JPH0155578B2 - - Google Patents

Info

Publication number
JPH0155578B2
JPH0155578B2 JP58223438A JP22343883A JPH0155578B2 JP H0155578 B2 JPH0155578 B2 JP H0155578B2 JP 58223438 A JP58223438 A JP 58223438A JP 22343883 A JP22343883 A JP 22343883A JP H0155578 B2 JPH0155578 B2 JP H0155578B2
Authority
JP
Japan
Prior art keywords
post
wire
bonding
main body
soldering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58223438A
Other languages
Japanese (ja)
Other versions
JPS60115239A (en
Inventor
Takeshi Watanabe
Sadaharu Nishimori
Ushio Sakazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mahle Electric Drive Systems Co Ltd
Original Assignee
Kokusan Denki Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusan Denki Co Ltd filed Critical Kokusan Denki Co Ltd
Priority to JP58223438A priority Critical patent/JPS60115239A/en
Publication of JPS60115239A publication Critical patent/JPS60115239A/en
Publication of JPH0155578B2 publication Critical patent/JPH0155578B2/ja
Granted legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/328Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by welding
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/30Assembling printed circuits with electric components, e.g. with resistors
    • H05K3/32Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits
    • H05K3/34Assembling printed circuits with electric components, e.g. with resistors electrically connecting electric components or wires to printed circuits by soldering
    • H05K3/341Surface mounted components
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/071Connecting or disconnecting
    • H10W72/075Connecting or disconnecting of bond wires
    • H10W72/07551Connecting or disconnecting of bond wires characterised by changes in properties of the bond wires during the connecting
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/531Shapes of wire connectors
    • H10W72/5363Shapes of wire connectors the connected ends being wedge-shaped
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W72/00Interconnections or connectors in packages
    • H10W72/50Bond wires
    • H10W72/531Shapes of wire connectors
    • H10W72/5366Shapes of wire connectors the bond wires having kinks
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10WGENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W90/00Package configurations
    • H10W90/701Package configurations characterised by the relative positions of pads or connectors relative to package parts
    • H10W90/751Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires
    • H10W90/753Package configurations characterised by the relative positions of pads or connectors relative to package parts of bond wires between laterally-adjacent chips

Landscapes

  • Wire Bonding (AREA)

Abstract

PURPOSE:To improve the efficiency of wire bonding operation, by forming both of bonding and soldering surfaces on the opposite end faces of a post. CONSTITUTION:The main body 5a of a square-pillar-shaped post is made of a first metal having a soldering property, such as nickel, and wire-connecting parts 5b, which are jointed to the oposite end faces of the main body 5a of the post respectively, are made of a second metal which can be bonded with wires by ultrasonic bonding. Each wire-connecting part 5b has a smaller surface area than the opposite and faces 5A of the main body 5a of the post. Moreover, each wire-connecting part 5b is formed, for instance, in the shape of a strip having a smaller width than that of the end face of the main body 5a of the post, and is jointed to the central portion of each end face of said main body. Accordingly, a surface B to which the ultrasonic bonding can be applied is formed in the center of each end face of the wire bonding post 5, while a surface A to which soldering can be applied is formed on both sides of the surface B, and thus the soldering and the ultrasonic bonding can be applied to each of the end faces.

Description

【発明の詳細な説明】 産業上の利用分野 本発明は、ハイブリツド集積回路等を形成する
場合にボンデイング用ワイヤと基板の導電部との
間に介在させるワイヤボンデイング用ポストに関
するものである。
DETAILED DESCRIPTION OF THE INVENTION Field of Industrial Application The present invention relates to a wire bonding post that is interposed between a bonding wire and a conductive portion of a substrate when forming a hybrid integrated circuit or the like.

従来技術 トランジスタ等の半導体素子(集積回路を含
む)や抵抗、コンデンサ等の電子部品のチツプを
基板に装着してハイブリツド集積回路を構成する
場合、第1図に示すようにチツプ1の一面1aに
設けた電極を基板2上の導電部2aに半田3によ
り接続してチツプ1を基板2に取付け、チツプ1
の他面1bに設けた電極1cをボンデイングワイ
ヤ4とワイヤボンデイング用ポスト5とを介して
基板2上に設けた他の導電部2bに接続すること
により所定の回路を構成することが行なわれてい
る。
Prior Art When configuring a hybrid integrated circuit by mounting chips of semiconductor elements (including integrated circuits) such as transistors and electronic components such as resistors and capacitors on a substrate, one side 1a of the chip 1 is mounted as shown in FIG. The chip 1 is attached to the board 2 by connecting the provided electrode to the conductive part 2a on the board 2 with solder 3.
A predetermined circuit is constructed by connecting the electrode 1c provided on the other surface 1b to another conductive portion 2b provided on the substrate 2 via the bonding wire 4 and the wire bonding post 5. There is.

最近、ワイヤボンデイング法としては、超音波
ボンデイング法が多く用いられており、この場合
ボンデイング用ワイヤとしてはコスト及び導電性
の見地からアルミニユームが使用されている。超
音波ボンデイング法においては、接合する金属同
志を突合せてボンデイングヘツドから突合せ接合
部に超音波を伝えることにより接合される金属同
志を擦り合せ、これにより金属表面の酸化物を除
去するとともに摩擦熱で接合部を溶融させて両金
属を一体に接合する。この場合接合される金属は
異種の金属であつてもよいが、異種の金属の場合
には条件が厳しく、生産性が低下するため、一般
には同種の金属が用いられる。そこでアルミニユ
ームのワイヤを使用するワイヤボンデイング法に
よりチツプの電極1cを基板の電極2bに接続す
る場合には、チツプ1の電極1cをアルミニユー
ムにより形成するとともに、第2図に示すよう
に、半田付け可能な金属からなるポスト主体5a
とアルミニユームからなるワイヤ接続部5bとを
クラツド法等により接合したワイヤボンデイング
用ポスト5を用いて該ポスト5のポスト主体5a
を基板2の電極2bに半田3により接続し、チツ
プ1の電極1cとポスト5のワイヤ接続部とにワ
イヤ4の両端をボンデイングしている。この場合
ワイヤ接続部5bの厚さtは10μ程度であり、ポ
スト主体5aの厚さは0.2乃至0.5mm程度である。
Recently, as a wire bonding method, an ultrasonic bonding method is often used, and in this case, aluminum is used as the bonding wire from the viewpoint of cost and conductivity. In the ultrasonic bonding method, the metals to be joined are brought together and rubbed together by transmitting ultrasonic waves from the bonding head to the butt joint, which removes oxides on the metal surfaces and generates frictional heat. Both metals are joined together by melting the joint. In this case, the metals to be joined may be different types of metals, but in the case of different types of metals, the conditions are severe and productivity decreases, so generally the same types of metals are used. Therefore, when connecting the electrode 1c of the chip to the electrode 2b of the substrate by the wire bonding method using aluminum wire, the electrode 1c of the chip 1 is formed of aluminum and can be soldered as shown in FIG. Post main body 5a made of metal
The post body 5a of the post 5 is bonded using a wire bonding post 5 in which a wire connection portion 5b made of aluminum and a wire connection portion 5b are bonded together by a cladding method or the like.
is connected to the electrode 2b of the substrate 2 by solder 3, and both ends of the wire 4 are bonded to the electrode 1c of the chip 1 and the wire connection portion of the post 5. In this case, the thickness t of the wire connection portion 5b is about 10 μm, and the thickness of the post main body 5a is about 0.2 to 0.5 mm.

ところでこの種の目的に使用されるワイヤボン
デイング用ポスト5においては、ポスト主体5a
を構成する金属として、アルミニユームとの接合
が容易でしかも半田付け性を有するニツケルが用
いられているが、ニツケルはアルミニユームとほ
ぼ同色であるため、両者の判別は困難であり、第
2図のようにポスト主体5aの一面にワイヤ接続
部5bを接合した構造では、組立ての際にボンデ
イング用の面と半田付け用の面とを見誤るミスが
多く発生して組立て作業能率が悪くなる欠点があ
つた。尚ボンデイング用の面と半田付け用の面と
の判別を可能にするために、両面の形状を異なら
せる等の対策が講じられているが、一般にワイヤ
ボンデイング用ポストは1mm平方乃至2mm平方程
度の小さいものであるため、その面の形状を判別
することは容易ではなく、両面を見誤るミスを無
くすことはできなかつた。
By the way, in the wire bonding post 5 used for this kind of purpose, the post main body 5a
Nickel is used as a metal that can be easily joined to aluminum and has solderability, but since nickel has almost the same color as aluminum, it is difficult to distinguish between the two, as shown in Figure 2. In the structure in which the wire connection portion 5b is bonded to one side of the post main body 5a, there is a drawback that many mistakes occur during assembly, such as misidentifying the bonding surface and the soldering surface, resulting in poor assembly work efficiency. Ta. In order to make it possible to distinguish between the bonding surface and the soldering surface, measures are taken such as making the shapes of both surfaces different, but generally wire bonding posts are approximately 1 mm square to 2 mm square. Since it is small, it is not easy to distinguish the shape of its surface, and it has not been possible to eliminate mistakes in identifying both sides.

発明の目的 本発明の目的は、半田付け用の面とボンデイン
グ用の面とを判別する必要がない構造にして上記
の欠点を解消したワイヤボンデイング用ポストを
提供することにある。
OBJECTS OF THE INVENTION An object of the present invention is to provide a wire bonding post that eliminates the above-mentioned drawbacks by having a structure that eliminates the need to distinguish between a soldering surface and a bonding surface.

発明の構成 本発明は、半田付けが可能な第1の金属からな
るポスト主体と、ワイヤをボンデイングし得る第
2の金属からなつていて前記ポスト主体に一体に
接合されたワイヤ接続部とからなるワイヤボンデ
イング用ポストを改良したもので、本発明におい
ては、前記ワイヤ接続部が前記ポスト主体の両端
面の表面積よりも小さな表面積を有するように形
成され、該ワイヤ接続部が前記ポスト主体の両端
面にそれぞれ配設されている。
Structure of the Invention The present invention comprises a post main body made of a first metal that can be soldered, and a wire connection part made of a second metal to which a wire can be bonded and integrally joined to the post main body. This is an improved wire bonding post, and in the present invention, the wire connection portion is formed to have a surface area smaller than the surface area of both end surfaces of the post main body, and the wire connection portion is formed so as to have a surface area smaller than the surface area of both end surfaces of the post main body. are located in each.

上記の構成において、ワイヤ接続部はポスト主
体よりも小さな表面積を有しているため、ポスト
主体の両端面には半田付けが可能な半田付け面と
ボンデイングが可能なボンデイング面との双方が
形成される。従つて本発明のワイヤボンデイング
用ポストではその両端のいずれの面にもボンデイ
ングと半田付けとが可能であり、ハイブリツド集
積回路等の組立ての際にワイヤボンデイング用ポ
ストの面の判別を行う必要が無い。
In the above configuration, since the wire connection part has a smaller surface area than the post main body, both end surfaces of the post main body are formed with both a soldering surface that can be soldered and a bonding surface that can be bonded. Ru. Therefore, with the wire bonding post of the present invention, bonding and soldering can be performed on either side of the wire bonding post, and there is no need to identify the surface of the wire bonding post when assembling a hybrid integrated circuit or the like. .

実施例 以下添附図面を参照して本発明の実施例を説明
する。
Embodiments Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

第3図は本発明に一実施例を示し、同図におい
て5aはニツケル等の半田付け性を有する第1の
金属からなる角柱状のポスト主体、5b,5bは
ポスト主体5aの両端面にそれぞれ接合された、
ワイヤとの超音波ボンデイングが可能な(ボンデ
イングワイヤを構成する金属と同種の)第2の金
属からなるワイヤ接続部であり、各ワイヤ接続部
5bはポスト主体5aの両端面5A,5Aの表面
積よりも小さな表面積を有している。図示の例で
は、各ワイヤ接続部5bがポスト主体5aの端面
の幅よりも小さな幅寸法を有する帯状の形状に形
成され、各ワイヤ接続部5bはポスト主体5aの
各端面の中央部に接合されている。従つてワイヤ
ボンデイング用ポスト5の各端面の中央に超音波
ボンデイングが可能な面(ボンデイング面)Bが
形成され、その両側に半田付けが可能な面(半田
付け面)Aが形成されていずれの端面にも半田付
けと超音波ボンデイングとが可能になつている。
尚ワイヤ接続部5bを構成する金属とポスト主体
5aを構成する金属との接合は、圧接によつても
よく、またポスト主体5aの両端面にワイヤ接続
部5bを構成する金属の薄膜を蒸着やスパツタリ
ング等により固着するようにしてもよい。
FIG. 3 shows one embodiment of the present invention, in which 5a is a prismatic post main body made of a first metal with solderability such as nickel, and 5b and 5b are respectively attached to both end surfaces of the post main body 5a. joined,
It is a wire connection part made of a second metal (of the same type as the metal constituting the bonding wire) that can be ultrasonically bonded with the wire, and each wire connection part 5b has a surface area larger than the surface area of both end surfaces 5A, 5A of the post main body 5a. also has a small surface area. In the illustrated example, each wire connection portion 5b is formed in a band-like shape having a width smaller than the width of the end surface of the post main body 5a, and each wire connection portion 5b is joined to the center of each end surface of the post main body 5a. ing. Therefore, a surface (bonding surface) B on which ultrasonic bonding is possible is formed at the center of each end surface of the wire bonding post 5, and surfaces (soldering surface) A on which soldering is possible are formed on both sides of the surface B. Soldering and ultrasonic bonding are also possible on the end faces.
Note that the metal forming the wire connection portion 5b and the metal forming the post main body 5a may be joined by pressure welding, or a thin film of the metal forming the wire connection portion 5b may be deposited on both end surfaces of the post main body 5a. It may be fixed by sputtering or the like.

上記各ワイヤ接続部5bの大きさ(ボンデイン
グ面Bの大きさ)は、ポスト5の各端面に半田付
け面Aを充分に確保し、且つポスト5の各端面に
ワイヤ4が如何なる向きから当てがわれても該ボ
ンデイング面がワイヤに充分な面積を以て接触し
得るように、ワイヤの幅寸法やポスト主体の大き
さを勘案して適当な大きさに設定しておく。
The size of each wire connection portion 5b (the size of the bonding surface B) is such that a sufficient soldering surface A is secured on each end surface of the post 5, and the wire 4 can be applied to each end surface of the post 5 from any direction. The bonding surface is set to an appropriate size in consideration of the width of the wire and the size of the main body of the post so that the bonding surface can contact the wire with a sufficient area even if the wire is moved.

第4図は上記のワイヤボンデイング用ポスト5
を用いてワイヤボンデイングを行つた状態を示し
たもので、ワイヤ4はポスト5の上端面のボンデ
イング面Bにボンデイングされ、ポスト5の下端
面の半田付け面A,Aが半田3により基板2の電
極2bに接続されている。
Figure 4 shows the above wire bonding post 5.
The wire 4 is bonded to the bonding surface B of the upper end surface of the post 5, and the soldering surfaces A, A of the lower end surface of the post 5 are bonded to the substrate 2 by the solder 3. It is connected to electrode 2b.

上記の実施例では、ワイヤ接続部5bを帯状に
形成して、ポスト主体5bの各端面の中央を横切
るようにワイヤ接続部5bを配置してポスト5の
各端面に2つの半田付け面A,Aと1つのボンデ
イング面Bとを形成するようにしたが、ワイヤ接
続部5bの設け方は任意であり、例えば第5図に
示すように、角柱状のポスト本体5aの両端面の
中央に正方形または長方形状のワイヤ接続部5b
を接合するようにしてもよい。
In the above embodiment, the wire connection part 5b is formed in a band shape, and the wire connection part 5b is arranged so as to cross the center of each end surface of the post main body 5b, so that two soldering surfaces A, A and one bonding surface B are formed, but the wire connection portion 5b may be provided in any manner.For example, as shown in FIG. Or rectangular wire connection part 5b
may be joined together.

またポスト本体5aは半田付け面A及びボンデ
イング面Bが設けられた両端面5A,5Bとこれ
らの面A,Bが設けられていない側面とを識別し
得る形状であれば良く、角柱状に限られるもので
はない。例えば第6図に示すように、ポスト本体
5aを円柱状に形成することもできる。尚ポスト
本体5aを角柱状に形成する場合、縦横の寸法に
比べて厚さが充分小さい偏平な形に形成しておく
と、その両端面5A,5Bと他の側面との識別
(ポスト5の向きの識別)を容易にすることがで
きる。
Further, the post body 5a may have any shape as long as it can distinguish between the end surfaces 5A and 5B on which the soldering surface A and the bonding surface B are provided and the side surface on which these surfaces A and B are not provided, and is limited to a prismatic shape. It's not something you can do. For example, as shown in FIG. 6, the post body 5a may be formed into a cylindrical shape. If the post body 5a is formed into a prismatic shape, it should be formed into a flat shape whose thickness is sufficiently small compared to the vertical and horizontal dimensions, so that both end surfaces 5A and 5B can be distinguished from other side surfaces (the post 5 direction identification).

尚第6図のようにポスト本体5aの形状を円柱
状にすると、ポストの向きの識別を確実に行うこ
とができる。この場合ワイヤ接続部5bは第3図
の例と同様に帯状に形成することもできる。
If the shape of the post body 5a is cylindrical as shown in FIG. 6, the orientation of the post can be reliably identified. In this case, the wire connection portion 5b can also be formed in a band shape as in the example shown in FIG.

上記の説明では、ポスト本体5aを形成する金
属及びワイヤ接続部5bを形成する金属としてそ
れぞれニツケル及びアルミニユームを挙げたが、
他の異種の金属を組合せる場合にも同様に本発明
を適用することができるのは勿論である。
In the above explanation, nickel and aluminum were mentioned as the metal forming the post body 5a and the metal forming the wire connection part 5b, respectively.
Of course, the present invention can be similarly applied to cases where other different types of metals are combined.

発明の効果 以上のように、本発明によれば、ポストの両端
面にそれぞれボンデイング面と半田付け面との双
方が形成されるので、ポストの半田付け面とボン
デイング面との識別を行う必要が無く、ワイヤボ
ンデイング作業の能率を向上させることができる
利点がある。
Effects of the Invention As described above, according to the present invention, since both the bonding surface and the soldering surface are formed on both end surfaces of the post, it is not necessary to distinguish between the soldering surface and the bonding surface of the post. This has the advantage of improving the efficiency of wire bonding work.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は従来のワイヤボンデイング用ポストを
用いてワイヤボンデイングを行つた例を示した断
面図、第2図は従来用いられていたワイヤボンデ
イング用ポストの斜視図、第3図は本発明の一実
施例のワイヤボンデイング用ポストを示した斜視
図、第4図は同実施例のワイヤボンデイング用ポ
ストを用いてワイヤボンデイングを行つた例を示
した断面図、第5図及び第6図はそれぞれ本発明
の他の異なる実施例を示した斜視図である。 1……半導体素子のチツプ、2……基板、2
a,2b……導電部、3……半田、4……ワイ
ヤ、5……ワイヤボンデイング用ポスト、5a…
…ポスト本体、5b……ワイヤ接続部、5A,5
B……ポストの端面、A……半田付け面、B……
ボンデイング面。
Fig. 1 is a sectional view showing an example of wire bonding using a conventional wire bonding post, Fig. 2 is a perspective view of a conventionally used wire bonding post, and Fig. 3 is an example of the present invention. FIG. 4 is a perspective view showing the wire bonding post of the example. FIG. 4 is a sectional view showing an example of wire bonding using the wire bonding post of the same example. FIGS. FIG. 7 is a perspective view showing another different embodiment of the invention. 1...Semiconductor element chip, 2...Substrate, 2
a, 2b... Conductive part, 3... Solder, 4... Wire, 5... Post for wire bonding, 5a...
...Post body, 5b...Wire connection part, 5A, 5
B... End face of post, A... Soldering surface, B...
Bonding side.

Claims (1)

【特許請求の範囲】[Claims] 1 半田付けが可能な第1の金属からなるポスト
主体と、ワイヤをボンデイングし得る第2の金属
からなつていて前記ポスト主体に一体に接合され
たワイヤ接続部とからなるワイヤボンデイング用
ポストにおいて、前記ワイヤ接続部は前記ポスト
主体の両端面の表面積よりも小さな表面積を有す
るように形成されて該ポスト主体の両端面にそれ
ぞれ配設され、ポストの各端面に半田付け面とボ
ンデイング面との双方が形成されていることを特
徴とするワイヤボンデイング用ポスト。
1. A wire bonding post comprising a post main body made of a first metal that can be soldered, and a wire connection part made of a second metal capable of bonding a wire and integrally joined to the post main body, The wire connection portion is formed to have a surface area smaller than the surface area of both end surfaces of the post main body, and is disposed on both end faces of the post main body, and has both a soldering surface and a bonding surface on each end surface of the post. A wire bonding post characterized in that a wire bonding post is formed.
JP58223438A 1983-11-28 1983-11-28 Post for wire bonding Granted JPS60115239A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58223438A JPS60115239A (en) 1983-11-28 1983-11-28 Post for wire bonding

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58223438A JPS60115239A (en) 1983-11-28 1983-11-28 Post for wire bonding

Publications (2)

Publication Number Publication Date
JPS60115239A JPS60115239A (en) 1985-06-21
JPH0155578B2 true JPH0155578B2 (en) 1989-11-27

Family

ID=16798143

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58223438A Granted JPS60115239A (en) 1983-11-28 1983-11-28 Post for wire bonding

Country Status (1)

Country Link
JP (1) JPS60115239A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5468683A (en) * 1992-09-25 1995-11-21 U.S. Philips Corporation Method of manufacturing an optoelectronic semiconductor device having a single wire between non-parallel surfaces

Also Published As

Publication number Publication date
JPS60115239A (en) 1985-06-21

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