JPH059628Y2 - - Google Patents

Description

[Detailed description of the invention] "Industrial application field" This invention is used to measure the temperature of a substrate to which a deposit is attached while a high voltage is applied in an ion plating device or the like. The present invention relates to a temperature measuring device suitably used for.

"Prior Art" FIG. 2 shows an example of a conventionally known ion plating apparatus. Reference numeral 1 in the figure is a vacuum container connected to a vacuum pump (not shown). A substrate holder 2 connected to the negative side of a DC power source 2a is disposed inside and above the vacuum container 1, and a substrate 3, which is an object to be deposited, is attached to the substrate holder 2. Further, a crucible 5 for storing the evaporative substance 4 is disposed on the floor surface 1a of the vacuum vessel 1, and an electron gun for heating and evaporating the evaporative substance 4 is provided near the crucible 5. The electron beam 7 emitted from this electron gun is
It is bent in the direction of movement by a magnetic field (not shown),
The evaporated substance 4 is irradiated.

Substrate holder 2 and crucible 5 in the vacuum container 1
An ionization electrode 8 connected to the positive side of a DC power supply 8a is arranged between them. A glow discharge region 9 is formed between the ionization electrode 8 and the crucible 5 by evaporation of the evaporation substance 4. This glow discharge region 9 is formed when thermoelectrons and the like generated during evaporation of the evaporative substance 4 move to the ionization electrode 8 . That is, the glow discharge area 9 is caused by thermionic electrons generated from the evaporated substance 4.
is formed, and the evaporated substance 4 is ionized by this glow discharge region 9. The ionized evaporated substance 4 then collides with the substrate 3 to which a negative voltage is applied at high speed.

On the other hand, a gas introduction pipe 10 is provided on the side of the vacuum container 1 to which a reaction gas such as nitrogen is supplied. The reaction gas supplied into the vacuum container 1 through the gas introduction tube 10 is ionized in the glow discharge region 9 to become positive ions, and reacts with the positive ions generated from the evaporative substance 4 to cause the substrate to be exposed to the substrate. It is designed to be deposited on the surface of 3. Note that 11 indicates a shutter.

"Problems to be solved by the invention" By the way, the temperature of the substrate 3, which is the object to be evaporated, affects the evaporation layer formed on its surface, and in order to obtain the desired evaporation layer, the temperature of the substrate 3 must be adjusted. It is necessary to control with high precision.

In order to control the temperature of the substrate 3 with high precision, accurate temperature measurement is a prerequisite. Conventionally, the temperature of the board 3 has been measured using a non-contact type thermometer 12 such as an infrared radiation thermometer because the board 3 is exposed to high voltage (several hundred volts) during operation, which is dangerous. It was commonly used.

In the case of a non-contact type thermometer 12, for example, one that uses radiant heat rays has the disadvantage that the surface temperature of objects other than the object to be measured easily enters as a disturbance, making it difficult to accurately measure the temperature.

Furthermore, in the case of an infrared thermometer that measures temperature through a glass window attached to the tip of the thermometer, the glass window is deposited during operation, and the radiant energy from the substrate to be deposited is absorbed. Because of the attenuation, there is a drawback that accurate measurement is difficult as described above.

The present invention was developed in view of the above circumstances, and the purpose is to provide a temperature measuring device that can perform accurate and quick measurements, and that can safely measure temperature even when high voltage is applied to the object to be measured. shall be.

"Means for Solving the Problem" In the present invention, both ends of the thermocouple wire are electrically connected to each other, and the thermocouple wire is provided so as to cover the end connection portion of the thermocouple wire, and the end portions of the thermocouple wire are electrically connected to each other. A temperature measurement object contacting part that is made of a highly insulating material and is in contact with the temperature measurement object; a protection tube provided to cover the thermocouple wire; a cover made of an insulating material provided on the outer periphery, and a bent groove having a non-exposed part that cannot be seen from the outside is provided between the cover and the protective tube. It is characterized by being formed continuously in the direction.

"Operation" In the device of the present invention, by bringing the part made of an insulating material attached to the tip of the thermocouple wire into contact with the object to be measured, temperature can be measured by the thermocouple element through this part.

Furthermore, even if this device is inserted into the vacuum chamber of an ion plating device and a vapor deposition layer is formed around the outer periphery of the device, the device must be covered in advance. A bending groove having an unexposed part that cannot be seen from the outside is formed continuously in the circumferential direction between the protective tube and the middle part of the vapor deposited layer formed on the outer periphery of the device. can be electrically interrupted.

Therefore, even if the device with a vapor deposited film formed on its outer periphery is brought into contact with the vapor deposition substrate to which a high voltage is applied in the ion plating device, there will be no electrical connection from the vapor deposition substrate to the measurement base side or the vacuum vessel through the device. never flows.

"Embodiment" An embodiment of the present invention will be described below with reference to FIG.

This example shows a case where the apparatus of the present invention is used to measure the temperature of a deposition substrate of an ion plating apparatus.

Reference numeral 21 in the figure is a side wall of the vacuum container. A temperature measuring device S according to the present invention is provided in this side wall 21 in a penetrating state and movable in a direction orthogonal to the side wall 21. temperature is measured.

To explain the temperature measuring device S in detail, reference numeral 22 is a protective tube formed in a substantially cylindrical shape, and thermocouple wires 24a and 24b are embedded in the center of the tube with an insulating material 23 in between. Both ends of the thermocouple wires 24a and 24b are electrically connected to each other, and the end connection part is connected to the outer surface 25a of a member (contact part) 25 made of an insulating material with withstand voltage and high thermal conductivity. It is embedded in a position slightly inward from the

The member 25 is brought into direct contact with the vapor deposition substrate 3, which is the object to be measured, when the apparatus is moved to the left in the figure during measurement. A bottomed cylindrical cover 26 made of an insulating material with withstand voltage is placed around the outer periphery of this member 25 at its bottom 26a.
are fitted and attached concentrically to the protection tube 22. Further, the cylindrical portion 2 of the cover 26
6b extends toward the protection tube 22 side, and a clearance C is formed between the cylindrical portion 26b and the small diameter portion 22a at the tip end of the protection tube 22 over the entire circumference.

That is, a clearance C is provided between the cover 26 and the protection tube 22, in which a bending groove 27 is formed continuously in the circumferential direction, and the bent groove 27 has a non-exposed portion 27a that cannot be seen from the outside. Ori,
The space between the two has a labyrinth structure with a long creepage distance.

Further, a thick wall portion 28 is formed on the side wall 21 of the vacuum container through which the measuring device S according to the present invention penetrates, and two sealing members 29 are fitted on the inner periphery of the thick wall portion 28. This ensures the sealing performance of the portion of the measuring device S that penetrates the side wall adjacent to the vacuum container.
Furthermore, a ring-shaped water jacket 30 is formed inside the thick walled portion 28, and water cooled to an appropriate temperature after passing through a cooler (not shown) is circulated and supplied to the water jacket 30. It is becoming more and more common. In other words, consideration has been given to ensuring sufficient sealing performance from the standpoint of heat resistance.

Further, a thick portion 28 is provided on the side wall 21 of the vacuum container.
A cylindrical portion 31 is formed facing inward from the side wall,
As a result, the portion of the measuring device S that is inserted a predetermined distance inward from the vacuum vessel side wall penetrating portion is covered. The reason for forming the cylindrical portion 31 on the side wall in this way is that without it, vapor deposits would gradually accumulate on the outer periphery of the protective tube 22, increasing the outer diameter of the protective tube 22, and as a result, the measuring device side wall penetrating portion This is because good sealing performance may not be ensured.

As is well known, a temperature indicator and a control system for automatically controlling the temperature of the object to be adhered are connected to the base ends of the thermocouple wires 24a and 24b via compensation conductors or the like.

Next, a case will be described in which the temperature of a target object is measured using the measuring device S.

When the measuring device S is not performing measurements, as shown in the figure, the measuring device S is placed on standby at a position where its tip is a distance L away from the vapor deposition substrate 3, which is the object to be measured.

When measuring the temperature of the vapor deposition substrate 3, the measuring device S is pushed into the vacuum container manually or by an appropriate drive means (not shown), and the member 25 at the tip of the measuring device S is brought into contact with the vapor deposition substrate 3.

At this time, the amount of movement of the measuring device S is a small distance L
That's enough. This means that the measurement device is normally placed outside the vacuum vessel and inserted into the vacuum vessel only for measurement, or the measurement device is placed on standby near the side wall of the vacuum vessel. This is advantageous in that the moving time of S can be shortened and the measurement time can be shortened.

Further, the tip member 25 and the like of the measuring device S have been brought to the ambient temperature near the vapor deposition substrate 3 in advance, and when the tip member 25 is brought into contact with the vapor deposition substrate 3, the tip member 25
It takes a short time for the temperature of No. 5 to reach the surface temperature of the deposition substrate 3, and from this point of view as well, the measurement time can be shortened.

In addition, the member 25 attached to the tip of the measuring device S is made of a material with high thermal conductivity, and the thermocouple wires 24a and 24b used for actual measurement
The fact that the connected portion is embedded near the member tip 25a also contributes to shortening measurement time and improving measurement accuracy.

Furthermore, when measuring temperature, the application of high voltage to the evaporation substrate 3 is usually stopped to ensure safety, but at the same time, the heater for heating the substrate is also stopped, so the temperature of the evaporation substrate 3 gradually decreases. Resulting in. Therefore, it is difficult to accurately measure the temperature of the evaporation substrate 3, but in the case of the above-mentioned device, since the temperature measurement time of the evaporation substrate 3 can be shortened as described above, it is possible to measure the substrate temperature in a state close to that during operation. The Rukoto.

Furthermore, as the vapor deposition is repeated, the vapor deposits G gradually accumulate on the outer periphery of the portion of the measuring device S that is inserted into the vacuum container. If the vapor deposit G is a conductive material, there is a risk that the vapor deposit G will cause discharge when a high voltage is applied to the vapor deposition substrate 3 by mistake.

However, in the case of the above measuring device, the cover 2
6 and the protection tube 22, there is a clearance C around the entire circumference.
It has a labyrinth structure with a long creepage distance around the outer periphery of the measuring device, so even if a high voltage is accidentally applied to the evaporation substrate 3 during temperature measurement as described above, the electricity of the evaporation material G will be maintained. The direct contact is broken, and no electricity flows from the deposition substrate 3 to the vacuum container side via the deposited material G. Therefore, it is superior in terms of safety. In addition, if sufficient safety is taken into consideration, it is also possible to measure the temperature of the vapor deposition substrate 3 during operation (that is, while a high voltage is being applied to the vapor deposition substrate 3).

"Effects of the Invention" According to the present invention described above, the following excellent effects are achieved.

A labyrinth structure is formed between the cover of the measurement device and the protective tube by forming a bending groove that partially has non-exposed parts that cannot be seen from the outside, forming a labyrinth structure. Even if a conductive material is deposited on the outer periphery of the measuring device during operation while placed in a plating device, the deposited conductive material can be electrically cut off. Therefore, safety can be ensured even if voltage is applied to the object to be measured during measurement.

As described above, since the measuring device can be operated while being inserted into the ion plating device, it is possible to operate the measuring device while being close to the object to be measured. Being able to bring the measuring device closer to the object to be measured reduces the distance that the measuring device itself must move during measurement, and because the measuring device is already at the ambient temperature near the object to be measured, the measurement time can be shortened. In addition, it is possible to relatively accurately measure the temperature of an object whose temperature changes easily.

[Brief explanation of drawings]

Fig. 1 is a sectional view showing one embodiment of the present invention;
The figure shows a conventional example of temperature measurement of a substrate in an ion plating apparatus. 22... Protection tube, 24a, 24b... Thermocouple wire, 25... Member (contact part), 26... Cover,
27a... Non-exposed portion, 27... Bend groove, C... Clearance, G... Vapor deposit.

Claims (1)

[Scope of utility model registration request] Thermocouple wires 24a and 24b whose ends are electrically connected to each other, and a thermocouple wire provided to cover the end connection portion of the thermocouple wires and made of an insulating material with high thermal conductivity. A temperature measurement object contacting part 25 that contacts the temperature measurement object, a protection tube 22 provided to cover the thermocouple wire, and an insulating material provided on the outer periphery of the temperature measurement object contacting part. A bent groove 27 having a non-exposed part 27a that cannot be seen from the outside is formed continuously in the circumferential direction between the cover and the protective tube. A temperature measuring device characterized by: