JPH0165979U - - Google Patents

Info

Publication number
JPH0165979U
JPH0165979U JP1987160956U JP16095687U JPH0165979U JP H0165979 U JPH0165979 U JP H0165979U JP 1987160956 U JP1987160956 U JP 1987160956U JP 16095687 U JP16095687 U JP 16095687U JP H0165979 U JPH0165979 U JP H0165979U
Authority
JP
Japan
Prior art keywords
exhaust outlet
movable shaft
lid
exhaust
outlet side
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1987160956U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987160956U priority Critical patent/JPH0165979U/ja
Publication of JPH0165979U publication Critical patent/JPH0165979U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Testing Of Individual Semiconductor Devices (AREA)
  • Self-Closing Valves And Venting Or Aerating Valves (AREA)
  • Pressure Vessels And Lids Thereof (AREA)
  • Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)

Description

【図面の簡単な説明】
第１図は本考案を使用した半導体パツケージの
オープナ装置の一実施例を示す系統図、第２図お
よび第３図は本考案の一実施例における排気口蓋
開閉装置の断面図で第２図は“閉”の状態、第３
図は“開”の状態を示す。 １……溶解液貯蔵部、２……溶解液予熱部、３
……半導体パツケージ開封部、４……廃液貯留部
、６……溶解液、１３……溶解液槽、１４……半
導体パツケージ、２３……ソレノイド、２４……
排気出口、２５……蓋、４３……本体、４５……
排気室、４６……可動軸、４８……排気入口、５
０……排気出口構成部材。

Claims (1)

    【実用新案登録請求の範囲】
  1. 排気入口と排気出口とを有する本体と、該本体
    の内部に排気出口からこの排気出口とは反対側の
    外部へ伸長する可動軸とを有し、該可動軸の排気
    出口側端部に蓋を設け、前記可動軸にはこれを直
    進方向に進退移動させる駆動機構を連結し、内側
    から排気出口側内端へ前記蓋を当接して閉止する
    ようにしたことを特徴とする排気口蓋開閉装置。
JP1987160956U 1987-10-21 1987-10-21 Pending JPH0165979U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987160956U JPH0165979U (ja) 1987-10-21 1987-10-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987160956U JPH0165979U (ja) 1987-10-21 1987-10-21

Publications (1)

Publication Number Publication Date
JPH0165979U true JPH0165979U (ja) 1989-04-27

Family

ID=31443477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987160956U Pending JPH0165979U (ja) 1987-10-21 1987-10-21

Country Status (1)

Country Link
JP (1) JPH0165979U (ja)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142077A (ja) * 1981-11-26 1983-08-23 フオエスト−アルピネ・アクチエンゲゼルシヤフト 耐圧容器の送入口の密閉装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142077A (ja) * 1981-11-26 1983-08-23 フオエスト−アルピネ・アクチエンゲゼルシヤフト 耐圧容器の送入口の密閉装置

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