JPH0161604U - - Google Patents

Info

Publication number
JPH0161604U
JPH0161604U JP15639687U JP15639687U JPH0161604U JP H0161604 U JPH0161604 U JP H0161604U JP 15639687 U JP15639687 U JP 15639687U JP 15639687 U JP15639687 U JP 15639687U JP H0161604 U JPH0161604 U JP H0161604U
Authority
JP
Japan
Prior art keywords
movement mechanism
guide block
probe
fine movement
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15639687U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP15639687U priority Critical patent/JPH0161604U/ja
Publication of JPH0161604U publication Critical patent/JPH0161604U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Description

【図面の簡単な説明】
第１図は本考案の実施例を示す断面図、第２図
はその要部の詳細な説明図、第３図は従来の例を
示す平面図である。 １……試料、４……探針、７……円筒ＰＺＴ、
９ａ……丈夫な被覆線、９ｂ……細い被覆線、１
３……ガイドブロツク。

Claims (1)

    【実用新案登録請求の範囲】
  1. 探針と、該探針を試料に対して３軸方向に駆動
    する微動機構と、該微動機構を保持し、試料に対
    して前記探針をトンネル電流が流れる領域まで近
    づける粗動機構と結合されたガイドブロツクとを
    有する走査型トンネル顕微鏡において、前記微動
    機構の配線が前記ガイドブロツクの中を貫通し、
    かつ、前記ガイドブロツクが架体により摺動可能
    にガイドされていることを特徴とする走査型トン
    ネル顕微鏡。
JP15639687U 1987-10-13 1987-10-13 Pending JPH0161604U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15639687U JPH0161604U (ja) 1987-10-13 1987-10-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15639687U JPH0161604U (ja) 1987-10-13 1987-10-13

Publications (1)

Publication Number Publication Date
JPH0161604U true JPH0161604U (ja) 1989-04-19

Family

ID=31434897

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15639687U Pending JPH0161604U (ja) 1987-10-13 1987-10-13

Country Status (1)

Country Link
JP (1) JPH0161604U (ja)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6023334B2 (ja) * 1976-08-19 1985-06-07 キヤノン株式会社 カメラのシヤツタ−レリ−ズ安全装置
JPS62223602A (ja) * 1986-03-26 1987-10-01 Hitachi Ltd 表面計測装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6023334B2 (ja) * 1976-08-19 1985-06-07 キヤノン株式会社 カメラのシヤツタ−レリ−ズ安全装置
JPS62223602A (ja) * 1986-03-26 1987-10-01 Hitachi Ltd 表面計測装置

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