JPH0161608U - - Google Patents
Info
- Publication number
- JPH0161608U JPH0161608U JP15622487U JP15622487U JPH0161608U JP H0161608 U JPH0161608 U JP H0161608U JP 15622487 U JP15622487 U JP 15622487U JP 15622487 U JP15622487 U JP 15622487U JP H0161608 U JPH0161608 U JP H0161608U
- Authority
- JP
- Japan
- Prior art keywords
- optical axis
- photoelectric sensor
- radial direction
- light
- contact displacement
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000006073 displacement reaction Methods 0.000 claims description 9
- 230000003287 optical effect Effects 0.000 claims description 9
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000003384 imaging method Methods 0.000 claims description 2
- 238000005259 measurement Methods 0.000 claims description 2
- 230000005484 gravity Effects 0.000 claims 1
- 238000005286 illumination Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Measurement Of Optical Distance (AREA)
- Optical Recording Or Reproduction (AREA)
Description
第１図は、本考案に係る非接触変位計の実施例
の構成を示す正面図、第２図は、第１図の矢視
方向から見た平面図、第３図は、前記実施例の作
用を説明するための光学系の正面図、第４図は、
前記実施例の変位信号の一例を示す線図、第５図
Ａ，Ｂは、前記実施例の作用を説明するための拡
大正面図、第６図は、本考案の他の実施例で用い
られる１次元半導体位置検出器の構成の例を示す
横断面図である。
１０……測定対象物、１２……レーザダイオー
ド、１４……集光レンズ、１６……ビームスプリ
ツタ、１８……対物レンズ、２０……スポツト光
、２２……結像レンズ、Ｑ……結像点、Ａ……光
軸、２４……ミラー、Ｑ′……結像点、２６……
光電センサ、２６Ａ……内側受光素子、２６Ｂ…
…外側受光素子、２８……差動増幅器、ｍ……変
位信号、Ｚ……光軸方向変位量、５０……１次元
半導体位置検出器（ＰＳＤ）。
FIG. 1 is a front view showing the configuration of an embodiment of the non-contact displacement meter according to the present invention, FIG. 2 is a plan view seen from the direction of the arrow in FIG. 1, and FIG. Figure 4 is a front view of the optical system for explaining the operation.
A line diagram showing an example of the displacement signal of the embodiment, FIGS. 5A and 5B are enlarged front views for explaining the operation of the embodiment, and FIG. 6 is a diagram used in another embodiment of the present invention. FIG. 2 is a cross-sectional view showing an example of the configuration of a one-dimensional semiconductor position detector. 10...Measurement object, 12...Laser diode, 14...Condensing lens, 16...Beam splitter, 18...Objective lens, 20...Spot light, 22...Imaging lens, Q...Focusing lens Image point, A... Optical axis, 24... Mirror, Q'... Image forming point, 26...
Photoelectric sensor, 26A...Inner light receiving element, 26B...
... Outer light receiving element, 28 ... Differential amplifier, m ... Displacement signal, Z ... Displacement amount in the optical axis direction, 50 ... One-dimensional semiconductor position detector (PSD).
Claims (1)
と、 該スポツト光の像を形成するための結像光学系
と、 該像に収束する光線の、光軸近傍から周辺に至
る部分を反射するミラーと、 該反射された光線の光量分布の、前記光軸の半
径方向の重心位置に対応した信号を生成するため
の光電センサとを含み、 測定対象物の前記光軸方向の変位に対応した変
位信号を生成することを特徴とする非接触変位計
。 (2) 前記光電センサが、前記光軸の半径方向に
２分割された受光素子である実用新案登録請求の
範囲第１項記載の非接触変位形。 (3) 前記光電センサが、前記光軸の半径方向に
沿つて配設された１次元半導体位置検出器である
実用新案登録請求の範囲第１項記載の非接触変位
計。[Scope of Claim for Utility Model Registration] (1) An illumination system that irradiates a measurement object with spot light, an imaging optical system that forms an image of the spot light, and an optical axis of a light beam that converges on the image. a mirror that reflects a portion from the vicinity to the periphery; and a photoelectric sensor for generating a signal corresponding to the position of the center of gravity in the radial direction of the optical axis of the light intensity distribution of the reflected light beam; A non-contact displacement meter that generates a displacement signal corresponding to the displacement in the optical axis direction. (2) The non-contact displacement type according to claim 1, wherein the photoelectric sensor is a light receiving element divided into two in the radial direction of the optical axis. (3) The non-contact displacement meter according to claim 1, wherein the photoelectric sensor is a one-dimensional semiconductor position detector arranged along the radial direction of the optical axis.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15622487U JPH0161608U (en) | 1987-10-13 | 1987-10-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15622487U JPH0161608U (en) | 1987-10-13 | 1987-10-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0161608U true JPH0161608U (en) | 1989-04-19 |
Family
ID=31434572
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15622487U Pending JPH0161608U (en) | 1987-10-13 | 1987-10-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0161608U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0394113A (en) * | 1989-06-28 | 1991-04-18 | Dainippon Screen Mfg Co Ltd | Position detecting device |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6217016A (en) * | 1985-07-16 | 1987-01-26 | Lion Corp | Production of zeolite |
-
1987
- 1987-10-13 JP JP15622487U patent/JPH0161608U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6217016A (en) * | 1985-07-16 | 1987-01-26 | Lion Corp | Production of zeolite |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0394113A (en) * | 1989-06-28 | 1991-04-18 | Dainippon Screen Mfg Co Ltd | Position detecting device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPS6358321U (en) | ||
| JPH0161608U (en) | ||
| JPH0161609U (en) | ||
| JP2578104Y2 (en) | Radiation thermometer | |
| JPH01138212U (en) | ||
| JPS63126812U (en) | ||
| JPH0511451Y2 (en) | ||
| JPH0431108U (en) | ||
| JPH01138211U (en) | ||
| JPS63188507U (en) | ||
| JPS6134117U (en) | Light projection optical system in distance detection device | |
| JPH0726841B2 (en) | Optical distance detector | |
| JPH0378230U (en) | ||
| JPH0473850U (en) | ||
| JPH01104507U (en) | ||
| JPS59136616A (en) | Optical sensor | |
| JPS62168413U (en) | ||
| JPH02110813U (en) | ||
| JPH02128222U (en) | ||
| JPS62176709U (en) | ||
| JPH01102710U (en) | ||
| JPH0321155U (en) | ||
| JPH027550U (en) | ||
| JPS6321901U (en) | ||
| JPH01158904U (en) |