JPH0159836U - - Google Patents
Info
- Publication number
- JPH0159836U JPH0159836U JP15479187U JP15479187U JPH0159836U JP H0159836 U JPH0159836 U JP H0159836U JP 15479187 U JP15479187 U JP 15479187U JP 15479187 U JP15479187 U JP 15479187U JP H0159836 U JPH0159836 U JP H0159836U
- Authority
- JP
- Japan
- Prior art keywords
- cover
- measurement object
- temperature measurement
- thermocouple
- insulating material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009529 body temperature measurement Methods 0.000 claims description 4
- 239000011810 insulating material Substances 0.000 claims 2
- 230000001681 protective effect Effects 0.000 claims 1
- 238000005452 bending Methods 0.000 description 1
- 238000007733 ion plating Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measuring Temperature Or Quantity Of Heat (AREA)
- Physical Vapour Deposition (AREA)
Description
第１図は本考案の一実施例を示す断面図、第２
図はイオンプレーテイング装置における基板の温
度測定の一従来例を示す図である。
２２…保護管、２４ａ，２４ｂ…熱電対素線、
２５…部材（接触部）、２６…カバー、２７ａ…
非露出部、２７…屈曲溝、Ｃ…クリアランス、Ｇ
…蒸着物。
Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure shows a conventional example of temperature measurement of a substrate in an ion plating apparatus. 22... Protection tube, 24a, 24b... Thermocouple wire,
25... Member (contact part), 26... Cover, 27a...
Non-exposed part, 27...Bending groove, C...Clearance, G
...deposit.
Claims (1)
線２４ａ，２４ｂと、該熱電対素線の先端接続部
分を覆うように設けられ、かつ熱伝導率が高い絶
縁性材料から作られた、温度測定対象物に接触さ
れる温度測定対象物接触部２５と、前記熱電対素
線を覆うよう設けられた保護管２２と、前記温度
測定対象物接触部の外周に設けられた絶縁性材料
から作られたカバー２６とを備えて成り、前記カ
バーと前記保護管との間には、一部に外方から見
ることができない非露出部２７ａを有する屈曲溝
２７が周方向に連続して形成されていることを特
徴とする温度測定装置。 Thermocouple wires 24a and 24b whose ends are electrically connected to each other, and a thermocouple wire provided to cover the end connection portion of the thermocouple wires and made of an insulating material with high thermal conductivity. A temperature measurement object contacting part 25 that comes into contact with the temperature measurement object, a protection tube 22 provided to cover the thermocouple wire, and an insulating material provided on the outer periphery of the temperature measurement object contacting part. A bent groove 27 having a non-exposed portion 27a that cannot be seen from the outside is formed continuously in the circumferential direction between the cover and the protective tube. A temperature measuring device characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15479187U JPH059628Y2 (en) | 1987-10-09 | 1987-10-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15479187U JPH059628Y2 (en) | 1987-10-09 | 1987-10-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0159836U true JPH0159836U (en) | 1989-04-14 |
| JPH059628Y2 JPH059628Y2 (en) | 1993-03-10 |
Family
ID=31431840
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15479187U Expired - Lifetime JPH059628Y2 (en) | 1987-10-09 | 1987-10-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH059628Y2 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0498135A (en) * | 1990-08-15 | 1992-03-30 | Hitachi Ltd | Detection of temperature |
-
1987
- 1987-10-09 JP JP15479187U patent/JPH059628Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0498135A (en) * | 1990-08-15 | 1992-03-30 | Hitachi Ltd | Detection of temperature |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH059628Y2 (en) | 1993-03-10 |
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