JPH0163063U - - Google Patents
Info
- Publication number
- JPH0163063U JPH0163063U JP1987157429U JP15742987U JPH0163063U JP H0163063 U JPH0163063 U JP H0163063U JP 1987157429 U JP1987157429 U JP 1987157429U JP 15742987 U JP15742987 U JP 15742987U JP H0163063 U JPH0163063 U JP H0163063U
- Authority
- JP
- Japan
- Prior art keywords
- electron microscope
- scanning electron
- storage device
- charging
- sample
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 1
Description
第１図は本案の一実施例を示す図である。
５…二次電子、７…画像記憶装置、８…画像記
憶装置、１０…比較装置。
FIG. 1 is a diagram showing an embodiment of the present invention. 5... Secondary electrons, 7... Image storage device, 8... Image storage device, 10... Comparison device.
Claims (1)
次電子による信号を画像記憶装置に記憶させる機
能を備えている装置において、試料における帯電
により、二次電子像が経時的に変化することを判
別することを特徴とする走査電子顕微鏡。 In a scanning electron microscope or similar device, which is equipped with a function of storing signals generated by secondary electrons in an image storage device, it is possible to determine that a secondary electron image changes over time due to charging in a sample. Features of scanning electron microscope.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987157429U JPH0163063U (en) | 1987-10-16 | 1987-10-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987157429U JPH0163063U (en) | 1987-10-16 | 1987-10-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0163063U true JPH0163063U (en) | 1989-04-24 |
Family
ID=31436863
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987157429U Pending JPH0163063U (en) | 1987-10-16 | 1987-10-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0163063U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005191017A (en) * | 2005-03-25 | 2005-07-14 | Hitachi Ltd | Scanning electron microscope |
| JP2015056330A (en) * | 2013-09-13 | 2015-03-23 | 株式会社日立ハイテクノロジーズ | Charged particle beam equipment |
| JPWO2023139668A1 (en) * | 2022-01-19 | 2023-07-27 |
-
1987
- 1987-10-16 JP JP1987157429U patent/JPH0163063U/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005191017A (en) * | 2005-03-25 | 2005-07-14 | Hitachi Ltd | Scanning electron microscope |
| JP2015056330A (en) * | 2013-09-13 | 2015-03-23 | 株式会社日立ハイテクノロジーズ | Charged particle beam equipment |
| JPWO2023139668A1 (en) * | 2022-01-19 | 2023-07-27 | ||
| WO2023139668A1 (en) * | 2022-01-19 | 2023-07-27 | 株式会社日立ハイテク | Charged particle beam device and inspection method using same |