JPH0151021B2 - - Google Patents

Info

Publication number
JPH0151021B2
JPH0151021B2 JP56056553A JP5655381A JPH0151021B2 JP H0151021 B2 JPH0151021 B2 JP H0151021B2 JP 56056553 A JP56056553 A JP 56056553A JP 5655381 A JP5655381 A JP 5655381A JP H0151021 B2 JPH0151021 B2 JP H0151021B2
Authority
JP
Japan
Prior art keywords
sample
lens
electron
magnetic field
magnetic pole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56056553A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57172643A (en
Inventor
Seiichi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP56056553A priority Critical patent/JPS57172643A/ja
Publication of JPS57172643A publication Critical patent/JPS57172643A/ja
Publication of JPH0151021B2 publication Critical patent/JPH0151021B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56056553A 1981-04-15 1981-04-15 High-resolution scanning electron microscope Granted JPS57172643A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56056553A JPS57172643A (en) 1981-04-15 1981-04-15 High-resolution scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56056553A JPS57172643A (en) 1981-04-15 1981-04-15 High-resolution scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS57172643A JPS57172643A (en) 1982-10-23
JPH0151021B2 true JPH0151021B2 (de) 1989-11-01

Family

ID=13030291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56056553A Granted JPS57172643A (en) 1981-04-15 1981-04-15 High-resolution scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS57172643A (de)

Also Published As

Publication number Publication date
JPS57172643A (en) 1982-10-23

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