JPH0165850U - - Google Patents
Info
- Publication number
- JPH0165850U JPH0165850U JP1987160763U JP16076387U JPH0165850U JP H0165850 U JPH0165850 U JP H0165850U JP 1987160763 U JP1987160763 U JP 1987160763U JP 16076387 U JP16076387 U JP 16076387U JP H0165850 U JPH0165850 U JP H0165850U
- Authority
- JP
- Japan
- Prior art keywords
- heat insulating
- induction heating
- insulating member
- view
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000919 ceramic Substances 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 description 6
- 230000006698 induction Effects 0.000 description 6
- 238000007740 vapor deposition Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 1
- 239000012774 insulation material Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
Landscapes
- Furnace Details (AREA)
- Physical Vapour Deposition (AREA)
Description
第１図、第２図は本考案断熱部材をソレノイド
コイル誘導加熱方式蒸着真空装置に適用した場合
を示す図で、第１図はその縦断面図、第２図は第
１図のＡ―Ａ矢視断面図である。第３図、第４図
は本考案断熱部材をトランスバースコイル誘導加
熱方式蒸着真空装置に適用した場合を示す図で、
第３図はその縦断面図、第４図は第３図のＢ―Ｂ
矢視断面図である。第５図、第６図は本考案断熱
部材を説明する図で、第５図はそのうちの一つの
斜視図、第６図は他のものゝ断面である。第７図
、第８図は従来の断熱材を適用したソレノイドコ
イル誘導加熱方式蒸着真空装置及びトランスバー
スコイル誘導加熱方式蒸着装置をそれぞれ示す。
図において、１は真空容器、２は反射板、３は
ソレノイド誘導加熱コイル、４はトランスバース
誘導加熱コイル、５は被蒸着板、６はるつぼ、７
は綿状、繊維状又は多孔質セラミツクス断熱材、
８は溶融金属、９はハニカム構造セラミツクス断
熱部材である。
Fig. 1 and Fig. 2 are diagrams showing the case where the heat insulating member of the present invention is applied to a solenoid coil induction heating type vapor deposition vacuum apparatus, Fig. 1 is a longitudinal cross-sectional view thereof, and Fig. 2 is an A-A of Fig. 1. It is an arrow sectional view. Figures 3 and 4 are diagrams showing the case where the heat insulating member of the present invention is applied to a transverse coil induction heating type vapor deposition vacuum apparatus.
Figure 3 is a longitudinal cross-sectional view, and Figure 4 is B-B in Figure 3.
It is an arrow sectional view. 5 and 6 are views for explaining the heat insulating member of the present invention, FIG. 5 is a perspective view of one of them, and FIG. 6 is a cross section of the other. 7 and 8 respectively show a solenoid coil induction heating type vapor deposition vacuum apparatus and a transverse coil induction heating type vapor deposition apparatus using conventional heat insulating materials. In the figure, 1 is a vacuum vessel, 2 is a reflection plate, 3 is a solenoid induction heating coil, 4 is a transverse induction heating coil, 5 is a plate to be deposited, 6 is a crucible, and 7
is cotton-like, fibrous or porous ceramic insulation material,
8 is a molten metal, and 9 is a honeycomb structured ceramic heat insulating member.
Claims (1)
対してハニカム孔を垂直となるように配置してな
ることを特徴とする真空装置用断熱部材。 A heat insulating member for a vacuum device, comprising ceramics having a honeycomb structure arranged with honeycomb holes perpendicular to the direction of heat flow.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987160763U JPH0165850U (en) | 1987-10-22 | 1987-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987160763U JPH0165850U (en) | 1987-10-22 | 1987-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0165850U true JPH0165850U (en) | 1989-04-27 |
Family
ID=31443113
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987160763U Pending JPH0165850U (en) | 1987-10-22 | 1987-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0165850U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012021742A (en) * | 2010-07-16 | 2012-02-02 | Murata Mfg Co Ltd | Heat treatment furnace |
-
1987
- 1987-10-22 JP JP1987160763U patent/JPH0165850U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2012021742A (en) * | 2010-07-16 | 2012-02-02 | Murata Mfg Co Ltd | Heat treatment furnace |