JPS57172643A - High-resolution scanning electron microscope - Google Patents

High-resolution scanning electron microscope

Info

Publication number
JPS57172643A
JPS57172643A JP56056553A JP5655381A JPS57172643A JP S57172643 A JPS57172643 A JP S57172643A JP 56056553 A JP56056553 A JP 56056553A JP 5655381 A JP5655381 A JP 5655381A JP S57172643 A JPS57172643 A JP S57172643A
Authority
JP
Japan
Prior art keywords
lens
magnetic
sample
field
detectors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP56056553A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0151021B2 (de
Inventor
Seiichi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
NTT Inc
Original Assignee
Jeol Ltd
Nihon Denshi KK
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK, Nippon Telegraph and Telephone Corp filed Critical Jeol Ltd
Priority to JP56056553A priority Critical patent/JPS57172643A/ja
Publication of JPS57172643A publication Critical patent/JPS57172643A/ja
Publication of JPH0151021B2 publication Critical patent/JPH0151021B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP56056553A 1981-04-15 1981-04-15 High-resolution scanning electron microscope Granted JPS57172643A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56056553A JPS57172643A (en) 1981-04-15 1981-04-15 High-resolution scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56056553A JPS57172643A (en) 1981-04-15 1981-04-15 High-resolution scanning electron microscope

Publications (2)

Publication Number Publication Date
JPS57172643A true JPS57172643A (en) 1982-10-23
JPH0151021B2 JPH0151021B2 (de) 1989-11-01

Family

ID=13030291

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56056553A Granted JPS57172643A (en) 1981-04-15 1981-04-15 High-resolution scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS57172643A (de)

Also Published As

Publication number Publication date
JPH0151021B2 (de) 1989-11-01

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