JPH0165644U - - Google Patents
Info
- Publication number
- JPH0165644U JPH0165644U JP1987159356U JP15935687U JPH0165644U JP H0165644 U JPH0165644 U JP H0165644U JP 1987159356 U JP1987159356 U JP 1987159356U JP 15935687 U JP15935687 U JP 15935687U JP H0165644 U JPH0165644 U JP H0165644U
- Authority
- JP
- Japan
- Prior art keywords
- holder
- sample
- partition plate
- loading mechanism
- reaction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
第１図、第２図は本案の第１の実施例の斜視図
、第３図は本案の第２の実施例の斜視図、第４図
は従来のマスクローデイング機構の一例の斜視図
である。
記号の説明：１…フオトマスク、２…ホルダ、
３…仕切弁、４…予備室、５…開閉扉、６…ピツ
クアツプ、７…Ｘ―Ｙステージ、８…エレベータ
、９…ハンドラ、１１…フオトマスク、１２…ホ
ルダ、１３…仕切弁、１４…予備室、１５…開閉
扉、１６…ピツクアツプ、１７…Ｘ―Ｙステージ
、１８…回転軸、１６１…吸着チヤツク。
1 and 2 are perspective views of a first embodiment of the present invention, FIG. 3 is a perspective view of a second embodiment of the present invention, and FIG. 4 is a perspective view of an example of a conventional mask loading mechanism. be. Explanation of symbols: 1...Photomask, 2...Holder,
3...Gate valve, 4...Preliminary room, 5...Opening/closing door, 6...Pickup, 7...X-Y stage, 8...Elevator, 9...Handler, 11...Photomask, 12...Holder, 13...Gate valve, 14...Spare Chamber, 15...opening/closing door, 16...pickup, 17...X-Y stage, 18...rotation shaft, 161...suction chuck.
Claims (1)
板で、外界とは開閉扉で境した気密の予備室を設
け、ホルダに取付けた試料を該予備室を通つて該
反応室気密を保持した状態で搬入し装着する方式
の真空処理装置における試料ローデイング機構で
あつて、前記仕切り板が、一端が固定された回転
軸の回りに回転可能であり、ほぼ中央部に前記ホ
ルダを、該仕切板が閉じたときは該ホルダが前記
予備室内の試料ホールド位置するように、又該仕
切板が開いたときは該ホルダが試料ピツクアツプ
位置にあるように装着したことを特徴とする、真
空処理装置における試料ローデイング機構。 A part of or outside the reaction chamber is provided with an airtight preliminary chamber that is separated from the reaction chamber by a partition plate and from the outside world by an opening/closing door, and the sample attached to the holder is passed through the preliminary chamber to keep the reaction chamber airtight. The sample loading mechanism in a vacuum processing apparatus is a type in which the sample is carried in and installed in a held state, and the partition plate is rotatable around a rotating shaft to which one end is fixed, and the holder is placed approximately in the center of the sample loading mechanism. Vacuum processing characterized in that the holder is mounted so that when the partition plate is closed, the holder is at the sample holding position in the preliminary chamber, and when the partition plate is opened, the holder is at the sample pickup position. Sample loading mechanism in the device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159356U JPH0165644U (en) | 1987-10-20 | 1987-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159356U JPH0165644U (en) | 1987-10-20 | 1987-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0165644U true JPH0165644U (en) | 1989-04-26 |
Family
ID=31440494
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987159356U Pending JPH0165644U (en) | 1987-10-20 | 1987-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0165644U (en) |
-
1987
- 1987-10-20 JP JP1987159356U patent/JPH0165644U/ja active Pending
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