JPH0165979U - - Google Patents
Info
- Publication number
- JPH0165979U JPH0165979U JP1987160956U JP16095687U JPH0165979U JP H0165979 U JPH0165979 U JP H0165979U JP 1987160956 U JP1987160956 U JP 1987160956U JP 16095687 U JP16095687 U JP 16095687U JP H0165979 U JPH0165979 U JP H0165979U
- Authority
- JP
- Japan
- Prior art keywords
- exhaust outlet
- movable shaft
- lid
- exhaust
- outlet side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Self-Closing Valves And Venting Or Aerating Valves (AREA)
- Pressure Vessels And Lids Thereof (AREA)
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Description
第１図は本考案を使用した半導体パツケージの
オープナ装置の一実施例を示す系統図、第２図お
よび第３図は本考案の一実施例における排気口蓋
開閉装置の断面図で第２図は“閉”の状態、第３
図は“開”の状態を示す。
１……溶解液貯蔵部、２……溶解液予熱部、３
……半導体パツケージ開封部、４……廃液貯留部
、６……溶解液、１３……溶解液槽、１４……半
導体パツケージ、２３……ソレノイド、２４……
排気出口、２５……蓋、４３……本体、４５……
排気室、４６……可動軸、４８……排気入口、５
０……排気出口構成部材。
FIG. 1 is a system diagram showing an embodiment of a semiconductor package opener device using the present invention, and FIGS. 2 and 3 are cross-sectional views of an exhaust port cover opening/closing device according to an embodiment of the present invention. “Closed” state, 3rd
The figure shows the "open" state. 1...Dissolved solution storage section, 2...Dissolved solution preheating section, 3
... Semiconductor package opening section, 4 ... Waste liquid storage section, 6 ... Dissolution liquid, 13 ... Dissolution liquid tank, 14 ... Semiconductor package, 23 ... Solenoid, 24 ...
Exhaust outlet, 25...lid, 43...main body, 45...
Exhaust chamber, 46...Movable shaft, 48...Exhaust inlet, 5
0... Exhaust outlet component.
Claims (1)
の内部に排気出口からこの排気出口とは反対側の
外部へ伸長する可動軸とを有し、該可動軸の排気
出口側端部に蓋を設け、前記可動軸にはこれを直
進方向に進退移動させる駆動機構を連結し、内側
から排気出口側内端へ前記蓋を当接して閉止する
ようにしたことを特徴とする排気口蓋開閉装置。 The main body has an exhaust inlet and an exhaust outlet, and a movable shaft extending from the exhaust outlet to the outside on the opposite side of the exhaust outlet inside the body, and a lid is attached to the end of the movable shaft on the exhaust outlet side. An exhaust port lid opening/closing device, characterized in that the movable shaft is connected to a drive mechanism for moving the movable shaft forward and backward in a straight direction, and the lid is closed by abutting the lid from the inside to the inner end on the exhaust outlet side.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987160956U JPH0165979U (en) | 1987-10-21 | 1987-10-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987160956U JPH0165979U (en) | 1987-10-21 | 1987-10-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0165979U true JPH0165979U (en) | 1989-04-27 |
Family
ID=31443477
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987160956U Pending JPH0165979U (en) | 1987-10-21 | 1987-10-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0165979U (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58142077A (en) * | 1981-11-26 | 1983-08-23 | フオエスト−アルピネ・アクチエンゲゼルシヤフト | Sealing device for send-in port of pressure-resistant vessel |
-
1987
- 1987-10-21 JP JP1987160956U patent/JPH0165979U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58142077A (en) * | 1981-11-26 | 1983-08-23 | フオエスト−アルピネ・アクチエンゲゼルシヤフト | Sealing device for send-in port of pressure-resistant vessel |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH0165979U (en) | ||
| JPS62137286U (en) | ||
| JPH035171U (en) | ||
| JPS63147145U (en) | ||
| JPS62139999U (en) | ||
| JPS6445060U (en) | ||
| JPH0177172U (en) | ||
| JPS62122615U (en) | ||
| JPS62160764U (en) | ||
| JPH0233862U (en) | ||
| JPS63114167U (en) | ||
| JPH0373504U (en) | ||
| JPS62188496U (en) | ||
| JPS5898029U (en) | Water stop device for saifon type air pot | |
| JPS6185146U (en) | ||
| JPS6120995U (en) | Trap discharge valve opening/closing mechanism | |
| JPH0278144U (en) | ||
| JPH0272201U (en) | ||
| JPS6440758U (en) | ||
| JPS6151740U (en) | ||
| JPS5956472U (en) | Pour valve of thermal container | |
| JPS6013381U (en) | Liquid quantitative supply device | |
| JPH0373147U (en) | ||
| JPS6315978U (en) | ||
| JPS58109427U (en) | Siphon type liquid container |