JPH0161975U - - Google Patents
Info
- Publication number
- JPH0161975U JPH0161975U JP15777587U JP15777587U JPH0161975U JP H0161975 U JPH0161975 U JP H0161975U JP 15777587 U JP15777587 U JP 15777587U JP 15777587 U JP15777587 U JP 15777587U JP H0161975 U JPH0161975 U JP H0161975U
- Authority
- JP
- Japan
- Prior art keywords
- control port
- coated
- rotating table
- coating device
- coating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Coating Apparatus (AREA)
Description
第１図は本考案の一実施例を示す概略図。第２
図は空気流制御口の中心線より径方向の断面曲線
。第３図は従来の方法による膜厚分布を示すグラ
フを示す。
１……筐体、１５……空気流制御口。
FIG. 1 is a schematic diagram showing an embodiment of the present invention. Second
The figure shows a cross-sectional curve in the radial direction from the center line of the airflow control port. FIG. 3 shows a graph showing the film thickness distribution according to the conventional method. 1... Housing, 15... Air flow control port.
Claims (1)
塗布物に溶液を滴下することによつて塗布を行う
塗布装置において、回転台上に位置する被塗布物
の上面に開口部をもつ空気流制御口を備え、前記
制御口と被塗布物との間の距離を中心部は大きく
周辺部は小さくなるように連続した傾斜を設けた
ことを特徴とする塗布装置。 In a coating device that performs coating by dropping a solution onto an object to be coated that is removably fixed on a rotating table and rotated, an air flow having an opening on the upper surface of the object positioned on the rotating table. 1. A coating device comprising a control port, and having a continuous slope so that the distance between the control port and the object to be coated is large at the center and small at the periphery.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15777587U JPH0161975U (en) | 1987-10-15 | 1987-10-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15777587U JPH0161975U (en) | 1987-10-15 | 1987-10-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0161975U true JPH0161975U (en) | 1989-04-20 |
Family
ID=31437511
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15777587U Pending JPH0161975U (en) | 1987-10-15 | 1987-10-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0161975U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012151238A (en) * | 2011-01-18 | 2012-08-09 | Tokyo Electron Ltd | Liquid processing apparatus |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS61291072A (en) * | 1985-06-20 | 1986-12-20 | Matsushita Electric Ind Co Ltd | Spin coating method |
| JPS6161070B2 (en) * | 1976-12-02 | 1986-12-24 | Bofors Ab |
-
1987
- 1987-10-15 JP JP15777587U patent/JPH0161975U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6161070B2 (en) * | 1976-12-02 | 1986-12-24 | Bofors Ab | |
| JPS61291072A (en) * | 1985-06-20 | 1986-12-20 | Matsushita Electric Ind Co Ltd | Spin coating method |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012151238A (en) * | 2011-01-18 | 2012-08-09 | Tokyo Electron Ltd | Liquid processing apparatus |
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