JPH0161631U - - Google Patents
Info
- Publication number
- JPH0161631U JPH0161631U JP12617287U JP12617287U JPH0161631U JP H0161631 U JPH0161631 U JP H0161631U JP 12617287 U JP12617287 U JP 12617287U JP 12617287 U JP12617287 U JP 12617287U JP H0161631 U JPH0161631 U JP H0161631U
- Authority
- JP
- Japan
- Prior art keywords
- crystal substrate
- strain
- locking portion
- central axis
- generating body
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Force Measurement Appropriate To Specific Purposes (AREA)
Description
第１図はこの考案の一実施例を示す縦断側面図
、第２図はその平面型力覚センサの縦断側面図、
第３図および第４図はエツチングされる係止部の
状態を示す縦断側面図、第５図および第６図はＸ
，Ｙ軸方向への位置ズレを防ぐための変形例を示
すｎ―Ｓｉ基板の平面図、第７図は起歪体とｎ―
Ｓｉ基板との接着部分の縦断側面図、第８図は従
来の平面型力覚センサの縦断側面図、第９図はそ
のキヤツプを取り外した状態の平面図、第１０図
は各種の応力が発生した状態を示す特性図、第１
１図はｎ―Ｓｉ基板がＹ軸方向へ位置ズレした時
の応力の発生状態を示す特性図、第１２図はブリ
ツジ回路図である。
１１……Ｐ型拡散抵抗（検出素子）、１３……
起歪体、１９……ｎ型単結晶基板、２２……係止
部、２３……凸部（係止部）、２４……凹部（係
止部）、２５……凹部（係止部）、２６，２７…
…凸部（係止部）、２８……孔（係止部）。
FIG. 1 is a vertical side view showing an embodiment of this invention, FIG. 2 is a vertical side view of the planar force sensor,
Figures 3 and 4 are vertical sectional side views showing the state of the locking part to be etched, and Figures 5 and 6 are
, a plan view of an n-Si substrate showing a modified example to prevent positional deviation in the Y-axis direction, and FIG.
Fig. 8 is a longitudinal sectional side view of the bonded part with the Si substrate, Fig. 8 is a longitudinal sectional side view of a conventional flat force sensor, Fig. 9 is a plan view with the cap removed, and Fig. 10 shows various stresses generated. Characteristic diagram showing the state in which
FIG. 1 is a characteristic diagram showing the stress generation state when the n-Si substrate is displaced in the Y-axis direction, and FIG. 12 is a bridge circuit diagram. 11...P-type diffused resistor (detection element), 13...
Strain body, 19...n-type single crystal substrate, 22...locking part, 23...convex part (locking part), 24... recess (locking part), 25... recess (locking part) , 26, 27...
...Convex part (locking part), 28... Hole (locking part).
Claims (1)
子を備えた検出面が一面に形成された単結晶基板
の中心軸に凸部または凹部もしくは孔による係止
部を設け、中心部と周辺部のいずれか一方を支持
部とし他方を作用部とした起歪体の中心軸に凹部
または凸部による係止部を設け、前記単結晶基板
の係止部と前記起歪体の係止部とを嵌め合わせて
前記起歪体に前記単結晶基板を接着固定したこと
を特徴とする平面型力覚センサ。 A single-crystal substrate is equipped with a detection element that changes electrical resistance through mechanical deformation, and a detection surface is formed over the entire surface. A protrusion, depression, or hole is provided on the central axis of the single-crystal substrate. A locking portion by a recess or a convex portion is provided on the central axis of the strain-generating body, one of which is a support portion and the other is an action portion, and the locking portion of the single crystal substrate and the locking portion of the strain-generating body are fitted together. A planar force sensor characterized in that the single crystal substrate is adhesively fixed to the strain body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12617287U JPH0161631U (en) | 1987-06-15 | 1987-08-19 |
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9143887 | 1987-06-15 | ||
| JP12617287U JPH0161631U (en) | 1987-06-15 | 1987-08-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0161631U true JPH0161631U (en) | 1989-04-19 |
Family
ID=31718663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12617287U Pending JPH0161631U (en) | 1987-06-15 | 1987-08-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0161631U (en) |
-
1987
- 1987-08-19 JP JP12617287U patent/JPH0161631U/ja active Pending