JPH0164848U - - Google Patents
Info
- Publication number
- JPH0164848U JPH0164848U JP1987159884U JP15988487U JPH0164848U JP H0164848 U JPH0164848 U JP H0164848U JP 1987159884 U JP1987159884 U JP 1987159884U JP 15988487 U JP15988487 U JP 15988487U JP H0164848 U JPH0164848 U JP H0164848U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- field lens
- cooling
- turning
- controlling
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims 3
- 238000010894 electron beam technology Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Description
第１図は本案の一実施例のブロツク図である。
１〜７……磁界レンズコイル、８〜１４……レ
ンズ電流制御装置、１５……ＣＰＵ、１６……温
度検出器、１７……バルブ、１８……バルブ制御
装置、１９……冷却水路、２０……スイツチ、２
１……タイマー。
FIG. 1 is a block diagram of an embodiment of the present invention. 1-7... Magnetic field lens coil, 8-14... Lens current control device, 15... CPU, 16... Temperature detector, 17... Valve, 18... Valve control device, 19... Cooling water channel, 20 ...Switch, 2
1...Timer.
Claims (1)
を制御する手段と磁界レンズを冷却する手段を持
つ電子顕微鏡において、磁界レンズを冷却する手
段をＯＮ、ＯＦＦする手段と磁界レンズを冷却す
る手段をＯＮ、ＯＦＦする手段に連動し磁界レン
ズ電流を制御する手段および磁界レンズの温度を
検出する手段を設けたことを特徴とする電子顕微
鏡。 In an electron microscope having a magnetic field lens that converges an electron beam, a means for controlling a magnetic field lens current, and a means for cooling the magnetic field lens, the means for turning on and off the means for cooling the magnetic field lens and the means for cooling the magnetic field lens are turned on and off. An electron microscope characterized in that it is provided with means for controlling the magnetic field lens current in conjunction with the means for turning off the magnetic field lens, and means for detecting the temperature of the magnetic field lens.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159884U JPH0164848U (en) | 1987-10-21 | 1987-10-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159884U JPH0164848U (en) | 1987-10-21 | 1987-10-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0164848U true JPH0164848U (en) | 1989-04-26 |
Family
ID=31441477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987159884U Pending JPH0164848U (en) | 1987-10-21 | 1987-10-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0164848U (en) |
-
1987
- 1987-10-21 JP JP1987159884U patent/JPH0164848U/ja active Pending