JPH0166077U - - Google Patents
Info
- Publication number
- JPH0166077U JPH0166077U JP1987160032U JP16003287U JPH0166077U JP H0166077 U JPH0166077 U JP H0166077U JP 1987160032 U JP1987160032 U JP 1987160032U JP 16003287 U JP16003287 U JP 16003287U JP H0166077 U JPH0166077 U JP H0166077U
- Authority
- JP
- Japan
- Prior art keywords
- detection
- measured
- field effect
- effect transistor
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims description 13
- 230000005669 field effect Effects 0.000 claims description 3
- 230000006698 induction Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Measurement Of Current Or Voltage (AREA)
Description
第１図は、本考案の表面電位分布検出装置の第
１の実施例を表わす主要部分の構成図、第２図は
、本考案の第２の実施例を表わす主要部分の構成
図、第３図は、本考案の第１の実施例及び第２の
実施例における検出出力を表わすグラフ、第４図
は、従来の表面電位分布検出装置の一例を表わす
主要部分の構成図である。
１……被測定物、２……検出用電極、３，５…
…電界効果トランジスタ（ＦＥＴ）、４，６……
スイツチ、７……差動増幅器、８……Ａ／Ｄ変換
器、９……記憶回路、１０……デジタル演算回路
、１１……Ｄ／Ａ変換器、１２……増幅器、１３
……電圧検出回路、１４……補正回路、Ｅ１，Ｅ
２……直流電源、Ｔ……移動装置（移動機構）、
Ｒ１〜Ｒ４……抵抗。
FIG. 1 is a block diagram of the main parts showing the first embodiment of the surface potential distribution detection device of the present invention, FIG. 2 is a block diagram of the main parts showing the second embodiment of the present invention, and FIG. The figure is a graph showing detection outputs in the first and second embodiments of the present invention, and FIG. 4 is a configuration diagram of main parts showing an example of a conventional surface potential distribution detection device. 1...Object to be measured, 2...Detection electrode, 3, 5...
...Field effect transistor (FET), 4,6...
Switch, 7...Differential amplifier, 8...A/D converter, 9...Storage circuit, 10...Digital arithmetic circuit, 11...D/A converter, 12...Amplifier, 13
... Voltage detection circuit, 14 ... Correction circuit, E 1 , E
2 ...DC power supply, T...moving device (moving mechanism),
R1 to R4 ...Resistance.
Claims (1)
せる検出用電極と、 この検出用電極に誘起される電圧を電界効果ト
ランジスタを介して検出する電圧検出回路と、 前記被測定物の表面と前記検出用電極を相対的
に移動させる移動機構とより成る表面電位分布検
出装置において、 前記検出回路の電界効果トランジスタのゲート
端子へ流れ込む漏れ電流が検出出力の基準電位を
上昇させるのを補正する補正回路を付加したこと
を特徴とする表面電位分布検出装置。[Claims for Utility Model Registration] A detection electrode that causes an electrostatic induction phenomenon between the surface of the object to be measured and a voltage detection circuit that detects the voltage induced in the detection electrode via a field effect transistor. and a surface potential distribution detection device comprising a moving mechanism that relatively moves the surface of the object to be measured and the detection electrode, wherein a leakage current flowing into a gate terminal of a field effect transistor of the detection circuit is a reference for the detection output. A surface potential distribution detection device characterized by adding a correction circuit for correcting an increase in potential.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987160032U JPH0166077U (en) | 1987-10-20 | 1987-10-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987160032U JPH0166077U (en) | 1987-10-20 | 1987-10-20 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0166077U true JPH0166077U (en) | 1989-04-27 |
Family
ID=31441747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987160032U Pending JPH0166077U (en) | 1987-10-20 | 1987-10-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0166077U (en) |
-
1987
- 1987-10-20 JP JP1987160032U patent/JPH0166077U/ja active Pending
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