode 1 and extraction electrodes 8 and 2 configured as described above
The nearby equipotential surfaces 7a are concentric spherical surfaces as shown in FIG. 7, and the secondary electrons emitted from the sample 3 form a hemispherical surface from the inside of the extraction electrode 2 of the flat mesh to the extraction electrode 8 of the hemispherical mesh. The upper equipotential surface is formed, and the secondary electrons travel straight without changing direction, and are only decelerated by the deceleration electrode.
本発明は上述の如く構成したのでエネルギのア
ナライザに於て、試料に照射した電子ビームによ
つて放出される２次電子が平板状メツシユよりな
る引き出し電極によつて生ずる等電位面により方
向を変えられることがなく、この方向変換によつ
て生ずる差が減速電界で増大することもなく、引
き出し電極としての機能を充分に果し、且つ測定
点（減速電極）近傍の電位分布の影響をとり除く
ことが出来るので精密な電圧測定が出来る特徴を
有するものである。 Since the present invention is constructed as described above, in the energy analyzer, the direction of secondary electrons emitted by the electron beam irradiated onto the sample is changed by the equipotential surface created by the extraction electrode made of a flat mesh. The difference caused by this direction change is not increased by the deceleration electric field, and the function as an extraction electrode is sufficiently performed, and the influence of the potential distribution near the measurement point (deceleration electrode) is eliminated. It has the feature of being able to perform precise voltage measurements.
第１図は従来のエネルギアナライザに用いる電
圧測定装置の原理的説明図、第２図は第１図の減
速電極と引き出し電極部分の電界分布を示す説明
図、第３図及び第４図は、第１図の電圧測定装置
の動作説明図、第５図は本発明のエネルギアナラ
イザに用いる電圧測定装置の原理的説明図、第６
図は第５図の減速電極と引き出し電極部分の電界
分布を示す説明図である。
１……減速電極、２……引き出し電極、３……
試料、４……電子ビーム、５……２次電子、６…
…検知手段、７，７ａ……等電位面、８……半円
球状の引き出し電極。
Fig. 1 is an explanatory diagram of the principle of a voltage measuring device used in a conventional energy analyzer, Fig. 2 is an explanatory diagram showing the electric field distribution of the deceleration electrode and extraction electrode portion of Fig. 1, and Figs. 3 and 4 are: FIG. 1 is an explanatory diagram of the operation of the voltage measuring device, FIG. 5 is an explanatory diagram of the principle of the voltage measuring device used in the energy analyzer of the present invention, and FIG.
The figure is an explanatory diagram showing the electric field distribution in the deceleration electrode and extraction electrode portions of FIG. 5. 1...Deceleration electrode, 2...Extraction electrode, 3...
Sample, 4...Electron beam, 5...Secondary electron, 6...
...detection means, 7, 7a... equipotential surface, 8... semicircular spherical extraction electrode.
Claims (1)
出される２次電子をエネルギアナライズして該試
料の電圧を測定する電圧測定装置に於てエネルギ
アナライザーの減速電極と、前記減速電極と同心
状の半円球状メツシユと該半円球状メツシユの下
部に配設された平面メツシユとよりなる引き出し
電極とを設けてなる電圧測定装置。1. In a voltage measuring device that measures the voltage of the sample by irradiating the sample with an electron beam and energy-analyzing the secondary electrons emitted from the surface of the sample, a deceleration electrode of the energy analyzer is concentric with the deceleration electrode. A voltage measuring device comprising an extraction electrode made of a hemispherical mesh and a flat mesh disposed below the hemispherical mesh.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55148988A JPS5772073A (en) | 1980-10-24 | 1980-10-24 | Voltage measuring device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP55148988A JPS5772073A (en) | 1980-10-24 | 1980-10-24 | Voltage measuring device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5772073A JPS5772073A (en) | 1982-05-06 |
| JPH0145584B2 true JPH0145584B2 (en) | 1989-10-04 |
Family
ID=15465182
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP55148988A Granted JPS5772073A (en) | 1980-10-24 | 1980-10-24 | Voltage measuring device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5772073A (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE3638682A1 (en) * | 1986-11-13 | 1988-05-19 | Siemens Ag | SPECTROMETER LENS FOR CARPUSULAR BEAM MEASUREMENT TECHNOLOGY |
-
1980
- 1980-10-24 JP JP55148988A patent/JPS5772073A/en active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5772073A (en) | 1982-05-06 |
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