JPH0188454U - - Google Patents
Info
- Publication number
- JPH0188454U JPH0188454U JP18299687U JP18299687U JPH0188454U JP H0188454 U JPH0188454 U JP H0188454U JP 18299687 U JP18299687 U JP 18299687U JP 18299687 U JP18299687 U JP 18299687U JP H0188454 U JPH0188454 U JP H0188454U
- Authority
- JP
- Japan
- Prior art keywords
- magnetic field
- field lens
- turning
- controlling
- electron microscope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims 1
- 238000010894 electron beam technology Methods 0.000 claims 1
- 239000000498 cooling water Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Electron Beam Exposure (AREA)
- Electron Sources, Ion Sources (AREA)
Description
第１図は本案の一実施例のブロツク図である。
１〜７……磁界レンズコイル、８〜１４……レ
ンズ電流制御装置、１５……ＣＰＵ、１６……冷
却水路、１７……バルブ制御装置、１８……バル
ブ、１９……スイツチ。
FIG. 1 is a block diagram of an embodiment of the present invention. 1-7... Magnetic field lens coil, 8-14... Lens current control device, 15... CPU, 16... Cooling water channel, 17... Valve control device, 18... Valve, 19... Switch.
Claims (1)
ンズ電流を制御する手段と磁界レンズを冷却する
手段を持つ電子顕微鏡に於いて、磁界レンズ電流
をＯＮ、ＯＦＦする手段と連動して磁界レンズを
冷却する手段の制御バルブをＯＮ、ＯＦＦする駆
動装置を設けたことを特徴とする電子顕微鏡。 In an electron microscope that has a plurality of magnetic field lenses that converge an electron beam, a means for controlling the magnetic field lens current, and a means for cooling the magnetic field lens, the magnetic field lens is cooled in conjunction with the means for turning on and off the magnetic field lens current. An electron microscope characterized in that it is provided with a drive device for turning on and off a control valve of a means for controlling.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18299687U JPH0188454U (en) | 1987-12-02 | 1987-12-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP18299687U JPH0188454U (en) | 1987-12-02 | 1987-12-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0188454U true JPH0188454U (en) | 1989-06-12 |
Family
ID=31474432
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP18299687U Pending JPH0188454U (en) | 1987-12-02 | 1987-12-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0188454U (en) |
-
1987
- 1987-12-02 JP JP18299687U patent/JPH0188454U/ja active Pending