JPH0165865U - - Google Patents
Info
- Publication number
- JPH0165865U JPH0165865U JP1987159712U JP15971287U JPH0165865U JP H0165865 U JPH0165865 U JP H0165865U JP 1987159712 U JP1987159712 U JP 1987159712U JP 15971287 U JP15971287 U JP 15971287U JP H0165865 U JPH0165865 U JP H0165865U
- Authority
- JP
- Japan
- Prior art keywords
- gallium arsenide
- quartz
- quartz ampoule
- ampoule
- single crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010453 quartz Substances 0.000 claims description 11
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 11
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims description 9
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims description 9
- 239000003708 ampul Substances 0.000 claims description 8
- 239000013078 crystal Substances 0.000 claims description 7
- 238000004519 manufacturing process Methods 0.000 claims description 6
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 claims 1
- 229910052785 arsenic Inorganic materials 0.000 claims 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims 1
- 229910052733 gallium Inorganic materials 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Description
第１図は本考案の砒化ガリウム単結晶製造装置
の一実施例の横断面図、第２図は本考案の砒化ガ
リウム単結晶製造装置の他の実施例の横断面図、
第３図は従来の砒化ガリウム単結晶製造装置の縦
断側面図、第４図は第３図の横断面図である。
１ａ……角型石英アンプル、２……角型石英ボ
ート、４……ＧａＡｓ単結晶、５……耐熱性部材
。
FIG. 1 is a cross-sectional view of one embodiment of the gallium arsenide single crystal production apparatus of the present invention, and FIG. 2 is a cross-sectional view of another embodiment of the gallium arsenide single crystal production apparatus of the present invention.
FIG. 3 is a longitudinal sectional side view of a conventional gallium arsenide single crystal manufacturing apparatus, and FIG. 4 is a cross sectional view of FIG. 3. 1a... Square quartz ampoule, 2... Square quartz boat, 4... GaAs single crystal, 5... Heat resistant member.
Claims (1)
置された石英アンプルと、この石英アンプルの他
方端に設置され、かつガリウムが載置された角型
石英ボートとを備え、前記石英アンプルを加熱し
て石英アンプル内で砒化ガリウムを合成し、単結
晶化させる砒化ガリウム単結晶製造装置において
、前記石英アンプルが、その断面形状が角型の角
型石英アンプルであることを特徴とする砒化ガリ
ウム単結晶製造装置。 (2) 前記角型石英アンプルが、前記角型石英ボ
ートとの間に耐熱性部材が設けられたものである
実用新案登録請求の範囲第１項記載の砒化ガリウ
ム単結晶製造装置。[Claims for Utility Model Registration] (1) A quartz ampoule that is vacuum-sealed and has arsenic placed on one end thereof, and a rectangular shape that is placed on the other end of the quartz ampoule and has gallium placed on it. quartz boat, the gallium arsenide single crystal production device heats the quartz ampoule to synthesize gallium arsenide in the quartz ampoule and crystallizes the gallium arsenide, wherein the quartz ampoule is made of square quartz having a square cross section; A gallium arsenide single crystal production device characterized by being in the form of an ampoule. (2) The gallium arsenide single crystal production apparatus according to claim 1, wherein the square quartz ampoule is provided with a heat-resistant member between it and the square quartz boat.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159712U JPH0165865U (en) | 1987-10-19 | 1987-10-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159712U JPH0165865U (en) | 1987-10-19 | 1987-10-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0165865U true JPH0165865U (en) | 1989-04-27 |
Family
ID=31441149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987159712U Pending JPH0165865U (en) | 1987-10-19 | 1987-10-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0165865U (en) |
-
1987
- 1987-10-19 JP JP1987159712U patent/JPH0165865U/ja active Pending
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