JPH0160554U - - Google Patents

Info

Publication number
JPH0160554U
JPH0160554U JP15474787U JP15474787U JPH0160554U JP H0160554 U JPH0160554 U JP H0160554U JP 15474787 U JP15474787 U JP 15474787U JP 15474787 U JP15474787 U JP 15474787U JP H0160554 U JPH0160554 U JP H0160554U
Authority
JP
Japan
Prior art keywords
region
conductivity type
low concentration
channel
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15474787U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15474787U priority Critical patent/JPH0160554U/ja
Publication of JPH0160554U publication Critical patent/JPH0160554U/ja
Pending legal-status Critical Current

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Landscapes

  • Insulated Gate Type Field-Effect Transistor (AREA)

Description

【図面の簡単な説明】
第１図はこの考案に係る縦形ＭＩＳＦＥＴの実
施例を示す縦断面図、第２図は同上実施例の製造
工程の一例を示す工程図、第３図は従来の縦形Ｍ
ＩＳＦＥＴを示す縦断面図である。 １：Ｎ形基板領域、２：Ｐ形の低濃度チヤネル
領域、２ａ：チヤネル、３：Ｐ＋埋込み領域、４
：Ｎ＋ソース領域、５：Ｐ＋コンタクト領域、６
：Ｖ形溝、７：ゲート絶縁膜、８：ゲート電極、
１１：ドレイン電極、１０：第１のＮ形半導体基
板、２０：第２のＮ形半導体基板。

Claims (1)

  1. 【実用新案登録請求の範囲】 ドレインとして作用する第１導電形の基板領域
    上に第２導電形の低濃度チヤネル領域が形成され
    た基板体と、 該基板体との直接接合により前記低濃度チヤネ
    ル領域上に形成された第１導電形のソース領域と
    、 該ソース領域および前記低濃度チヤネル領域を
    貫通して前記基板領域に達する溝の内壁面に形成
    されたゲート絶縁膜と、 該ゲート絶縁膜上に設けられ前記低濃度チヤネ
    ル領域にチヤネルを誘起させるゲート電極と、 前記低濃度チヤネル領域内に形成された第２導
    電形の高濃度埋込み領域と を有することを特徴とする縦形ＭＩＳＦＥＴ。
JP15474787U 1987-10-12 1987-10-12 Pending JPH0160554U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15474787U JPH0160554U (ja) 1987-10-12 1987-10-12

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15474787U JPH0160554U (ja) 1987-10-12 1987-10-12

Publications (1)

Publication Number Publication Date
JPH0160554U true JPH0160554U (ja) 1989-04-17

Family

ID=31431754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15474787U Pending JPH0160554U (ja) 1987-10-12 1987-10-12

Country Status (1)

Country Link
JP (1) JPH0160554U (ja)

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