JPH0161609U - - Google Patents
Info
- Publication number
- JPH0161609U JPH0161609U JP15622587U JP15622587U JPH0161609U JP H0161609 U JPH0161609 U JP H0161609U JP 15622587 U JP15622587 U JP 15622587U JP 15622587 U JP15622587 U JP 15622587U JP H0161609 U JPH0161609 U JP H0161609U
- Authority
- JP
- Japan
- Prior art keywords
- optical axis
- photoelectric sensor
- light
- displacement meter
- contact displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 8
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims description 2
- 230000005484 gravity Effects 0.000 claims 1
- 238000005286 illumination Methods 0.000 claims 1
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Measurement Of Optical Distance (AREA)
- Optical Recording Or Reproduction (AREA)
Description
第１図は、本考案に係る非接触変位計の実施例
の構成を示す、一部断面図を含む正面図、第２図
は、第１図の矢視方向から見た平面図、第３図
は、前記実施例の作用を説明するための光学系の
正面図、第４図は、前記実施例の変位信号の一例
を示す線図、第５図Ａ，Ｂは、前記実施例の作用
を説明するための拡大正面図、第６図は、本考案
の他の実施例で用いられる半導体位置検出器の構
成の例を示す横断面図である。
１０……測定対象物、１２……レーザダイオー
ド、１４……集光レンズ、１６……ビームスプリ
ツタ、１８……対物レンズ、２０……スポツト光
、２２……結像レンズ、Ｑ……結像点、Ａ……光
軸、２４……円錐ミラー、Ｑ′……結像円、２６
……光電センサ、２６Ａ……内側受光素子、２６
Ｂ……外側受光素子、２８……差動増幅器、ｍ…
…変位信号、Ｚ……光軸方向変位量、５０……半
導体位置検出器（ＰＳＤ）。
1 is a front view including a partial sectional view showing the configuration of an embodiment of a non-contact displacement meter according to the present invention; FIG. 2 is a plan view as seen from the direction of the arrow in FIG. 1; 4 is a diagram showing an example of a displacement signal of the embodiment, and FIGS. 5A and 5B are diagrams showing the operation of the embodiment. FIG. 6 is a cross-sectional view showing an example of the configuration of a semiconductor position detector used in another embodiment of the present invention. 10...Measurement object, 12...Laser diode, 14...Condensing lens, 16...Beam splitter, 18...Objective lens, 20...Spot light, 22...Imaging lens, Q...Focusing lens Image point, A... Optical axis, 24... Conical mirror, Q'... Image forming circle, 26
...Photoelectric sensor, 26A...Inner light receiving element, 26
B...Outer light receiving element, 28...Differential amplifier, m...
...Displacement signal, Z...Amount of displacement in the optical axis direction, 50...Semiconductor position detector (PSD).
Claims (1)
と、 該スポツト光の像を形成するための結像光学系
と、 該像に収束する光線を反射するための、該収束
光線の光軸上に頂点を有する円錐ミラーと、 該反射された光線の光量分布の、前記光軸の半
径方向の重心位置に対応した信号を生成するため
の光電センサとを含み、 測定対象物の前記光軸方向の変位に対応した変
位信号を生成することを特徴とする非接触変位計
。 (2) 前記光電センサが、前記光軸を中心として
同芯円状に配列された２個のリング状の受光素子
からなる実用新案登録請求の範囲第１項記載の非
接触変位計。 (3) 前記光電センサが、前記光軸を中心として
配設されたリング状の半導体位置検出器である実
用新案登録請求の範囲第１項記載の非接触変位計
。[Scope of Claim for Utility Model Registration] (1) An illumination system for irradiating a measurement object with spot light, an imaging optical system for forming an image of the spot light, and a system for reflecting light rays converging on the image. a conical mirror having an apex on the optical axis of the convergent light beam; and a photoelectric sensor for generating a signal corresponding to the position of the center of gravity of the optical axis in the radial direction of the light intensity distribution of the reflected light beam. , A non-contact displacement meter, characterized in that it generates a displacement signal corresponding to the displacement of the object to be measured in the optical axis direction. (2) The non-contact displacement meter according to claim 1, wherein the photoelectric sensor includes two ring-shaped light receiving elements arranged concentrically around the optical axis. (3) The non-contact displacement meter according to claim 1, wherein the photoelectric sensor is a ring-shaped semiconductor position detector arranged around the optical axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15622587U JPH0161609U (en) | 1987-10-13 | 1987-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15622587U JPH0161609U (en) | 1987-10-13 | 1987-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0161609U true JPH0161609U (en) | 1989-04-19 |
Family
ID=31434574
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15622587U Pending JPH0161609U (en) | 1987-10-13 | 1987-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0161609U (en) |
-
1987
- 1987-10-13 JP JP15622587U patent/JPH0161609U/ja active Pending
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